Download or read book Microwave Discharges written by Carlos M. Ferreira and published by Springer Science & Business Media. This book was released on 2013-11-21 with total page 556 pages. Available in PDF, EPUB and Kindle. Book excerpt: Proceedings of a NATO ARW held in Vimeiro, Portugal, May 11-15, 1992
Download or read book Microwave Discharges Fundamentals and Applications MD 8 written by V. A. Ivanov and published by . This book was released on 2012 with total page 95 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Microwave Discharges Fundamentals and Applications written by C. Boisse-Laport and published by . This book was released on 1998 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book 3rd International Workshop Microwave Discharges Fundamentals and Applications written by Caroline Boisse-Laporte and published by . This book was released on 1998 with total page 444 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book 4TH International Workshop Microwave Discharges Fundamentals and Applications written by and published by . This book was released on 2000 with total page 294 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Final Proceedings for Fourth International Workshop on Microwave Discharges: Fundamental and Applications, 18 September 2000 - 22 September 2000. This is an interdisciplinary conference. Topics include: Methods of microwave plasma generation; High and low pressure microwave discharges; Continuous wave and pulsed microwave discharges; Interaction of microwaves with a plasma; Discharge modeling and diagnostics; Applications of microwave plasma (surface treatment etching, film deposition, growth of structures, light sources, analytical chemistry, etc.); and selected topics of closely-related gas discharges problems.
Download or read book Microwave Discharges Fundamentals and Applications written by and published by . This book was released on with total page 222 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Microwave Discharges written by 正士·神藤 and published by . This book was released on 2009 with total page 242 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Microwave Plasma Sources and Methods in Processing Technology written by Hana Barankova and published by John Wiley & Sons. This book was released on 2022-01-31 with total page 208 pages. Available in PDF, EPUB and Kindle. Book excerpt: A practical introduction to microwave plasma for processing applications at a variety of pressures In Microwave Plasma Sources and Methods in Processing Technology, the authors deliver a comprehensive introduction to microwaves and microwave-generated plasmas. Ideal for anyone interested in non-thermal gas discharge plasmas and their applications, the book includes detailed descriptions, explanations, and practical guidance for the study and use of microwave power, microwave components, plasma, and plasma generation. This reference includes over 130 full-color diagrams to illustrate the concepts discussed within. The distinguished authors discuss the plasmas generated at different levels of power, as well as their applications at reduced, atmospheric and higher pressures. They also describe plasmas inside liquids and plasma interactions with combustion flames. Microwave Plasma Sources and Methods in Processing Technology concludes with an incisive exploration of new trends in the study and application of microwave discharges, offering promising new areas of study. The book also includes: • A thorough introduction to the basic principles of microwave techniques and power systems, including a history of the technology, microwave generators, waveguides, and wave propagation • A comprehensive exploration of the fundamentals of the physics of gas discharge plasmas, including plasma generation, Townsend coefficients, and the Paschen curve • Practical discussions of the interaction between plasmas and solid surfaces and gases, including PVD, PE CVD, oxidation, sputtering, evaporation, dry etching, surface activation, and cleaning • In-depth examinations of microwave plasma systems for plasma processing at varied parameters Perfect for researchers and engineers in the microwave community, as well as those who work with plasma applications, Microwave Plasma Sources and Methods in Processing Technology will also earn a place in the libraries of graduate and PhD students studying engineering physics, microwave engineering, and plasmas.
Download or read book IV International Workshop Microwave Discharges written by I︠U︡riĭ Anatolʹevich Lebedev and published by . This book was released on 2001 with total page 299 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book 3rd International Workshop Microwave Discharges Fundamentals and Applications written by and published by . This book was released on 1998 with total page 420 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Plasma Etching written by M. Sugawara and published by OUP Oxford. This book was released on 1998-05-28 with total page 362 pages. Available in PDF, EPUB and Kindle. Book excerpt: The focus of this book is the remarkable advances in understanding of low pressure RF (radio frequency) glow discharges. A basic analytical theory and plasma physics are explained. Plasma diagnostics are also covered before the practicalities of etcher use are explored.
Download or read book Microwave Induced Plasma Analytical Spectrometry written by Krzysztof J. Jankowski and published by Royal Society of Chemistry. This book was released on 2011 with total page 263 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is the most comprehensive publication on MWP technology and MWP-OES analytical spectrometry with an emphasis on practical issues.
Download or read book Microwave Discharges written by Yu A. Lebedev and published by Wexford College Press. This book was released on 2007-12 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Specialists in different areas of microwave plasma physics, technique, and plasma processing cover all problems of theory, experiments, and applications of microwave discharges, and yield the state-of-the-art trends.
Download or read book Physics of Microwave Discharges written by A Gurevich and published by Routledge. This book was released on 2018-12-19 with total page 189 pages. Available in PDF, EPUB and Kindle. Book excerpt: A comprehensive and unique account of the creation of artificially ionized layers in the middle and upper atmosphere, using powerful radio waves. Major physical mechanisms associated with the formation of the ionized region are studied in detail. The main part of the author's research is devoted to problems associated with the breakdown mechanisms for radio frequency discharges in air. A special chapter deals with breakdown in intersecting pulsed beams and the effects of recombination, diffusion and atmospheric winds on the stability of the structure. The kinetics of the plasma produced are also described. The authors examine possibilities of inducing changes in the chemical composition of the upper atmosphere by means of radio frequence heating, with promising effects on the concentration of constituents such as ozone. The feasibility of using this phenomenon for; ozone healing - in connection with the ozone holes in the polar regions is investigated. The text is a timely treatment of key topics in the field of ionospheric modification.
Download or read book Electron Kinetics and Applications of Glow Discharges written by Uwe Kortshagen and published by Springer. This book was released on 2006-04-11 with total page 553 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book resulted from the NATO Advanced Research Workshop on “Electron Kinetics and Applications of Glow Discharges,” held in St. Petersburg, Russia, on May 19-23, 1997. Glow discharges have found widespread applications in many technological processes from the manufacture of semiconductors, to recent developments in na- technology, to the traditional fields of gas lasers, and discharge lamps. Consequently, the interest in the physics of glow discharges has experienced yet another resurgence of interest. While the non-equilibrium character of glow discharges is widely accepted, the opinion still prevails that the main features can be captured by fluid models, and that kinetic treatments are only required for the understanding of subtle details. The erroneousness of this belief is demonstrated by the failure of fluid models to describe many basic features of glow discharges such as, for instance, electrode phenomena, striations, and collisionless heating effects. An adequate description of glow discharges thus has to be of kinetic nature.
Download or read book Advanced Technologies Based on Wave and Beam Generated Plasmas written by H. Schlüter and published by Springer Science & Business Media. This book was released on 2013-06-29 with total page 580 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book draws together three areas of work on plasma technologies: advanced efforts based on wave generated, high frequency plasmas, plasma assisted ion implantation, and electron beam generated plasma. It lays a foundation for the application of sources in industry and various research areas
Download or read book Guided Wave Produced Plasmas written by Yu. M. Aliev and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 312 pages. Available in PDF, EPUB and Kindle. Book excerpt: Guided-Wave-Produced Plasmas provides an up-to-date report on the physics of plasmas produced by the high-frequency electromagnetic fields of guided waves. The modelling of discharges generated by travelling surface waves is presented using a unified approach based on modern aspects of nonlinear plasma theory. Diagnostic methods needed for research and the main experimental results on plasma behaviour are covered in detail. The methods and ideas presented are liekly to lead to a wide variety of applications in plasma technology.