Download or read book MEMS Accelerometers written by Mahmoud Rasras and published by MDPI. This book was released on 2019-05-27 with total page 252 pages. Available in PDF, EPUB and Kindle. Book excerpt: Micro-electro-mechanical system (MEMS) devices are widely used for inertia, pressure, and ultrasound sensing applications. Research on integrated MEMS technology has undergone extensive development driven by the requirements of a compact footprint, low cost, and increased functionality. Accelerometers are among the most widely used sensors implemented in MEMS technology. MEMS accelerometers are showing a growing presence in almost all industries ranging from automotive to medical. A traditional MEMS accelerometer employs a proof mass suspended to springs, which displaces in response to an external acceleration. A single proof mass can be used for one- or multi-axis sensing. A variety of transduction mechanisms have been used to detect the displacement. They include capacitive, piezoelectric, thermal, tunneling, and optical mechanisms. Capacitive accelerometers are widely used due to their DC measurement interface, thermal stability, reliability, and low cost. However, they are sensitive to electromagnetic field interferences and have poor performance for high-end applications (e.g., precise attitude control for the satellite). Over the past three decades, steady progress has been made in the area of optical accelerometers for high-performance and high-sensitivity applications but several challenges are still to be tackled by researchers and engineers to fully realize opto-mechanical accelerometers, such as chip-scale integration, scaling, low bandwidth, etc. This Special Issue on "MEMS Accelerometers" seeks to highlight research papers, short communications, and review articles that focus on: Novel designs, fabrication platforms, characterization, optimization, and modeling of MEMS accelerometers. Alternative transduction techniques with special emphasis on opto-mechanical sensing. Novel applications employing MEMS accelerometers for consumer electronics, industries, medicine, entertainment, navigation, etc. Multi-physics design tools and methodologies, including MEMS-electronics co-design. Novel accelerometer technologies and 9DoF IMU integration. Multi-accelerometer platforms and their data fusion.

Download or read book MEMS Silicon Oscillating Accelerometers and Readout Circuits written by Xu, Yong Ping and published by River Publishers. This book was released on 2019-02-12 with total page 312 pages. Available in PDF, EPUB and Kindle. Book excerpt: Most MEMS accelerometers on the market today are capacitive accelerometers that are based on the displacement sensing mechanism. This book is intended to cover recent developments of MEMS silicon oscillating accelerometers (SOA), also referred to as MEMS resonant accelerometer. As contrast to the capacitive accelerometer, the MEMS SOA is based on the force sensing mechanism, where the input acceleration is converted to a frequency output. MEMS Silicon Oscillating Accelerometers and Readout Circuits consists of six chapters and covers both MEMS sensor and readout circuit, and provides an in-depth coverage on the design and modelling of the MEMS SOA with several recently reported prototypes. The book is not only useful to researchers and engineers who are familiar with the topic, but also appeals to those who have general interests in MEMS inertial sensors. The book includes extensive references that provide further information on this topic.

Download or read book Microelectromechanical Systems written by National Research Council and published by National Academies Press. This book was released on 1998-01-01 with total page 76 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microelectromenchanical systems (MEMS) is a revolutionary field that adapts for new uses a technology already optimized to accomplish a specific set of objectives. The silicon-based integrated circuits process is so highly refined it can produce millions of electrical elements on a single chip and define their critical dimensions to tolerances of 100-billionths of a meter. The MEMS revolution harnesses the integrated circuitry know-how to build working microsystems from micromechanical and microelectronic elements. MEMS is a multidisciplinary field involving challenges and opportunites for electrical, mechanical, chemical, and biomedical engineering as well as physics, biology, and chemistry. As MEMS begin to permeate more and more industrial procedures, society as a whole will be strongly affected because MEMS provide a new design technology that could rivalâ€"perhaps surpassâ€"the societal impact of integrated circuits.

Download or read book Inertial MEMS written by Volker Kempe and published by Cambridge University Press. This book was released on 2011-02-17 with total page 497 pages. Available in PDF, EPUB and Kindle. Book excerpt: A practical and systematic overview of the design, fabrication and test of MEMS-based inertial sensors, this comprehensive and rigorous guide shows you how to analyze and transform application requirements into practical designs, and helps you to avoid potential pitfalls and to cut design time. With this book you'll soon be up to speed on the relevant basics, including MEMS technologies, packaging, kinematics and mechanics, and transducers. You'll also get a thorough evaluation of different approaches and architectures for design and an overview of key aspects of testing and calibration. Unique insights into the practical difficulties of making sensors for real-world applications make this up-to-date description of the state of the art in inertial MEMS an ideal resource for professional engineers in industry as well as students looking for a complete introduction to the area.

Download or read book Position Navigation and Timing Technologies in the 21st Century written by Y. Jade Morton and published by John Wiley & Sons. This book was released on 2021-01-13 with total page 902 pages. Available in PDF, EPUB and Kindle. Book excerpt: Covers the latest developments in PNT technologies, including integrated satellite navigation, sensor systems, and civil applications Featuring sixty-four chapters that are divided into six parts, this two-volume work provides comprehensive coverage of the state-of-the-art in satellite-based position, navigation, and timing (PNT) technologies and civilian applications. It also examines alternative navigation technologies based on other signals-of-opportunity and sensors and offers a comprehensive treatment on integrated PNT systems for consumer and commercial applications. Volume 1 of Position, Navigation, and Timing Technologies in the 21st Century: Integrated Satellite Navigation, Sensor Systems, and Civil Applications contains three parts and focuses on the satellite navigation systems, technologies, and engineering and scientific applications. It starts with a historical perspective of GPS development and other related PNT development. Current global and regional navigation satellite systems (GNSS and RNSS), their inter-operability, signal quality monitoring, satellite orbit and time synchronization, and ground- and satellite-based augmentation systems are examined. Recent progresses in satellite navigation receiver technologies and challenges for operations in multipath-rich urban environment, in handling spoofing and interference, and in ensuring PNT integrity are addressed. A section on satellite navigation for engineering and scientific applications finishes off the volume. Volume 2 of Position, Navigation, and Timing Technologies in the 21st Century: Integrated Satellite Navigation, Sensor Systems, and Civil Applications consists of three parts and addresses PNT using alternative signals and sensors and integrated PNT technologies for consumer and commercial applications. It looks at PNT using various radio signals-of-opportunity, atomic clock, optical, laser, magnetic field, celestial, MEMS and inertial sensors, as well as the concept of navigation from Low-Earth Orbiting (LEO) satellites. GNSS-INS integration, neuroscience of navigation, and animal navigation are also covered. The volume finishes off with a collection of work on contemporary PNT applications such as survey and mobile mapping, precision agriculture, wearable systems, automated driving, train control, commercial unmanned aircraft systems, aviation, and navigation in the unique Arctic environment. In addition, this text: Serves as a complete reference and handbook for professionals and students interested in the broad range of PNT subjects Includes chapters that focus on the latest developments in GNSS and other navigation sensors, techniques, and applications Illustrates interconnecting relationships between various types of technologies in order to assure more protected, tough, and accurate PNT Position, Navigation, and Timing Technologies in the 21st Century: Integrated Satellite Navigation, Sensor Systems, and Civil Applications will appeal to all industry professionals, researchers, and academics involved with the science, engineering, and applications of position, navigation, and timing technologies. pnt21book.com

Download or read book MEMS Accelerometers written by Ibrahim (Abe) M. Elfadel and published by . This book was released on 2019 with total page 1 pages. Available in PDF, EPUB and Kindle. Book excerpt: Micro-electro-mechanical system (MEMS) devices are widely used for inertia, pressure, and ultrasound sensing applications. Research on integrated MEMS technology has undergone extensive development driven by the requirements of a compact footprint, low cost, and increased functionality. Accelerometers are among the most widely used sensors implemented in MEMS technology. MEMS accelerometers are showing a growing presence in almost all industries ranging from automotive to medical. A traditional MEMS accelerometer employs a proof mass suspended to springs, which displaces in response to an external acceleration. A single proof mass can be used for one- or multi-axis sensing. A variety of transduction mechanisms have been used to detect the displacement. They include capacitive, piezoelectric, thermal, tunneling, and optical mechanisms. Capacitive accelerometers are widely used due to their DC measurement interface, thermal stability, reliability, and low cost. However, they are sensitive to electromagnetic field interferences and have poor performance for high-end applications (e.g., precise attitude control for the satellite). Over the past three decades, steady progress has been made in the area of optical accelerometers for high-performance and high-sensitivity applications but several challenges are still to be tackled by researchers and engineers to fully realize opto-mechanical accelerometers, such as chip-scale integration, scaling, low bandwidth, etc. This Special Issue on "MEMS Accelerometers" seeks to highlight research papers, short communications, and review articles that focus on: Novel designs, fabrication platforms, characterization, optimization, and modeling of MEMS accelerometers. Alternative transduction techniques with special emphasis on opto-mechanical sensing. Novel applications employing MEMS accelerometers for consumer electronics, industries, medicine, entertainment, navigation, etc. Multi-physics design tools and methodologies, including MEMS-electronics co-design. Novel accelerometer technologies and 9DoF IMU integration. Multi-accelerometer platforms and their data fusion.

Download or read book Recent Advances in Mechatronics written by Ryszard Jablonski and published by Springer Science & Business Media. This book was released on 2007-09-19 with total page 709 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents recent state of advances in mechatronics presented on the 7th International Conference Mechatronics 2007, hosted at the Faculty of Mechatronics, Warsaw University of Technology, Poland. The selected papers give an overview of the state-of-the-art and present new research results and prospects of the future development in this interdisciplinary field of mechatronic systems.

Download or read book Strapdown Inertial Navigation Technology written by David Titterton and published by IET. This book was released on 2004 with total page 578 pages. Available in PDF, EPUB and Kindle. Book excerpt: Inertial navigation is widely used for the guidance of aircraft, missiles ships and land vehicles, as well as in a number of novel applications such as surveying underground pipelines in drilling operations. This book discusses the physical principles of inertial navigation, the associated growth of errors and their compensation. It draws current technological developments, provides an indication of potential future trends and covers a broad range of applications. New chapters on MEMS (microelectromechanical systems) technology and inertial system applications are included.

Download or read book Dynamics of Civil Structures Volume 2 written by Kirk Grimmelsman and published by Springer Nature. This book was released on 2021-10-22 with total page 157 pages. Available in PDF, EPUB and Kindle. Book excerpt: Dynamics of Civil Structures, Volume 2: Proceedings of the 39th IMAC, A Conference and Exposition on Structural Dynamics, 2021, the second volume of nine from the Conference brings together contributions to this important area of research and engineering. The collection presents early findings and case studies on fundamental and applied aspects of the Dynamics of Civil Structures, including papers on: Structural Vibration Humans & Structures Innovative Measurement for Structural Applications Smart Structures and Automation Modal Identification of Structural Systems Bridges and Novel Vibration Analysis Sensors and Control

Download or read book Novel Algorithms and Techniques in Telecommunications Automation and Industrial Electronics written by Tarek Sobh and published by Springer Science & Business Media. This book was released on 2008-08-15 with total page 597 pages. Available in PDF, EPUB and Kindle. Book excerpt: Novel Algorithms and Techniques in Telecommunications, Automation and Industrial Electronics includes a set of rigorously reviewed world-class manuscripts addressing and detailing state-of-the-art research projects in the areas of Industrial Electronics, Technology and Automation, Telecommunications and Networking. Novel Algorithms and Techniques in Telecommunications, Automation and Industrial Electronics includes selected papers form the conference proceedings of the International Conference on Industrial Electronics, Technology and Automation (IETA 2007) and International Conference on Telecommunications and Networking (TeNe 07) which were part of the International Joint Conferences on Computer, Information and Systems Sciences and Engineering (CISSE 2007).

Download or read book New Trends in Networking Computing E learning Systems Sciences and Engineering written by Khaled Elleithy and published by Springer. This book was released on 2014-11-27 with total page 619 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book includes a set of rigorously reviewed world-class manuscripts addressing and detailing state-of-the-art research projects in the areas of Computer Science, Informatics, and Systems Sciences, and Engineering. It includes selected papers form the conference proceedings of the Ninth International Joint Conferences on Computer, Information, and Systems Sciences, and Engineering (CISSE 2013). Coverage includes topics in: Industrial Electronics, Technology & Automation, Telecommunications and Networking, Systems, Computing Sciences and Software Engineering, Engineering Education, Instructional Technology, Assessment, and E-learning. • Provides the latest in a series of books growing out of the International Joint Conferences on Computer, Information, and Systems Sciences, and Engineering; • Includes chapters in the most advanced areas of Computing, Informatics, Systems Sciences, and Engineering; • Accessible to a wide range of readership, including professors, researchers, practitioners and students.

Download or read book Special Topics in Structural Dynamics Volume 6 written by Randall Allemang and published by Springer. This book was released on 2015-04-20 with total page 207 pages. Available in PDF, EPUB and Kindle. Book excerpt: Special Topics in Structural Dynamics, Volume 6: Proceedings of the 33rd IMAC, A Conference and Exposition on Structural Dynamics, 2015, the sixth volume of ten from the Conference brings together contributions to this important area of research and engineering. The collection presents early findings and case studies on fundamental and applied aspects of Structural Dynamics, including papers on: Aircraft/Aerospace Active Control Analytical Methods System Identification Sensors and Instrumentation

Download or read book Packaging of MEMS Based Accelerometers written by Gregory J. Balet and published by . This book was released on 2000 with total page 76 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Handbook of Silicon Based MEMS Materials and Technologies written by Markku Tilli and published by Elsevier. This book was released on 2020-04-17 with total page 1028 pages. Available in PDF, EPUB and Kindle. Book excerpt: Handbook of Silicon Based MEMS Materials and Technologies, Third Edition is a comprehensive guide to MEMS materials, technologies, and manufacturing with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, modeling, manufacturing, processing, system integration, measurement, and materials characterization techniques of MEMS structures. The third edition of this book provides an important up-to-date overview of the current and emerging technologies in MEMS making it a key reference for MEMS professionals, engineers, and researchers alike, and at the same time an essential education material for undergraduate and graduate students. Provides comprehensive overview of leading-edge MEMS manufacturing technologies through the supply chain from silicon ingot growth to device fabrication and integration with sensor/actuator controlling circuits Explains the properties, manufacturing, processing, measuring and modeling methods of MEMS structures Reviews the current and future options for hermetic encapsulation and introduces how to utilize wafer level packaging and 3D integration technologies for package cost reduction and performance improvements Geared towards practical applications presenting several modern MEMS devices including inertial sensors, microphones, pressure sensors and micromirrors

Download or read book Practical MEMS written by Ville Kaajakari and published by . This book was released on 2009 with total page 478 pages. Available in PDF, EPUB and Kindle. Book excerpt: Practical MEMS focuses on analyzing the operational principles of microsystems. The salient features of the book include: Tutorial approach. The book emphasizes the design and analysis through over 100 calculated examples covering all aspects of MEMS design. Emphasis on design. This book focuses on the microdevice operation. First, the physical operation principles are covered. Second, the design equations are derived and exemplified. Practical MEMS is a perfect companion to MEMS fabrication textbooks. Quantitative performance analysis. The critical performance parameters for the given application are identified and analyzed. For example, the noise and power performance of piezoresistive and capacitive accelerometers is analyzed in detail. Mechanical, resistive (thermal and 1/f-noise), and circuit noise analysis is covered. Application specifications. Different MEMS applications are compared to commercial design requirements. For example, the optical MEMS is analyzed in the context of bar code scanner, projection displays, and optical cross connect specifications. MEMS economics and market analysis. A full chapter is devoted to yield and cost analysis of microfabricated devices. In addition, the market economics for emerging applications such as RF MEMS is discussed.

Download or read book MEMS Silicon Oscillating Accelerometers and Readout Circuits written by Yong Ping Xu and published by CRC Press. This book was released on 2022-09-01 with total page 312 pages. Available in PDF, EPUB and Kindle. Book excerpt: Most MEMS accelerometers on the market today are capacitive accelerometers that are based on the displacement sensing mechanism. This book is intended to cover recent developments of MEMS silicon oscillating accelerometers (SOA), also referred to as MEMS resonant accelerometer. As contrast to the capacitive accelerometer, the MEMS SOA is based on the force sensing mechanism, where the input acceleration is converted to a frequency output. MEMS Silicon Oscillating Accelerometers and Readout Circuits consists of six chapters and covers both MEMS sensor and readout circuit, and provides an in-depth coverage on the design and modelling of the MEMS SOA with several recently reported prototypes. The book is not only useful to researchers and engineers who are familiar with the topic, but also appeals to those who have general interests in MEMS inertial sensors. The book includes extensive references that provide further information on this topic.

Download or read book Springer Handbook of Semiconductor Devices written by Massimo Rudan and published by Springer Nature. This book was released on 2022-11-10 with total page 1680 pages. Available in PDF, EPUB and Kindle. Book excerpt: This Springer Handbook comprehensively covers the topic of semiconductor devices, embracing all aspects from theoretical background to fabrication, modeling, and applications. Nearly 100 leading scientists from industry and academia were selected to write the handbook's chapters, which were conceived for professionals and practitioners, material scientists, physicists and electrical engineers working at universities, industrial R&D, and manufacturers. Starting from the description of the relevant technological aspects and fabrication steps, the handbook proceeds with a section fully devoted to the main conventional semiconductor devices like, e.g., bipolar transistors and MOS capacitors and transistors, used in the production of the standard integrated circuits, and the corresponding physical models. In the subsequent chapters, the scaling issues of the semiconductor-device technology are addressed, followed by the description of novel concept-based semiconductor devices. The last section illustrates the numerical simulation methods ranging from the fabrication processes to the device performances. Each chapter is self-contained, and refers to related topics treated in other chapters when necessary, so that the reader interested in a specific subject can easily identify a personal reading path through the vast contents of the handbook.