Download or read book Residual Stress Analysis of Sputtered Tantalum Silicide Thin Film written by Young Joo Song and published by . This book was released on 1996 with total page 136 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Phase Residual Stress and Texture in Triode Sputtered Tantalum Coatings on Steel written by and published by . This book was released on 1998 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: This work analyzes the unoptimized prototype triode-sputtered. 150 microns thick tantalum coatings deposited with a 2.5 microns niobium under-layer the bore of a large-diameter A723 steel cylinder. The coating was deposited for wear and erosion protection by Pacific Northwest National Laboratory. Our phase determination was based on X ray diffraction analysis, wavelength dispersive X ray fluorescence analysis, energy dispersive X ray analysis, and hardness and electrical resistivity measurements. Both X ray diffraction and radius-of-curvature methods were used to determine residual stresses. A locally developed high-resolution pole figure technique was used to perform texture analysis. The post-firing, debonded coating showed alpha-tantalum, preferred 110 orientation, high surface stresses, tantalum oxides, entrapped krypton sputtering gas, interstitial oxygen, and other impurities. The surface and subsurface pole figures revealed broadened poles and body-centered-cubic tantalum crystalline structure.
Download or read book Optical Properties of Sputtered Thin Films of Tantalum and Zirconium Silicides written by Zulfiqar Alam and published by . This book was released on 1998 with total page 138 pages. Available in PDF, EPUB and Kindle. Book excerpt: TaSi2 thin films were deposited and optically characterized for all wavelengths between 190-900nm. The films were deposited by sputtering stacks of Si and Ta on fused silica, and then reacting them at high temperature. The film structure was confirmed by X-ray diffraction analysis and resistivity measurements. Refractive index and extinction coefficients of the films were determined by calculating the best fit solution to Fresnel equations. These results were then verified by measuring the optical constants for all wavelengths using ellipsometry. Thin films of Zr and Si were similarly sputtered for optical evaluation.
Download or read book Tantalum Thin Films written by William Dickson Westwood and published by . This book was released on 1975 with total page 480 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Small Scale Structures written by N.F. de Rooij and published by Elsevier. This book was released on 2012-12-02 with total page 559 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book contains the proceedings of 3 symposia dealing with various aspects of small scale structures. Symposium A deals with the development of new materials, including ceramics, polymers, metals, etc., their microstructuring as well as their potential for application in microsystems. All kinds of microsystems are considered, e.g. mechanical, magnetic, optical, chemical, biochemical and issues related to assembly and packaging were also covered. Symposium B deals with four topics: synthesis and preparation of nanostructured ceramics and composites with well-controlled geometric order and chemical composition; coupling of these structures to transducers for current and future chemical and biochemical devices based upon microoptics, microelectronics, microionics, microelectrodes or molecular cages; planar thin film structures and the control of covalent thin film/transducer couplings, the control of selective, stable and sensitive recognition centers at the surface, at grain boundaries or in the bulk of selected nanostructured materials with extremely narrow particle size distributions; analysis of these structures and sensor functions by means of techniques utilizing photons, electrons, ions, or atomic particle beam probes. Symposium E examines the structure-property relationships in thin films and multilayers, from the point of view of both fundamental studies and practical applications.
Download or read book Measurement of Residual Stress in Thin Films written by Gaelle Teresa Belot and published by . This book was released on 2005 with total page 94 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Metallurgical Coatings and Thin Films 1998 written by Bruce D. Sartwell and published by Elsevier Science & Technology. This book was released on 1998 with total page 494 pages. Available in PDF, EPUB and Kindle. Book excerpt: Hardbound. In keeping with the high standard set at previous conferences, these proceedings present high quality, state-of-the-art papers covering this dynamic field. Papers from symposia A, B, E and G have been published as a special issue of Surface and Coatings Technology and the remaining papers were published in Thin Solid Films.The resulting proceedings, containing more than 90 invited papers by internationally recognized experts, should be of interest to materials scientists, physicists, electronic, chemical and mechanical engineers, and chemists.
Download or read book Coastlines written by and published by . This book was released on 1996-03 with total page 830 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Residual Stress Analysis in 3C SiC Thin Films by Substrate Curvature Method written by Jose M. Carballo and published by . This book was released on 2010 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: ABSTRACT: Development of thin films has allowed for important improvements in optical, electronic and electromechanical devices within micrometer length scales. In order to grow thin films, there exist a wide variety of deposition techniques, as each technique offers a unique set of advantages. The main challenge of thin film deposition is to reach smallest possible dimensions, while achieving mechanical stability during operating conditions (including extreme temperatures and external forces, complex film structures and device configurations). Silicon carbide (SiC) is attractive for its resistance to harsh environments, and the potential it offers to improve performance in several microelectronic, micro-electromechanical, and optoelectronic applications. The challenge is to overcome presence of high defect densities within structure of SiC while it is grown as a crystalline thin film. For this reason is important to monitor levels of residual stress, inherited from such grown defects, and which can risk the mechanical stability of SiC- made thin film devices. Stoney's equation is the theoretical foundation of the curvature method for measuring thin film residual stress. It connects residual film stress with substrate curvature through thin plates bending mechanics. Important assumptions and vii simplifications are made about the film-substrate system material properties, dimensions and loading conditions; however, accuracy is reduced upon applying such simplifications. In recent studies of cubic SiC growth, certain Stoney's equation assumptions are violated in order to obtain approximate values of residual stress average. Furthermore, several studies have proposed to expand the scope of Stoney's equation utility; however, such expansions demand of more extensive substrate deflection measurements to be made, before and after film deposition. The goal of this work is to improve the analysis of substrate deflection data, obtained by mechanical profilometry, which is a simple and inexpensive technique. Scatter in deflection data complicates the use of simple processes such as direct differentiation or polynomial fitting. One proposed method is total variation regularization of differentiation process; and results are promising for the adaptation of mechanical profilometry for complete measurement of all components of non-uniform substrate curvature.
Download or read book Auger Electron Spectroscopy written by Donald T. Hawkins and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 305 pages. Available in PDF, EPUB and Kindle. Book excerpt: Auger electron spectroscopy is rapidly developing into the single most powerful analytical technique in basic and applied science.for investigating the chemical and structural properties of solids. Its ex plosive growth beginning in 1967 was triggered by the development of Auger analyzers capable of de tecting one atom layer of material in a fraction of a second. Continued growth was guaranteed firstly by the commercial availability of apparatus which combined the capabilities of scanning electron mi croscopy and ion-mill depth profiling with Auger analysis, and secondly by the increasing need to know the atomistics of many processes in fundamental research and engineering applications. The expanding use of Auger analysis was accompanied by an increase in the number of publications dealing with it. Because of the developing nature of Auger spectroscopy, the articles have appeared in many different sources covering diverse disciplines, so that it is extremely difficult to discover just what has or has not been subjected to Auger analysis. In this situation, a comprehensive bibliography is obviou-sly useful to those both inside and outside the field. For those in the field, this bibliography should be a wonderful time saver for locating certain references, in researching a particular topic, or when considering various aspects of instrumentation or data analysis. This bibliography not only provides the most complete listing of references pertinent to surface Auger analysis available today, but it is also a basis for extrapolating from past trends to future expectations.
Download or read book Metals Abstracts written by and published by . This book was released on 1996 with total page 732 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book In Situ Phase Evolution Study in Magnetron Sputtered Tantalum Thin Films written by and published by . This book was released on 2002 with total page 23 pages. Available in PDF, EPUB and Kindle. Book excerpt: The design and construction of a planar magnetron-sputter deposition system with a beryllium chamber was accomplished to perform in-situ x-ray diffracUon growth study of refractory coatings. The deposition system was set on top of a laboratory 26 x-ray diffractometer. A two-dimensional array detector was interfaced for observation of the Debye nngs during growth. Integration along the 20 and directions allows fast phase and texture determination. The system was built to study effects of sputter deposition parameters on the structural properties of tantalum on steel, silicon, and glass substrates without exposing the system to atmosphere pressure. Two sputter depositions of tantalum films onto glass substrate in argon gas are reported here, one was deposited at 25-mm target-detector distance, 3.9 Pascal argon gas, and the other at 108-mm target-detector distance and 1.3 Pasc% argon gas. The first film grew to 250-nm in 39 minutes at an average growth rate of 6.4-nm/minute. It consisted of 45-nm of interface layer, which showed no crystalline structure, and was most likely amorphous film. It was followed by 15-nm growth of Beta-tantalum, and then followed by 190-nm growth of alpha-tantalum. From the full-width half maximum of the plot, it was determined that the p-tantalum region was 002 textured, and the a-tantalum region was 110 textured, and grew more textured with deposition time. The second film grew to 36-nm in 22 minutes at an average growth rate of 1 .6-nm/minute. It consisted of 31-nm of layer, which showed no crystalline structure, and was most likely amorphous film. It was followed by 5-nm of surface layer of p- and a-tantalum. Ex-situ grazing incidence x-ray diffraction performed on the film surface confirmed the in-situ results. Ex-situ pole figure analysis showed 110 fiber texture in a- tantalum, and highly 002 texture in p-tantalum.
Download or read book Nuclear Science Abstracts written by and published by . This book was released on 1970 with total page 992 pages. Available in PDF, EPUB and Kindle. Book excerpt: NSA is a comprehensive collection of international nuclear science and technology literature for the period 1948 through 1976, pre-dating the prestigious INIS database, which began in 1970. NSA existed as a printed product (Volumes 1-33) initially, created by DOE's predecessor, the U.S. Atomic Energy Commission (AEC). NSA includes citations to scientific and technical reports from the AEC, the U.S. Energy Research and Development Administration and its contractors, plus other agencies and international organizations, universities, and industrial and research organizations. References to books, conference proceedings, papers, patents, dissertations, engineering drawings, and journal articles from worldwide sources are also included. Abstracts and full text are provided if available.
Download or read book Metallurgical Coatings and Thin Films 1994 written by and published by . This book was released on 1994 with total page 564 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book An In situ Study of the Stresses in Silicide Thin Films written by George Eugene White and published by . This book was released on 1987 with total page 438 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Materials and Electrical Characterization of Sputtered Tantalum Oxide Thin Films written by Andrea Pons and published by . This book was released on 2006 with total page 210 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Physics Briefs written by and published by . This book was released on 1992 with total page 812 pages. Available in PDF, EPUB and Kindle. Book excerpt:
