Download or read book Mechanisms of Surface and Microstructure Evolution in Deposited Films and Film Structures written by John Sanchez, Jr and published by Cambridge University Press. This book was released on 2014-06-05 with total page 508 pages. Available in PDF, EPUB and Kindle. Book excerpt: A wide variety of materials systems and deposition strategies have been developed to produce epitaxial and polycrystalline thin films. In particular, controlling the morphology and microstructure of metal films at the nanometer and/or micron scale has become crucial for applications such as giant magnetoresistive devices, contacts and diffusion barriers in integrated circuits and photovoltaics, and multilayer X-ray mirrors. This book, first published in 2001, focuses on the interactions between different mechanisms of microstructure evolution and film-growth conditions. Two sections of the volume, including a joint effort with Symposium R, Morphology and Dynamics of Crystal Surfaces in Molecular and Colloid Systems, highlight the fundamental mechanisms of epitaxial growth. Additional topics include: multilayers - stress in thin films; early stages of film growth - mechanical properties; texture in polycrystalline films; grain growth - barrier layers; and silicides and organic thin films - pulsed laser deposition.
- Author : Jacques G. Amar
- Publisher :
- Release : 2001-11-12
- ISBN :
- Pages : 526 pages
Mechanisms of Surface and Microstructure Evolution in Deposited Films and Film Structures Volume 672
Download or read book Mechanisms of Surface and Microstructure Evolution in Deposited Films and Film Structures Volume 672 written by Jacques G. Amar and published by . This book was released on 2001-11-12 with total page 526 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. This book, first published in 2001, focuses on the interactions between different mechanisms of microstructure evolution and film-growth conditions.
Download or read book RHEED Transmission Mode and Pole Figures written by Gwo-Ching Wang and published by Springer Science & Business Media. This book was released on 2013-12-11 with total page 231 pages. Available in PDF, EPUB and Kindle. Book excerpt: This unique book covers the fundamental principle of electron diffraction, basic instrumentation of RHEED, definitions of textures in thin films and nanostructures, mechanisms and control of texture formation, and examples of RHEED transmission mode measurements of texture and texture evolution of thin films and nanostructures. Also presented is a new application of RHEED in the transmission mode called RHEED pole figure technique that can be used to monitor the texture evolution in thin film growth and nanostructures and is not limited to single crystal epitaxial film growth. Details of the construction of RHEED pole figures and the interpretation of observed pole figures are presented. Materials covered include metals, semiconductors, and thin insulators. This book also: Presents a new application of RHEED in the transmission mode Introduces a variety of textures from metals, semiconductors, compound semiconductors, and their characteristics in RHEED pole figures Provides examples of RHEED measurements of texture and texture evolution, construction of RHEED pole figures, and interpretation of observed pole figures RHEED Transmission Mode and Pole Figures: Thin Film and Nanostructure Texture Analysis is ideal for researchers in materials science and engineering and nanotechnology.
Download or read book Simulation of Thin Film Deposition Microstructure Evolution and Properties in Complex Oxide Systems written by Christopher Paul Burmester and published by . This book was released on 1996 with total page 272 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Correlation Between Microstructure and Surface Structure Evolution in Polycrystalline Films written by Adriana Eleni Lita and published by . This book was released on 2000 with total page 408 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Evolution of Thin Film Morphology written by Matthew Pelliccione and published by Springer Science & Business Media. This book was released on 2008-01-29 with total page 206 pages. Available in PDF, EPUB and Kindle. Book excerpt: The focus of this book is on modeling and simulations used in research on the morphological evolution during film growth. The authors emphasize the detailed mathematical formulation of the problem. The book will enable readers themselves to set up a computational program to investigate specific topics of interest in thin film deposition. It will benefit those working in any discipline that requires an understanding of thin film growth processes.
Download or read book Evolution of Thin Film and Surface Microstructure Volume 202 written by C. V. Thompson and published by . This book was released on 1991-05-31 with total page 770 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Download or read book Nano Optoelectronics written by Marius Grundmann and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 450 pages. Available in PDF, EPUB and Kindle. Book excerpt: Traces the quest to use nanostructured media for novel and improved optoelectronic devices. Leading experts - among them Nobel laureate Zhores Alferov - write here about the fundamental concepts behind nano-optoelectronics, the material basis, physical phenomena, device physics and systems.
Download or read book Evolution of Surface and Thin Film Microstructure Volume 280 written by Harry A. Atwater and published by Mrs Proceedings. This book was released on 1993-10-27 with total page 784 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Download or read book Advanced Interconnects for ULSI Technology written by Mikhail Baklanov and published by John Wiley & Sons. This book was released on 2012-04-02 with total page 616 pages. Available in PDF, EPUB and Kindle. Book excerpt: Finding new materials for copper/low-k interconnects is critical to the continuing development of computer chips. While copper/low-k interconnects have served well, allowing for the creation of Ultra Large Scale Integration (ULSI) devices which combine over a billion transistors onto a single chip, the increased resistance and RC-delay at the smaller scale has become a significant factor affecting chip performance. Advanced Interconnects for ULSI Technology is dedicated to the materials and methods which might be suitable replacements. It covers a broad range of topics, from physical principles to design, fabrication, characterization, and application of new materials for nano-interconnects, and discusses: Interconnect functions, characterisations, electrical properties and wiring requirements Low-k materials: fundamentals, advances and mechanical properties Conductive layers and barriers Integration and reliability including mechanical reliability, electromigration and electrical breakdown New approaches including 3D, optical, wireless interchip, and carbon-based interconnects Intended for postgraduate students and researchers, in academia and industry, this book provides a critical overview of the enabling technology at the heart of the future development of computer chips.
Download or read book Growth Mechanism and Interface Effects on Microstructure of Perovskite type Barium Titanate based Epitaxial Films written by Jie He and published by . This book was released on 2012 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: This work was motivated and focused on the growth mechanism, microstructures and interfaces of barium titanate, BaTiO3 (BTO), based epitaxial thin films. Transimission electron microscopy (TEM), high resolution TEM (HRTEM), electron diffraction (ED) have been mainly employed in this study for microstructure investigations of BTO-based epitaxial thin films with the assistance of other materials characterization methods, such as X-ray diffraction (XRD), atomic force microscopy (AFM), Nanoindentation testing, etc. As a basic studying model, epitaxial BTO films were first deposited on the (001) MgO substrate using RF magnetron sputtering to provide fundamental knowledge of the film growth for BTO based thin films. The epitaxial BTO films show a tetragonal crystal structure (a = 4.02 Å and c = 4.11 Å) with epitaxial nanodomains induced from the rough film/substrate interface due to the modification of the substrate surface characteristics (steps, terraces, and kinks) during the deposition process. Two new phases of - calculus [gamma]y (Ba10TiO26) and Hß (BaTi8O24) were formed on the MgO substrate using RF magnetron sputtering. The atomic structures of the two new phases were determined and examined. The [gamma]y phase has a monoclinic structure, Cm, a=16.49 Å̊̊, b=8.94 Å, c=3.94 Å, y=77°. The Hß phase has a monoclinic structure, Cm, a = 17.88̊Å̊, b = 7.21Å, c = 3.94 Å̊̊̊, y =82°. Both [gamma]y and Hß phases have four different oriented domains. The orientation relationship between domains and MgO substrate is discussed. Initail study shows that these new phases possess novel and interesting properties. The doped BTO films with different dopant (Sr2 and Zr4) fabricated using pulsed laser deposition (PLD) have been studied for doping effects, interface effects and film growth mechanism. The (Ba, Sr)TiO3 (BST) epitaxial films grown on 1.2° and 5.3° miscut substrates consist of lager commensurate domains, and correspondly show higher dielectric constant and dielectric tunability, and lower average modulus and hardness than those of the films grown on the 3.5° miscut substrate. The results suggest that the differences on the interfacial structure have a tremendous effect on the properties of the films. The investigation on epitaxial Ba(Zr, Ti)O3 (BZT) and 2% Mn doped Ba(Zr, Ti)O3 (Mn:BZT) thin films grown on MgO substrate revealed the formation of twin-coupled domains on the epilayer by sharing their {111}/{110} planes as common planes. The structure evolution from epilayer to nanopillars is accomplished by alternatively introducing {111} and {110} twin boundaries, resulting in gradual shrinking or enlarging of the lateral size of the epitaxial grains/twin coupled nanopillars. The formations of twin domains, sharing planes and structure transition mechasim have been discussed in detail. Eventually, the microstructures and layer interfaces of [Mn:BZT//Mn:BST]N multilayer films consisting of 2% Mn doped (Ba, Sr)TiO3 (Mn:BST) and Mn:BZT layers on MgO (001) substrates with various deposition rates, deposition period numbers N were studied to provide an integral view of the formation of multilayer films in BTO system. All the [Mn:BZT//Mn:BST]N multilayer films present epitaxial quality and induced {111}/{110} twin-coupled domains initially formed at different film thickness/layers. The film/substrate interface has an important role for the formation of twin domains and the proportion of twin domain structures in the entire films. The layer interfaces between Mn:BST and Mn:BZT with period compression and extension strains were observed and discussed. The microstructure evolution and structure-related nano-mechanical properties of the multilayer films have been systematically investigated.
Download or read book International Journal of Powder Metallurgy written by and published by . This book was released on 2000 with total page 630 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Evolution of Thin Film and Surface Structure and Morphology Volume 355 written by B. G. Demczyk and published by . This book was released on 1995-07-18 with total page 696 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Download or read book Handbook of Thin Film Deposition Processes and Techniques written by Krishna Seshan and published by William Andrew. This book was released on 2001-02-01 with total page 430 pages. Available in PDF, EPUB and Kindle. Book excerpt: New second edition of the popular book on deposition (first edition by Klaus Schruegraf) for engineers, technicians, and plant personnel in the semiconductor and related industries. This book traces the technology behind the spectacular growth in the silicon semiconductor industry and the continued trend in miniaturization over the last 20 years. This growth has been fueled in large part by improved thin film deposition techniques and the development of highly specialized equipment to enable this deposition. The book includes much cutting-edge material. Entirely new chapters on contamination and contamination control describe the basics and the issues—as feature sizes shrink to sub-micron dimensions, cleanliness and particle elimination has to keep pace. A new chapter on metrology explains the growth of sophisticated, automatic tools capable of measuring thickness and spacing of sub-micron dimensions. The book also covers PVD, laser and e-beam assisted deposition, MBE, and ion beam methods to bring together all the physical vapor deposition techniques. Two entirely new areas receive full treatment: chemical mechanical polishing which helps attain the flatness that is required by modern lithography methods, and new materials used for interconnect dielectric materials, specifically organic polyimide materials.
Download or read book Directory of Published Proceedings written by and published by . This book was released on 2002 with total page 68 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Structure and Evolution of Surfaces Volume 440 written by Robert C. Cammarata and published by . This book was released on 1997-11-13 with total page 536 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book brings together an interdisciplinary group of surface physicists, chemists and materials scientists to present the most current advances in the area of surface science. Both scientific and technological issues are addressed. Topics include: surface and step structure; morphology, roughness and instabilities; kinetic processes; nucleation on surfaces and interfaces; mechanics of surfaces; self-assembled and Langmuir-Blodgett films; thin-film surfaces and growth; chemistry and modification of surfaces and metal-semiconductor interfaces.
Download or read book Research Development written by and published by . This book was released on 2000-09 with total page 668 pages. Available in PDF, EPUB and Kindle. Book excerpt: