Download or read book SAMPR a Computer Code for Simple Analysis of Materials Processing Reactors written by M. Meyyappan and published by . This book was released on 1997 with total page 58 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book SAMPR written by M. Meyyappan and published by . This book was released on 1997 with total page 49 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is the user's manual for a computer code (SAMPR: Simple Analysis of Materials Processing Reactors) that solves zero-dimensional or volume-averaged conservation equations for the analysis of plasma and non-plasma reactors used in semiconductor processing. Species mass, gas energy, and electron energy equations are solved taking into account homogeneous reactions. Surface reactions are also taken into account in the species balance through properly weighting by the surface-to volume ratio.

Download or read book Handbook of Advanced Plasma Processing Techniques written by R.J. Shul and published by Springer Science & Business Media. This book was released on 2011-06-28 with total page 664 pages. Available in PDF, EPUB and Kindle. Book excerpt: Pattern transfer by dry etching and plasma-enhanced chemical vapor de position are two of the cornerstone techniques for modern integrated cir cuit fabrication. The success of these methods has also sparked interest in their application to other techniques, such as surface-micromachined sen sors, read/write heads for data storage and magnetic random access memory (MRAM). The extremely complex chemistry and physics of plasmas and their interactions with the exposed surfaces of semiconductors and other materi als is often overlooked at the manufacturing stage. In this case, the process is optimized by an informed "trial-and-error" approach which relies heavily on design-of-experiment techniques and the intuition of the process engineer. The need for regular cleaning of plasma reactors to remove built-up reaction or precursor gas products adds an extra degree of complexity because the interaction of the reactive species in the plasma with the reactor walls can also have a strong effect on the number of these species available for etching or deposition. Since the microelectronics industry depends on having high process yields at each step of the fabrication process, it is imperative that a full understanding of plasma etching and deposition techniques be achieved.

Download or read book NASA Tech Briefs written by and published by . This book was released on 1998 with total page 658 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Atmosphere of Freedom written by Glenn E. Bugos and published by . This book was released on 2010 with total page 340 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Proceedings of the IEEE Conference on Nanotechnology written by and published by . This book was released on 2003 with total page 500 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Summary of Flat Plate Solar Array Project Documentation written by M. J. Phillips and published by . This book was released on 1986 with total page 246 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1992 with total page 292 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Proceedings of the ASME Heat Transfer Division 2005 written by and published by . This book was released on 2005 with total page 910 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Nuclear Science Abstracts written by and published by . This book was released on 1975 with total page 1212 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Proceedings of the ASME Heat Transfer Division written by and published by . This book was released on 2005 with total page 906 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Energy Research Abstracts written by and published by . This book was released on 1995 with total page 782 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book ERDA Energy Research Abstracts written by and published by . This book was released on 1977 with total page 724 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book ERDA Energy Research Abstracts written by United States. Energy Research and Development Administration. Technical Information Center and published by . This book was released on 1977 with total page 1680 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book The United States Department of Commerce Publications Catalog and Index Supplement written by United States. Department of Commerce and published by . This book was released on 1973 with total page 692 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book A Directory of Computer Software Applications written by and published by . This book was released on 1979 with total page 306 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book ERDA Energy Research Abstracts written by United States. Energy Research and Development Administration and published by . This book was released on 1977 with total page 1080 pages. Available in PDF, EPUB and Kindle. Book excerpt: