Download or read book Spectroscopic Ellipsometry written by Harland G. Tompkins and published by Momentum Press. This book was released on 2015-12-16 with total page 138 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ellipsometry is an experimental technique for determining the thickness and optical properties of thin films. It is ideally suited for films ranging in thickness from sub-nanometer to several microns. Spectroscopic measurements have greatly expanded the capabilities of this technique and introduced its use into all areas where thin films are found: semiconductor devices, flat panel and mobile displays, optical coating stacks, biological and medical coatings, protective layers, and more. While several scholarly books exist on the topic, this book provides a good introduction to the basic theory of the technique and its common applications. The target audience is not the ellipsometry scholar, but process engineers and students of materials science who are experts in their own fields and wish to use ellipsometry to measure thin film properties without becoming an expert in ellipsometry itself.
Download or read book Measurement of Thin Films by Optical Ellipsometry written by Samuel C. Mauk (CAPT, USAF.) and published by . This book was released on 1969 with total page 79 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book A User s Guide to Ellipsometry written by Harland G. Tompkins and published by Courier Corporation. This book was released on 2013-03-21 with total page 496 pages. Available in PDF, EPUB and Kindle. Book excerpt: This text on optics for graduate students explains how to determine material properties and parameters for inaccessible substrates and unknown films as well as how to measure extremely thin films. Its 14 case studies illustrate concepts and reinforce applications of ellipsometry — particularly in relation to the semiconductor industry and to studies involving corrosion and oxide growth. A User's Guide to Ellipsometry will enable readers to move beyond limited turn-key applications of ellipsometers. In addition to its comprehensive discussions of the measurement of film thickness and optical constants in film, it also considers the trajectories of the ellipsometric parameters Del and Psi and how changes in materials affect parameters. This volume also addresses the use of polysilicon, a material commonly employed in the microelectronics industry, and the effects of substrate roughness. Three appendices provide helpful references.
Download or read book Ellipsometry in the Measurement of Surfaces and Thin Films written by Elio Passaglia and published by . This book was released on 1964 with total page 366 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Measurement of Thin Films by Optical Ellipsometry written by Samuel C. Mauk and published by . This book was released on 1969 with total page 89 pages. Available in PDF, EPUB and Kindle. Book excerpt: A specially designed ellipsometer was set up, aligned and calibrated. Using this equipment, air measurements were made on thin vacuum prepared films of tantalum, aluminum, and gold and the complex optical constants of these samples were calculated. Measurements were also made on thin films of anodized tantalum oxide, anodized aluminum oxide, sputtered aluminum oxide, and evaporated sapphire (Al2O3). The refractive index and thickness of each oxide film were calculated using the exact Drude equations. A comparison of the results with published values indicated good agreement, but a general trend of increasing refractive index with film thickness was noted for tantalum oxide and an opposite trend was noted for both anodized aluminum oxide and evaporated sapphire. Suggested improvements include more care in sample preparation and some minor equipment and procedure modifications. (Author).
Download or read book Handbook of Ellipsometry written by Harland Tompkins and published by William Andrew. This book was released on 2005-01-06 with total page 887 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Handbook of Ellipsometry is a critical foundation text on an increasingly critical subject. Ellipsometry, a measurement technique based on phase and amplitude changes in polarized light, is becoming popular in a widening array of applications because of increasing miniaturization of integrated circuits and breakthroughs in knowledge of biological macromolecules deriving from DNA and protein surface research. Ellipsometry does not contact or damage samples, and is an ideal measurement technique for determining optical and physical properties of materials at the nano scale. With the acceleration of new instruments and applications now occurring, this book provides an essential foundation for the current science and technology of ellipsometry for scientists and engineers in industry and academia at the forefront of nanotechnology developments in instrumentation, integrated circuits, biotechnology, and pharmaceuticals. Divided into four parts, this comprehensive handbook covers the theory of ellipsometry, instrumentation, applications, and emerging areas. Experts in the field contributed to its twelve chapters, covering various aspects of ellipsometry.
Download or read book Spectroscopic Ellipsometry written by Hiroyuki Fujiwara and published by John Wiley & Sons. This book was released on 2007-09-27 with total page 388 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ellipsometry is a powerful tool used for the characterization of thin films and multi-layer semiconductor structures. This book deals with fundamental principles and applications of spectroscopic ellipsometry (SE). Beginning with an overview of SE technologies the text moves on to focus on the data analysis of results obtained from SE, Fundamental data analyses, principles and physical backgrounds and the various materials used in different fields from LSI industry to biotechnology are described. The final chapter describes the latest developments of real-time monitoring and process control which have attracted significant attention in various scientific and industrial fields.
Download or read book A Practical Guide to Optical Metrology for Thin Films written by Michael Quinten and published by John Wiley & Sons. This book was released on 2012-09-24 with total page 212 pages. Available in PDF, EPUB and Kindle. Book excerpt: A one-stop, concise guide on determining and measuring thin film thickness by optical methods. This practical book covers the laws of electromagnetic radiation and interaction of light with matter, as well as the theory and practice of thickness measurement, and modern applications. In so doing, it shows the capabilities and opportunities of optical thickness determination and discusses the strengths and weaknesses of measurement devices along with their evaluation methods. Following an introduction to the topic, Chapter 2 presents the basics of the propagation of light and other electromagnetic radiation in space and matter. The main topic of this book, the determination of the thickness of a layer in a layer stack by measuring the spectral reflectance or transmittance, is treated in the following three chapters. The color of thin layers is discussed in chapter 6. Finally, in chapter 7, the author discusses several industrial applications of the layer thickness measurement, including high-reflection and anti-reflection coatings, photolithographic structuring of semiconductors, silicon on insulator, transparent conductive films, oxides and polymers, thin film photovoltaics, and heavily doped silicon. Aimed at industrial and academic researchers, engineers, developers and manufacturers involved in all areas of optical layer and thin optical film measurement and metrology, process control, real-time monitoring, and applications.
Download or read book Ellipsometry of Functional Organic Surfaces and Films written by Karsten Hinrichs and published by Springer. This book was released on 2018-05-06 with total page 549 pages. Available in PDF, EPUB and Kindle. Book excerpt: This new edition provides a state-of-the-art survey of ellipsometric methods used to study organic films and surfaces, from laboratory to synchrotron applications, with a special focus on in-situ use in processing environments and at solid-liquid interfaces. Thanks to the development of functional organic, meta- and hybrid materials for new optical, electronic, sensing and biotechnological devices, the ellipsometric analysis of optical and material properties has made tremendous strides over the past few years. The second edition has been updated to reflect the latest advances in ellipsometric methods. The new content focuses on the study of anisotropic materials, conjugated polymers, polarons, self-assembled monolayers, industrial membranes, adsorption of proteins, enzymes and RGD-peptides, as well as the correlation of ellipsometric spectra to structure and molecular interactions.
Download or read book Optical Characterization of Real Surfaces and Films written by K. Vedam and published by Academic Press. This book was released on 2013-10-22 with total page 345 pages. Available in PDF, EPUB and Kindle. Book excerpt: This new volume of the highly respected Physics of Thin Films Serial discusses inhomogeneity in real films and surfaces. The volume, guest-edited by K. Vedam, follows the growth of thin films both from the surface of the substrate, and from the atomic level, layer by layer. The text features coverage of Real-Time Spectroscopic Ellipsometry (RTSE) and Reflectance Anisotropy (RA), two major breakthrough optical techniques used to characterize real time and insitu films and surfaces. In six insightful chapters, the contributors assess the impact of these techniques, their strengths and limitations, and their potential for further development.
Download or read book Peptides and Proteins as Biomaterials for Tissue Regeneration and Repair written by Mario Barbosa and published by Woodhead Publishing. This book was released on 2017-09-25 with total page 392 pages. Available in PDF, EPUB and Kindle. Book excerpt: Peptides and Proteins as Biomaterials for Tissue Regeneration and Repair highlights the various important considerations that go into biomaterial development, both in terms of fundamentals and applications. After covering a general introduction to protein and cell interactions with biomaterials, the book discusses proteins in biomaterials that mimic the extracellular matrix (ECM). The properties, fabrication and application of peptide biomaterials and protein-based biomaterials are discussed in addition to in vivo and in vitro studies. This book is a valuable resource for researchers, scientists and advanced students interested in biomaterials science, chemistry, molecular biology and nanotechnology. - Presents an all-inclusive and authoritative coverage of the important role which protein and peptides play as biomaterials for tissue regeneration - Explores protein and peptides from the fundamentals, to processing and applications - Written by an international group of leading biomaterials researchers
Download or read book Ellipsometry at the Nanoscale written by Maria Losurdo and published by Springer Science & Business Media. This book was released on 2013-03-12 with total page 740 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents and introduces ellipsometry in nanoscience and nanotechnology making a bridge between the classical and nanoscale optical behaviour of materials. It delineates the role of the non-destructive and non-invasive optical diagnostics of ellipsometry in improving science and technology of nanomaterials and related processes by illustrating its exploitation, ranging from fundamental studies of the physics and chemistry of nanostructures to the ultimate goal of turnkey manufacturing control. This book is written for a broad readership: materials scientists, researchers, engineers, as well as students and nanotechnology operators who want to deepen their knowledge about both basics and applications of ellipsometry to nanoscale phenomena. It starts as a general introduction for people curious to enter the fields of ellipsometry and polarimetry applied to nanomaterials and progresses to articles by experts on specific fields that span from plasmonics, optics, to semiconductors and flexible electronics. The core belief reflected in this book is that ellipsometry applied at the nanoscale offers new ways of addressing many current needs. The book also explores forward-looking potential applications.
Download or read book Bioseparations of Proteins written by Ajit Sadana and published by Elsevier. This book was released on 1997-11-27 with total page 367 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book covers the fundamentals of protein inactivation during bioseparation and the effect on protein processing. Bioseparation of Proteins is unique because it provides a background of the bioseparation processes, and it is the first book available to emphasize the influence of the different bioseparation processes on protein inactivation.Bioseparation of Proteins covers the extent, mechanisms of, and control of protein inactivation during these processes along with the subsequent and essential validation of these processes. The book focuses on the avoidance of protein (biologicalproduct) inactivation at each step in a bioprocess. It compares protein inactivation exhibited during the different bioseparation processes by different workers and provides a valuable framework for workers in different areas interested in bioseparations.Topics include separation and detection methods; estimates of protein inactivation and an analysis of this problem for different separation processes; strategies for avoiding inactivation; the molecular basis of surface activity and protein adsorption,process monitoring, and product validation techniques; and the economics of various bioseparation processes and quality control procedures.Key Features* Protein inactivation and other aspects of biological stability are critical to an effective bioseparation process; This book is a detailed and critical review of the available literature in an area that is essential to the effectiveness, validation, and economics of bioseparation processes for drugs and other biological products; Conveniently assembled under one cover, the survey of the literature and resulting perspective will greatly assist engineers and chemists in designingand improving their own processes; Key features of the text include:* detailed data on biological stability under various bioseparation conditions* extensive case studies from the literature on separation processes, validation, and economics* simplified analysis of protein refolding and inactivation mechanisms* consideration of adsorption theories and the effect of heterogeneity* coverage of both classical and novel bioseparation techniques, including chromatographic procedures
Download or read book Spectroscopic Ellipsometry and Reflectometry written by Harland G. Tompkins and published by Wiley-Interscience. This book was released on 1999-03-18 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: While single wave ellipsometry has been around for years, spectroscopic ellipsometry is fast becoming the method of choice for measuring the thickness and optical properties of thin films. This book provides the first practical introduction to spectroscopic ellipsometry and the related techniques of reflectometry. A guide for practitioners and researchers in a variety of disciplines, it addresses a broad range of applications in physics, chemistry, electrical engineering, and materials science.
Download or read book Thin Films for Optical Systems written by Flory and published by CRC Press. This book was released on 1995-07-06 with total page 608 pages. Available in PDF, EPUB and Kindle. Book excerpt: This work presents advances in thin films for applications in the fields of integrated optics, micro-optics, optical telecommunications and optoelectronics. It delineates the performance characteristics needed for graded coatings, damage-resistant laser coatings and many others. Basic theory and applications are illustrated.
Download or read book Ellipsometry in the Measurement of Surfaces and Thin Films written by Elio Passaglia and published by . This book was released on 1964 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Practical Design of Optical Thin Films Fifth Edition written by Ronald R Willey and published by Lulu.com. This book was released on 2018-01-18 with total page 487 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book deals with the basic fundamentals, understanding, and design of optical thin films, or interference coatings for practical production. It focuses on one of the main subjects that is critical to meeting the practical challenges of producing optical coatings. This is the design of coatings, an understanding of which allows the practitioner to know the possibilities and limitations involved in reducing, enhancing, or otherwise controlling the reflection, transmission, and absorption of light (visible or otherwise). This Fifth Edition now includes measurement of index, thickness, and color; the determination of tooling factors; and the programming of Macros, Workbooks, and FilmStar Basic.
