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Book Tensile Testing of Thin Films Using Electrostatic Force Grip

Download or read book Tensile Testing of Thin Films Using Electrostatic Force Grip written by and published by . This book was released on 2002 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Tensile Testing of Thin Films Using Electrostatic Force Grip

Download or read book Tensile Testing of Thin Films Using Electrostatic Force Grip written by T. Tsuchiya and published by . This book was released on 2001 with total page 15 pages. Available in PDF, EPUB and Kindle. Book excerpt: Thin film tensile testers using an electrostatic force grip system were developed to enable increased reliability in MEMS devices. This grip system uses electrostatic force to chuck a thin film specimen. The chucking force is easily controlled and the damage to the specimen during testing can be minimized. With these testers, silicon, silicon-dioxide, and silicon-nitride thin films fabricated with surface micromachining were tensile-tested in a vacuum and in air. The specimens were 2 to 10 ?im wide, 30 to 300 ?m long, and 0.7 to 2.0 ?m thick. We compare the strength of these films and discuss the fracture properties of the films and the effect of the environment.

Book Mechanical Properties of Structural Films

Download or read book Mechanical Properties of Structural Films written by Christopher L. Muhlstein and published by ASTM International. This book was released on 2001 with total page 333 pages. Available in PDF, EPUB and Kindle. Book excerpt: Recent advances in the mechanical properties of structural films are described in these papers from a November 2000 symposium held in Orlando, Florida. Papers are organized in sections on fracture and fatigue of structural films, elastic behavior and residual stress in thin films, tensile testing of

Book Transducers 01 Eurosensors XV

Download or read book Transducers 01 Eurosensors XV written by Ernst Obermeier and published by Springer. This book was released on 2016-05-12 with total page 1763 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Conference is the premier international meeting for the presentation of original work addressing all aspects of the theory, design, fabrication, assembly, packaging, testing and application of solid-state sensors, actuators, MEMS, and microsystems.

Book Tensile Testing of Thin Films

Download or read book Tensile Testing of Thin Films written by D. T. Read and published by . This book was released on 1997 with total page 96 pages. Available in PDF, EPUB and Kindle. Book excerpt: Five technical papers covering the development of a set of techniques for measuring the tensile properties of thin films are gathered here. Also included are drawings of the mechanical components of the apparatus and listings of two computer programs. Additional necessary parts include a computer, instrumentation, two piezoelectric stacks, and an appropriate platform equipped with a microscope. Piezoelectric stacks are used as actuators. Noncontacting eddy-current displacement sensors measure both the tensile displacement and the force.Closed-loop feedback control allows a variety of test programs. The maximum available displacement is about 50 um, and the maximum available force is about 0.3 N. The resolution of displacement is about 25 nm, and the resolution of force is about 100 uN. Cyclic loading has been demonstrated for cycles as short as 20 s.

Book MEMS A Practical Guide of Design Analysis and Applications

Download or read book MEMS A Practical Guide of Design Analysis and Applications written by Jan Korvink and published by Springer Science & Business Media. This book was released on 2010-05-28 with total page 981 pages. Available in PDF, EPUB and Kindle. Book excerpt: A new generation of MEMS books has emerged with this cohesive guide on the design and analysis of micro-electro-mechanical systems (MEMS). Leading experts contribute to its eighteen chapters that encompass a wide range of innovative and varied applications. This publication goes beyond fabrication techniques covered by earlier books and fills a void created by a lack of industry standards. Subjects such as transducer operations and free-space microsystems are contained in its chapters. Satisfying a demand for literature on analysis and design of microsystems the book deals with a broad array of industrial applications. This will interest engineering and research scientists in industry and academia.

Book Thin Films

Download or read book Thin Films written by and published by . This book was released on 1998 with total page 672 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Micromechanics and Nanoscale Effects

Download or read book Micromechanics and Nanoscale Effects written by Vasyl Michael Harik and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 251 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume consists of the state-of-the-art reports on new developments in micromechanics and the modeling of nanoscale effects, and is a companion book to the recent Kluwer volume on nanomechanics and mul- scale modeling (it is entitled Trends in Nanoscale Mechanics). The two volumes grew out of a series of discussions held at NASA Langley Research Center (LaRC), lectures and other events shared by many researchers from the national research laboratories and academia. The key events include the 2001 Summer Series of Round-Table Discussions on Nanotechnology at ICASE Institute (NASA LaRC) organized by Drs. V. M. Harik and M. D. Salas and the 2002 NASA LaRC Workshop on Multi-scale Modeling. The goal of these interactions was to foster collaborations between academic researchers and the ICASE Institute (NASA LaRC), a universi- based institute, which has pioneered world-class computational, theoretical and experimental research in the disciplines that are important to NASA. Editors gratefully acknowledge help of Ms. E. Todd (ICASE, NASA LaRC), the ICASE Director M. D. Salas and all reviewers, in particular, Dr. B. Diskin (ICASE/NIA, NASA LaRC), Prof. R. Haftka (University of Florida), Dr. V. M. Harik (ICASE/Swales Aerospace, NASA LaRC), Prof.

Book Reliability of MEMS

Download or read book Reliability of MEMS written by Osamu Tabata and published by John Wiley & Sons. This book was released on 2008-02-04 with total page 328 pages. Available in PDF, EPUB and Kindle. Book excerpt: This first book to cover exclusively and in detail the principles, tools and methods for determining the reliability of microelectromechanical materials, components and devices covers both component materials as well as entire MEMS devices. Divided into two major parts, following a general introductory chapter to reliability issues, the first part looks at the mechanical properties of the materials used in MEMS, explaining in detail the necessary measuring technologies -- nanoindenters, bulge methods, bending tests, tensile tests, and others. Part Two treats the actual devices, organized by important device categories such as pressure sensors, inertial sensors, RF MEMS, and optical MEMS.

Book Advanced Nondestructive Evaluation I

Download or read book Advanced Nondestructive Evaluation I written by Seung Seok Lee and published by Trans Tech Publications Ltd. This book was released on 2006-10-15 with total page 1870 pages. Available in PDF, EPUB and Kindle. Book excerpt: Volume is indexed by Thomson Reuters CPCI-S (WoS). The papers which make up this volume reflect the very diverse nature of nondestructive evaluation; covering as they do topics ranging from traditional NDE to newly developing NDE methods such as structural health monitoring; where nondestructive technologies are rapidly progressing by integrating emerging technologies from various fields.

Book TENSILE TESTING OF THIN FILMS

Download or read book TENSILE TESTING OF THIN FILMS written by D. T. READ and published by . This book was released on 2018 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book IEEE the Tenth Annual International Workshop on Micro Electro Mechanical Systems

Download or read book IEEE the Tenth Annual International Workshop on Micro Electro Mechanical Systems written by and published by Institute of Electrical & Electronics Engineers(IEEE). This book was released on 1997 with total page 574 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Comprehensive Structural Integrity

Download or read book Comprehensive Structural Integrity written by Ian Milne and published by Elsevier. This book was released on 2003-07-25 with total page 4647 pages. Available in PDF, EPUB and Kindle. Book excerpt: The aim of this major reference work is to provide a first point of entry to the literature for the researchers in any field relating to structural integrity in the form of a definitive research/reference tool which links the various sub-disciplines that comprise the whole of structural integrity. Special emphasis will be given to the interaction between mechanics and materials and structural integrity applications. Because of the interdisciplinary and applied nature of the work, it will be of interest to mechanical engineers and materials scientists from both academic and industrial backgrounds including bioengineering, interface engineering and nanotechnology. The scope of this work encompasses, but is not restricted to: fracture mechanics, fatigue, creep, materials, dynamics, environmental degradation, numerical methods, failure mechanisms and damage mechanics, interfacial fracture and nano-technology, structural analysis, surface behaviour and heart valves. The structures under consideration include: pressure vessels and piping, off-shore structures, gas installations and pipelines, chemical plants, aircraft, railways, bridges, plates and shells, electronic circuits, interfaces, nanotechnology, artificial organs, biomaterial prostheses, cast structures, mining... and more. Case studies will form an integral part of the work.