Download or read book Thin film Bulk Acoustic Resonators on Integrated Circuits for Physical Sensing Applications written by Matthew Leigh Johnston and published by . This book was released on 2012 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: The fabrication of 0.8-1.5 GHz FBAR devices is validated for both off-chip and on-chip devices, and the integrated system is characterized for sensitivity and limit of detection. On-chip, parallel measurement of multiple sensors in real time is demonstrated for a quantitative vapor sensing application, and the limit of detection is below 50 ppm. This sensor platform could be used for a broad scope of label-free detection applications in chemistry, biology, and medicine, and it demonstrates potential for enabling a low-cost, point of use instrument.
Download or read book Multilayer Integrated Film Bulk Acoustic Resonators written by Yafei Zhang and published by Springer Science & Business Media. This book was released on 2012-08-28 with total page 159 pages. Available in PDF, EPUB and Kindle. Book excerpt: Mulilayer Integrated Film Bulk Acoustic Resonators mainly introduces the theory, design, fabrication technology and application of a recently developed new type of device, multilayer integrated film bulk acoustic resonators, at the micro and nano scale involving microelectronic devices, integrated circuits, optical devices, sensors and actuators, acoustic resonators, micro-nano manufacturing, multilayer integration, device theory and design principles, etc. These devices can work at very high frequencies by using the newly developed theory, design, and fabrication technology of nano and micro devices. Readers in fields of IC, electronic devices, sensors, materials, and films etc. will benefit from this book by learning the detailed fundamentals and potential applications of these advanced devices. Prof. Yafei Zhang is the director of the Ministry of Education’s Key Laboratory for Thin Films and Microfabrication Technology, PRC; Dr. Da Chen was a PhD student in Prof. Yafei Zhang’s research group.
Download or read book Multilayer Integrated Film Bulk Acoustic Resonators written by Yafei Zhang and published by . This book was released on 2013 with total page 152 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Multilayer Integrated Film Bulk Acoustic Resonators written by Springer and published by . This book was released on 2012-08-29 with total page 164 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Tuneable Film Bulk Acoustic Wave Resonators written by Spartak Gevorgian and published by Springer Science & Business Media. This book was released on 2013-02-14 with total page 255 pages. Available in PDF, EPUB and Kindle. Book excerpt: To handle many standards and ever increasing bandwidth requirements, large number of filters and switches are used in transceivers of modern wireless communications systems. It makes the cost, performance, form factor, and power consumption of these systems, including cellular phones, critical issues. At present, the fixed frequency filter banks based on Film Bulk Acoustic Resonators (FBAR) are regarded as one of the most promising technologies to address performance -form factor-cost issues. Even though the FBARs improve the overall performances the complexity of these systems remains high. Attempts are being made to exclude some of the filters by bringing the digital signal processing (including channel selection) as close to the antennas as possible. However handling the increased interference levels is unrealistic for low-cost battery operated radios. Replacing fixed frequency filter banks by one tuneable filter is the most desired and widely considered scenario. As an example, development of the software based cognitive radios is largely hindered by the lack of adequate agile components, first of all tuneable filters. In this sense the electrically switchable and tuneable FBARs are the most promising components to address the complex cost-performance issues in agile microwave transceivers, smart wireless sensor networks etc. Tuneable Film Bulk Acoustic Wave Resonators discusses FBAR need, physics, designs, modelling, fabrication and applications. Tuning of the resonant frequency of the FBARs is considered. Switchable and tuneable FBARs based on electric field induced piezoelectric effect in paraelectric phase ferroelectrics are covered. The resonance of these resonators may be electrically switched on and off and tuned without hysteresis. The book is aimed at microwave and sensor specialists in the industry and graduate students. Readers will learn about principles of operation and possibilities of the switchable and tuneable FBARs, and will be given general guidelines for designing, fabrication and applications of these devices.
Download or read book Acoustic Wave and Electromechanical Resonators written by Humberto Campanella and published by Artech House. This book was released on 2010 with total page 364 pages. Available in PDF, EPUB and Kindle. Book excerpt: This groundbreaking book provides you with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the technology and application levels. This practical reference offers you guidance in design, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the integration of these devices with standard CMOS (complementary-metal-oxide-semiconductor) technologies, and their application to sensing and RF systems. Moreover, this one-stop resource looks at the main characteristics, differences, and limitations of FBAR, MEMS, and NEMS devices, helping you to choose the right approaches for your projects. Over 280 illustrations and more than 130 equations support key topics throughout the book.
Download or read book Resonant MEMS written by Oliver Brand and published by John Wiley & Sons. This book was released on 2015-06-08 with total page 512 pages. Available in PDF, EPUB and Kindle. Book excerpt: Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.
Download or read book Thin film Bulk Acoustic Wave Resonators FBAR written by Humberto Campanella Pineda and published by . This book was released on 2008 with total page 234 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Piezoelectric MEMS Resonators written by Harmeet Bhugra and published by Springer. This book was released on 2017-01-09 with total page 423 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include: Widely-used piezoelectric materials, as well as materials in which there is emerging interest Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets ...and more! The authors present industry and academic perspectives, making this book ideal for engineers, graduate students, and researchers.
Download or read book Proceedings of the 10th Italian Conference Sensors and Microsystems Firenze Italy 15 17 February 2005 written by Anna Grazia Mignani and published by World Scientific. This book was released on 2008 with total page 699 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book contains a selection of papers presented at the 10th Italian Conference on Sensors and Microsystems. It provides a unique perspective on the research and development of sensors, microsystems and related technologies in Italy. The scientific values of the papers also offers an invaluable source to analysts intending to survey the Italian situation about sensors and microsystems. In an interdisciplinary approach, many aspects of the disciplines are covered, ranging from materials science, chemistry, applied physics, electronic engineering and biotechnologies.
Download or read book Mechanic and Dielectric Properties written by Maurice H. Francombe and published by Academic Press. This book was released on 2013-10-22 with total page 415 pages. Available in PDF, EPUB and Kindle. Book excerpt: Mechanic and Dielectric Properties deals with the mechanical and dielectric properties of thin films. Topics covered range from the deposition and mechanical properties of superlattice thin films to the preparation of hard coatings by sputtering and arc evaporation. The use of thin films in microwave acoustics is also discussed, along with ferroelectric films for integrated electronics and the physics, chemistry, and technology of electrochromic tungsten-oxide-based thin films. Comprised of five chapters, this volume begins with an analysis of the growth, characterization, and mechanical behavior of films comprising multilayers primarily of metal and refractory metallic compound components. The next chapter reviews the mechanical properties of hard coatings prepared by sputtering and arc evaporation, together with the influence of multilayer and gradient structures, and of film crystallinity, crystal orientation, and morphology, on properties such as hardness, coating smoothness, and friction behavior. Subsequent chapters focus on the unique role played by piezoelectric films in signal processing devices utilizing bulk or surface acoustic waves; the properties and applications of ferroelectric films in integrated electronics; and the underlying physics and chemistry of electrochromic tungsten-oxide-based thin films. This book should be of interest to physicists.
Download or read book Sensors And Microsystems Proceedings Of The 10th Italian Conference written by Riccardo Falciai and published by World Scientific. This book was released on 2008-07-24 with total page 699 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book contains a selection of papers presented at the 10th Italian Conference on Sensors and Microsystems. It provides a unique perspective on the research and development of sensors, microsystems and related technologies in Italy. The scientific values of the papers also offers an invaluable source to analysts intending to survey the Italian situation about sensors and microsystems. In an interdisciplinary approach, many aspects of the disciplines are covered, ranging from materials science, chemistry, applied physics, electronic engineering and biotechnologies.
Download or read book SBCCI 2007 written by Antonio Petraglia and published by . This book was released on 2007 with total page 384 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Investigation of the Physical Properties Performance and Application of MEMS Sensors Based on Bulk Acoustic Waves Excited in Piezoelectric Thin Film Devices written by and published by . This book was released on 2007 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: In this work, piezoelectric thin film resonators (FBARs) are investigated and their performance and aptitude in different sensing applications is evaluated. The theoretic and experimental analysis of the acoustic mode structure yielded important results describing the nature of different modes and providing information for resonator optimization. With an appropriate design a significant improvement of the sensitivity and quality factor can be achieved. Different modes can be furthermore exploited to enhance the functionality of the sensor and a selection of specific modes by applying a structure on top of the resonator seems possible. Furthermore the influence of design parameters such as the operation frequency, resonator size, form and electrode thickness on the device performance were investigated in detail. Different sensing applications were tested from a stress- over a viscosity- to a bio-sensor and also the capability to act as a fluid mixer was tried successfully. The performance in all these applications was evaluated experimentally and backed up with theoretical models. In comparison experiments acting as a biosensor the FBAR was found to be slightly better than the established quartz crystal microbalance.
Download or read book Piezoelectricity Acoustic Waves And Device Applications Proceedings Of The 2006 Symposium written by Ji Wang and published by World Scientific. This book was released on 2007-09-27 with total page 400 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume covers important subjects in the field of piezoelectric devices and applications with the latest research on piezoelectricity, acoustic waves, manufacturing technology, and design techniques. It includes up-to-date research and information on materials, new products, technological trends, and design methods of benefit to academics and researchers in the piezoelectric device industry. Contributors to this volume include prominent experts such as Clemens Ruppel of Epcos, Daining Fang of Tsinghua University, Tong-Yi Zhang of University of Science and Technology, Hong Kong, and CS Lam of TXC Corporation. A number of papers have been dedicated to Professor Harry F Tiersten of Resselear Polytechnic Institute, who passed away in 2006, for his contributions to the fundamental theory of piezoelectricity and methods for acoustic wave device analysis.
Download or read book Film Bulk Acoustic Resonators of High Quality Factors in Liquid Environments for Biosensing Applications written by Wencheng Xu and published by . This book was released on 2011 with total page 74 pages. Available in PDF, EPUB and Kindle. Book excerpt: Micro-electro-mechanical systems (MEMS) film bulk acoustic resonator (FBAR) demonstrates label-free biosensing capabilities and is considered to be a promising alternative of quartz crystal microbalance (QCM). FBARs achieve great success in vacuum, or in the air, but find limited applications in liquid media because squeeze damping significantly degrades quality factor (Q) and results in poor frequency resolution. A transmission-line model shows that by confining the liquid in a thickness comparable to the acoustic wavelength of the resonator, Q can be considerably improved. The devices exhibit damped oscillatory patterns of Q as the liquid thickness varies. Q assumes its maxima and minima when the channel thickness is an odd and even multiple of the quarter-wavelength of the resonance, respectively. Microfluidic channels are integrated with longitudinal-mode FBARs (L-FBARs) to realize this design; a tenfold improvement of Q over fully-immersed devices is experimentally verified. Microfluidic integrated FBAR sensors have been demonstrated for detecting protein binding in liquid and monitoring the Vroman effect (the competitive protein adsorption behavior), showing their potential as a promising bio-analytical tool. A contour-mode FBAR (C-FBAR) is developed to further improve Q and to alleviate the need for complex integration of microfluidic channels. The C-FBAR consists of a suspended piezoelectric ring made of aluminum nitride and is excited in the fundamental radial-extensional mode. By replacing the squeeze damping with shear damping, high Qs (189 in water and 77 in human whole blood) are obtained in semi-infinite depth liquids. The C-FBAR sensors are characterized by aptamer - thrombin binding pairs and aqueous glycerine solutions for mass and viscosity sensing schemes, respectively. The C-FBAR sensor demonstrates accurate viscosity measurement from 1 to 10 centipoise, and can be deployed to monitor in-vitro blood coagulation processes in real time. Results show that its resonant frequency decreases as the viscosity of the blood increases during the fibrin generation process after the coagulation cascade. The coagulation time and the start/end of the fibrin generation are quantitatively determined, showing the C-FBAR can be a low-cost, portable yet reliable tool for hemostasis diagnostics.
Download or read book Fabrication and Design of Resonant Microdevices written by Behraad Bahreyni and published by William Andrew. This book was released on 2008-10-20 with total page 234 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book discusses the main issues of fabrication and design, and applications of micromachined resonant devices, including techniques commonly used for processing the output signal of resonant micro-electro-mechanical systems (MEMS). Concepts of resonance are introduced, with an overview of fabrication techniques for micromachined devices – important to understand as design options will depend on how the device will be fabricated. Also explained: excitation and signal detection methods; an analytic model of device behavior (a valuable design tool); numerical simulation techniques; issues of damping and noise for resonant MEMS; electronic interfacing; packaging issues; and numerous examples of resonant MEMS from academia and industry. Offers numerous academic and industrial examples of resonant MEMS Provides an analytic model of device behaviour Explains two-port systems in detail Devotes ample space to excitation and signal detection methods Covers issues of damping and noise for resonant MEMS, two topics of particular importance for high-Q devices
