Download or read book Focused Ion Beam Fabrication of Microelectronic Structures written by and published by . This book was released on 1990 with total page 109 pages. Available in PDF, EPUB and Kindle. Book excerpt: The development of the capability focusing many species of ions to beam diameters well below 0.1 micron has led to many applications, from many applications, from the repair of photomasks and integrated circuits to the fabrication of quantum effect devices. The work reported here has concentrated on ion induced deposition. This novel method of film growth combines patterning and deposition in a single step. It is used in repair processes to locally add material, and it may also be useful in making conductors and contact in-situ, for example, on III-V compounds which cannot be exposed to the ambient between MBE growth steps. In ion induced deposition a local gas ambient of, for example, an organometallic, is created where the ion beam is incident. A film grows where the beam is scanned. We have demonstrated, characterized, and developed focused ion beam induced deposition of gold and platinum. Features down to 0.1 micron line width have been written as well as, thick (approx. 1 micron) features with steep sidewalls. The microstructure of the gold and platinum deposits has been studied by transmission electron microscopy (TEM). The Pt deposits were found to be amorphous while the gold growth begins as islands an becomes columnar. Measurements were made of the dependence of growth rate on average ion current, ion energy, ion species, and precursor gas pressure and a macroscopic and microscopic model of the process developed.
Download or read book Deterministic Fabrication of Micro and Nano structures by Focused Ion Beam written by Jining Sun and published by . This book was released on 2012 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Electron Beam Technology in Microelectronic Fabrication written by George Brewer and published by Elsevier. This book was released on 2012-12-02 with total page 377 pages. Available in PDF, EPUB and Kindle. Book excerpt: Electron-Beam Technology in Microelectronic Fabrication presents a unified description of the technology of high resolution lithography. This book is organized into six chapters, each treating a major segment of the technology of high resolution lithography. The book examines topics such as the physics of interaction of the electrons with the polymer resist in which the patterns are drawn, the machines that generate and control the beam, and ways of applying electron-beam lithography in device fabrication and in the making of masks for photolithographic replication. Chapter 2 discusses fundamental processes by which patterns are created in resist masks. Chapter 3 describes electron-beam lithography machines, including some details of each of the major elements in the electron-optical column and their effect on the focused electron beam. Chapter 4 presents the use of electron-beam lithography to make discrete devices and integrated circuits. Chapter 5 looks at the techniques and economics of mask fabrication by the use of electron beams. Finally, Chapter 6 presents a comprehensive description and evaluation of the several high resolution replication processes currently under development. This book will be of great value to students and to engineers who want to learn the unique features of high resolution lithography so that they can apply it in research, development, or production of the next generation of microelectronic devices and circuits.
Download or read book Introduction to Focused Ion Beams written by Lucille A. Giannuzzi and published by Springer Science & Business Media. This book was released on 2006-05-18 with total page 362 pages. Available in PDF, EPUB and Kindle. Book excerpt: Introduction to Focused Ion Beams is geared towards techniques and applications. This is the only text that discusses and presents the theory directly related to applications and the only one that discusses the vast applications and techniques used in FIBs and dual platform instruments.
Download or read book Focused Ion Beam Systems written by Nan Yao and published by Cambridge University Press. This book was released on 2007-09-13 with total page 496 pages. Available in PDF, EPUB and Kindle. Book excerpt: The focused ion beam (FIB) system is an important tool for understanding and manipulating the structure of materials at the nanoscale. Combining this system with an electron beam creates a DualBeam - a single system that can function as an imaging, analytical and sample modification tool. Presenting the principles, capabilities, challenges and applications of the FIB technique, this edited volume, first published in 2007, comprehensively covers the ion beam technology including the DualBeam. The basic principles of ion beam and two-beam systems, their interaction with materials, etching and deposition are all covered, as well as in situ materials characterization, sample preparation, three-dimensional reconstruction and applications in biomaterials and nanotechnology. With nanostructured materials becoming increasingly important in micromechanical, electronic and magnetic devices, this self-contained review of the range of ion beam methods, their advantages, and when best to implement them is a valuable resource for researchers in materials science, electrical engineering and nanotechnology.
Download or read book Nanofabrication Using Focused Ion and Electron Beams written by Ivo Utke and published by OUP USA. This book was released on 2012-05 with total page 830 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book comprehensively reviews the achievements and potentials of a minimally invasive, three-dimensional, and maskless surface structuring technique operating at nanometer scale by using the interaction of focused ion and electron beams (FIB/FEB) with surfaces and injected molecules.
Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1994 with total page 836 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Research in Progress written by and published by . This book was released on 1992 with total page 302 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book FIB Nanostructures written by Zhiming M. Wang and published by Springer Science & Business Media. This book was released on 2014-01-04 with total page 536 pages. Available in PDF, EPUB and Kindle. Book excerpt: FIB Nanostructures reviews a range of methods, including milling, etching, deposition, and implantation, applied to manipulate structures at the nanoscale. Focused Ion Beam (FIB) is an important tool for manipulating the structure of materials at the nanoscale, and substantially extends the range of possible applications of nanofabrication. FIB techniques are widely used in the semiconductor industry and in materials research for deposition and ablation, including the fabrication of nanostructures such as nanowires, nanotubes, nanoneedles, graphene sheets, quantum dots, etc. The main objective of this book is to create a platform for knowledge sharing and dissemination of the latest advances in novel areas of FIB for nanostructures and related materials and devices, and to provide a comprehensive introduction to the field and directions for further research. Chapters written by leading scientists throughout the world create a fundamental bridge between focused ion beam and nanotechnology that is intended to stimulate readers' interest in developing new types of nanostructures for application to semiconductor technology. These applications are increasingly important for the future development of materials science, energy technology, and electronic devices. The book can be recommended for physics, electrical engineering, and materials science departments as a reference on materials science and device design.
Download or read book Micro nanoscale Fabrication and Testing of Small scale Structures Using Focused Ion and Electron Beam Technology written by Cheng Choo Nikki Lee and published by . This book was released on 2013 with total page 320 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Future Trends in Microelectronics written by Serge Luryi and published by John Wiley & Sons. This book was released on 2010-08-03 with total page 448 pages. Available in PDF, EPUB and Kindle. Book excerpt: In the summer of 2009, leading professionals from industry, government, and academia gathered for a free-spirited debate on the future trends of microelectronics. This volume represents the summary of their valuable contributions. Providing a cohesive exploration and holistic vision of semiconductor microelectronics, this text answers such questions as: What is the future beyond shrinking silicon devices and the field-effect transistor principle? Are there green pastures beyond the traditional semiconductor technologies? This resource also identifies the direction the field is taking, enabling microelectronics professionals and students to conduct research in an informed, profitable, and forward-looking fashion.
Download or read book Catalog of Federal Domestic Assistance written by United States. Office of Management and Budget and published by . This book was released on 2007 with total page 1032 pages. Available in PDF, EPUB and Kindle. Book excerpt: Identifies and describes specific government assistance opportunities such as loans, grants, counseling, and procurement contracts available under many agencies and programs.
Download or read book Fools Knaves and Heroes written by Jeffrey Archer and published by DIANE Publishing. This book was released on 1998-07 with total page 1694 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Precision Product Process Design and Optimization written by Sanjay S. Pande and published by Springer. This book was released on 2018-04-18 with total page 444 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book introduces readers to various tools and techniques for the design of precision, miniature products, assemblies and associated manufacturing processes. In particular, it focuses on precision mechanisms, robotic devices and their control strategies, together with case studies. In the context of manufacturing process, the book highlights micro/nano machining/forming processes using non-conventional energy sources such as lasers, EDM (electro-discharge machining), ECM (electrochemical machining), etc. Techniques for achieving optimum performance in process modeling, simulation and optimization are presented. The applications of various research tools such as FEM (finite element method), neural networks, genetic algorithms, etc. to product-process design and optimization are illustrated through case studies. The state-of-the-art material presented here provides valuable directions for product development and future research work in this area. The contents of this book will be of use to researchers and industry professionals alike.
Download or read book Recent Advances in Nanofabrication Techniques and Applications written by Bo Cui and published by BoD – Books on Demand. This book was released on 2011-12-02 with total page 630 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nanotechnology has experienced a rapid growth in the past decade, largely owing to the rapid advances in nanofabrication techniques employed to fabricate nano-devices. Nanofabrication can be divided into two categories: "bottom up" approach using chemical synthesis or self assembly, and "top down" approach using nanolithography, thin film deposition and etching techniques. Both topics are covered, though with a focus on the second category. This book contains twenty nine chapters and aims to provide the fundamentals and recent advances of nanofabrication techniques, as well as its device applications. Most chapters focus on in-depth studies of a particular research field, and are thus targeted for researchers, though some chapters focus on the basics of lithographic techniques accessible for upper year undergraduate students. Divided into five parts, this book covers electron beam, focused ion beam, nanoimprint, deep and extreme UV, X-ray, scanning probe, interference, two-photon, and nanosphere lithography.
Download or read book Fabrication and Design of Resonant Microdevices written by Behraad Bahreyni and published by William Andrew. This book was released on 2008-10-20 with total page 234 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book discusses the main issues of fabrication and design, and applications of micromachined resonant devices, including techniques commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). Concepts of resonance are introduced, with an overview of fabrication techniques for micromachined devices – important to understand as design options will depend on how the device will be fabricated. Also explained: excitation and signal detection methods; an analytic model of device behavior (a valuable design tool); numerical simulation techniques; issues of damping and noise for resonant MEMS; electronic interfacing; packaging issues; and numerous examples of resonant MEMS from academia and industry. - Offers numerous academic and industrial examples of resonant MEMS - Provides an analytic model of device behaviour - Explains two-port systems in detail - Devotes ample space to excitation and signal detection methods - Covers issues of damping and noise for resonant MEMS, two topics of particular importance for high-Q devices
Download or read book ISTFA 2019 Proceedings of the 45th International Symposium for Testing and Failure Analysis written by and published by ASM International. This book was released on 2019-12-01 with total page 540 pages. Available in PDF, EPUB and Kindle. Book excerpt: The theme for the 2019 conference is Novel Computing Architectures. Papers will include discussions on the advent of Artificial Intelligence and the promise of quantum computing that are driving disruptive computing architectures; Neuromorphic chip designs on one hand, and Quantum Bits on the other, still in R&D, will introduce new computing circuitry and memory elements, novel materials, and different test methodologies. These novel computing architectures will require further innovation which is best achieved through a collaborative Failure Analysis community composed of chip manufacturers, tool vendors, and universities.
