Download or read book Dry Etching Technology for Semiconductors written by Kazuo Nojiri and published by Springer. This book was released on 2014-10-25 with total page 126 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is a must-have reference to dry etching technology for semiconductors, which will enable engineers to develop new etching processes for further miniaturization and integration of semiconductor integrated circuits. The author describes the device manufacturing flow, and explains in which part of the flow dry etching is actually used. The content is designed as a practical guide for engineers working at chip makers, equipment suppliers and materials suppliers, and university students studying plasma, focusing on the topics they need most, such as detailed etching processes for each material (Si, SiO2, Metal etc) used in semiconductor devices, etching equipment used in manufacturing fabs, explanation of why a particular plasma source and gas chemistry are used for the etching of each material, and how to develop etching processes. The latest, key technologies are also described, such as 3D IC Etching, Dual Damascene Etching, Low-k Etching, Hi-k/Metal Gate Etching, FinFET Etching, Double Patterning etc.

Download or read book The Periodic Table Nature s Building Blocks written by J. Theo Kloprogge and published by Elsevier. This book was released on 2020-11-18 with total page 931 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Periodic Table: Nature’s Building Blocks: An Introduction to the Naturally Occurring Elements, Their Origins and Their Uses addresses how minerals and their elements are used, where the elements come from in nature, and their applications in modern society. The book is structured in a logical way using the periodic table as its outline. It begins with an introduction of the history of the periodic table and a short introduction to mineralogy. Element sections contain their history, how they were discovered, and a description of the minerals that contain the element. Sections conclude with our current use of each element. Abundant color photos of some of the most characteristic minerals containing the element accompany the discussion. Ideal for students and researchers working in inorganic chemistry, minerology and geology, this book provides the foundational knowledge needed for successful study and work in this exciting area. Describes the link between geology, minerals and chemistry to show how chemistry relies on elements from nature Emphasizes the connection between geology, mineralogy and daily life, showing how minerals contribute to the things we use and in our modern economy Contains abundant color photos of each mineral that bring the periodic table to life

Download or read book Nanotechnology in Drug Delivery written by Melgardt M. de Villiers and published by Springer Science & Business Media. This book was released on 2008-10-29 with total page 681 pages. Available in PDF, EPUB and Kindle. Book excerpt: The reader will be introduced to various aspects of the fundamentals of nanotechnology based drug delivery systems and the application of these systems for the delivery of small molecules, proteins, peptides, oligonucleotides and genes. How these systems overcome challenges offered by biological barriers to drug absorption and drug targeting will also be described.

Download or read book Electron Beam Technology in Microelectronic Fabrication written by George Brewer and published by Elsevier. This book was released on 2012-12-02 with total page 377 pages. Available in PDF, EPUB and Kindle. Book excerpt: Electron-Beam Technology in Microelectronic Fabrication presents a unified description of the technology of high resolution lithography. This book is organized into six chapters, each treating a major segment of the technology of high resolution lithography. The book examines topics such as the physics of interaction of the electrons with the polymer resist in which the patterns are drawn, the machines that generate and control the beam, and ways of applying electron-beam lithography in device fabrication and in the making of masks for photolithographic replication. Chapter 2 discusses fundamental processes by which patterns are created in resist masks. Chapter 3 describes electron-beam lithography machines, including some details of each of the major elements in the electron-optical column and their effect on the focused electron beam. Chapter 4 presents the use of electron-beam lithography to make discrete devices and integrated circuits. Chapter 5 looks at the techniques and economics of mask fabrication by the use of electron beams. Finally, Chapter 6 presents a comprehensive description and evaluation of the several high resolution replication processes currently under development. This book will be of great value to students and to engineers who want to learn the unique features of high resolution lithography so that they can apply it in research, development, or production of the next generation of microelectronic devices and circuits.

Download or read book Springer Handbook of Nanomaterials written by Robert Vajtai and published by Springer Science & Business Media. This book was released on 2013-08-20 with total page 1234 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Springer Handbook of Nanomaterials covers the description of materials which have dimension on the "nanoscale". The description of the nanomaterials in this Handbook follows the thorough but concise explanation of the synergy of structure, properties, processing and applications of the given material. The Handbook mainly describes materials in their solid phase; exceptions might be e.g. small sized liquid aerosols or gas bubbles in liquids. The materials are organized by their dimensionality. Zero dimensional structures collect clusters, nanoparticles and quantum dots, one dimensional are nanowires and nanotubes, while two dimensional are represented by thin films and surfaces. The chapters in these larger topics are written on a specific materials and dimensionality combination, e.g. ceramic nanowires. Chapters are authored by well-established and well-known scientists of the particular field. They have measurable part of publications and an important role in establishing new knowledge of the particular field.

Download or read book Plasma Medical Science written by Shinya Toyokuni and published by Academic Press. This book was released on 2018-07-06 with total page 460 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma Medical Science describes the progress that has been made in the field over the past five years, illustrating what readers must know to be successful. As non-thermal, atmospheric pressure plasma has been applied for a wide variety of medical fields, including wound healing, blood coagulation, and cancer therapy, this book is a timely resource on the topics discussed. - Provides a dedicated reference for this emerging topic - Discusses the state-of-the-art developments in plasma technology - Introduces topics of plasma biophysics and biochemistry that are required to understand the application of the technology for plasma medicine - Brings together diverse experience in this field in one reference text - Provides a roadmap for future developments in the area

Download or read book The Chemistry of Metal CVD written by Toivo T. Kodas and published by John Wiley & Sons. This book was released on 2008-09-26 with total page 562 pages. Available in PDF, EPUB and Kindle. Book excerpt: High purity, thin metal coatings have a variety of important commercial applications, for example, in the microelectronics industry, as catalysts, as protective and decorative coatings as well as in gas-diffusion barriers. This book offers detailed, up- to-date coverage of the chemistry behind the vapor deposition of different metals from organometallic precursors. In nine chapters, the CVD of metals including aluminum, tungsten, gold, silver, platinum, palladium, nickel, as well as copper from copper(I) and copper(II) compounds is covered. The synthesis and properties of the precursors, the growth process, morphology, quality and adhesion of the resulting films as well as laser- assisted, ion- assisted and plasma-assisted methods are discussed. Present applications and prospects for future developments are summarized. With ca. 1000 references and a glossary, this book is a unique source of in-depth information. It is indispensable for chemists, physicists, engineers and materials scientists working with metal- coating processes and technologies. From Reviews: 'I highly recommend this book to anyone interested in learning more about the chemistry of metal CVD.' J. Am Chem. Soc.

Download or read book Atomic Layer Deposition of Nanostructured Materials written by Nicola Pinna and published by John Wiley & Sons. This book was released on 2012-09-19 with total page 463 pages. Available in PDF, EPUB and Kindle. Book excerpt: Atomic layer deposition, formerly called atomic layer epitaxy, was developed in the 1970s to meet the needs of producing high-quality, large-area fl at displays with perfect structure and process controllability. Nowadays, creating nanomaterials and producing nanostructures with structural perfection is an important goal for many applications in nanotechnology. As ALD is one of the important techniques which offers good control over the surface structures created, it is more and more in the focus of scientists. The book is structured in such a way to fi t both the need of the expert reader (due to the systematic presentation of the results at the forefront of the technique and their applications) and the ones of students and newcomers to the fi eld (through the first part detailing the basic aspects of the technique). This book is a must-have for all Materials Scientists, Surface Chemists, Physicists, and Scientists in the Semiconductor Industry.

Download or read book Science of Microscopy written by P.W. Hawkes and published by Springer Science & Business Media. This book was released on 2008-08-29 with total page 1336 pages. Available in PDF, EPUB and Kindle. Book excerpt: This fully corrected second impression of the classic 2006 text on microscopy runs to more than 1,000 pages and covers up-to-the-minute developments in the field. The two-volume work brings together a slew of experts who present comprehensive reviews of all the latest instruments and new versions of the older ones, as well as their associated operational techniques. The chapters draw attention to their principal areas of application. A huge range of subjects are benefiting from these new tools, including semiconductor physics, medicine, molecular biology, the nanoworld in general, magnetism, and ferroelectricity. This fascinating book will be an indispensable guide for a wide range of scientists in university laboratories as well as engineers and scientists in industrial R&D departments.

Download or read book Bio and Nano Packaging Techniques for Electron Devices written by Gerald Gerlach and published by Springer Science & Business Media. This book was released on 2012-07-16 with total page 619 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book discusses future trends and developments in electron device packaging and the opportunities of nano and bio techniques as future solutions. It describes the effect of nano-sized particles and cell-based approaches for packaging solutions with their diverse requirements. It offers a comprehensive overview of nano particles and nano composites and their application as packaging functions in electron devices. The importance and challenges of three-dimensional design and computer modeling in nano packaging is discussed; also ways for implementation are described. Solutions for unconventional packaging solutions for metallizations and functionalized surfaces as well as new packaging technologies with high potential for industrial applications are discussed. The book brings together a comprehensive overview of nano scale components and systems comprising electronic, mechanical and optical structures and serves as important reference for industrial and academic researchers.

Download or read book Nanomedicine and Cancer written by Rajaventhan Srirajaskanthan and published by CRC Press. This book was released on 2011-12-20 with total page 462 pages. Available in PDF, EPUB and Kindle. Book excerpt: The nanosciences are a rapidly expanding field of research with a wide applicability to all areas of health. They encompass a variety of technologies ranging from particles to networks and nanostructures. This book focuses on the application of nanomedicine and nanotechnology to cancer. It introduces nanocarriers, nanorods, nanoprobes nanoplatforms, nanorings, nanotubes nanowires, nano-sensor arrays and a variety of methodological techniques. This is done within the framework of numerous cancer types. Contributors are all leading experts and are carrying out groundbreaking work. The book is essential reading for oncologists, research scientists, doctors, health care professionals, pathologists, biologists, biochemists, chemists and physicists as well as those interested in disease and nanosciences or cancer in general.

Download or read book Energy Scavenging for Wireless Sensor Networks written by Shad Roundy and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 219 pages. Available in PDF, EPUB and Kindle. Book excerpt: The vast reduction in size and power consumption of CMOS circuitry has led to a large research effort based around the vision of wireless sensor networks. The proposed networks will be comprised of thousands of small wireless nodes that operate in a multi-hop fashion, replacing long transmission distances with many low power, low cost wireless devices. The result will be the creation of an intelligent environment responding to its inhabitants and ambient conditions. Wireless devices currently being designed and built for use in such environments typically run on batteries. However, as the networks increase in number and the devices decrease in size, the replacement of depleted batteries will not be practical. The cost of replacing batteries in a few devices that make up a small network about once per year is modest. However, the cost of replacing thousands of devices in a single building annually, some of which are in areas difficult to access, is simply not practical. Another approach would be to use a battery that is large enough to last the entire lifetime of the wireless sensor device. However, a battery large enough to last the lifetime of the device would dominate the overall system size and cost, and thus is not very attractive. Alternative methods of powering the devices that will make up the wireless networks are desperately needed.

Download or read book Advanced Pharmaceutics written by Cherng-ju Kim and published by CRC Press. This book was released on 2004-03-17 with total page 755 pages. Available in PDF, EPUB and Kindle. Book excerpt: Discussing a comprehensive range of topics, Advanced Pharmaceutics: Physicochemical Principles reviews all aspects of physical pharmacy. The book explains the basic, mechanistic, and quantitative interpretation skills needed to solve physical pharmacy related problems. The author supplies a strong fundamental background and extensively covers therm

Download or read book The Materials Science of Semiconductors written by Angus Rockett and published by Springer Science & Business Media. This book was released on 2007-11-20 with total page 629 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book describes semiconductors from a materials science perspective rather than from condensed matter physics or electrical engineering viewpoints. It includes discussion of current approaches to organic materials for electronic devices. It further describes the fundamental aspects of thin film nucleation and growth, and the most common physical and chemical vapor deposition techniques. Examples of the application of the concepts in each chapter to specific problems or situations are included, along with recommended readings and homework problems.

Download or read book Fundamentals of Microsystems Packaging written by Rao Tummala and published by McGraw Hill Professional. This book was released on 2001-05-08 with total page 979 pages. Available in PDF, EPUB and Kindle. Book excerpt: LEARN ABOUT MICROSYSTEMS PACKAGING FROM THE GROUND UP Written by Rao Tummala, the field’s leading author, Fundamentals of Microsystems Packaging is the only book to cover the field from wafer to systems, including every major contributing technology. This rigorous and thorough introduction to electronic packaging technologies gives you a solid grounding in microelectronics, photonics, RF, packaging design, assembly, reliability, testing, and manufacturing and its relevance to both semiconductors and systems. You’ll find: *Full coverage of electrical, mechanical, chemical, and materials aspects of each technology *Easy-to-read schematics and block diagrams *Fundamental approaches to all system issues *Examples of all common configurations and technologies—wafer level packaging, single chip, multichip, RF, opto-electronic, microvia boards, thermal and others *Details on chip-to-board connections, sealing and encapsulation, and manufacturing processes *Basics of electrical and reliability testing

Download or read book Nanoscale Thermoelectrics written by Xiaodong Wang and published by Springer Science & Business Media. This book was released on 2013-11-18 with total page 520 pages. Available in PDF, EPUB and Kindle. Book excerpt: For the efficient utilization of energy resources and the minimization of environmental damage, thermoelectric materials can play an important role by converting waste heat into electricity directly. Nanostructured thermoelectric materials have received much attention recently due to the potential for enhanced properties associated with size effects and quantum confinement. Nanoscale Thermoelectrics describes the theory underlying these phenomena, as well as various thermoelectric materials and nanostructures such as carbon nanotubes, SiGe nanowires, and graphene nanoribbons. Chapters written by leading scientists throughout the world are intended to create a fundamental bridge between thermoelectrics and nanotechnology, and to stimulate readers' interest in developing new types of thermoelectric materials and devices for power generation and other applications. Nanoscale Thermoelectrics is both a comprehensive introduction to the field and a guide to further research, and can be recommended for Physics, Electrical Engineering, and Materials Science departments.

Download or read book Planetary Atmospheres written by C. Sagan and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 409 pages. Available in PDF, EPUB and Kindle. Book excerpt: Proceedings of the IAU Symposium No. 40, held in Marfa, Texas, U.S.A., October 26-31, 1969