Download or read book Precursors for Metal organic Chemical Vapor Deposition of Thin Films written by Dan R. Denomme and published by . This book was released on 2012 with total page 67 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Precursors for Metal Organic Chemical Vapor Deposition MOCVD of ZrO 1tn2 and HfO 1tn2 Thin Films as Gate Dielectrics in Complementary Metal Oxide Semiconductor CMOS Devices written by and published by . This book was released on 2005 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Chemical Vapour Deposition written by Anthony C. Jones and published by Royal Society of Chemistry. This book was released on 2009 with total page 600 pages. Available in PDF, EPUB and Kindle. Book excerpt: "The book is one of the most comprehensive overviews ever written on the key aspects of chemical vapour deposition processes and it is more comprehensive, technically detailed and up-to-date than other books on CVD. The contributing authors are all practising CVD technologists and are leading international experts in the field of CVD. It presents a logical and progressive overview of the various aspects of CVD processes. Basic concepts, such as the various types of CVD processes, the design of CVD reactors, reaction modelling and CVD precursor chemistry are covered in the first few"--Jacket
Download or read book Precursor Chemistry of Advanced Materials written by Roland A. Fischer and published by Springer Science & Business Media. This book was released on 2005-09-29 with total page 240 pages. Available in PDF, EPUB and Kindle. Book excerpt: Material synthesis by the transformation of organometallic compounds (precursors) by vapor deposition techniques such as chemical vapor deposition (CVD) and atomic layer deposition (ALD) has been in the forefront of modern day research and development of new materials. There exists a need for new routes for designing and synthesizing new precursors as well as the application of established molecular precursors to derive tuneable materials for technological demands. With regard to the precursor chemistry, a most detailed understanding of the mechanistic complexity of materials formation from molecular precursors is very important for further development of new processes and advanced materials. To emphasize and stimulate research in these areas, this volume comprises a selection of case studies covering various key-aspects of the interplay of precursor chemistry with the process conditions of materials formation, particularly looking at the similarities and differences of CVD, ALD and nanoparticle synthesis, e.g. colloid chemistry, involving tailored molecular precursors.
- Author : May Nyman
- Publisher :
- Release : 1992
- ISBN :
- Pages : 354 pages
Synthesis and Characterization of Precursors for Chemical Vapor Deposition of Metal Oxide Thin Films
Download or read book Synthesis and Characterization of Precursors for Chemical Vapor Deposition of Metal Oxide Thin Films written by May Nyman and published by . This book was released on 1992 with total page 354 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book I Synthesis of Metal organic Chemical Vapor Deposition Precursors and Their Use in Oxide Thin Film Depositions written by Seigi Suh and published by . This book was released on 1996 with total page 292 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Molecular Precursors for Solid State Materials written by Daniel Gerard Colombo and published by . This book was released on 1999 with total page 826 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Metal organic Chemical Vapor Deposition of Electronic Ceramics written by and published by . This book was released on 1996 with total page 288 pages. Available in PDF, EPUB and Kindle. Book excerpt:
- Author : Michael Krasnopolski
- Publisher :
- Release : 2014
- ISBN :
- Pages : pages
Metalorganic Chemical Vapor Deposition MOCVD Routes for Fabrication of Rare Earth Nitride Thin Films
Download or read book Metalorganic Chemical Vapor Deposition MOCVD Routes for Fabrication of Rare Earth Nitride Thin Films written by Michael Krasnopolski and published by . This book was released on 2014 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Synthesis of Novel Barium Precursors and Their Use to Deposit Thin Films by Metal Organic Chemical Vapor Deposition written by Daniel Bliss Studebaker and published by . This book was released on 1999 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: A new class of volatile compounds of barium were synthesized. These 'capsule' compounds were prepared to saturate the coordination sphere of barium with one ligand. The covalent bonding of the polyglyme ligand to the 2,2,6,6-tetramethyl-3,5-heptanedione or similar ligand also increased the chelate effect, making loss of the glyme ligand on sublimation less likely. Single crystal X-ray crystal diffraction studies were done on these complexes. One of the complexes was used to grow BaTiO3 thin films to display the ability for these complexes to be used as metal organic chemical vapor deposition (MOCVD) precursors. Thin films of the superconducting material YBa2Cu3O 7-x were deposited on silver substrates by MOCVD. These films were analyzed by microscopy, and the electrical properties are discussed. The first reported growth of beta-BaBLO4 thin films by MOCVD is given. These films were grown on platinum, fused silica, sapphire, and silicon. Second harmonic generation of light from a Nd:YAG laser is observed in optical measurements.
Download or read book Metal Organic Chemical Vapor Deposition MOCVD of Metal Thin Films written by Zhaofeng Wang and published by . This book was released on 1993 with total page 132 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Metalorganic Vapor Phase Epitaxy MOVPE written by Stuart Irvine and published by John Wiley & Sons. This book was released on 2019-10-07 with total page 582 pages. Available in PDF, EPUB and Kindle. Book excerpt: Systematically discusses the growth method, material properties, and applications for key semiconductor materials MOVPE is a chemical vapor deposition technique that produces single or polycrystalline thin films. As one of the key epitaxial growth technologies, it produces layers that form the basis of many optoelectronic components including mobile phone components (GaAs), semiconductor lasers and LEDs (III-Vs, nitrides), optical communications (oxides), infrared detectors, photovoltaics (II-IV materials), etc. Featuring contributions by an international group of academics and industrialists, this book looks at the fundamentals of MOVPE and the key areas of equipment/safety, precursor chemicals, and growth monitoring. It covers the most important materials from III-V and II-VI compounds to quantum dots and nanowires, including sulfides and selenides and oxides/ceramics. Sections in every chapter of Metalorganic Vapor Phase Epitaxy (MOVPE): Growth, Materials Properties and Applications cover the growth of the particular materials system, the properties of the resultant material, and its applications. The book offers information on arsenides, phosphides, and antimonides; nitrides; lattice-mismatched growth; CdTe, MCT (mercury cadmium telluride); ZnO and related materials; equipment and safety; and more. It also offers a chapter that looks at the future of the technique. Covers, in order, the growth method, material properties, and applications for each material Includes chapters on the fundamentals of MOVPE and the key areas of equipment/safety, precursor chemicals, and growth monitoring Looks at important materials such as III-V and II-VI compounds, quantum dots, and nanowires Provides topical and wide-ranging coverage from well-known authors in the field Part of the Materials for Electronic and Optoelectronic Applications series Metalorganic Vapor Phase Epitaxy (MOVPE): Growth, Materials Properties and Applications is an excellent book for graduate students, researchers in academia and industry, as well as specialist courses at undergraduate/postgraduate level in the area of epitaxial growth (MOVPE/ MOCVD/ MBE).
Download or read book Metal organic Chemical Vapor Deposition of Indium Oxide Based Transparent Conducting Oxide Thin Films written by Jun Ni and published by . This book was released on 2005 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Four novel diamine adducts of bis(hexafluoroacetylacetonato)zinc [Zn(hfa)2·(diamine)] can be synthesized in a single step reaction. Single crystal x-ray diffraction studies reveal monomeric, six-coordinate structures. The thermal stabilities and vapor phase transport properties of these complexes are considerably greater than those of conventional solid/liquid zinc metal-organic chemical vapor deposition (MOCVD) precursors. Of the four complexes, bis(1,1,1,5,5,5-hexafluoro-2,4-pentadionato)(N,N '-diethylethylenediamine)zinc [Zn(hfa)2 ( N,N'-DEA)], is particularly effective in the growth of thin films of the transparent conducting oxide Zn- and Sn-doped In2O3 (ZITO) due to its superior volatility and low melting point of 64°C.
Download or read book Chemical Physics of Thin Film Deposition Processes for Micro and Nano Technologies written by Y. Pauleau and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 372 pages. Available in PDF, EPUB and Kindle. Book excerpt: An up-to-date collection of tutorial papers on the latest advances in the deposition and growth of thin films for micro and nano technologies. The emphasis is on fundamental aspects, principles and applications of deposition techniques used for the fabrication of micro and nano devices. The deposition of thin films is described, emphasising the gas phase and surface chemistry and its effects on the growth rates and properties of films. Gas-phase phenomena, surface chemistry, growth mechanisms and the modelling of deposition processes are thoroughly described and discussed to provide a clear understanding of the growth of thin films and microstructures via thermally activated, laser induced, photon assisted, ion beam assisted, and plasma enhanced vapour deposition processes. A handbook for engineers and scientists and an introduction for students of microelectronics.
Download or read book Practical Handbook of Photovoltaics written by Augustin McEvoy and published by Academic Press. This book was released on 2012 with total page 1269 pages. Available in PDF, EPUB and Kindle. Book excerpt: This handbook opens with an overview of solar radiation and how its energy can be tapped using photovoltaic cells. Other chapters cover the technology, manufacture and application of PV cells in real situations. The book ends by exploring the economic and business aspects of PV systems.
Download or read book Metal organic Chemical Vapor Deposition of Group 6 Metal Containing Thin Films written by William Kibbey Stovall and published by . This book was released on 1995 with total page 218 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Metal organic Chemical Vapor Deposition of Cerium Oxide Gallium indium oxide and Magnesium Oxide Thin Films written by Nikki Lynn Edleman and published by . This book was released on 2002 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: The synthesis and characterization of a new magnesium MOCVD precursor, Mg(dpm)2(TMEDA) is detailed. It is shown that the donating ligand TMEDA prevents oligomerization and subsequent volatility depression as observed in the commonly used [Mg(dpm)2]2. The superiority of Mg(dpm)2(TMEDA) as an MOCVD precursor is explicitly demonstrated by growth of epitaxial MgO thin films on single-crystal SrTiO3 substrates.