Download or read book High Power Impulse Magnetron Sputtering written by Daniel Lundin and published by Elsevier. This book was released on 2019-08-30 with total page 398 pages. Available in PDF, EPUB and Kindle. Book excerpt: High Power Impulse Magnetron Sputtering: Fundamentals, Technologies, Challenges and Applications is an in-depth introduction to HiPIMS that emphasizes how this novel sputtering technique differs from conventional magnetron processes in terms of both discharge physics and the resulting thin film characteristics. Ionization of sputtered atoms is discussed in detail for various target materials. In addition, the role of self-sputtering, secondary electron emission and the importance of controlling the process gas dynamics, both inert and reactive gases, are examined in detail with an aim to generate stable HiPIMS processes. Lastly, the book also looks at how to characterize the HiPIMS discharge, including essential diagnostic equipment. Experimental results and simulations based on industrially relevant material systems are used to illustrate mechanisms controlling nucleation kinetics, column formation and microstructure evolution.

Download or read book Ionized Physical Vapor Deposition written by and published by Academic Press. This book was released on 1999-10-14 with total page 268 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume provides the first comprehensive look at a pivotal new technology in integrated circuit fabrication. For some time researchers have sought alternate processes for interconnecting the millions of transistors on each chip because conventional physical vapor deposition can no longer meet the specifications of today's complex integrated circuits. Out of this research, ionized physical vapor deposition has emerged as a premier technology for the deposition of thin metal films that form the dense interconnect wiring on state-of-the-art microprocessors and memory chips.For the first time, the most recent developments in thin film deposition using ionized physical vapor deposition (I-PVD) are presented in a single coherent source. Readers will find detailed descriptions of relevant plasma source technology, specific deposition systems, and process recipes. The tools and processes covered include DC hollow cathode magnetrons, RF inductively coupled plasmas, and microwave plasmas that are used for depositing technologically important materials such as copper, tantalum, titanium, TiN, and aluminum. In addition, this volume describes the important physical processes that occur in I-PVD in a simple and concise way. The physical descriptions are followed by experimentally-verified numerical models that provide in-depth insight into the design and operation I-PVD tools.Practicing process engineers, research and development scientists, and students will find that this book's integration of tool design, process development, and fundamental physical models make it an indispensable reference.Key Features:The first comprehensive volume on ionized physical vapor depositionCombines tool design, process development, and fundamental physical understanding to form a complete picture of I-PVDEmphasizes practical applications in the area of IC fabrication and interconnect technologyServes as a guide to select the most appropriate technology for any deposition application*This single source saves time and effort by including comprehensive information at one's finger tips*The integration of tool design, process development, and fundamental physics allows the reader to quickly understand all of the issues important to I-PVD*The numerous practical applications assist the working engineer to select and refine thin film processes

Download or read book Recent Advances in Technology Research and Education written by Dumitru Luca and published by Springer. This book was released on 2017-09-08 with total page 352 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents selected contributions to the 16th International Conference on Global Research and Education Inter-Academia 2017 hosted by Alexandru Ioan Cuza University of Iași, Romania from 25 to 28 September 2017. It is the third volume in the series, following the editions from 2015 and 2016. Fundamental and applied research in natural sciences have led to crucial developments in the ongoing 4th global industrial revolution, in the course of which information technology has become deeply embedded in industrial management, research and innovation – and just as deeply in education and everyday life. Materials science and nanotechnology, plasma and solid state physics, photonics, electrical and electronic engineering, robotics and metrology, signal processing, e-learning, intelligent and soft computing have long since been central research priorities for the Inter-Academia Community (I-AC) – a body comprising 14 universities and research institutes from Japan and Central/East-European countries that agreed, in 2002, to coordinate their research and education programs so as to better address today’s challenges. The book is intended for use in academic, government, and industrial R&D departments as a reference tool in research and technology education. The 42 peer-reviewed papers were written by more than 119 leading scientists from 14 countries, most of them affiliated to the I-AC.

Download or read book Cathodic Arcs written by André Anders and published by Springer Science & Business Media. This book was released on 2009-07-30 with total page 555 pages. Available in PDF, EPUB and Kindle. Book excerpt: Cathodic arcs are among the longest studied yet least understood objects in science. Plasma-generating, tiny spots appear on the cathode; they are highly dynamic and hard to control. With an approach emphasizing the fractal character of cathode spots, strongly fluctuating plasma properties are described such as the presence of multiply charged ions that move with supersonic velocity. Richly illustrated, the book also deals with practical issues, such as arc source construction, macroparticle removal, and the synthesis of dense, well adherent coatings. The book spans a bridge from plasma physics to coatings technology based on energetic condensation, appealing to scientists, practitioners and graduate students alike.

Download or read book Reactive Sputter Deposition written by Diederik Depla and published by Springer Science & Business Media. This book was released on 2008-06-24 with total page 584 pages. Available in PDF, EPUB and Kindle. Book excerpt: In this valuable work, all aspects of the reactive magnetron sputtering process, from the discharge up to the resulting thin film growth, are described in detail, allowing the reader to understand the complete process. Hence, this book gives necessary information for those who want to start with reactive magnetron sputtering, understand and investigate the technique, control their sputtering process and tune their existing process, obtaining the desired thin films.

Download or read book Advances in Coatings Deposition and Characterization written by MDPI and published by MDPI. This book was released on 2020-12-29 with total page 196 pages. Available in PDF, EPUB and Kindle. Book excerpt: Coatings offer the unique opportunity to create architectures that combine the functionality of two or more materials, conferring unique properties to objects with an extremely large palette of solutions. For this flexibility, thick and thin films have terrific impacts on the most relevant societal challenges. Computers, food packaging, airplanes, and cars, to mention a few familiar objects from everyday life, rely heavily on coatings. To celebrate the key role that coatings have in society, and in science and technology, this book collects a selection of relevant reviews and original research articles published in “Coatings” in 2017 and 2018. Papers have been selected based on their broad impact and balancing between the two major aspects of coatings science and technology: deposition and characterization.

Download or read book Coatings Technology written by Arthur A. Tracton and published by CRC Press. This book was released on 2006-11-07 with total page 408 pages. Available in PDF, EPUB and Kindle. Book excerpt: Drawn from the third edition of The Coatings Technology Handbook, this book focuses entirely on testing, experimental design, and strategies for selecting processing techniques in the coatings, adhesives, paints, and inks industries. Coatings Technology: Fundamentals, Testing, and Processing Techniques contains the latest coating and processing met

Download or read book Sputtering by Particle Bombardment written by Rainer Behrisch and published by Springer Science & Business Media. This book was released on 2007-07-26 with total page 527 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides a long-needed survey of new results. Especially welcome is a new summary of the measured and calculated sputtering yields with an algebraic approximation formula for the energy and angular dependence of the yields, which is useful for researchers who need sputtering yields for physics research or applied problems. The book offers a critical review of computational methods for calculating sputtering yields and also includes molecular dynamics calculations.

Download or read book Handbook of Deposition Technologies for Films and Coatings written by Peter M. Martin and published by William Andrew. This book was released on 2009-12-01 with total page 932 pages. Available in PDF, EPUB and Kindle. Book excerpt: This 3e, edited by Peter M. Martin, PNNL 2005 Inventor of the Year, is an extensive update of the many improvements in deposition technologies, mechanisms, and applications. This long-awaited revision includes updated and new chapters on atomic layer deposition, cathodic arc deposition, sculpted thin films, polymer thin films and emerging technologies. Extensive material was added throughout the book, especially in the areas concerned with plasma-assisted vapor deposition processes and metallurgical coating applications.

Download or read book Halide Perovskites written by Tze-Chien Sum and published by John Wiley & Sons. This book was released on 2019-03-25 with total page 312 pages. Available in PDF, EPUB and Kindle. Book excerpt: Real insight from leading experts in the field into the causes of the unique photovoltaic performance of perovskite solar cells, describing the fundamentals of perovskite materials and device architectures. The authors cover materials research and development, device fabrication and engineering methodologies, as well as current knowledge extending beyond perovskite photovoltaics, such as the novel spin physics and multiferroic properties of this family of materials. Aimed at a better and clearer understanding of the latest developments in the hybrid perovskite field, this is a must-have for material scientists, chemists, physicists and engineers entering or already working in this booming field.

Download or read book Encyclopedia of Tribology written by Q. Jane Wang and published by Springer. This book was released on 2013-09-26 with total page 4139 pages. Available in PDF, EPUB and Kindle. Book excerpt: TRIBOLOGY – the study of friction, wear and lubrication – impacts almost every aspect of our daily lives. The Springer Encyclopedia of Tribology is an authoritative and comprehensive reference covering all major aspects of the science and engineering of tribology that are relevant to researchers across all engineering industries and related scientific disciplines. This is the first major reference that brings together the science, engineering and technological aspects of tribology of this breadth and scope in a single work. Developed and written by leading experts in the field, the Springer Encyclopedia of Tribology covers the fundamentals as well as advanced applications across material types, different length and time scales, and encompassing various engineering applications and technologies. Exciting new areas such as nanotribology, tribochemistry and biotribology have also been included. As a six-volume set, the Springer Encyclopedia of Tribology comprises 1630 entries written by authoritative experts in each subject area, under the guidance of an international panel of key researchers from academia, national laboratories and industry. With alphabetically-arranged entries, concept diagrams and cross-linking features, this comprehensive work provides easy access to essential information for both researchers and practicing engineers in the fields of engineering (aerospace, automotive, biomedical, chemical, electrical, and mechanical) as well as materials science, physics, and chemistry.

Download or read book Pulsed and Pulsed Bias Sputtering written by Edward V. Barnat and published by Springer Science & Business Media. This book was released on 2013-11-27 with total page 151 pages. Available in PDF, EPUB and Kindle. Book excerpt: Diffusion Barrier Stack - 5 nm -3 nm -2 nm :. . . -. . . . : . . O. 21-lm Figure 2: Schematic representing a cross-sectional view of the topography that is encountered in the processing of integrated circuits. (Not to scale) these sub-micron sized features is depicted in Fig. 2. The role of the diffusion barrier is to prevent the diffusion of metallic ions into the interlayer dielectric (lLD). Depending on the technology, in particular the choice of the ILD and the metal interconnect, the diffusion barrier may be Ti, Ta, TiN, TaN, or a multi-layered structure of these materials. The adhesion of the barrier to the dielectric, the conformality of the barrier to the feature, the physical structure of the film, and the chemical composition of the film are key issues that are determined in part by the nature of the deposition process. Likewise, after the growth of the barrier, a conducting layer (the seed layer) is needed for subsequent filling of the trench by electrochemical deposition. Again, the growth process must be able to deposit a film that is continuous along the topography of the sub-micron sized features. Other factors of concern are the purity and the texture of the seed layer, as both of these factors influence the final resistivity of the metallic interconnect. Sputter-deposited coatings are also commonly employed for their electro-optical properties. For example, an electrochromic glazing is used to control the flux of light that is transmitted through a glazed material.

Download or read book Plasma Medicine written by Alexander Fridman and published by John Wiley & Sons. This book was released on 2012-12-19 with total page 629 pages. Available in PDF, EPUB and Kindle. Book excerpt: This comprehensive text is suitable for researchers and graduate students of a ‘hot’ new topic in medical physics. Written by the world’s leading experts, this book aims to present recent developments in plasma medicine, both technological and scientific, reviewed in a fashion accessible to the highly interdisciplinary audience consisting of doctors, physicists, biologists, chemists and other scientists, university students and professors, engineers and medical practitioners. The book focuses on major topics and covers the physics required to develop novel plasma discharges relevant for medical applications, the medicine to apply the technology not only in-vitro but also in-vivo testing and the biology to understand complicated bio-chemical processes involved in plasma interaction with living tissues.

Download or read book The Stopping and Range of Ions in Solids written by James F. Ziegler and published by . This book was released on 1985 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Environmental Barrier Coatings written by Kang N. Lee and published by MDPI. This book was released on 2020-12-29 with total page 168 pages. Available in PDF, EPUB and Kindle. Book excerpt: The global increase in air travel will require commercial vehicles to be more efficient than ever before. Advanced engine hot section materials are a key technology required to keep fuel consumption and emission to a minimum in next-generation gas turbines. Ceramic matrix composites (CMCs) are the most promising material to revolutionize gas turbine hot section materials technology because of their excellent high‐temperature properties. Rapid surface recession due to volatilization by water vapor is the Achilles heel of CMCs. Environmental barrier coatings (EBCs) is an enabling technology for CMCs, since it protects CMCs from water vapor. The first CMC component entered into service in 2016 in a commercial engine, and more CMC components are scheduled to follow within the next few years. One of the most difficult challenges to CMC components is EBC durability, because failure of EBC leads to a rapid reduction in CMC component life. Key contributors to EBC failure include recession, oxidation, degradation by calcium‐aluminum‐magnesium silicates (CMAS) deposits, thermal and thermo‐mechanical strains, particle erosion, and foreign object damage (FOD). Novel EBC chemistries, creative EBC designs, and robust processes are required to meet EBC durability challenges. Engine-relevant testing, characterization, and lifing methods need to be developed to improve EBC reliability. The aim of this Special Issue is to present recent advances in EBC technology to address these issues. In particular, topics of interest include but are not limited to the following: • Novel EBC chemistries and designs; • Processing including plasma spray, suspension plasma spray, solution precursor plasma spray, slurry process, PS-PVD, EB-PVD, and CVD; • Testing, characterization, and modeling; • Lifing.

Download or read book Magnetic Multilayers and Giant Magnetoresistance written by U. Hartmann and published by Springer Science & Business Media. This book was released on 2013-03-14 with total page 331 pages. Available in PDF, EPUB and Kindle. Book excerpt: This unified overview of recent progress in a growing, multi-disciplinary field places special emphasis on the industrial applications of magnetic multilayered materials. The text describes a wide range of physical aspects, together with experimental and theoretical methods.

Download or read book Handbook of Physical Vapor Deposition PVD Processing written by D. M. Mattox and published by Cambridge University Press. This book was released on 2014-09-19 with total page 947 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book covers all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the book is on the aspects of the process flow that are critical to economical deposition of films that can meet the required performance specifications. The book covers subjects seldom treated in the literature: substrate characterization, adhesion, cleaning and the processing. The book also covers the widely discussed subjects of vacuum technology and the fundamentals of individual deposition processes. However, the author uniquely relates these topics to the practical issues that arise in PVD processing, such as contamination control and film growth effects, which are also rarely discussed in the literature. In bringing these subjects together in one book, the reader can understand the interrelationship between various aspects of the film deposition processing and the resulting film properties. The author draws upon his long experience with developing PVD processes and troubleshooting the processes in the manufacturing environment, to provide useful hints for not only avoiding problems, but also for solving problems when they arise. He uses actual experiences, called ""war stories"", to emphasize certain points. Special formatting of the text allows a reader who is already knowledgeable in the subject to scan through a section and find discussions that are of particular interest. The author has tried to make the subject index as useful as possible so that the reader can rapidly go to sections of particular interest. Extensive references allow the reader to pursue subjects in greater detail if desired. The book is intended to be both an introduction for those who are new to the field and a valuable resource to those already in the field. The discussion of transferring technology between R&D and manufacturing provided in Appendix 1, will be of special interest to the manager or engineer responsible for moving a PVD product and process from R&D into production. Appendix 2 has an extensive listing of periodical publications and professional societies that relate to PVD processing. The extensive Glossary of Terms and Acronyms provided in Appendix 3 will be of particular use to students and to those not fully conversant with the terminology of PVD processing or with the English language.