Download or read book Resonant MEMS written by Oliver Brand and published by John Wiley & Sons. This book was released on 2015-04-22 with total page 512 pages. Available in PDF, EPUB and Kindle. Book excerpt: Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.
Download or read book Whole Angle MEMS Gyroscopes written by Doruk Senkal and published by John Wiley & Sons. This book was released on 2020-05-11 with total page 172 pages. Available in PDF, EPUB and Kindle. Book excerpt: Presents the mathematical framework, technical language, and control systems know-how needed to design, develop, and instrument micro-scale whole-angle gyroscopes This comprehensive reference covers the technical fundamentals, mathematical framework, and common control strategies for degenerate mode gyroscopes, which are used in high-precision navigation applications. It explores various energy loss mechanisms and the effect of structural imperfections, along with requirements for continuous rate integrating gyroscope operation. It also provides information on the fabrication of MEMS whole-angle gyroscopes and the best methods of sustaining oscillations. Whole-Angle Gyroscopes: Challenges and Opportunities begins with a brief overview of the two main types of Coriolis Vibratory Gyroscopes (CVGs): non-degenerate mode gyroscopes and degenerate mode gyroscopes. It then introduces readers to the Foucault Pendulum analogy and a review of MEMS whole angle mode gyroscope development. Chapters cover: dynamics of whole-angle coriolis vibratory gyroscopes; fabrication of whole-angle coriolis vibratory gyroscopes; energy loss mechanisms of coriolis vibratory gyroscopes; and control strategies for whole-angle coriolis vibratory gyro- scopes. The book finishes with a chapter on conventionally machined micro-machined gyroscopes, followed by one on micro-wineglass gyroscopes. In addition, the book: Lowers barrier to entry for aspiring scientists and engineers by providing a solid understanding of the fundamentals and control strategies of degenerate mode gyroscopes Organizes mode-matched mechanical gyroscopes based on three classifications: wine-glass, ring/disk, and mass spring mechanical elements Includes case studies on conventionally micro-machined and 3-D micro-machined gyroscopes Whole-Angle Gyroscopes is an ideal book for researchers, scientists, engineers, and college/graduate students involved in the technology. It will also be of great benefit to engineers in control systems, MEMS production, electronics, and semi-conductors who work with inertial sensors.
Download or read book Advances on Mechanics Design Engineering and Manufacturing written by Benoit Eynard and published by Springer. This book was released on 2016-09-02 with total page 1208 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book gathers papers presented at the International Joint Conference on Mechanics, Design Engineering and Advanced Manufacturing (JCM 2016), held on 14-16 September, 2016, in Catania, Italy. It reports on cutting-edge topics in product design and manufacturing, such as industrial methods for integrated product and process design; innovative design; and computer-aided design. Further topics covered include virtual simulation and reverse engineering; additive manufacturing; product manufacturing; engineering methods in medicine and education; representation techniques; and nautical, aeronautics and aerospace design and modeling. The book is divided into eight main sections, reflecting the focus and primary themes of the conference. The contributions presented here will not only provide researchers, engineers and experts in a range of industrial engineering subfields with extensive information to support their daily work; they are also intended to stimulate new research directions, advanced applications of the methods discussed, and future interdisciplinary collaborations.
Download or read book Dual Mass Linear Vibration Silicon Based MEMS Gyroscope written by Huiliang Cao and published by Springer Nature. This book was released on 2023-04-17 with total page 231 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book introduces the key technologies in the manufacture of double-mass line vibrating silicon micromechanical gyroscope, respectively. The design of gyrostructure, detection technology, orthogonal correction technology, the influence of temperature and the design of measurement and control system framework are introduced in detail, with illustrations for easy understanding. It presents the principle, structure and related technology of silicon-based MEMS gyroscope. The content enlightens the researchers of silicon-based MEMS gyroscopes and gives readers a new understanding of the structural design of silicon-based gyroscopes and the design of dual-mass gyroscopes.
Download or read book Resonant MEMS written by Oliver Brand and published by John Wiley & Sons. This book was released on 2015-04-28 with total page 512 pages. Available in PDF, EPUB and Kindle. Book excerpt: Part of the AMN book series, this book covers the principles, modeling and implementation as well as applications of resonant MEMS from a unified viewpoint. It starts out with the fundamental equations and phenomena that govern the behavior of resonant MEMS and then gives a detailed overview of their implementation in capacitive, piezoelectric, thermal and organic devices, complemented by chapters addressing the packaging of the devices and their stability. The last part of the book is devoted to the cutting-edge applications of resonant MEMS such as inertial, chemical and biosensors, fluid properties sensors, timing devices and energy harvesting systems.
Download or read book Mechanical Analysis and Design of Vibratory Micromachined Gyroscopes written by Wyatt Owen Davis and published by . This book was released on 2001 with total page 340 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Inertial MEMS written by Volker Kempe and published by Cambridge University Press. This book was released on 2011-02-17 with total page 497 pages. Available in PDF, EPUB and Kindle. Book excerpt: A practical and systematic overview of the design, fabrication and test of MEMS-based inertial sensors, this comprehensive and rigorous guide shows you how to analyze and transform application requirements into practical designs, and helps you to avoid potential pitfalls and to cut design time. With this book you'll soon be up to speed on the relevant basics, including MEMS technologies, packaging, kinematics and mechanics, and transducers. You'll also get a thorough evaluation of different approaches and architectures for design and an overview of key aspects of testing and calibration. Unique insights into the practical difficulties of making sensors for real-world applications make this up-to-date description of the state of the art in inertial MEMS an ideal resource for professional engineers in industry as well as students looking for a complete introduction to the area.
Download or read book Recent Advances in Applied Mechanics written by Tezeswi Tadepalli and published by Springer Nature. This book was released on 2022-04-04 with total page 743 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book comprises the proceedings of the Virtual Seminar on Applied Mechanics 2021 organized by the Indian Society for Applied Mechanics. The contents of this volume focus on solid mechanics, fluid mechanics, biomechanics/biomedical engineering, materials science and design engineering. The authors are experienced practitioners and the chapters encompass up-to-date research in the field of applied mechanics. This book will appeal to researchers and scholars across the broad spectrum of engineering involving the application of mechanics in civil, mechanical, aerospace, automobile, bio-medical, material science, and more.
Download or read book Microactuators Microsensors and Micromechanisms written by Ashok Kumar Pandey and published by Springer Nature. This book was released on 2022-11-20 with total page 379 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book brings together investigations which combine theoretical and experimental results related to such systems as flexure hinges and compliant mechanisms for precision applications, the non-linear analytical modeling of compliant mechanisms, mechanical systems using compliance as a bipedal robot and reconfigurable tensegrity systems and micro-electro-mechanical systems (MEMS) as energy efficient micro-robots, microscale force compensation, magnetoelectric micro-sensors, acoustical actuators and the wafer bonding as a key technology for the MEMS fabrication. The volume gathers the contributions presented at the 6th Conference on Microactuators, Microsensors and Micromechanisms (MAMM), held in Hyderabad, India in December 2022. The aim of the conference was to provide a special opportunity for a know-how exchange and collaboration in various disciplines concerning systems pertaining to micro-technology. The conference was organized under the patronage of IFToMM (International Federation for the Promotion of Mechanism and Machine Science).
Download or read book Silicon Sensors and Actuators written by Benedetto Vigna and published by Springer Nature. This book was released on 2022-04-12 with total page 988 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book thoroughly reviews the present knowledge on silicon micromechanical transducers and addresses emerging and future technology challenges. Readers will acquire a solid theoretical and practical background that will allow them to analyze the key performance aspects of devices, critically judge a fabrication process, and then conceive and design new ones for future applications. Envisioning a future complex versatile microsystem, the authors take inspiration from Richard Feynman’s visionary talk “There is Plenty of Room at the Bottom” to propose that the time has come to see silicon sensors as part of a “Feynman Roadmap” instead of the “More-than-Moore” technology roadmap. The sharing of the author’s industrially proven track record of development, design, and manufacturing, along with their visionary approach to the technology, will allow readers to jump ahead in their understanding of the core of the topic in a very effective way. Students, researchers, engineers, and technologists involved in silicon-based sensor and actuator research and development will find a wealth of useful and groundbreaking information in this book.
Download or read book Vibration Engineering and Technology of Machinery written by Jyoti K. Sinha and published by Springer. This book was released on 2014-08-14 with total page 1110 pages. Available in PDF, EPUB and Kindle. Book excerpt: The VETOMAC-X Conference covered a holistic plethora of relevant topics in vibration and engineering technology including condition monitoring, machinery and structural dynamics, rotor dynamics, experimental techniques, finite element model updating, industrial case studies, vibration control and energy harvesting, and signal processing. These proceedings contain not only all of the nearly one-hundred peer-reviewed presentations from authors representing more than twenty countries, but also include six invited lectures from renowned experts: Professor K. Gupta, Mr W. Hahn, Professor A.W. Lees, Professor John Mottershead, Professor J.S. Rao, and Dr P. Russhard. This work is of interest to researchers and practitioners alike, and is an essential book for most of libraries of higher academic institutes.
Download or read book Journal of Micro nanolithography MEMS and MOEMS written by and published by . This book was released on 2008 with total page 688 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Vibrations and Waves in Continuous Mechanical Systems written by Peter Hagedorn and published by John Wiley & Sons. This book was released on 2007-10-22 with total page 396 pages. Available in PDF, EPUB and Kindle. Book excerpt: The subject of vibrations is of fundamental importance in engineering and technology. Discrete modelling is sufficient to understand the dynamics of many vibrating systems; however a large number of vibration phenomena are far more easily understood when modelled as continuous systems. The theory of vibrations in continuous systems is crucial to the understanding of engineering problems in areas as diverse as automotive brakes, overhead transmission lines, liquid filled tanks, ultrasonic testing or room acoustics. Starting from an elementary level, Vibrations and Waves in Continuous Mechanical Systems helps develop a comprehensive understanding of the theory of these systems and the tools with which to analyse them, before progressing to more advanced topics. Presents dynamics and analysis techniques for a wide range of continuous systems including strings, bars, beams, membranes, plates, fluids and elastic bodies in one, two and three dimensions. Covers special topics such as the interaction of discrete and continuous systems, vibrations in translating media, and sound emission from vibrating surfaces, among others. Develops the reader’s understanding by progressing from very simple results to more complex analysis without skipping the key steps in the derivations. Offers a number of new topics and exercises that form essential steppingstones to the present level of research in the field. Includes exercises at the end of the chapters based on both the academic and practical experience of the authors. Vibrations and Waves in Continuous Mechanical Systems provides a first course on the vibrations of continuous systems that will be suitable for students of continuous system dynamics, at senior undergraduate and graduate levels, in mechanical, civil and aerospace engineering. It will also appeal to researchers developing theory and analysis within the field.
Download or read book Scaling Issues and Design of MEMS written by Salvatore Baglio and published by John Wiley & Sons. This book was released on 2008-07-31 with total page 244 pages. Available in PDF, EPUB and Kindle. Book excerpt: This accessible volume delivers a complete design methodology for microelectromechanical systems (MEMS). Focusing on the scaling of an autonomous micro-system, it explains the real-world problems and theoretical concepts of several different aspects inherent to the miniaturization of sensors and actuators. It reports on the analysis of dimensional scaling, the modelling, design and experimental characterization of a wide range of specific devices and applications, including: temperature microsensors based on an integrated complementary metal-oxide-semiconductor (CMOS) thermocouple; mechanical sensors; inductive microsensors for the detection of magnetic particles; electrostatic, thermal and magnetic actuators. With an original approach, this informative text encompasses the entire range of themes currently at the forefront of MEMS, including an analysis of the importantissue of energy sources in MEMS. In addition, the book explores contemporary research into the design of complete MEMS with a case study on colonies of microbots. Scaling Issues and Design of MEMS aims to improve the reader’s basic knowledge on modelling issues of complex micro devices, and to encourage new thinking about scaling effects. It will provide support for practising engineers working within the defence industry and will also be of welcome interest to graduate students and researchers with a background in electronic engineering, physics, chemistry, biology and materials science.
Download or read book Strapdown Inertial Navigation Technology written by David Titterton and published by IET. This book was released on 2004 with total page 578 pages. Available in PDF, EPUB and Kindle. Book excerpt: Inertial navigation is widely used for the guidance of aircraft, missiles ships and land vehicles, as well as in a number of novel applications such as surveying underground pipelines in drilling operations. This book discusses the physical principles of inertial navigation, the associated growth of errors and their compensation. It draws current technological developments, provides an indication of potential future trends and covers a broad range of applications. New chapters on MEMS (microelectromechanical systems) technology and inertial system applications are included.
Download or read book Optimal Synthesis Methods for MEMS written by S.G.K. Ananthasuresh and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 326 pages. Available in PDF, EPUB and Kindle. Book excerpt: The field of "microelectromechanical systems," or "MEMS," has gradually evolved from a "discipline" populated by a small group of researchers to an "enabling technology" supporting a variety of products in such diverse areas as mechanical and inertial sensors, optical projection displays, telecommunications equipment, and biology and medicine. Critical to the success of these products is the ability to design them, and this invariably involves detailed modeling of proposed designs. Over the past twenty years, such modeling has become increasingly sophisticated, with full suites of MEMS-oriented computer-aided-design tools now available worldwide. But there is another equally important side to the design process In my own book, Microsystem figuring out what to build in the first place. Design, I chose to emphasize the modeling aspect of design. The task of figuring out what to build was defined by a vague step called "creative thinking." I used practical product examples to illustrate the many subtle characteristics of successful designs, but I made no attempt to systematize the generation ofdesign proposals or optimized designs. That systemization is called "synthesis," which is the subjectofthis book.
Download or read book Reliability of MEMS written by Osamu Tabata and published by John Wiley & Sons. This book was released on 2008-02-04 with total page 328 pages. Available in PDF, EPUB and Kindle. Book excerpt: This first book to cover exclusively and in detail the principles, tools and methods for determining the reliability of microelectromechanical materials, components and devices covers both component materials as well as entire MEMS devices. Divided into two major parts, following a general introductory chapter to reliability issues, the first part looks at the mechanical properties of the materials used in MEMS, explaining in detail the necessary measuring technologies -- nanoindenters, bulge methods, bending tests, tensile tests, and others. Part Two treats the actual devices, organized by important device categories such as pressure sensors, inertial sensors, RF MEMS, and optical MEMS.
