Download or read book Studies of Heat and Mass Transfer During Chemical Vapor Deposition written by Mansoo Choi and published by . This book was released on 1987 with total page 356 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Heat and Mass Transfer Studies in Enclosures with Applications in Chemical Vapor Deposition Reactors written by Lei Yang and published by . This book was released on 1993 with total page 382 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Studies of Flow Heat Transfer and Particle Deposition During Chemical Vapor Deposition written by Yur-Tsai Lin and published by . This book was released on 1991 with total page 458 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Principles of Chemical Vapor Deposition written by D.M. Dobkin and published by Springer Science & Business Media. This book was released on 2013-03-09 with total page 277 pages. Available in PDF, EPUB and Kindle. Book excerpt: Principles of Chemical Vapor Deposition provides a simple introduction to heat and mass transfer, surface and gas phase chemistry, and plasma discharge characteristics. In addition, the book includes discussions of practical films and reactors to help in the development of better processes and equipment. This book will assist workers new to chemical vapor deposition (CVD) to understand CVD reactors and processes and to comprehend and exploit the literature in the field. The book reviews several disparate fields with which many researchers may have only a passing acquaintance, such as heat and mass transfer, discharge physics, and surface chemistry, focusing on key issues relevant to CVD. The book also examines examples of realistic industrial reactors and processes with simplified analysis to demonstrate how to apply the principles to practical situations. The book does not attempt to exhaustively survey the literature or to intimidate the reader with irrelevant mathematical apparatus. This book is as simple as possible while still retaining the essential physics and chemistry. The book is generously illustrated to assist the reader in forming the mental images which are the basis of understanding.

Download or read book Studies of Heat Transfer and Flow in the Modified Chemical Vapor Deposition Including Effects of Chemistry written by Sooyun Joh and published by . This book was released on 1993 with total page 368 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Principles of Chemical Vapor Deposition written by Daniel Dobkin and published by Springer. This book was released on 2014-03-14 with total page 273 pages. Available in PDF, EPUB and Kindle. Book excerpt: Principles of Chemical Vapor Deposition provides a simple introduction to heat and mass transfer, surface and gas phase chemistry, and plasma discharge characteristics. In addition, the book includes discussions of practical films and reactors to help in the development of better processes and equipment. This book will assist workers new to chemical vapor deposition (CVD) to understand CVD reactors and processes and to comprehend and exploit the literature in the field. The book reviews several disparate fields with which many researchers may have only a passing acquaintance, such as heat and mass transfer, discharge physics, and surface chemistry, focusing on key issues relevant to CVD. The book also examines examples of realistic industrial reactors and processes with simplified analysis to demonstrate how to apply the principles to practical situations. The book does not attempt to exhaustively survey the literature or to intimidate the reader with irrelevant mathematical apparatus. This book is as simple as possible while still retaining the essential physics and chemistry. The book is generously illustrated to assist the reader in forming the mental images which are the basis of understanding.

Download or read book Modeling of Chemical Vapor Deposition of Tungsten Films written by Chris R. Kleijn and published by Birkhäuser. This book was released on 2013-11-11 with total page 138 pages. Available in PDF, EPUB and Kindle. Book excerpt: Semiconductor equipment modeling has in recent years become a field of great interest, because it offers the potential to support development and optimization of manufacturing equipment and hence reduce the cost and improve the quality of the reactors. This book is the result of two parallel lines of research dealing with the same subject - Modeling of Tungsten CVD processes -, which were per formed independently under very different boundary conditions. On the one side, Chris Kleijn, working in an academic research environment, was able to go deep enough into the subject to laya solid foundation and prove the validity of all the assumptions made in his work. On the other side, Christoph Werner, working in the context of an industrial research lab, was able to closely interact with manufacturing and development engineers in a modern submicron semiconductor processing line. Because of these different approaches, the informal collaboration during the course of the projects proved to be extremely helpful to both sides, even though - or perhaps because - different computer codes, different CVD reactors and also slightly different models were used. In spite of the inconsistencies which might arise from this double approach, we feel that the presentation of both sets of results in one book will be very useful for people working in similar projects.

Download or read book Fundamentals of Multiphase Heat Transfer and Flow written by Amir Faghri and published by Springer Nature. This book was released on 2019-09-13 with total page 820 pages. Available in PDF, EPUB and Kindle. Book excerpt: This textbook presents a modern treatment of fundamentals of heat and mass transfer in the context of all types of multiphase flows with possibility of phase-changes among solid, liquid and vapor. It serves equally as a textbook for undergraduate senior and graduate students in a wide variety of engineering disciplines including mechanical engineering, chemical engineering, material science and engineering, nuclear engineering, biomedical engineering, and environmental engineering. Multiphase Heat Transfer and Flow can also be used to teach contemporary and novel applications of heat and mass transfer. Concepts are reinforced with numerous examples and end-of-chapter problems. A solutions manual and PowerPoint presentation are available to instructors. While the book is designed for students, it is also very useful for practicing engineers working in technical areas related to both macro- and micro-scale systems that emphasize multiphase, multicomponent, and non-conventional geometries with coupled heat and mass transfer and phase change, with the possibility of full numerical simulation.

Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1995 with total page 704 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Advances in Heat Transfer written by and published by Academic Press. This book was released on 1999-02-18 with total page 465 pages. Available in PDF, EPUB and Kindle. Book excerpt: Advances in Heat Transfer is designed to fill the information gap between regularly scheduled journals and university level textbooks by providing in-depth review articles over a broader scope than is allowable in either journals or texts.

Download or read book Advances in Heat Transfer written by and published by Academic Press. This book was released on 2016-10-25 with total page 352 pages. Available in PDF, EPUB and Kindle. Book excerpt: Advances in Heat Transfer fills the information gap between regularly scheduled journals and university-level textbooks by providing in-depth review articles that are from a broader scope than in traditional journals or texts. The articles, which serve as a broad review for experts in the field, are also of great interest to non-specialists who need to keep up-to-date on the results of the latest research. This serial is essential reading for all mechanical, chemical, and industrial engineers working in the field of heat transfer, or in graduate schools or industry. Compiles the expert opinions of leaders in the industry Fills the information gap between regularly scheduled journals and university-level textbooks by providing in-depth review articles over a broader scope than in traditional journals or texts Essential reading for all mechanical, chemical, and industrial engineers working in the field of heat transfer, or in graduate schools or industry

Download or read book Flow and Heat Transfer in External Chemical Vapor Deposition Including the Effects of Chemistry written by Cheng-Kuan Wu and published by . This book was released on 1997 with total page 322 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Massively Parallel Computation of 3D Flow and Reactions in Chemical Vapor Deposition Reactors written by and published by . This book was released on 1997 with total page 33 pages. Available in PDF, EPUB and Kindle. Book excerpt: Computer modeling of Chemical Vapor Deposition (CVD) reactors can greatly aid in the understanding, design, and optimization of these complex systems. Modeling is particularly attractive in these systems since the costs of experimentally evaluating many design alternatives can be prohibitively expensive, time consuming, and even dangerous, when working with toxic chemicals like Arsine (AsH3): until now, predictive modeling has not been possible for most systems since the behavior is three-dimensional and governed by complex reaction mechanisms. In addition, CVD reactors often exhibit large thermal gradients, large changes in physical properties over regions of the domain, and significant thermal diffusion for gas mixtures with widely varying molecular weights. As a result, significant simplifications in the models have been made which erode the accuracy of the models' predictions. In this paper, the authors will demonstrate how the vast computational resources of massively parallel computers can be exploited to make possible the analysis of models that include coupled fluid flow and detailed chemistry in three-dimensional domains. For the most part, models have either simplified the reaction mechanisms and concentrated on the fluid flow, or have simplified the fluid flow and concentrated on rigorous reactions. An important CVD research thrust has been in detailed modeling of fluid flow and heat transfer in the reactor vessel, treating transport and reaction of chemical species either very simply or as a totally decoupled problem. Using the analogy between heat transfer and mass transfer, and the fact that deposition is often diffusion limited, much can be learned from these calculations; however, the effects of thermal diffusion, the change in physical properties with composition, and the incorporation of surface reaction mechanisms are not included in this model, nor can transitions to three-dimensional flows be detected.

Download or read book Heat and Mass Transfer written by Md Monwar Hossain and published by BoD – Books on Demand. This book was released on 2011-09-22 with total page 230 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book covers a number of topics in heat and mass transfer processes for a variety of industrial applications. The research papers provide advances in knowledge and design guidelines in terms of theory, mathematical modeling and experimental findings in multiple research areas relevant to many industrial processes and related equipment design. The design of equipment includes air heaters, cooling towers, chemical system vaporization, high temperature polymerization and hydrogen production by steam reforming. Nine chapters of the book will serve as an important reference for scientists and academics working in the research areas mentioned above, especially in the aspects of heat and mass transfer, analytical/numerical solutions and optimization of the processes.

Download or read book Chemical Vapor Deposition written by Electrochemical Society. High Temperature Materials Division and published by The Electrochemical Society. This book was released on 1997 with total page 1686 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Wie man sich zu zeitten der Pestilentz f rsehen und halten m g written by and published by . This book was released on 1569 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Proceedings of the Sixth International Conference on Chemical Vapor Deposition 1977 written by Lee F. Donaghey and published by . This book was released on 1977 with total page 564 pages. Available in PDF, EPUB and Kindle. Book excerpt: