Download or read book Micromachined Thin Film Sensors for SOI CMOS Co Integration written by Jean Laconte and published by Springer Science & Business Media. This book was released on 2006-10-11 with total page 293 pages. Available in PDF, EPUB and Kindle. Book excerpt: Co-integration of sensors with their associated electronics on a single silicon chip may provide many significant benefits regarding performance, reliability, miniaturization and process simplicity without significantly increasing the total cost. Micromachined Thin-Film Sensors for SOI-CMOS Co-integration covers the challenges and interests and demonstrates the successful co-integration of gas-flow sensors on dielectric membrane, with their associated electronics, in CMOS-SOI technology. We firstly investigate the extraction of residual stress in thin layers and in their stacking and the release, in post-processing, of a 1 μm-thick robust and flat dielectric multilayered membrane using Tetramethyl Ammonium Hydroxide (TMAH) silicon micromachining solution. The optimization of its selectivity towards aluminum is largely demonstrated. The second part focuses on sensors design and characteristics. A novel loop-shape polysilicon microheater is designed and built in a CMOS-SOI standard process. High thermal uniformity, low power consumption and high working temperature are confirmed by extensive measurements. The additional gas flow sensing layers are judiciously chosen and implemented. Measurements in the presence of a nitrogen flow and gas reveal fair sensitivity on a large flow velocity range as well as good response to many gases. Finally, MOS transistors suspended on released dielectric membranes are presented and fully characterized as a concluding demonstrator of the co-integration in SOI technology.
Download or read book Micromachined Thin Film Sensors for SOI CMOS Co Integration written by Jean Laconte and published by Springer. This book was released on 2008-11-01 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Co-integration of sensors with their associated electronics on a single silicon chip may provide many significant benefits regarding performance, reliability, miniaturization and process simplicity without significantly increasing the total cost. Micromachined Thin-Film Sensors for SOI-CMOS Co-integration covers the challenges and interests and demonstrates the successful co-integration of gas-flow sensors on dielectric membrane, with their associated electronics, in CMOS-SOI technology. We firstly investigate the extraction of residual stress in thin layers and in their stacking and the release, in post-processing, of a 1 μm-thick robust and flat dielectric multilayered membrane using Tetramethyl Ammonium Hydroxide (TMAH) silicon micromachining solution. The optimization of its selectivity towards aluminum is largely demonstrated. The second part focuses on sensors design and characteristics. A novel loop-shape polysilicon microheater is designed and built in a CMOS-SOI standard process. High thermal uniformity, low power consumption and high working temperature are confirmed by extensive measurements. The additional gas flow sensing layers are judiciously chosen and implemented. Measurements in the presence of a nitrogen flow and gas reveal fair sensitivity on a large flow velocity range as well as good response to many gases. Finally, MOS transistors suspended on released dielectric membranes are presented and fully characterized as a concluding demonstrator of the co-integration in SOI technology.
Download or read book Semiconductor On Insulator Materials for Nanoelectronics Applications written by Alexei Nazarov and published by Springer Science & Business Media. This book was released on 2011-03-03 with total page 437 pages. Available in PDF, EPUB and Kindle. Book excerpt: "Semiconductor-On-Insulator Materials for NanoElectronics Applications” is devoted to the fast evolving field of modern nanoelectronics, and more particularly to the physics and technology of nanoelectronic devices built on semiconductor-on-insulator (SemOI) systems. The book contains the achievements in this field from leading companies and universities in Europe, USA, Brazil and Russia. It is articulated around four main topics: 1. New semiconductor-on-insulator materials; 2. Physics of modern SemOI devices; 3. Advanced characterization of SemOI devices; 4. Sensors and MEMS on SOI. "Semiconductor-On-Insulator Materials for NanoElectonics Applications” is useful not only to specialists in nano- and microelectronics but also to students and to the wider audience of readers who are interested in new directions in modern electronics and optoelectronics.
Download or read book Optical Acoustic Magnetic and Mechanical Sensor Technologies written by Krzysztof Iniewski and published by CRC Press. This book was released on 2017-12-19 with total page 361 pages. Available in PDF, EPUB and Kindle. Book excerpt: Light on physics and math, with a heavy focus on practical applications, Optical, Acoustic, Magnetic, and Mechanical Sensor Technologies discusses the developments necessary to realize the growth of truly integrated sensors for use in physical, biological, optical, and chemical sensing, as well as future micro- and nanotechnologies. Used to pick up sound, movement, and optical or magnetic signals, portable and lightweight sensors are perpetually in demand in consumer electronics, biomedical engineering, military applications, and a wide range of other sectors. However, despite extensive existing developments in computing and communications for integrated microsystems, we are only just now seeing real transformational changes in sensors, which are critical to conducting so many advanced, integrated tasks. This book is designed in two sections—Optical and Acoustic Sensors and Magnetic and Mechanical Sensors—that address the latest developments in sensors. The first part covers: Optical and acoustic sensors, particularly those based on polymer optical fibers Potential of integrated optical biosensors and silicon photonics Luminescent thermometry and solar cell analyses Description of research from United States Army Research Laboratory on sensing applications using photoacoustic spectroscopy Advances in the design of underwater acoustic modems The second discusses: Magnetic and mechanical sensors, starting with coverage of magnetic field scanning Some contributors’ personal accomplishments in combining MEMS and CMOS technologies for artificial microsystems used to sense airflow, temperature, and humidity MEMS-based micro hot-plate devices Vibration energy harvesting with piezoelectric MEMS Self-powered wireless sensing As sensors inevitably become omnipresent elements in most aspects of everyday life, this book assesses their massive potential in the development of interfacing applications for various areas of product design and sciences—including electronics, photonics, mechanics, chemistry, and biology, to name just a few.
Download or read book Advances in Microelectronics Reviews Vol 2 written by Sergey Yurish and published by Lulu.com. This book was released on 2019-08-06 with total page 516 pages. Available in PDF, EPUB and Kindle. Book excerpt: The 2nd volume of 'Advances in Microelectronics: Reviews' Book Series is written by 57 contributors from academy and industry from 11 countries (Bulgaria, Hungary, Iran, Japan, Malaysia, Romania, Russia, Slovak Republic, Spain, Ukraine and USA). The book contains 13 chapters from different areas of microelectronics: MEMS, materials characterization, and various microelectronic devices. With unique combination of information in each volume, the Book Series will be of value for scientists and engineers in industry and at universities. Each of chapter is ending by well selected list of references with books, journals, conference proceedings and web sites. This book ensures that readers will stay at the cutting edge of the field and get the right and effective start point and road map for the further researches and developments.
Download or read book Labs on Chip written by Eugenio Iannone and published by CRC Press. This book was released on 2018-09-03 with total page 1351 pages. Available in PDF, EPUB and Kindle. Book excerpt: Labs on Chip: Principles, Design and Technology provides a complete reference for the complex field of labs on chip in biotechnology. Merging three main areas— fluid dynamics, monolithic micro- and nanotechnology, and out-of-equilibrium biochemistry—this text integrates coverage of technology issues with strong theoretical explanations of design techniques. Analyzing each subject from basic principles to relevant applications, this book: Describes the biochemical elements required to work on labs on chip Discusses fabrication, microfluidic, and electronic and optical detection techniques Addresses planar technologies, polymer microfabrication, and process scalability to huge volumes Presents a global view of current lab-on-chip research and development Devotes an entire chapter to labs on chip for genetics Summarizing in one source the different technical competencies required, Labs on Chip: Principles, Design and Technology offers valuable guidance for the lab-on-chip design decision-making process, while exploring essential elements of labs on chip useful both to the professional who wants to approach a new field and to the specialist who wants to gain a broader perspective.
Download or read book Manufacturing Intelligence for Industrial Engineering Methods for System Self Organization Learning and Adaptation written by Zhou, Zude and published by IGI Global. This book was released on 2010-03-31 with total page 407 pages. Available in PDF, EPUB and Kindle. Book excerpt: "This book focuses on the latest innovations in the process of manufacturing in engineering"--Provided by publisher.
Download or read book Microwave and Millimeter Wave Electronic Packaging written by Rick Sturdivant and published by Artech House. This book was released on 2013-12-01 with total page 281 pages. Available in PDF, EPUB and Kindle. Book excerpt: Packaging of electronic components at microwave and millimeter-wave frequencies requires the same level of engineering effort for lower frequency electronics plus a set of additional activities which are unique due to the higher frequency of operation. This resource presents you with the electronic packaging issues unique to microwave and millimeter-wave frequencies and reviews lower frequency packaging techniques so they can be adapted to higher frequency designs. You are provided with 30 practical examples throughout the book, as well as three free downloadable software analysis programs.
Download or read book Topics in Nonlinear Mechanics and Physics written by Mohamed Belhaq and published by Springer. This book was released on 2019-08-14 with total page 309 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents a selection of contributions from the 4th International Conference on Structural Nonlinear Dynamics and Diagnostics, reflecting diverse aspects of nonlinear and complex dynamics. Fifteen chapters discuss the latest findings and applications in active research areas in nonlinear mechanics and physics. These includes the dynamics of ships with liquid sloshing interaction, dynamics of drops and bubbles, nonlinear drying processes, suppression of time-delayed induced vibrations, dynamics of robotic systems, chaos detection in rolling element, dynamics of a planetary gear system with faults, vibro-impact systems, complex fractional moments for nonlinear systems, oscillations under hysteretic conditions, as well as topics in nonlinear energy harvesting and control.
Download or read book Frontiers In Electronics Selected Papers From The Workshop On Frontiers In Electronics 2015 Wofe 15 written by Sorin Cristoloveanu and published by World Scientific. This book was released on 2017-01-13 with total page 176 pages. Available in PDF, EPUB and Kindle. Book excerpt: Rapid pace of electronic technology evolution and current economic climate compel a merger of such technical areas as low-power digital electronics, microwave power circuits, optoelectronics, etc., which collectively have become the foundation of today's electronic technology.This Workshop aims at encouraging active cross-fertilization of the different 'species' in this electronic planet. The WOFE2015 had gather experts from academia, industry, and government agencies to review the recent exciting breakthroughs and their underlying physical mechanisms.This Monographs includes ten invited articles; cover topics ranging from Ultra-thin silicon nanowire solar cells, to hydrogen generation under illumination of GaN-based structures and from ultrafast response of nanoscale device structures to Power device optimization.
Download or read book CMOS Hotplate Chemical Microsensors written by Markus Graf and published by Springer Science & Business Media. This book was released on 2007-04-19 with total page 131 pages. Available in PDF, EPUB and Kindle. Book excerpt: The first comprehensive text on microhotplate-based chemical sensor systems in CMOS-technology covers all aspects of successful sensor prototyping: theoretical considerations for modelling, controller- and system design, simulation of circuits and microsensors, design considerations, microfabrication, packaging and testing. A whole family of metal-oxide based microsensor systems with increasing complexity is presented, including fully integrated sensor arrays. This represents one of the first examples of integrated nanomaterials, microtechnology and embedded circuitry.
Download or read book Mechanical Microsensors written by M. Elwenspoek and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 306 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book on mechanical microsensors is based on a course organized by the Swiss Foundation for Research in Microtechnology (FSRM) in Neuchatel, Swit zerland, and developed and taught by the authors. Support by FSRM is herewith gratefully acknowledged. This book attempts to serve two purposes. First it gives an overview on me chanical microsensors (sensors for pressure, force, acceleration, angular rate and fluid flow, realized by silicon micromachining). Second, it serves as a textbook for engineers to give them a comprehensive introduction on the basic design issues of these sensors. Engineers active in sensor design are usually educated either in electrical engineering or mechanical engineering. These classical educa tional pro grams do not prepare the engineer for the challenging task of sensor design since sensors are instruments typically bridging the disciplines: one needs a rather deep understanding of both mechanics and electronics. Accordingly, the book contains discussion of the basic engineering sciences relevant to mechanical sensors, hopefully in a way that it is accessible for all colours of engineers. Engi rd th neering students in their 3 or 4 year should have enough knowledge to be able to follow the arguments presented in this book. In this sense, this book should be useful as textbook for students in courses on mechanical microsensors (as is CUf rently being done at the University ofTwente).
Download or read book Radio Frequency Micromachined Switches Switching Networks and Phase Shifters written by Shiban Kishen Koul and published by CRC Press. This book was released on 2019-05-03 with total page 309 pages. Available in PDF, EPUB and Kindle. Book excerpt: Radio Frequency Micromachined Switches, Switching Networks, and Phase Shifters discusses radio frequency microelectromechanical systems (RF MEMS)-based control components and will be useful for researchers and R&D engineers. It offers an in-depth study, performance analysis, and extensive characterization on micromachined switches and phase shifters. The reader will learn about basic design methodology and techniques to carry out extensive measurements on MEMS switches and phase shifters which include electrical, mechanical, power handling, linearity, temperature stability, reliability, and radio frequency performance. Practical examples included in the book will help readers to build high performance systems/subsystems using micromachined circuits. Key Features Provides simple design methodology of MEMS switches and switching networks including SPST to SP16T switches Gives an in-depth performance study of micromachined phase shifters. Detailed study on reliability and power handling capability of RF MEMS switches and phase shifters presented Proposes reconfigurable micromachined phase shifters Verifies a variety of MEMS switches and phase shifters experimentally
Download or read book Thin Film Resistive Sensors written by Petru Ciureanu and published by CRC Press. This book was released on 1992 with total page 520 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides a complete overview of thin film resistive sensors.devoted to thin-film devices. Each type of input energy is discussed in a separate chapter. Detailed descriptions are given of the materials, properties, structure and principles of operation of the sensors as well as their main applications. Results of the authors' research and comprehensive reviews of the current literature are included. The scope of this book and its accessible style make it a valuable reference work to graduate scientists and engineers in many disciplines. Written for scientists and engineers using or developing thin film sensors.
Download or read book Chemical Sensors written by Ghenadii Korotcenkov and published by Momentum Press. This book was released on 2011-11-02 with total page 380 pages. Available in PDF, EPUB and Kindle. Book excerpt: Chemical sensors are integral to the automation of myriad industrial processes, as well as everyday monitoring of such activities as public safety, engine performance, medical therapeutics, and many more. This massive reference work will cover all major categories of chemical sensor materials and devices, and their general functional usage...from monitoring and analyzing gases, to analyzing liquids and compounds of all kinds. This is THE reference work on sensors used for chemical detection and analysis. In this final volume of the Chemical Sensors will be found the latest in new chemical sensor applications including remote chemical sensing for such applications as atmosphere monitoring , new uses for electronic "noses" and "tongues," wireless chemical sensors, and new future directions for chemical sensors in industry, agriculture, and transportation.
Download or read book Integrated Chemical Microsensor Systems in CMOS Technology written by Andreas Hierlemann and published by Springer Science & Business Media. This book was released on 2005-02-21 with total page 248 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book, "Integrated Chemical Microsensor Systems in CMOS Technology", provides a comprehensive treatment of the highly interdisciplinary field of CMOS chemical microsensor systems. It is targeted at students, scientists and engineers who are interested in gaining an introduction to the field of chemical sensing since all the necessary fundamental knowledge is included. However, as it provides detailed information on all important issues related to the realization of chemical microsensors in CMOS technology, it also addresses experts well familiar with the field. After a brief introduction, the fundamentals of chemical sensing are presented. Fabrication and processing steps that are commonly used in the semiconductor industry are then detailed followed by a short description of the microfabrication techniques, and of the CMOS substrate and materials. Thereafter, a comprehensive overview of semiconductor-based and CMOS-based transducer structures for chemical sensors is given. CMOS-technology is then introduced as platform technology, which enables the integration of these microtransducers with the necessary driving and signal conditioning circuitry on the same chip. In a next section, the development of monolithic multisensor arrays and fully developed microsystems with on-chip sensor control and standard interfaces is described. A short section on packaging shows that techniques from the semiconductor industry can be applied to chemical microsensor packaging. The book concludes with a brief outlook on future developments, such as the realization of more complex integrated microsensor systems and methods to interface biological materials, such as cells, with CMOS microelectronics.
Download or read book Micromachined VLSI Sensors written by Patricia Ann Beck and published by . This book was released on 1990 with total page 480 pages. Available in PDF, EPUB and Kindle. Book excerpt:
