Download or read book Materials Research Society Symposia Proceedings Volume 36 Impurity Diffusion and Gettering in Silicon Held on November 27 30 1984 at Boston Massachusetts written by R. B. Fair and published by . This book was released on 1985 with total page 300 pages. Available in PDF, EPUB and Kindle. Book excerpt: Topics included impurity behavior, diffusion and oxygen in silicon. Precipitation and complexing of metals in silicon as well as their electrical activity, solubility and diffusivity were discussed. Analytical techniques for impurity mapping or detection were compared and the importance of using several analytical tools were stressed. Getter processes were also discussed. Evidence was presented that shows gettering of Nickel, Gold and Iron to be governed by the availability of self interstitials in silicon. Methods of gettering metallic impurities were presented such as deposited films, implantation damage and epitaxial misfit dislocations. The role of point defects in silicon and their influence on diffusion, extrinsic defect growth and gettering was presented in two sessions. Questions addressed were the relative contributions of vacancies and self-interstitials to impurity diffusion as well as their own diffusivities and concentrations. New data regarding the strain and pressure dependence of diffusion was presented, but no definitive conclusions can be made regarding the mechanisms involved. Two sessions were also devoted to oxygen in silicon. Mechanisms regarding intrinsic gettering, denuded zone formation, nucleation and growth of oxygen precipitates were addressed.

Download or read book Impurity Diffusion and Gettering in Silicon Volume 36 written by Richard B. Fair and published by . This book was released on 1985-05-15 with total page 316 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Download or read book Impurity Diffusion and Gettering in Silicon Volume 36 written by Richard B. Fair and published by Cambridge University Press. This book was released on 1985-05-15 with total page 300 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

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Download or read book Impurity Diffusion and Gettering in Silicon written by Richard B. Fair and published by Cambridge University Press. This book was released on 2014-06-05 with total page 300 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

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