Download or read book Model based control applied to rapid thermal processing thesis written by Paul John Gyugyi and published by . This book was released on 1993 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Model based Control Applied to Rapid Thermal Processing written by Paul Gyugyi and published by . This book was released on 1993 with total page 282 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Control System Applications written by William S. Levine and published by CRC Press. This book was released on 2018-10-24 with total page 360 pages. Available in PDF, EPUB and Kindle. Book excerpt: Control technology permeates every aspect of our lives. We rely on them to perform a wide variety of tasks without giving much thought to the origins of the technology or how it became such an important part of our lives. Control System Applications covers the uses of control systems, both in the common and in the uncommon areas of our lives. From the everyday to the unusual, it's all here. From process control to human-in-the-loop control, this book provides illustrations and examples of how these systems are applied. Each chapter contains an introduction to the application, a section defining terms and references, and a section on further readings that help you understand and use the techniques in your work environment. Highly readable and comprehensive, Control System Applications explores the uses of control systems. It illustrates the diversity of control systems and provides examples of how the theory can be applied to specific practical problems. It contains information about aspec ts of control that are not fully captured by the theory, such as techniques for protecting against controller failure and the role of cost and complexity in specifying controller designs.

Download or read book Model identification and nonlinear predictive control of rapid thermal processing systems written by Terence Breedijk and published by . This book was released on 1994 with total page 252 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Trends in Control written by Alberto Isidori and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 424 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book contains the text of the plenary lectures and the mini-courses of the European Control Conference (ECC 95) held in Rome, Italy, September 5-September 8, 1995. In particular, the book includes nine essays in which a selected number of prominent authorities present their views on some of the most recent developments in the theory and practice of control systems design and three self-contained sets of lecture notes. Some of the essays are focused on the topic of robust control. The article by J. Ackermann describes how to robustly control the rotational motions of a vehicle, to the purpose of simplifying the driver's task. The contribution by H. K wakernaak presents a detailed discussion of the requirements that performance and robustness impose on control systems design and of the symmetric roles of sensitivity and complementary sensitivity functions. The article by P. Boulet, B. A. Francis, P. C . Hughes and T. Hong describes an experimental testbed facility, called Daisy, whose dynamics emulate those of a real large flexible space structure and whose purpose is to test advanced identification and control design methods. The article of K. Glover discusses recent advances in uncertain system modeling, analysis and design, with ref erence to a flight control case study that has been test flown. The other essays describe advances in fundamental problems of control theory. The article by V. A. Yakubovich is a survey of certain new infinite horizon linear-quadratic optimization problems. The contribution by A. S.

Download or read book Subspace Identification for Linear Systems written by Peter van Overschee and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 263 pages. Available in PDF, EPUB and Kindle. Book excerpt: Subspace Identification for Linear Systems focuses on the theory, implementation and applications of subspace identification algorithms for linear time-invariant finite- dimensional dynamical systems. These algorithms allow for a fast, straightforward and accurate determination of linear multivariable models from measured input-output data. The theory of subspace identification algorithms is presented in detail. Several chapters are devoted to deterministic, stochastic and combined deterministic-stochastic subspace identification algorithms. For each case, the geometric properties are stated in a main 'subspace' Theorem. Relations to existing algorithms and literature are explored, as are the interconnections between different subspace algorithms. The subspace identification theory is linked to the theory of frequency weighted model reduction, which leads to new interpretations and insights. The implementation of subspace identification algorithms is discussed in terms of the robust and computationally efficient RQ and singular value decompositions, which are well-established algorithms from numerical linear algebra. The algorithms are implemented in combination with a whole set of classical identification algorithms, processing and validation tools in Xmath's ISID, a commercially available graphical user interface toolbox. The basic subspace algorithms in the book are also implemented in a set of Matlab files accompanying the book. An application of ISID to an industrial glass tube manufacturing process is presented in detail, illustrating the power and user-friendliness of the subspace identification algorithms and of their implementation in ISID. The identified model allows for an optimal control of the process, leading to a significant enhancement of the production quality. The applicability of subspace identification algorithms in industry is further illustrated with the application of the Matlab files to ten practical problems. Since all necessary data and Matlab files are included, the reader can easily step through these applications, and thus get more insight in the algorithms. Subspace Identification for Linear Systems is an important reference for all researchers in system theory, control theory, signal processing, automization, mechatronics, chemical, electrical, mechanical and aeronautical engineering.

Download or read book Soft Computing written by Luigi Fortuna and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 275 pages. Available in PDF, EPUB and Kindle. Book excerpt: The book presents a clear understanding of a new type of computation system, the Cellular Neural Network (CNN), which has been successfully applied to the solution of many heavy computation problems, mainly in the fields of image processing and complex partial differential equations. The text describes how CNN will improve the soft-computation toolbox, and examines the many applications of soft computing to complex systems.

Download or read book A Model for Rapid Thermal Processing written by Terrence J. Riley and published by . This book was released on 1989 with total page 120 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book written by and published by . This book was released on 1987 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Advances in Rapid Thermal Processing written by Fred Roozeboom and published by The Electrochemical Society. This book was released on 1999 with total page 470 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Modeling control and temperature measurement in rapid thermal processing written by John Douglas Stuber and published by . This book was released on 1996 with total page 272 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Proceedings of the 1995 American Control Conference written by and published by . This book was released on 1995 with total page 610 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Dynamical Modeling and Control of Multiphase Heat Transport Systems Based on Loop Heat Pipes written by Gellrich, Thomas Christoph and published by KIT Scientific Publishing. This book was released on 2022-12-05 with total page 268 pages. Available in PDF, EPUB and Kindle. Book excerpt: Effective heat transport systems in aerospace are based on multiphase loop heat pipes (LHPs). For a precise thermal control of the electronics, electrical heaters are additionally used to control the operating temperature of the LHP. This work focusses on the dynamical modeling and model-based control design for LHP-based heat transport systems. The results of this work can be used for the optimization of current control parameters and the efficient control design for future LHP applications.

Download or read book Real time Implementation of an Adaptive Control System for a 3 zone Rapid Thermal Processing Station written by David Hur and published by . This book was released on 1996 with total page 220 pages. Available in PDF, EPUB and Kindle. Book excerpt: In this thesis, the implementation details of a real time adaptive control system for a TI 3-zone RTP station, as well as the simulation and the experimental results are presented. Extensive simulation of the system is performed in order to ensure proper operation of the system. The experimental results are used to verify proper operation of the closed loop control system. Initial experiments were conducted using two thermocouples. Further experiments were conducted using one thermocouple for the purpose of testing the performance of the system using Extended Kalman Filter as the state estimator. The implementation of the control system is carried out on an IBM compatible PC hosting a Transputer parallel -processing system. The motivation for utilizing the parallel processing system is to ensure future extensibility of the system. The eventual incorporation of a remote temperature sensing method such as Multi-Wavelength Imaging Pyrometer (M-WIP) will require great deal of computing power from the system. The implementation of the software for the system is also carried out with goal of providing ease of maintenance and extensibility. The implementation of graphical user environment also provides to the user point and click operation of the system as well as real time plotting capability.

Download or read book Dissertation Abstracts International written by and published by . This book was released on 2004 with total page 772 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Application of Modern Signal Processing to Semiconductor Manufacturing and Phase Mask Design written by and published by . This book was released on 1997 with total page 9 pages. Available in PDF, EPUB and Kindle. Book excerpt: The semiconductor manufacturing industry faces the need for tighter control of thermal budget and process variations as circuit feature sizes decrease. Strategies to meet this need include supervisory control, run-to-run control, and real-time feedback control. Typically, the level of control chosen depends upon the actuation and sensing available. Rapid Thermal (RTP) is one step of the manufacturing cycle requiring precise temperature control and hence real-time feedback control. At the outset of this research, the primary ingredient lacking from in-situ RTP temperature control was suitable sensor. This research looks at an alternative to the traditional approach of pyrometry, which is limited by the unknown and possibly time-varying wafer emissivity. the technique is based upon the temperature dependence of the propagation time of an acoustic wave in the wafer. The aim of this thesis is to demonstrate that ultrasonic sensors are a viable sensor for control in RTP. To do this, an experimental implementation was developed at the Center for Integrated Systems. Because of the difficulty in applying a known temperature standard in an RTP environment, calibration to absolute temperature is nontrivial Given reference propagation delays, multivariable model-based feedback control is applied to the system. The modelling and implementation details are described. The control techniques have been applied to a number of research processes including rapid thermal annealing and rapid thermal crystallization of thin silicon films on quartz/glass substrates.

Download or read book Journal of Dynamic Systems Measurement and Control written by and published by . This book was released on 2004 with total page 960 pages. Available in PDF, EPUB and Kindle. Book excerpt: Publishes theoretical and applied original papers in dynamic systems. Theoretical papers present new theoretical developments and knowledge for controls of dynamical systems together with clear engineering motivation for the new theory. Applied papers include modeling, simulation, and corroboration of theory with emphasis on demonstrated practicality.