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Book Investigation of Industrially Suited Processes for Deposition of Oxide Thin Films by High Power Impulse Magnetron Sputtering

Download or read book Investigation of Industrially Suited Processes for Deposition of Oxide Thin Films by High Power Impulse Magnetron Sputtering written by Felipe de Campos Carreri and published by Fraunhofer Verlag. This book was released on 2018 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: The scope of this work is to investigate and to develop advanced HIPIMS processes for deposition of oxides, utilizing industrial-scale equipment and technology. Two classes of oxide materials were studied: insulating (aluminum oxide) and conducting oxides (indium-tin oxide and aluminum-doped zinc oxide). The electrical properties of the oxides have a significant influence on the process design, as the issues and approaches for deposition of insulating materials are fairly different from conducting materials. Different types of reactive process control were also investigated, utilizing optical emission spectroscopy to control the oxygen flow and lambda probes to control the discharge power. A non-reactive process was also studied for indium-tin oxide.

Book Conducting and Optical Properties of Transparent Conducting Indium Doped Zinc Oxide Thin Films by Sol Gel Processing

Download or read book Conducting and Optical Properties of Transparent Conducting Indium Doped Zinc Oxide Thin Films by Sol Gel Processing written by and published by . This book was released on 2004 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Transparent conducting oxides were successfully prepared from mixed zinc nitrate hexahydrate and indium nitrate hydrate solutions in ethylene glycol using sol-gel technique. The In content in the film was varied (0, 2, 10, 20, 40, 75 and 100 atom %). Films were prepared by spin coating of the liquid precursors followed by thermal decomposition at 400° C after each layer. According to X-ray diffraction (XRD) measurements, the pure ZnO and pure InO films (0 and at 100 % In) were crystalline as-deposited. The crystallinity was suppressed in mixed compositions such that the films with compositions between 10 and 75 at % were amorphous. All the films were transparent with the transmission cut-off frequency near 400 nm, which is characteristic of TCO materials. All as-deposited films were conductive with 0 and 100 atom % In having the lowest resistivities. The resistivity of all compositions were improved by post-deposition reducing anneal in pure Ar at 300° C. The lowest resistivity of 0.2?cm was obtained for the pure ZnO after Ar anneal. It was two-orders of magnitude higher than reported in the literature for the In-doped ZnO, which was attributed to the low processing temperature. The resistivities of as-deposited and annealed in Ar films were increased by consequent air anneal at 300° C.

Book Zinc Oxide Bulk  Thin Films and Nanostructures

Download or read book Zinc Oxide Bulk Thin Films and Nanostructures written by Chennupati Jagadish and published by Elsevier. This book was released on 2011-10-10 with total page 600 pages. Available in PDF, EPUB and Kindle. Book excerpt: With an in-depth exploration of the following topics, this book covers the broad uses of zinc oxide within the fields of materials science and engineering:- Recent advances in bulk , thin film and nanowire growth of ZnO (including MBE, MOCVD and PLD), - The characterization of the resulting material (including the related ternary systems ZgMgO and ZnCdO), - Improvements in device processing modules (including ion implantation for doping and isolation ,Ohmic and Schottky contacts , wet and dry etching), - The role of impurities and defects on materials properties - Applications of ZnO in UV light emitters/detectors, gas, biological and chemical-sensing, transparent electronics, spintronics and thin film

Book Codoped Zinc Oxide by a Novel Co spray Deposition Technique for Solar Cells Applications

Download or read book Codoped Zinc Oxide by a Novel Co spray Deposition Technique for Solar Cells Applications written by Bin Zhou and published by . This book was released on 2013 with total page 87 pages. Available in PDF, EPUB and Kindle. Book excerpt: Zinc oxide (ZnO), a naturally n-type semiconductor has been identified as a promising candidate to replace indium tin oxide (ITO) as the transparent electrode in solar cells, because of its wide bandgap (3.37 eV), abundant source materials and suitable refractive index (2.0 at 600 nm). Spray deposition is a convenient and low cost technique for large area and uniform deposition of semiconductor thin films. In particular, it provides an easier way to dope the film by simply adding the dopant precursor into the starting solution. In order to reduce the resistivity of undoped ZnO, many works have been done by doping in the ZnO with either group IIIA elements or VIIA elements using spray pyrolysis. However, the resistivity is still too high to meet TCO's resistivity requirement.

Book Indium Zinc Oxide Thin Films

Download or read book Indium Zinc Oxide Thin Films written by Matthew P. Taylor and published by . This book was released on 2005 with total page 196 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Investigation of Europium Doped Wide Band Gap Oxides and an Annealing Study of the Amorphous Oxide Semiconductor    Indium Gallium Zinc Oxide

Download or read book Investigation of Europium Doped Wide Band Gap Oxides and an Annealing Study of the Amorphous Oxide Semiconductor Indium Gallium Zinc Oxide written by and published by . This book was released on 2001 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: The electronic, optical and luminescent properties of europium doped wide band gap oxide thin films and the electronic properties of indium gallium zinc oxide (IGZO), a novel amorphous oxide semiconductor were investigated. The thin films of europium doped gallium and gadolinium oxides and indium gallium zinc oxide were deposited on c-axis oriented sapphire substrates by Pulsed Laser Deposition at various conditions of temperature, pressure and doping concentration. Europium doped gallium oxide was found to be in beta phase with monoclinic crystal structure and the films exhibited intense red emission under cathode ray excitation with a peak wavelength of emission at 611 nm which corresponds to the transitions from 5D0 to 7F2 levels in europium. Europium doped gadolinium oxide thin films were found to exhibit two different phases (cubic and monoclinic) with the one of the phases being dominant depending on the growth conditions. The peak wavelength of emission was either 611 nm or 613 nm depending on the phase of the films. The amorphous indium gallium zinc oxide thin films were found to exhibit very high hall mobilities of the order of ̃15 cm2∙V−1∙s−1 and the conductivity could be controlled over several orders of magnitude from 5 x 10−3 S∙cm−1 to 10 S∙cm−1 in the amorphous phase. Annealing the films in presence of air was found to decrease the carrier concentration of the films due the incorporation of oxygen in the films thereby filling up the oxygen vacancies. Applications of amorphous indium gallium zinc oxide include Transparent Thin Film Transistors and use as transparent conducting oxide for optoelectronic devices.

Book Properties of Thin Films of Zinc Oxide Prepared by a Chemical Spray Method

Download or read book Properties of Thin Films of Zinc Oxide Prepared by a Chemical Spray Method written by J. McK. Nobbs and published by . This book was released on 1969 with total page 12 pages. Available in PDF, EPUB and Kindle. Book excerpt: The electrical, optical and structural properties of thin films of zinc oxide in the thickness range 10-400 nm on glass and fuzed quartz substrates have been investigated. The films were prepared using a new chemical spray technique which permitted deposition on either insulating or conducting substrates with a high degree of control over both the dimensions of the coatings and their electrical properties. The effects of variations in film thickness and heat treatment in oxygen have been examined and an assessment has been made of the dimensions of the depletion layer and of the diffusion coefficient of interstitial zinc in zinc oxide. Films with thicknesses greater than 40 nm are stable for long periods and show a crystalline structure with a preferred orientation of the C-axis normal to the substrate. An amorphous phase together with crystallites is apparent in films less than 40 nm thick. However, these films are unstable and show crystallite growth after storage at room temperature. In general, the optical properties of the films correspond with those of films prepared by other methods. (Author).

Book Atomic Structure of Amorphous Zinc Oxide Thin Films

Download or read book Atomic Structure of Amorphous Zinc Oxide Thin Films written by Halton Richard Beumer and published by . This book was released on 1973 with total page 240 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Zinc Oxide Thin films by Spray Pyrolysis with Low Deposition Temperature

Download or read book Zinc Oxide Thin films by Spray Pyrolysis with Low Deposition Temperature written by Jonas Köhling and published by . This book was released on 2021 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Zinc Oxide and Related Materials  Volume 957

Download or read book Zinc Oxide and Related Materials Volume 957 written by Jürgen H. Christen and published by . This book was released on 2007-04-05 with total page 470 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. The topics covered in this volume, first published in 2007, include devices, defects, spintronics and magnetism, growth, optical properties and nanostructures, and doping and processing TFTs.

Book Metal organic Chemical Vapor Deposition of Indium Oxide Based Transparent Conducting Oxide Thin Films

Download or read book Metal organic Chemical Vapor Deposition of Indium Oxide Based Transparent Conducting Oxide Thin Films written by Jun Ni and published by . This book was released on 2005 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Four novel diamine adducts of bis(hexafluoroacetylacetonato)zinc [Zn(hfa)2·(diamine)] can be synthesized in a single step reaction. Single crystal x-ray diffraction studies reveal monomeric, six-coordinate structures. The thermal stabilities and vapor phase transport properties of these complexes are considerably greater than those of conventional solid/liquid zinc metal-organic chemical vapor deposition (MOCVD) precursors. Of the four complexes, bis(1,1,1,5,5,5-hexafluoro-2,4-pentadionato)(N,N '-diethylethylenediamine)zinc [Zn(hfa)2 ( N,N'-DEA)], is particularly effective in the growth of thin films of the transparent conducting oxide Zn- and Sn-doped In2O3 (ZITO) due to its superior volatility and low melting point of 64°C.