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Book Plasma Electronics

    Book Details:
  • Author : Toshiaki Makabe
  • Publisher : CRC Press
  • Release : 2006-03-27
  • ISBN : 1420012274
  • Pages : 355 pages

Download or read book Plasma Electronics written by Toshiaki Makabe and published by CRC Press. This book was released on 2006-03-27 with total page 355 pages. Available in PDF, EPUB and Kindle. Book excerpt: Without plasma processing techniques, recent advances in microelectronics fabrication would not have been possible. But beyond simply enabling new capabilities, plasma-based techniques hold the potential to enhance and improve many processes and applications. They are viable over a wide range of size and time scales, and can be used for deposition,

Book Plasma Electronics  Second Edition

Download or read book Plasma Electronics Second Edition written by Toshiaki Makabe and published by CRC Press. This book was released on 2014-08-27 with total page 414 pages. Available in PDF, EPUB and Kindle. Book excerpt: Beyond enabling new capabilities, plasma-based techniques, characterized by quantum radicals of feed gases, hold the potential to enhance and improve many processes and applications. Following in the tradition of its popular predecessor, Plasma Electronics, Second Edition: Applications in Microelectronic Device Fabrication explains the fundamental physics and numerical methods required to bring these technologies from the laboratory to the factory. Emphasizing computational algorithms and techniques, this updated edition of a popular monograph supplies a complete and up-to-date picture of plasma physics, computational methods, applications, and processing techniques. Reflecting the growing importance of computer-aided approaches to plasma analysis and synthesis, it showcases recent advances in fabrication from micro- and nano-electronics, MEMS/NEMS, and the biological sciences. A helpful resource for anyone learning about collisional plasma structure, function, and applications, this edition reflects the latest progress in the quantitative understanding of non-equilibrium low-temperature plasma, surface processing, and predictive modeling of the plasma and the process. Filled with new figures, tables, problems, and exercises, it includes a new chapter on the development of atmospheric-pressure plasma, in particular microcell plasma, with a discussion of its practical application to improve surface efficiency. The book provides an up-to-date discussion of MEMS fabrication and phase transition between capacitive and inductive modes in an inductively coupled plasma. In addition to new sections on the phase transition between the capacitive and inductive modes in an ICP and MOS-transistor and MEMS fabrications, the book presents a new discussion of heat transfer and heating of the media and the reactor. Integrating physics, numerical methods, and practical applications, this book equips you with the up-to-date understanding required to scale up lab breakthroughs into industrial innovations.

Book Plasma Electronics

    Book Details:
  • Author : Toshiaki Makabe
  • Publisher : CRC Press
  • Release : 2014-08-27
  • ISBN : 1482222108
  • Pages : 406 pages

Download or read book Plasma Electronics written by Toshiaki Makabe and published by CRC Press. This book was released on 2014-08-27 with total page 406 pages. Available in PDF, EPUB and Kindle. Book excerpt: Beyond enabling new capabilities, plasma-based techniques, characterized by quantum radicals of feed gases, hold the potential to enhance and improve many processes and applications. Following in the tradition of its popular predecessor, Plasma Electronics, Second Edition: Applications in Microelectronic Device Fabrication explains the fundamental

Book Plasma Physics and Magnetohydrodynamics

Download or read book Plasma Physics and Magnetohydrodynamics written by and published by . This book was released on 1963 with total page 188 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Plasma Physics and Magnetohydrodynamics

Download or read book Plasma Physics and Magnetohydrodynamics written by Defense Documentation Center (U.S.) and published by . This book was released on 1962 with total page 290 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Routledge German Dictionary of Electrical Engineering and Electronics Worterbuch Elektrotechnik and Elektronik Englisch

Download or read book Routledge German Dictionary of Electrical Engineering and Electronics Worterbuch Elektrotechnik and Elektronik Englisch written by Peter-Klaus Budig and published by Routledge. This book was released on 2020-10-14 with total page 734 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents the vocabulary of a continually evolving and fundamental technical field which is finding ever broad applications in industry. It provides special attention to the language of national and international standards and recommendations, as well as appropriate field indications.

Book Plasma Cathode Electron Sources

Download or read book Plasma Cathode Electron Sources written by Efim Oks and published by John Wiley & Sons. This book was released on 2007-06-27 with total page 181 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book fills the gap for a textbook describing this kind of electron beam source in a systematic and thorough manner: from physical processes of electron emission to examples of real plasma electron sources and their applications.

Book Controlled Fusion and Plasma Research

Download or read book Controlled Fusion and Plasma Research written by and published by . This book was released on 1965 with total page 578 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Plasma Physics

    Book Details:
  • Author : B. Samuel Tanenbaum
  • Publisher :
  • Release : 1967
  • ISBN :
  • Pages : 388 pages

Download or read book Plasma Physics written by B. Samuel Tanenbaum and published by . This book was released on 1967 with total page 388 pages. Available in PDF, EPUB and Kindle. Book excerpt: "This text on plasma physics is written for students at the senior or first-year graduate level ... It is intended to serve both as an introduction to the theory of plasmas for students planning to do further work in the subject and as a survey for students with out research interests who want to have some knowledge of plasmas"--Preface.

Book Plasma Processing of Materials

Download or read book Plasma Processing of Materials written by National Research Council and published by National Academies Press. This book was released on 1991-02-01 with total page 88 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma processing of materials is a critical technology to several of the largest manufacturing industries in the worldâ€"electronics, aerospace, automotive, steel, biomedical, and toxic waste management. This book describes the relationship between plasma processes and the many industrial applications, examines in detail plasma processing in the electronics industry, highlights the scientific foundation underlying this technology, and discusses education issues in this multidisciplinary field. The committee recommends a coordinated, focused, and well-funded research program in this area that involves the university, federal laboratory, and industrial sectors of the community. It also points out that because plasma processing is an integral part of the infrastructure of so many American industries, it is important for both the economy and the national security that America maintain a strong leadership role in this technology.

Book Plasma and High Frequency Processes for Obtaining and Processing Materials in the Nuclear Fuel Cycle

Download or read book Plasma and High Frequency Processes for Obtaining and Processing Materials in the Nuclear Fuel Cycle written by I. N. Toumanov and published by Nova Publishers. This book was released on 2003 with total page 628 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma & High Frequency Processes for Obtaining & Processing Materials in the Nuclear Fuel Cycle

Book Quantum Electronics and Plasma Physics

Download or read book Quantum Electronics and Plasma Physics written by Giancarlo C. Righini and published by . This book was released on 1991 with total page 534 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Basic Processes of Gaseous Electronics

Download or read book Basic Processes of Gaseous Electronics written by Leonard B. Loeb and published by Univ of California Press. This book was released on 2023-11-15 with total page 1030 pages. Available in PDF, EPUB and Kindle. Book excerpt: This title is part of UC Press's Voices Revived program, which commemorates University of California Press’s mission to seek out and cultivate the brightest minds and give them voice, reach, and impact. Drawing on a backlist dating to 1893, Voices Revived makes high-quality, peer-reviewed scholarship accessible once again using print-on-demand technology. This title was originally published in 1955.

Book A Functional Description of the Edvac  an Automatically sequence Serial Binary Electronic Digital Computer

Download or read book A Functional Description of the Edvac an Automatically sequence Serial Binary Electronic Digital Computer written by Moore School of Electrical Engineering and published by . This book was released on 1949 with total page 1794 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Basics of Plasma Free Electron Lasers

Download or read book Basics of Plasma Free Electron Lasers written by Mikhail Viktorovich Kuzelev and published by Atlantica Séguier Frontières. This book was released on 1995 with total page 262 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Theory of Gas Discharge Plasma

Download or read book Theory of Gas Discharge Plasma written by Boris M. Smirnov and published by Springer. This book was released on 2014-11-17 with total page 423 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents the theory of gas discharge plasmas in a didactical way. It explains the processes in gas discharge plasmas. A gas discharge plasma is an ionized gas which is supported by an external electric field. Therefore its parameters are determined by processes in it. The properties of a gas discharge plasma depend on its gas component, types of external fields, their geometry and regimes of gas discharge. Fundamentals of a gas discharge plasma include elementary, radiative and transport processes which are included in its kinetics influence. They are represented in this book together with the analysis of simple gas discharges. These general principles are applied to stationary gas discharge plasmas of helium and argon. The analysis of such plasmas under certain conditions is theoretically determined by numerical plasma parameters for given regimes and conditions.

Book Plasma Processes and Plasma Kinetics

Download or read book Plasma Processes and Plasma Kinetics written by Boris M. Smirnov and published by John Wiley & Sons. This book was released on 2008-09-26 with total page 582 pages. Available in PDF, EPUB and Kindle. Book excerpt: This problems supplement to plasma physics textbooks covers plasma theory for both science and technology. Written by a renowned plasma scientist, experienced book author and skilled teacher, it treats all aspects of plasma theory in no fewer than 520 very detailed worked-out problems. With this systematic collection the reader will gain a sound understanding of plasma physics in all fields, from fusion and astrophysics to surface treatment. The book also includes the transport of particles as well as radiation in plasmas, and while designed for graduate students and young researchers, it can equally serve as a reference.