Download or read book Polarization Modulated Ellipsometry written by James L. Lauer and published by . This book was released on 1986 with total page 118 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Polarization modulation Ellipsometry with Low reflectance Materials written by Yung-Rai Lee and published by . This book was released on 1979 with total page 57 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Ellipsometry and Polarized Light written by R. M. A. Azzam and published by North Holland. This book was released on 1987 with total page 570 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ellipsometry is a unique optical technique of great sensitivity for in situ non-destructive characterization of surface (inter-facial) phenomena (reactions) utilizing the change in the state of polarization of a light-wave probe. Although known for almost a century, the use of ellipsometry has increased rapidly in the last two decades. Among the most significant recent developments are new applications, novel and automated instrumentation and techniques for error-free data analysis. This book provides the necessary analytical and experimental tools needed for competent understanding and use of these developments. It is directed to those who are already working in the field and, more importantly, to the newcomer who would otherwise have to sift through several hundred published papers. The authors first present a comprehensive study of the different mathematical representations of polarized light and how such light is processed by optical systems, going on to show how these tools are applied to the analysis of ellipsometer systems. To relate ellipsometric measurements to surface properties, use is then made of electromagnetic theory. Experimental techniques and apparatus are described and the many interesting applications of ellipsometry to surface and thin-film phenomena are reviewed. This reference work is addressed to researchers and students with a strong interest in surface and thin-film physics and optics and their applications. It is a must for libraries in the fields of solid state physics, physical chemistry, electro-chemistry, metallurgy and optical engineering.
Download or read book Handbook of Ellipsometry written by Harland Tompkins and published by William Andrew. This book was released on 2005-01-06 with total page 887 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Handbook of Ellipsometry is a critical foundation text on an increasingly critical subject. Ellipsometry, a measurement technique based on phase and amplitude changes in polarized light, is becoming popular in a widening array of applications because of increasing miniaturization of integrated circuits and breakthroughs in knowledge of biological macromolecules deriving from DNA and protein surface research. Ellipsometry does not contact or damage samples, and is an ideal measurement technique for determining optical and physical properties of materials at the nano scale. With the acceleration of new instruments and applications now occurring, this book provides an essential foundation for the current science and technology of ellipsometry for scientists and engineers in industry and academia at the forefront of nanotechnology developments in instrumentation, integrated circuits, biotechnology, and pharmaceuticals. Divided into four parts, this comprehensive handbook covers the theory of ellipsometry, instrumentation, applications, and emerging areas. Experts in the field contributed to its twelve chapters, covering various aspects of ellipsometry.
Download or read book Polarization Modulated Ellipsometry written by James L. Lauer and published by . This book was released on 1986 with total page 120 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Spectroscopic Ellipsometry written by Hiroyuki Fujiwara and published by John Wiley & Sons. This book was released on 2007-09-27 with total page 388 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields.
Download or read book Ellipsometry written by Faustino Wahaia and published by BoD – Books on Demand. This book was released on 2017-11-29 with total page 164 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ellipsometry is rapidly emerging as a popular solution addressed to new materials science challenges and technological pitfalls hindering its effective application on modern problems. Amid the nowadays active development of materials of top notch, ellipsometry is also evolving rapidly both in the academic and industry sectors. The global industry strategies, introduce the latest scientific advances at manufacturing new, more accurate, and reliable ellipsometry systems to tackle emerging challenges. The book provides a comprehensive overview on the principles and technical capabilities of the modern ellipsometry highlighting its versatility in materials characterization.
Download or read book A Study of Oxide Films on Aluminum Using the Polarization modulated Ellipsometer written by Stephen Richard Lawry and published by . This book was released on 1980 with total page 82 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Nonlinear Optical Polarization Analysis in Chemistry and Biology written by Garth J. Simpson and published by Cambridge University Press. This book was released on 2017-03-24 with total page 499 pages. Available in PDF, EPUB and Kindle. Book excerpt: Presents a clear systematic molecular-based description of nonlinear optical polarization analysis of chemical and biological assemblies.
Download or read book Photoelastic Modulated Imaging Ellipsometry written by Chien-Yuan Han and published by . This book was released on 2017 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Photoelastic modulator (PEM)-based ellipsometry employed either lock-in amplifiers or the Fourier analysis technique to obtain the ellipsometric parameters almost in real-time that makes the system with a feature of fast measurement speed, higher stability, and sensitivity at small retardations. Since the PEM modulation frequency is too high to compare it with the exposure time of the camera, photoelastic modulator-based approach is not applicable for a two-dimensional ellipsometric measurement. Here, we represent a novel technique that coordinates with the light pulses and PEM modulation that can freeze the time-varied signals. Thus, two-dimensional ellipsometric parameters can be obtained within few seconds. In addition to ellipsometric measurement, this approach also can be extended to other imaging polarimetry measurements, such as Stokes parameters and Mueller matrix. Moreover, since the chromatic dispersion of birefringence was also a significant issue in the polarization modulation systems, we proposed an equivalent phase retardation technique to deal with this issue. This technique was confirmed by a dual wavelength measurement result without changing the optical configuration of the system. The concept and the theory of this system were indicated in the preceding section, and the passage below described some calibration issues for the photoelastic modulator. Some measurement results were revealed in the final part of this chapter.
Download or read book Spectroscopic Ellipsometry written by Harland G. Tompkins and published by Momentum Press. This book was released on 2015-12-16 with total page 138 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ellipsometry is an experimental technique for determining the thickness and optical properties of thin films. It is ideally suited for films ranging in thickness from sub-nanometer to several microns. Spectroscopic measurements have greatly expanded the capabilities of this technique and introduced its use into all areas where thin films are found: semiconductor devices, flat panel and mobile displays, optical coating stacks, biological and medical coatings, protective layers, and more. While several scholarly books exist on the topic, this book provides a good introduction to the basic theory of the technique and its common applications. The target audience is not the ellipsometry scholar, but process engineers and students of materials science who are experts in their own fields and wish to use ellipsometry to measure thin film properties without becoming an expert in ellipsometry itself.
Download or read book A Variable angle Wavelength scanning Polarization modulation Ellipsometer for Surface Characterization written by Koorosh Vasseghi and published by . This book was released on 1992 with total page 244 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Ellipsometry for Industrial Applications written by Karl Riedling and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 109 pages. Available in PDF, EPUB and Kindle. Book excerpt: During the past years, elliposometry, a non-destructive and contact-less optical surface analysis technique, has gained increased importance in industrial areas, such as the technology of electronic devices, when simple instruments, many of them computer-controlled and automated, became available. The potential users of such instruments are, however, frequently aware neither of the inherent possibilities of this technique, nor of its accuracy limitations. This book endeavors to point out some of the less obvious features and possibilities of ellipsometry, particularly of dynamic "in situ" measurements, and reviews its applications in research and manufacturing of semiconductor and thin film devices. A comprehensive discussion of various error effects typical particularly for simple ellipsometers and of their impact on measured sample parameters is provided. Error correction or (numerical) calibration procedures are given wherever possible, and design and operation guidelines for high-speed instruments suitable for dynamic "in situ" measurements are suggested.
Download or read book Selected Papers on Ellipsometry written by R. M. A. Azzam and published by . This book was released on 1990 with total page 754 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Polarimetry and Ellipsometry written by Maksymilian Pluta and published by SPIE-International Society for Optical Engineering. This book was released on 1997 with total page 400 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Ellipsometry in the Measurement of Surfaces and Thin Films written by Elio Passaglia and published by . This book was released on 1964 with total page 366 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book A User s Guide to Ellipsometry written by Harland G. Tompkins and published by Courier Corporation. This book was released on 2013-03-21 with total page 496 pages. Available in PDF, EPUB and Kindle. Book excerpt: This text on optics for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. Its 14 case studies illustrate concepts and reinforce applications of ellipsometry — particularly in relation to the semiconductor industry and to studies involving corrosion and oxide growth. A User's Guide to Ellipsometry will enable readers to move beyond limited turn-key applications of ellipsometers. In addition to its comprehensive discussions of the measurement of film thickness and optical constants in film, it also considers the trajectories of the ellipsometric parameters Del and Psi and how changes in materials affect parameters. This volume also addresses the use of polysilicon, a material commonly employed in the microelectronics industry, and the effects of substrate roughness. Three appendices provide helpful references.
