Download or read book Advances in Rapid Thermal Processing written by Fred Roozeboom and published by The Electrochemical Society. This book was released on 1999 with total page 470 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Rapid Thermal Processing written by Richard B. Fair and published by Academic Press. This book was released on 2012-12-02 with total page 441 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is the first definitive book on rapid thermal processing (RTP), an essential namufacturing technology for single-wafer processing in highly controlled environments. Written and edited by nine experts in the field, this book covers a range of topics for academics and engineers alike, moving from basic theory to advanced technology for wafer manufacturing. The book also provides new information on the suitability or RTP for thin film deposition, junction formation, silicides, epitaxy, and in situ processing. Complete discussions on equipment designs and comparisons between RTP and other processing approaches also make this book useful for supplemental information on silicon processing, VLSI processing, and integrated circuit engineering.
Download or read book Advances in Rapid Thermal and Integrated Processing written by F. Roozeboom and published by Springer Science & Business Media. This book was released on 2013-03-09 with total page 568 pages. Available in PDF, EPUB and Kindle. Book excerpt: Rapid thermal and integrated processing is an emerging single-wafer technology in ULSI semiconductor manufacturing, electrical engineering, applied physics and materials science. Here, the physics and engineering of this technology are discussed at the graduate level. Three interrelated areas are covered. First, the thermophysics of photon-induced annealing of semiconductor and related materials, including fundamental pyrometry and emissivity issues, the modelling of reactor designs and processes, and their relation to temperature uniformity. Second, process integration, treating the advances in basic equipment design, scale-up, integrated cluster-tool equipment, including wafer cleaning and integrated processing. Third, the deposition and processing of thin epitaxial, dielectric and metal films, covering selective deposition and epitaxy, integrated processing of layer stacks, and new areas of potential application, such as the processing of III-V semiconductor structures and thin- film head processing for high-density magnetic data storage.
Download or read book Intelligent Modeling Diagnosis And Control Of Manufacturing Processes written by B-t Chu and published by World Scientific. This book was released on 1992-08-31 with total page 273 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume demonstrates that the key to the modeling, diagnosis and control of the next generation manufacturing processes is to integrate knowledge-based systems with traditional techniques. An up-to-date study is given here of this relatively recent development.The book is for those working primarily with traditional techniques and those working in the knowledge-based systems field. Both sets of readers will find it to be a source of many specific ideas about the integration of knowledge-based systems with traditional techniques, and carrying a wealth of useful references.
Download or read book Rapid Thermal and Other Short time Processing Technologies II written by Dim-Lee Kwong and published by The Electrochemical Society. This book was released on 2001 with total page 458 pages. Available in PDF, EPUB and Kindle. Book excerpt: "Electronics, Dielectric Science and Technology, and High Temperature Materials Divisions."
Download or read book Rapid Thermal and Integrated Processing written by and published by . This book was released on 1996 with total page 416 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Computational Intelligence in Time Series Forecasting written by Ajoy K. Palit and published by Springer Science & Business Media. This book was released on 2006-01-04 with total page 382 pages. Available in PDF, EPUB and Kindle. Book excerpt: Foresight in an engineering business can make the difference between success and failure, and can be vital to the effective control of industrial systems. The authors of this book harness the power of intelligent technologies individually and in combination.
Download or read book Recent Advances in Sliding Modes From Control to Intelligent Mechatronics written by Xinghuo Yu and published by Springer. This book was released on 2015-04-10 with total page 460 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume is dedicated to Professor Okyay Kaynak to commemorate his life time impactful research and scholarly achievements and outstanding services to profession. The 21 invited chapters have been written by leading researchers who, in the past, have had association with Professor Kaynak as either his students and associates or colleagues and collaborators. The focal theme of the volume is the Sliding Modes covering a broad scope of topics from theoretical investigations to their significant applications from Control to Intelligent Mechatronics.
Download or read book Proceedings of the Symposium Om Process Control Diagnostics and Modeling in Semiconductor Manufacturing written by M. Meyyappan and published by The Electrochemical Society. This book was released on 1995 with total page 644 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Radiometric Temperature Measurements written by and published by Academic Press. This book was released on 2009-10-01 with total page 368 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book describes the theory of radiation thermometry, both at a primary level and for a variety of applications, such as in the materials processing industries and remote sensing. This book is written for those who will apply radiation thermometry in industrial practice; use radiation thermometers for scientific research; the radiation thermometry specialist in a national measurement institute; developers of radiation thermometers who are working to innovate products for instrument manufacturers, and developers of non-contact thermometry methods to address challenging thermometry problems. The authors of each chapter were chosen from a group of international scientists who are experts in the field and specialists on the subject matter covered in the chapter. A large number of references are included at the end of each chapter as a resource for those seeking a deeper or more detailed understanding. This book is more than a practice guide, readers will gain in-depth knowledge in: (1) the proper selection of the type of thermometer; (2) the best practice in using the radiation thermometers; (3) awareness of the error sources and subsequent appropriate procedure to reduce the overall uncertainty; and (4) understanding of the calibration chain and its current limitations. - Covers all fundamental aspects of the radiometric measurements - Discusses practical applications with details on the instrumentation, calibration, and error sources - Authors are from leading national labs working in R&D of temperature measurements
Download or read book Optical Diagnostics for Thin Film Processing written by Irving P. Herman and published by Elsevier. This book was released on 1996-10-23 with total page 815 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume describes the increasing role of in situ optical diagnostics in thin film processing for applications ranging from fundamental science studies to process development to control during manufacturing. The key advantage of optical diagnostics in these applications is that they are usually noninvasive and nonintrusive. Optical probes of the surface, film, wafer, and gas above the wafer are described for many processes, including plasma etching, MBE, MOCVD, and rapid thermal processing. For each optical technique, the underlying principles are presented, modes of experimental implementation are described, and applications of the diagnostic in thin film processing are analyzed, with examples drawn from microelectronics and optoelectronics. Special attention is paid to real-time probing of the surface, to the noninvasive measurement of temperature, and to the use of optical probes for process control. Optical Diagnostics for Thin Film Processing is unique. No other volume explores the real-time application of optical techniques in all modes of thin film processing. The text can be used by students and those new to the topic as an introduction and review of the subject. It also serves as a comprehensive resource for engineers, technicians, researchers, and scientists already working in the field. - The only volume that comprehensively explores in situ, real-time, optical probes for all types of thin film processing - Useful as an introduction to the subject or as a resource handbook - Covers a wide range of thin film processes including plasma etching, MBE, MOCVD, and rapid thermal processing - Examples emphasize applications in microelectronics and optoelectronics - Introductory chapter serves as a guide to all optical diagnostics and their applications - Each chapter presents the underlying principles, experimental implementation, and applications for a specific optical diagnostic
Download or read book Temperature Measurement during Millisecond Annealing written by Denise Reichel and published by Springer. This book was released on 2016-01-07 with total page 128 pages. Available in PDF, EPUB and Kindle. Book excerpt: Denise Reichel studies the delicate subject of temperature measurement during lamp-based annealing of semiconductors, in particular during flash lamp annealing. The approach of background-correction using amplitude-modulated light to obtain the sample reflectivity is reinvented from rapid thermal annealing to apply to millisecond annealing. The author presents a new method independent of the lamp operation to obtain this amplitude modulation and derives a formula to describe the process. Further, she investigates the variables of the formula in depth to validate the method’s suitability for background-corrected temperature measurement. The experimental results finally proof its power for elevated temperatures.
Download or read book Rapid Thermal and Integrated Processing VII written by Materials Research Society and published by . This book was released on 1998 with total page 432 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Manufacturing Technology Directorate written by DIANE Publishing Company and published by DIANE Publishing. This book was released on 1998-05 with total page 108 pages. Available in PDF, EPUB and Kindle. Book excerpt: This supplement contains new projects since the publication of the Project Book in Sep. 1995. Potential new starts are summarized on a single page. The summary contains an explanation of the need for the project, the approach taken to accomplish the effort, the benefits expected to be realized, the current status, the name of the project engineer, & performing contractor. Covers: advanced industrial practices, electronics, manufacturing & engineering systems, metals, nonmetals, sustainment, technology development, & Title III. Illsutrated.
Download or read book Mathematical Sciences Technology and Economic Competitiveness written by National Research Council and published by National Academies Press. This book was released on 1991-02-01 with total page 127 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book describes the contributions of mathematics to the nation's advanced technology and to economic competitiveness. Examples from five industriesâ€"aircraft, petroleum, automotive, semiconductor, and telecommunicationsâ€"illustrate how mathematics enters into and improves industry. Mathematical Sciences, Technology, and Economic Competitiveness addresses these high-technology industries and breadth of mathematical endeavors in the United States as they materially contribute to the technology base from which innovation in these industries flows. The book represents a serious attempt by the mathematics community to bring about an awareness by policymakers of the pervasive influence of mathematics in everyday life.
Download or read book Handbook of Semiconductor Manufacturing Technology written by Yoshio Nishi and published by CRC Press. This book was released on 2017-12-19 with total page 1720 pages. Available in PDF, EPUB and Kindle. Book excerpt: Retaining the comprehensive and in-depth approach that cemented the bestselling first edition's place as a standard reference in the field, the Handbook of Semiconductor Manufacturing Technology, Second Edition features new and updated material that keeps it at the vanguard of today's most dynamic and rapidly growing field. Iconic experts Robert Doering and Yoshio Nishi have again assembled a team of the world's leading specialists in every area of semiconductor manufacturing to provide the most reliable, authoritative, and industry-leading information available. Stay Current with the Latest Technologies In addition to updates to nearly every existing chapter, this edition features five entirely new contributions on... Silicon-on-insulator (SOI) materials and devices Supercritical CO2 in semiconductor cleaning Low-κ dielectrics Atomic-layer deposition Damascene copper electroplating Effects of terrestrial radiation on integrated circuits (ICs) Reflecting rapid progress in many areas, several chapters were heavily revised and updated, and in some cases, rewritten to reflect rapid advances in such areas as interconnect technologies, gate dielectrics, photomask fabrication, IC packaging, and 300 mm wafer fabrication. While no book can be up-to-the-minute with the advances in the semiconductor field, the Handbook of Semiconductor Manufacturing Technology keeps the most important data, methods, tools, and techniques close at hand.
Download or read book CRC Handbook of Thermal Engineering written by Frank Kreith and published by CRC Press. This book was released on 1999-12-27 with total page 1204 pages. Available in PDF, EPUB and Kindle. Book excerpt: To be successful in the international marketplace, corporations must have access to the latest developments and most recent experimental data. Traditional handbooks of heat transfer stress fundamental principles, analytical approaches to thermal problems, and elegant solutions to classical problems. The CRC Handbook of Thermal Engineering is not a traditional handbook. Engineers in industry need up-to-date, accessible information on the applications of heat and mass transfer-The CRC Handbook of Thermal Engineering provides it. Peer reviewed articles-selected on the basis of their current relevance to the development of new products-provide in-depth treatment of applications in diverse fields, such as: Bioengineering Desalination Electronics Energy conservation Food processing Measurement techniques in fluid flow and heat transfer You'll find complete, up-to-date information on the latest development in the field, including: Recent advances in thermal sciences Microthermal design Compact heat exchangers Thermal optimization Exergy analysis A unique, one-stop resource for all your thermal engineering questions From the basics of thermodynamics, fluid mechanics, and heat and mass transfer, to comprehensive treatment of current applications, the latest computational tools, to data tables for the properties of gases, liquids, and solids, The CRC Handbook of Thermal Engineering has it all!
