Download or read book Proceedings of the Seventh International Workshop on Inelastic Ion Surface Collisions written by Marek Szymonski and published by CRC Press. This book was released on 1989 with total page 358 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Inelastic Particle Surface Collisions written by E. Taglauer and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 337 pages. Available in PDF, EPUB and Kindle. Book excerpt: The interaction of particles and photons with solid surfaces is interdisci plinary in character, so that very recent developments in solid-state phys ics, surface physics and atomic physics stimulate progress in the field or profit from results of the "ion-solid" community. Technical interest in the field ranges from catalysis and semiconductor manufacturing to fusion re search, for instance by surface analytical techniques, or interest in phenom ena such as sputtering and radiation damage. The Third International Workshop on Inelastic Ion-Surface Coll isions, held at Feldkirchen-Westerham under the auspices of Max-Planck-Institut fUr Plasmaphysik, Garching, Fed. Rep. of Germany, brought together 63 scientists from 12 countries for three days of very involved discussions. As at the pre vious workshops at Bell Laboratories in 1976 and McMaster University in 1978, the experiment of gathering experts from seemingly different disciplines was very successful in promoting the basic physical ideas. The proceedings contain the 14 major reviews and a smaller number of con tributions presented at the workshop. All papers have been reviewed with little delay, and the reviewer's efforts are gratefully acknowledged. The first group of papers is concerned with theoretical and experimental aspects of secondary electron emission due to ion impact, including the potential emission caused by slow metastables. This is followed by reviews of exper iments and recent theoretical developments of electron- and photon-induced desorption.
Download or read book Energy Meetings written by United States. Department of Energy. Technical Information Center and published by . This book was released on 1985 with total page 684 pages. Available in PDF, EPUB and Kindle. Book excerpt: A listing of forthcoming meetings, conventions, etc.
Download or read book Insulating Films on Semiconductors written by M. Schulz and published by Springer Science & Business Media. This book was released on 2013-03-12 with total page 323 pages. Available in PDF, EPUB and Kindle. Book excerpt: The INFOS 81 Conference on Insulating Films on Semiconductors was held at the University of Erlangen-NUrnberg in Erlangen from 27 to 29 April 1981. This conference was a sequel to the first conference INFOS 79 held in Durham. INFOS 81 attracted 170 participants from universities, research institutes and industry. Attendants were registered from 15 nations. The biannual topical conference series will be continued by INFOS 83 to be held in Eindhoven, The Netherlands, in April 1983. The conference proceedings include all the invited (Y) and contrlDUtea (42) papers presented at the meeting. The topics range from the basic physical understanding of the properties of insulating films and their interface to semiconductors to the discussion of stability and dielectric strength as well as growing and deposition techniques which are relevant for technical applications. Strong emphasis was given to the semiconductor silicon and its native oxide; however, sessions on compound semiconductors and other insulating films also raised strong interest. The proceedings survey the present state of our understanding of the system of insulating films on semiconductors. As a new aspect of the topic, the properties of semiconductors deposited and laser processed on insulating films was in cluded for the first time.
Download or read book Surface Passivation and Junction Engineering in Silicon written by Gaurav Thareja and published by Stanford University. This book was released on 2011 with total page 99 pages. Available in PDF, EPUB and Kindle. Book excerpt: The planar silicon MOSFET is facing diminishing performance returns in improvement from device geometry scaling. Two alternative devices are being explored as possible solutions to this problem. The first contender is a multi-gate device (FINFET or surround gate) and the other is a MOSFET with high mobility channel material such as germanium, III-V or carbon. Ge has emerged as an important materials platform during recent years. With its high carrier mobility and the ability to detect and emit photons at telecommunications wavelengths, Ge is an attractive candidate for applications in both high performance electronics and optoelectronics. Moreover due to its compatibility with conventional CMOS fabrication, it can be processed using the standard manufacturing techniques that are currently used for silicon. However Ge does present a number of unique challenges that must be overcome, including issues of surface passivation, low n-type dopant solubility, and high dopant diffusivity. In this work, the unique properties of surface passivation enabled by radical oxidation are discussed. Some of the highlights are low temperature processing, substrate orientation independent growth rate of dielectric and low interface density. Subsequently, this radical oxidation is applied to 3D vertical gate all around (GAA) silicon MOSFET devices. Higher drive current, lower gate leakage and higher gate dielectric breakdown voltage are demonstrated for GAA devices using radical oxidation in comparison to thermal oxidation In the second part, radical oxidation is investigated for GeO2 growth as an interfacial layer in high-k / Ge gate stack. Using MOSCAP and n-MOSFET devices on Ge, low interface state density combined with drive current and electron mobility enhancement is demonstrated for Ge devices. In the third part, the source/drain junctions for Ge are studied. Ultra-shallow junctions using plasma immersion ion implantation are demonstrated. High n-type dopant activation in Ge using laser annealing is realized along with high performance diodes, significant reduction of contact resistance and integration in a MOSFET process flow.
Download or read book Proceedings of the International Workshop on Acceleration and Radiation Generation in Space and Laboratory Plasmas written by International Workshop on Acceleration and Radiation Generation in Space and Laboratory Plasmas and published by . This book was released on 1994 with total page 172 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Index of Conference Proceedings written by British Library. Document Supply Centre and published by . This book was released on 2003 with total page 870 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Energy Research Abstracts written by and published by . This book was released on 1994-03 with total page 332 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book The British Library General Catalogue of Printed Books 1976 to 1982 written by British Library and published by . This book was released on 1983 with total page 616 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Desorption Induced by Electronic Transitions DIET V written by Alan R. Burns and published by Springer Science & Business Media. This book was released on 2013-03-07 with total page 344 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume in the Springer Series on Surface Sciences presents a recent account of advances in the ever-broadening field of electron-and photon-stimulated sur face processes. As in previous volumes, these advances are presented as the proceedings of the International Workshop on Desorption Induced by Electronic Transitions; the fifth workshop (DIET V) was held in Taos, New Mexico, April 1-4, 1992. It will be abundantly clear to the reader that "DIET" is not restricted to desorption, but has for several years included photochemistry, non-thermal surface modification, exciton self-trapping, and many other phenomena that are induced by electron or photon bombardment. However, most stimulated surface processes do share a common physics: initial electronic excitation, localization of the excitation, and conversion of electronic energy into nuclear kinetic energy. It is the rich variation of this theme which makes the field so interesting and fruitful. We have divided the book into eleven parts in order to emphasize the wide range of materials that are examined and to highlight recent experimental and theoretical advances. Naturally, there is considerable overlap between sections, and many papers would be appropriate in more than one part. Part I focuses on perhaps the most active area in the field today: electron attachment. Here the detection and characterization of negative ions formed by attachment of elec trons supplied externally from the vacuum are discussed. In addition, the first observations of negative ions formed by substrate photoelectrons are presented.
Download or read book Nordic Conference on Surface Science Tampere August 18 20 1982 written by M. Pessa and published by . This book was released on 1983 with total page 220 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Ion Implantation And Ion Beam Equipmen Proceedings Of The International Conference written by Karpuzov D S and published by #N/A. This book was released on 1991-07-16 with total page 604 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Ionization of Solids by Heavy Particles written by Raul A. Baragiola and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 455 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book collects the papers presented at the NATO Advanced Research Workshop on "Ionization of Solids by Heavy Particles", held in Giardini-Naxos (Taormina), Italy, on June 1 -5, 1992. The meeting was the first to gather scientists to discuss the physics of electron emission and other ionization effects occurring during the interaction of heavy particles with condensed matter. The central problem in the field is how to use observations of electron emission and final radiation damage to understand what happens inside the solid, like excitation mechanisms, the propagation of the electronic excitation along different pathways, and surface effects. The ARW began with a brief survey of the field, stressing the unknowns. It was pointed out that ionization theories can only address the very particular case of weak perturbations. For this problem, this meant high speed, low-charged projectiles (a perturbation treatment of interactions with slow, highly charged ions was later presented). Only semi-empirical models exist for velocities lower than the Fermi velocity in the solid, which can be used to predict kinetic electron emission yields. These models, however, do not address the basic questions about the mechanisms for electron excitation, transport and escape through the surface layer.
Download or read book Secondary Ion Mass Spectrometry SIMS IV written by A. Benninghoven and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 518 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume contains full proceedings of the Fourth International Conference on Secondary Ion Mass Spectrometry (SIMS-IV), held in the Minoo-Kanko Hotel, Osaka, Japan, from November 13th to 19th, 1983. Coordinated by a local or ganizing committee under the auspices of the international organizing com mittee, it followed earlier conferences held in MUnster (1977), Stanford (1979), and Budapest (1981). The conference was attended by about 250 participants from 18 countries, and 130 papers including 24 invited ones were presented. Reflecting the rap idly expanding activities in the SIMS field, informative papers were pre sented containing up-to-date information on SIMS and various related fields. The proceedings focussed upon six main issues: (1) Fundamentals of sput tering and secondary ion formation. (2) Recent progress in instrumentation, including submicron SIMS and image processing. (3) SIMS combined with other surface analysis techniques. (4) Outstanding SIMS-related analytical methods such as laser-microprobe SIMS, sputtered neutral mass spectrometry, mass spectrometry of sputtered neutrals by multi-photon resonance ionization, and accelerator-based SIMS. (5) Organic SIMS and FAB which has recently become a rapidly expanding technique in pharmacy, biotechnology, etc. (6) Appl ica tions of SIMS to various fields such as metallurgy, geology, and biology, including depth profiling of semiconductors, and analysis of inorganic mate rials. As a venue for the exchange of ideas and information concerning all the above issues, the conference proved a great success.
Download or read book Physics Briefs written by and published by . This book was released on 1994 with total page 1256 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Gesamtverzeichnis der Kongress Schriften in Bibliotheken der Bundesrepublik Deutschland einschliesslich Berlin West written by Staatsbibliothek Preussischer Kulturbesitz. Abteilung Gesamtkataloge und Dokumentation and published by . This book was released on 1982 with total page 628 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book 4th Nordic Meeting on Nuclear Physics Fugls August 16 20 1982 written by Jakob Bondorf and published by . This book was released on 1983 with total page 236 pages. Available in PDF, EPUB and Kindle. Book excerpt:
