Download or read book Effects of High Temperature Treatment on Curl and Microstructure of Heavily Boron Doped Silicon written by Denise Marie Bruce and published by . This book was released on 1997-04-01 with total page 115 pages. Available in PDF, EPUB and Kindle. Book excerpt: An experimental study was performed to investigate the effects of high temperature treatment on the microstructure and curling behavior of heavily boron-doped silicon structures. Cantilever structures were created from p++ boron diffused silicon wafers. The post-diffusion high temperature 'anneal' treatment temperature was varied while the anneal time remained constant. The micromechanical cantilevers were analyzed for curl as a function of the anneal temperature using an optical profiler. Bulk sections from the wafers were analyzed to obtain boron concentration using secondary ion mass spectroscopy (SIMS) and to obtain the distribution of lattice constant using x-ray diffraction. Microstructure of plan-view and cross section samples was investigated with the transmission electron microscope (TEM). Results of the curl measurements revealed that all non-annealed cantilever structures were curled in one direction, and those annealed for 90 minutes above 1100 deg C were all curled in the other direction, with an apparent transition temperature of about 1050 deg C. SIMS analysis confirmed that boron concentration becomes more uniform through the wafer thickness with increasing anneal temperature. X-ray diffraction revealed that the magnitude of the smallest lattice constant present in a wafer increases with increasing anneal temperature. TEM observations showed that dislocation and precipitate density do not change with anneal temperature.
Download or read book Micromachining and Microfabrication Process Technology written by and published by . This book was released on 1997 with total page 332 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Thermal Modification of Microstructures and Grain Boundaries in Silicon Carbide written by and published by . This book was released on 2003 with total page 5 pages. Available in PDF, EPUB and Kindle. Book excerpt: Polycrystalline SiC samples hot-pressed with aluminum, boron, and carbon sintering additions (ABC-SiC) were characterized using transmission electron microscopy. The study focused on the effects of high temperature treatment on microstructure.
Download or read book International Aerospace Abstracts written by and published by . This book was released on 1998 with total page 984 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Boron Activation and Diffusion in Polycrystalline Silicon with Flash assist Rapid Thermal Annealing written by Sidan Jin and published by . This book was released on 2011 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: ABSTRACT: The rigorous scaling in dimensions for future generations of transistor fabrication demands ever steeper requirements for dopant solubility with minimal diffusion. Advanced annealing techniques such as flash-assist rapid thermal processing now allow effective anneal times up to three orders of magnitude less than conventional methods. At the same time, advanced characterization techniques can now provide three-dimensional compositional analysis of materials systems. While there has been extensive research for flash annealing of B doped crystalline Si, the effects on polycrystalline Si have been less studied, but is of equal importance. It continues to be prevalent in device fabrication for current and future technologies. The morphology and evolution of grains in heavily B-doped poly-Si is studied under high temperature millisecond annealing conditions using plan-view transmission electron microscopy. High activation with low thermal budgets has allowed study of a very fine-grained microstructure of highly activated B doped poly-Si. 3D atom probe tomography allowed direct quantitative measurement of the segregation coefficient of B to the grain boundaries, and its diffusion behavior has been accurately modeled. Activation, mobility, and deactivation of B in flash annealed polycrystalline Si was also explored using Hall effect. By combining electrical, compositional and microstructural measurements, a model has been developed to describe the activation, mobility, and diffusion behavior of B in poly-Si films with average hole concentrations greater than 5\U+00d7\1019 cm−3.
Download or read book Microstructure Development in Hot pressed Silicon Carbide written by and published by . This book was released on 2002 with total page 5 pages. Available in PDF, EPUB and Kindle. Book excerpt: SiC was hot-pressed with aluminum, boron, and carbon additives. The Al content was modified either to obtain SiC samples containing a continuous Al gradient, or to vary the average Al content. In both cases, dramatic changes in microstructure, phase composition, and grain boundary structure were observed as a result of the Al variation. Similar processing and characterization were done with modified boron and carbon average contents. The systematic experiments allowed identification of the roles of Al, B, and C in developing grain morphology and phase composition. The experiments also clarified the mechanical property responses to microstructural modification. Tailoring of the SiC microstructure to suit different applications would be possible.
Download or read book Environmental and Heat Treatment Effects on the Strength and Microstructure of 10 to 15um Silicon Carbide Fibers written by Darryl P. Butt and published by . This book was released on 1984 with total page 224 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book The Effects of Boron on the Microstructure and Elevated Temperature Porperties of 20 Cr 25 Ni Nb Stainless Steel written by D.R. Arkell and published by . This book was released on 1975 with total page 15 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book CMOS MEMS written by Henry Baltes and published by John Wiley & Sons. This book was released on 2008-07-11 with total page 612 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microstructures, electronics, nanotechnology - these vast fields of research are growing together as the size gap narrows and many different materials are combined. Current research, engineering sucesses and newly commercialized products hint at the immense innovative potentials and future applications that open up once mankind controls shape and function from the atomic level right up to the visible world without any gaps. Sensor systems, microreactors, nanostructures, nanomachines, functional surfaces, integrated optics, displays, communications technology, biochips, human/machine interfaces, prosthetics, miniaturized medical and surgery equipment and many more opportunities are being explored. This new series, Advanced Micro and Nano Systems, provides cutting-edge reviews from top authors on technologies, devices and advanced systems from the micro and nano worlds.
Download or read book Nanomaterials for Drug Delivery and Therapy written by Alexandru Mihai Grumezescu and published by William Andrew. This book was released on 2019-03-14 with total page 581 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nanomaterials for Drug Delivery and Therapy presents recent advances in the field of nanobiomaterials and their important applications in drug delivery, therapy and engineering. The book offers pharmaceutical perspectives, exploring the development of nanobiomaterials and their interaction with the human body. Chapters show how nanomaterials are used in treatments, including neurology, dentistry and cancer therapy. Authored by a range of contributors from global institutions, this book offers a broad, international perspective on how nanotechnology-based advances are leading to novel drug delivery and treatment solutions. It is a valuable research resource that will help both practicing medics and researchers in pharmaceutical science and nanomedicine learn more on how nanotechnology is improving treatments. - Assesses the opportunities and challenges of nanotechnology-based drug delivery systems - Explores how nanotechnology is being used to create more efficient drug delivery systems - Discusses which nanomaterials make the best drug carriers
Download or read book Metals Abstracts written by and published by . This book was released on 1989 with total page 1266 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Ultra thin Chip Technology and Applications written by Joachim Burghartz and published by Springer Science & Business Media. This book was released on 2010-11-18 with total page 471 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ultra-thin chips are the "smart skin" of a conventional silicon chip. This book shows how very thin and flexible chips can be fabricated and used in many new applications in microelectronics, Microsystems, biomedical and other fields. It provides a comprehensive reference to the fabrication technology, post processing, characterization and the applications of ultra-thin chips.
Download or read book Handbook of Carbon Graphite Diamonds and Fullerenes written by Hugh O. Pierson and published by William Andrew. This book was released on 2012-12-02 with total page 420 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is a review of the science and technology of the element carbon and its allotropes: graphite, diamond and the fullerenes. This field has expanded greatly in the last three decades stimulated by many major discoveries such as carbon fibers, low-pressure diamond, and the fullerenes. The need for such a book has been felt for some time. These carbon materials are very different in structure and properties. Some are very old (charcoal), others brand new (the fullerenes). They have different applications and markets and are produced by different segments of the industry.Few studies are available that attempt to review the entire field of carbon as a whole discipline. Moreover these studies were written several decades ago and a generally outdated since the development of the technology is moving very rapidly and scope of applications is constantly expanding and reaching into new fields such as aerospace, automotive, semiconductors, optics, and electronics. In this book the author provides a valuable, up-to-date account of both the newer and traditional forms of carbon, both naturally occurring and man-made. This volume will be a valuable resource for both specialists in, and occasional users of carbon materials.
Download or read book MEMS written by Mohamed Gad-el-Hak and published by CRC Press. This book was released on 2005-11-29 with total page 576 pages. Available in PDF, EPUB and Kindle. Book excerpt: As our knowledge of microelectromechanical systems (MEMS) continues to grow, so does The MEMS Handbook. The field has changed so much that this Second Edition is now available in three volumes. Individually, each volume provides focused, authoritative treatment of specific areas of interest. Together, they comprise the most comprehensive collection
Download or read book Manufacturing Technology for Aerospace Structural Materials written by Flake C Campbell Jr and published by Elsevier. This book was released on 2011-08-31 with total page 617 pages. Available in PDF, EPUB and Kindle. Book excerpt: The rapidly-expanding aerospace industry is a prime developer and user of advanced metallic and composite materials in its many products. This book concentrates on the manufacturing technology necessary to fabricate and assemble these materials into useful and effective structural components. Detailed chapters are dedicated to each key metal or alloy used in the industry, including aluminum, magnesium, beryllium, titanium, high strength steels, and superalloys. In addition the book deals with composites, adhesive bonding and presents the essentials of structural assembly. This book will be an important resource for all those involved in aerospace design and construction, materials science and engineering, as well as for metallurgists and those working in related sectors such as the automotive and mass transport industries. Flake Campbell Jr has over thirty seven years experience in the aerospace industry and is currently Senior Technical Fellow at the Boeing Phantom Works in Missouri, USA.* All major aerospace structural materials covered: metals and composites* Focus on details of manufacture and use* Author has huge experience in aerospace industry* A must-have book for materials engineers, design and structural engineers, metallurgical engineers and manufacturers for the aerospace industry
Download or read book Tensile Testing of Thin Films written by D. T. Read and published by . This book was released on 1997 with total page 96 pages. Available in PDF, EPUB and Kindle. Book excerpt: Five technical papers covering the development of a set of techniques for measuring the tensile properties of thin films are gathered here. Also included are drawings of the mechanical components of the apparatus and listings of two computer programs. Additional necessary parts include a computer, instrumentation, two piezoelectric stacks, and an appropriate platform equipped with a microscope. Piezoelectric stacks are used as actuators. Noncontacting eddy-current displacement sensors measure both the tensile displacement and the force.Closed-loop feedback control allows a variety of test programs. The maximum available displacement is about 50 um, and the maximum available force is about 0.3 N. The resolution of displacement is about 25 nm, and the resolution of force is about 100 uN. Cyclic loading has been demonstrated for cycles as short as 20 s.
Download or read book Microsensors written by Richard S. Muller and published by IEEE. This book was released on 1991 with total page 472 pages. Available in PDF, EPUB and Kindle. Book excerpt:
