Download or read book Piezoelectric MEMS Resonators written by Harmeet Bhugra and published by Springer. This book was released on 2017-01-09 with total page 423 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include: Widely-used piezoelectric materials, as well as materials in which there is emerging interest Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets ...and more! The authors present industry and academic perspectives, making this book ideal for engineers, graduate students, and researchers.
Download or read book Design of Piezoelectric MEMS Resonators and Oscillators written by 嘉佳 and published by . This book was released on 2015 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Performance of Cantilever based Piezoelectric MEMS Resonators in Liquid Environment written by Martin Kucera and published by . This book was released on 2017 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Optimization and Design of Radio Frequency Piezoelectric MEMS Resonators written by Anming Gao and published by . This book was released on 2018 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Piezoelectric MEMS written by Ulrich Schmid and published by . This book was released on 2016 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Piezoelectric MEMS written by Ulrich Schmid (Ed.) and published by . This book was released on with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Electrical Characterization of Piezoelectric MEMS Resonators in Liquid Phase for Sensing Applications written by Abid Ali and published by . This book was released on 2018 with total page 124 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Resonant MEMS written by Oliver Brand and published by John Wiley & Sons. This book was released on 2015-04-22 with total page 512 pages. Available in PDF, EPUB and Kindle. Book excerpt: Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.
Download or read book Piezoelectric MEMS written by Ulrich Schmid and published by MDPI. This book was released on 2018-07-10 with total page 177 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is a printed edition of the Special Issue "Piezoelectric MEMS" that was published in Micromachines
Download or read book Piezoelectric Aluminum Nitride MEMS Resonators for RF Signal Processing written by Philip Jason Stephanou and published by . This book was released on 2006 with total page 404 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Design of Width extensional Piezoelectric Radio Frequency Microelectromechanical System Resonators and Filters written by Jonathan A. Cox and published by . This book was released on 2007 with total page 121 pages. Available in PDF, EPUB and Kindle. Book excerpt: Existing width-extensional, piezoelectric resonators (LBARs) suffer from high motional resistance and susceptibility to manufacturing disorder. Attempts to lower motional resistance by connecting many LBARs electrically in parallel fail because such schemes are highly susceptible to the disorder inherent in the fabrication process. The manufacturing precision, not the minimum feature size, presently limits the maximum frequency for which a resonator or filter array can be fabricated. However, the effect of disorder in a group of resonators can be reduced with mechanical coupling. Therefore, we present a novel approach that is disorder tolerant, allowing for the fabrication of higher frequency, lower impedance LBAR-based resonators and filters. This novel resonator defeats the aspect ratio limitations imposed by the Poisson effect through stress-relieving slits. By etching narrow slits in a long bar, it is constrained to act as a single LBAR-without the spurious modes which would otherwise result. In addition, the admittance of the new array scales well with the number of unit cells, permitting the length of the array to be extended in one or two dimensions until the motional resistance is reduced to an adequate level. Finite element analysis techniques for disorder simulation and filter design are explored. Radiated acoustic power (anchor loss) is analyzed with finite element simulations with absorbing boundaries. Finally, a thorough discussion of filter design with the new resonator array, as well as a comparison of various filter topologies, is conducted.
Download or read book Piezoelectric and Acoustic Materials for Transducer Applications written by Ahmad Safari and published by Springer Science & Business Media. This book was released on 2008-09-11 with total page 483 pages. Available in PDF, EPUB and Kindle. Book excerpt: The book discusses the underlying physical principles of piezoelectric materials, important properties of ferroelectric/piezoelectric materials used in today’s transducer technology, and the principles used in transducer design. It provides examples of a wide range of applications of such materials along with the appertaining rationales. With contributions from distinguished researchers, this is a comprehensive reference on all the pertinent aspects of piezoelectric materials.
Download or read book 3D and Circuit Integration of MEMS written by Masayoshi Esashi and published by John Wiley & Sons. This book was released on 2021-03-16 with total page 528 pages. Available in PDF, EPUB and Kindle. Book excerpt: Explore heterogeneous circuit integration and the packaging needed for practical applications of microsystems MEMS and system integration are important building blocks for the “More-Than-Moore” paradigm described in the International Technology Roadmap for Semiconductors. And, in 3D and Circuit Integration of MEMS, distinguished editor Dr. Masayoshi Esashi delivers a comprehensive and systematic exploration of the technologies for microsystem packaging and heterogeneous integration. The book focuses on the silicon MEMS that have been used extensively and the technologies surrounding system integration. You’ll learn about topics as varied as bulk micromachining, surface micromachining, CMOS-MEMS, wafer interconnection, wafer bonding, and sealing. Highly relevant for researchers involved in microsystem technologies, the book is also ideal for anyone working in the microsystems industry. It demonstrates the key technologies that will assist researchers and professionals deal with current and future application bottlenecks. Readers will also benefit from the inclusion of: A thorough introduction to enhanced bulk micromachining on MIS process, including pressure sensor fabrication and the extension of MIS process for various advanced MEMS devices An exploration of epitaxial poly Si surface micromachining, including process condition of epi-poly Si, and MEMS devices using epi-poly Si Practical discussions of Poly SiGe surface micromachining, including SiGe deposition and LP CVD polycrystalline SiGe A concise treatment of heterogeneously integrated aluminum nitride MEMS resonators and filters Perfect for materials scientists, electronics engineers, and electrical and mechanical engineers, 3D and Circuit Integration of MEMS will also earn a place in the libraries of semiconductor physicists seeking a one-stop reference for circuit integration and the practical application of microsystems.
Download or read book Piezoelectric MEMS Resonator Characterization and Filter Design written by Joung-Mo Kang and published by . This book was released on 2004 with total page 100 pages. Available in PDF, EPUB and Kindle. Book excerpt: (Cont.) The filter analyses bring to light two major goals for the next stage of resonator development. First, an accurate tuning method must be devised as the resonator bar's small size makes manufacturing errors on the order of tens of nanometers significantly affect filter characteristics. Second, a lower impedance level for the resonator is desirable to allow robust interaction with integrated RF circuitry.
Download or read book Resonant MEMS written by Oliver Brand and published by John Wiley & Sons. This book was released on 2015-06-08 with total page 512 pages. Available in PDF, EPUB and Kindle. Book excerpt: Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.
Download or read book MEMS Linear and Nonlinear Statics and Dynamics written by Mohammad I. Younis and published by Springer Science & Business Media. This book was released on 2011-06-27 with total page 463 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMS Linear and Nonlinear Statics and Dynamics presents the necessary analytical and computational tools for MEMS designers to model and simulate most known MEMS devices, structures, and phenomena. This book also provides an in-depth analysis and treatment of the most common static and dynamic phenomena in MEMS that are encountered by engineers. Coverage also includes nonlinear modeling approaches to modeling various MEMS phenomena of a nonlinear nature, such as those due to electrostatic forces, squeeze-film damping, and large deflection of structures. The book also: Includes examples of numerous MEMS devices and structures that require static or dynamic modeling Provides code for programs in Matlab, Mathematica, and ANSYS for simulating the behavior of MEMS structures Provides real world problems related to the dynamics of MEMS such as dynamics of electrostatically actuated devices, stiction and adhesion of microbeams due to electrostatic and capillary forces MEMS Linear and Nonlinear Statics and Dynamics is an ideal volume for researchers and engineers working in MEMS design and fabrication.
Download or read book MEMS Resonator Filters written by Rajendra M. Patrikar and published by Institution of Engineering and Technology. This book was released on 2020-06-15 with total page 439 pages. Available in PDF, EPUB and Kindle. Book excerpt: The use of MEMS resonators for signal processing is relatively new and has the potential to change the topology of newer generation circuits. New materials, design and fabrication processes, and integration with conventional circuitry will need to be considered. This book explores the challenges and opportunities of developing circuits with MEMS resonator filters. The replacement of classical electrical components with electromechanical components is explored in this book, and the specific properties of MEMS resonators required in various frequency ranges are discussed. Materials and their selection, CAD tools for system design and the integration of MEMS with CMOS circuitry, and the design, fabrication, testing and packaging of MEMS filters themselves are addressed in detail. Case studies where resonator MEMS have been used as components have been included to encourage readers to consider the practical applications of this technology. MEMS Resonator Filters is essential reading for the analogue circuit designer community, particularly those who are designing circuits for wireless communications, and CMOS technology researchers and engineers who are involved in the fabrication of circuits. Designers of sensors and interfacing circuits will also be interested since resonators are also being used as sensors.
