Download or read book Two Dimensional Thermal Oxidation of Silicon 1 Experiments written by D. B. Kao and published by . This book was released on 1979 with total page 35 pages. Available in PDF, EPUB and Kindle. Book excerpt: This paper introduces a unique experimental approach in which extensive data were obtained concerning the oxidation of cylindrical silicon structures of controlled radii of curvature. It is quantitatively demonstrated that the oxidation of curved silicon surfaces is retarded at low temperatures and sharp curvatures, and that the retardation is more severe on concave than convex structures. These observations will be interpreted using a physical model based on stress effects on oxide growth parameters. The paper begins with a brief review of two-dimensional oxidation phenomena. Experimental procedures are then described in detail. The experimental results as characterized by surface curvature, oxide growth rate and viscosity will provide useful design guidelines. A theoretical model is developed in a separate paper based on the premise that the viscous normal to the silicon surface is responsible for the retarded oxide growth and that the stress in the bulk of the oxide accounts for the difference between concave and convex structures.
Download or read book Two dimensional Oxidation written by Stanford University. Stanford Electronics Laboratories. Integrated Circuits Laboratory and published by . This book was released on 1983 with total page 180 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Two dimensional Oxidation Effects in Silicon Experiments and Theory written by Dah-Binh Kao and published by . This book was released on 1986 with total page 138 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Demand Bibliography written by and published by . This book was released on 1989 with total page 36 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Technical Reports Awareness Circular TRAC written by and published by . This book was released on 1987-08 with total page 566 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Contributions to Advanced Dynamics and Continuum Mechanics written by Holm Altenbach and published by Springer. This book was released on 2019-05-31 with total page 263 pages. Available in PDF, EPUB and Kindle. Book excerpt: The book celebrates the 65th birthday of Prof. Alexander K. Belyaev—a well-known expert in the field of Dynamics of Mechanical Systems. In addition to reflecting Prof. Belyaev’s contributions, the papers gathered here address a range of current problems in Dynamics and Continuum Mechanics. All contributions were prepared by his friends and colleagues, and chiefly focus on theory and applications.
Download or read book Simulation of Semiconductor Devices and Processes written by Siegfried Selberherr and published by Springer. This book was released on 1993 with total page 532 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book MOSFET Technologies for Double Pole Four Throw Radio Frequency Switch written by Viranjay M. Srivastava and published by Springer Science & Business Media. This book was released on 2013-10-07 with total page 209 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides analysis and discusses the design of various MOSFET technologies which are used for the design of Double-Pole Four-Throw (DP4T) RF switches for next generation communication systems. The authors discuss the design of the (DP4T) RF switch by using the Double-Gate (DG) MOSFET, as well as the Cylindrical Surrounding double-gate (CSDG) MOSFET. The effect of HFO2 (high dielectric material) in the design of DG MOSFET and CSDG MOSFET is also explored. Coverage includes comparison of Single-gate MOSFET and Double-gate MOSFET switching parameters, as well as testing of MOSFETs parameters using image acquisition.
Download or read book Advanced Gate Stack Source drain and Channel Engineering for Si based CMOS 2 written by Fred Roozeboom and published by The Electrochemical Society. This book was released on 2006 with total page 472 pages. Available in PDF, EPUB and Kindle. Book excerpt: These proceedings describe processing, materials, and equipment for CMOS front-end integration including gate stack, source/drain and channel engineering. Topics: strained Si/SiGe and Si/SiGe on insulator; high-mobility channels including III-V¿s, etc.; nanowires and carbon nanotubes; high-k dielectrics, metal and FUSI gate electrodes; doping/annealing for ultra-shallow junctions; low-resistivity contacts; advanced deposition (e.g. ALD, CVD, MBE), RTP, UV, plasma and laser-assisted processes.
Download or read book C H N and O in Si and Characterization and Simulation of Materials and Processes written by A. Borghesi and published by Newnes. This book was released on 2012-12-02 with total page 580 pages. Available in PDF, EPUB and Kindle. Book excerpt: Containing over 200 papers, this volume contains the proceedings of two symposia in the E-MRS series. Part I presents a state of the art review of the topic - Carbon, Hydrogen, Nitrogen and Oxygen in Silicon and in Other Elemental Semiconductors. There was strong representation from the industrial laboratories, illustrating that the topic is highly relevant for the semiconductor industry. The second part of the volume deals with a topic which is undergoing a process of convergence with two concerns that are more particularly application oriented. Firstly, the advanced instrumentation which, through the use of atomic force and tunnel microscopies, high resolution electron microscopy and other high precision analysis instruments, now allows for direct access to atomic mechanisms. Secondly, the technological development which in all areas of applications, particularly in the field of microelectronics and microsystems, requires as a result of the miniaturisation race, a precise mastery of the microscopic mechanisms.
Download or read book Mechanics and Control of Solids and Structures written by Vladimir A. Polyanskiy and published by Springer Nature. This book was released on 2022-04-22 with total page 646 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents a collection of papers prepared by the researches of the Institute for Problems in Mechanical Engineering of the Russian Academy of Sciences (IPME RAS) on the occasion of the 30th anniversary of the establishment of the Institute. The IPME RAS is one of the leading research institutes of the Russian Academy of Sciences and consists of 18 research units (laboratories). The chapters cover the main research directions of the institute, including nano-,micro-, meso- and macro- mechanics and materials, with ,special emphasis on the problems of strength of materials and service life of structures.
Download or read book Microelectronics Manufacturing Diagnostics Handbook written by Abraham Landzberg and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 663 pages. Available in PDF, EPUB and Kindle. Book excerpt: The world of microelectronics is filled with cusses measurement systems, manufacturing many success stories. From the use of semi control techniques, test, diagnostics, and fail ure analysis. It discusses methods for modeling conductors for powerful desktop computers to their use in maintaining optimum engine per and reducing defects, and for preventing de formance in modem automobiles, they have fects in the first place. The approach described, clearly improved our daily lives. The broad while geared to the microelectronics world, has useability of the technology is enabled, how applicability to any manufacturing process of similar complexity. The authors comprise some ever, only by the progress made in reducing their cost and improving their reliability. De of the best scientific minds in the world, and fect reduction receives a significant focus in our are practitioners of the art. The information modem manufacturing world, and high-quality captured here is world class. I know you will diagnostics is the key step in that process. find the material to be an excellent reference in of product failures enables step func Analysis your application. tion improvements in yield and reliability. which works to reduce cost and open up new Dr. Paul R. Low applications and technologies. IBM Vice President and This book describes the process ofdefect re of Technology Products General Manager duction in the microelectronics world.
Download or read book JJAP written by and published by . This book was released on 2000 with total page 1108 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Proceedings of the Second International Symposium on Process Physics and Modeling in Semiconductor Technology written by G. R. Srinivasan and published by . This book was released on 1991 with total page 826 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1991 with total page 252 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Integrated Circuit Fabrication written by James D. Plummer and published by Cambridge University Press. This book was released on 2023-10-31 with total page 680 pages. Available in PDF, EPUB and Kindle. Book excerpt: Master fundamental technologies for modern semiconductor integrated circuits with this definitive textbook, for students from a range of STEM backgrounds, with a focus on big-picture thinking and industry-grade simulation. Includes over 450 full-color figures and over 280 homework problems, with solutions and lecture slides for instructors.
Download or read book JJAP Letters written by and published by . This book was released on 2002 with total page 722 pages. Available in PDF, EPUB and Kindle. Book excerpt:
