EBookClubs

Read Books & Download eBooks Full Online

EBookClubs

Read Books & Download eBooks Full Online

Book An Investigation of Electrical and Optical Properties of Sputtered Amorphous Silicon Nitride and Germanium Thin Films

Download or read book An Investigation of Electrical and Optical Properties of Sputtered Amorphous Silicon Nitride and Germanium Thin Films written by Rajendra S. Khandelwal and published by . This book was released on 1987 with total page 246 pages. Available in PDF, EPUB and Kindle. Book excerpt: Low temperature preparation of thin amorphous Silicon Nitride and Germanium Films by direct RF sputter deposition was investigated. Influence of various sputtering parameters on film properties was studied. Infrared transmission spectrophotometry was used to evaluate optical properties of the films whereas electrical characteristics of the films were determined from current-voltage measurements of MIS structures. For Silicon Nitride films it was observed that the stoichiometry, as indicated by the IR transmission, dielectric constant and current density versus square root of electric field measurements, was a strong function of the sputtering gas composition and particularly the Ar/N ratio in the sputtering gas. It was established from the current-voltage relationship that the dominant conduction mechanism in these films is of PooleFrenkel type. The current-voltage characteristics of the MIS devices were observed to be independent of the electrode material, device area and the film thickness. It is concluded that the insulating films thus deposited were comparable to those deposited using any other deposition method and is anticipated that due to the low deposition temperatures, sputtering may emerge as a highly potential process for optoelectronic device passivation.

Book Optical Properties of Amorphous Silicon Nitride Films

Download or read book Optical Properties of Amorphous Silicon Nitride Films written by Zhiping Yin and published by . This book was released on 1991 with total page 296 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book An Investigation of Electrical and Optical Properties of Reactively Sputtered Silicon Nitride and Amorphous Hydrogenated Silicon Thin Films

Download or read book An Investigation of Electrical and Optical Properties of Reactively Sputtered Silicon Nitride and Amorphous Hydrogenated Silicon Thin Films written by Tae Hoon Kim and published by . This book was released on 1988 with total page 168 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Silicon Nitride in Electronics

Download or read book Silicon Nitride in Electronics written by Vi︠a︡cheslav Ivanovich Belyĭ and published by Elsevier Publishing Company. This book was released on 1988 with total page 280 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is an English version, expanded and brought up to date, of the Russian book published in 1982. It has been written by a group of authors - chemists and physicists - and is designed particularly for specialists who are developing semiconductor devices. Silicon nitride has long been familiar as a material used in the process of manufacturing fire-proof products. During the past decade, it has come into use as a thin dielectric film in electronics, and at present silicon nitride synthesis underlies the basic technology for integrated circuits. The monograph discusses the characteristics that determine the process of synthesis of silicon nitride films, their structure, chemical composition, optical and electrophysical properties, as well as various applications of silicon nitride in electronics.

Book Optical and Electrical Characterization of Amorphous Carbon Thin Films

Download or read book Optical and Electrical Characterization of Amorphous Carbon Thin Films written by Alexander L. Martin and published by . This book was released on 1989 with total page 39 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Thin Films On Silicon Electronic And Photonic Applications

Download or read book Thin Films On Silicon Electronic And Photonic Applications written by Vijay Narayanan and published by World Scientific. This book was released on 2016-08-15 with total page 550 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume provides a broad overview of the fundamental materials science of thin films that use silicon as an active substrate or passive template, with an emphasis on opportunities and challenges for practical applications in electronics and photonics. It covers three materials classes on silicon: Semiconductors such as undoped and doped Si and SiGe, SiC, GaN, and III-V arsenides and phosphides; dielectrics including silicon nitride and high-k, low-k, and electro-optically active oxides; and metals, in particular silicide alloys. The impact of film growth and integration on physical, electrical, and optical properties, and ultimately device performance, is highlighted.

Book Synthesis and Characterization of Silicon Nitride Thin Films and Their Application as Hermetic Coatings on Optical Fibers for Protection Against Hydrogen Penetration

Download or read book Synthesis and Characterization of Silicon Nitride Thin Films and Their Application as Hermetic Coatings on Optical Fibers for Protection Against Hydrogen Penetration written by Qixian Lin and published by . This book was released on 1995 with total page 336 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Structural Optical and Mechanical Properties of Silicon Nitride Films Deposited by Inductively Coupled Plasma Enhanced Chemical Vapor Deposition

Download or read book Structural Optical and Mechanical Properties of Silicon Nitride Films Deposited by Inductively Coupled Plasma Enhanced Chemical Vapor Deposition written by Ezgi Abacıoğlu and published by . This book was released on 2022 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Silicon Nitride and Silicon Dioxide Thin Insulating Films

Download or read book Silicon Nitride and Silicon Dioxide Thin Insulating Films written by and published by . This book was released on 2003 with total page 660 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Properties of Sputtered A Ge and A Ge H Thin Films

Download or read book Properties of Sputtered A Ge and A Ge H Thin Films written by Hanjin Cho and published by . This book was released on 1987 with total page 126 pages. Available in PDF, EPUB and Kindle. Book excerpt: The effect of the amorphous and glassy structure of amorphous germanium films on their electrical characteristics was investigated experimentally. The films were deposited onto silicon substrates using a modified MRC 8800 triode sputtering system. The Poole-Frenkel and Schottky mechanisms are discussed in detail and the shortcomings of the accepted picture of the former in amorphous materials are dealt with. It was concluded on the basis available evidence that the current flow in amorphous germanium favors the Poole-Frenkel mechanism at high fields. Amorphous hydrogenated germanium films which were deposited by bias sputtering were characterized by measuring the infrared absorption. The films have absorption peaks, as expected, at 1950 cḿ1 and at 570 cḿ1 due to GeH2 bonding and at 1880 cḿ1 due to GeH2 bonding. A method was described for determining the optical constants of a thin film deposited on a nonabsorbing window using a single set of transmittances over an absorption band. The method depends on the fact that the phase shift of the transmitted radiation can be determined from the transmittance by a Kramers-Kronig transform. The transmittance data of a-Ge:H and sputtered silicon nitride films were used to calculate their optical constants by this method. In a-Ge:H films, the value of the calculated refractive index in the k=0 region was not reasonable. However, for Si3N4 films, the calculated absorption coefficient was consistent with the experimental results.

Book Silicon Nitride and Silicon Dioxide Thin Insulating Films VII

Download or read book Silicon Nitride and Silicon Dioxide Thin Insulating Films VII written by Electrochemical Society. Meeting and published by The Electrochemical Society. This book was released on 2003 with total page 652 pages. Available in PDF, EPUB and Kindle. Book excerpt: