Download or read book Parameter Measurements of a Germane Electron Cyclotron Resonance Plasma written by Matthew Jason DeFreese and published by . This book was released on 2000 with total page 122 pages. Available in PDF, EPUB and Kindle. Book excerpt: This thesis deals with research on optical and electrical characterizations of ECR (Electron Cyclotron Resonance) plasma processes used to deposit films of Germanium and its alloys. A semi-quantitative technique, optical emission spectroscopy (OES) is used to identify a characteristic peak (GeH) of germane plasmas. This is the first time ever that this peak has been seen in optical spectroscopy of germane plasmas. This peak is demonstrated to be correlated with film growth, and can be used to control the plasma process. The effects of changing deposition parameters, such as pressure, hydrogen or helium dilution ratios, and microwave power on film deposition rates and on electron and ion temperatures and electron densities in the plasma have been studied. A novel Langmuir probe technique, using a heated probe, was developed to measure these effects. The data obtained from the Langmuir probe have been correlated with the data obtained from OES measurements.
Download or read book Parameter Space Map of Electron Cyclotron Resonance ECR Plasma Characteristics written by Jeffrey S. Lillé and published by . This book was released on 1996 with total page 184 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Consequences of Mode Structure on Plasma Parameters in Electron Cyclotron Resonance Sources Used for Materials Processing written by Ronald Leonel Kinder and published by . This book was released on 1998 with total page 186 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Documentation of Plasma Physics Pt 1 Experimental Plasma Physics and Theoretical Plasma Physics written by and published by . This book was released on 1975 with total page 774 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Nuclear Science Abstracts written by and published by . This book was released on 1975 with total page 1212 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1981 with total page 788 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Fusion Energy Update written by and published by . This book was released on 1981 with total page 134 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Energy Research Abstracts written by and published by . This book was released on 1994-12 with total page 508 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book ERDA Energy Research Abstracts written by and published by . This book was released on 1985 with total page 676 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Nuclear Science Abstracts written by and published by . This book was released on 1975-11 with total page 960 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Plasma Physics Index written by and published by . This book was released on 1982 with total page 936 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book ERDA Energy Research Abstracts written by United States. Energy Research and Development Administration and published by . This book was released on 1977 with total page 852 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book ERDA Energy Research Abstracts written by United States. Energy Research and Development Administration. Technical Information Center and published by . This book was released on 1977 with total page 1680 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book PLASMA 2005 written by Marek J. Sadowski and published by American Institute of Physics. This book was released on 2006-02-02 with total page 514 pages. Available in PDF, EPUB and Kindle. Book excerpt: The topic of this joint conference was research on plasma physics and its applications, with particular emphasis on research on controlled nuclear fusion. Different experiments with tokamaks, stellerators, Z-pinch and plasma focus facilities are described. Papers on low temperature plasmas produced by microwave, spark or arc-discharges, as well as on applications of thermal plasmas are also included.
Download or read book OAR Cumulative Index of Research Results written by United States. Air Force. Office of Aerospace Research and published by . This book was released on 1965 with total page 586 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book OAR Cumulative Index of Research Results written by and published by . This book was released on with total page 576 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book INIS Atomindex written by and published by . This book was released on 1988 with total page 860 pages. Available in PDF, EPUB and Kindle. Book excerpt:
