Download or read book Laser Lift off Processing of PZT Thin Films for Improved Piezoelectric based Microelectromechanical Systems written by Loucas Tsakalakos and published by . This book was released on 1998 with total page 220 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Synthesis and Characterization of Pb Zr Ti O3 Thin Films for Microelectromechanical Systems written by Kirsten L. Brookshire and published by . This book was released on 2011 with total page 126 pages. Available in PDF, EPUB and Kindle. Book excerpt: Pb(Zr, Ti)O3 (PZT) is a very attractive material for use in piezoelectric-based microelectromechanical systems (MEMS) due to its high piezoelectric coefficients and ability for large displacements with relatively low applied fields (as compared to electrostatic-based MEMS). The piezoelectric effect is strongly anisotropic, thus it is very desirable to control the crystallographic orientation of the active material. This study is designed to understand the effect of crystallographic texture on the long-term stability of piezoelectric-based MEMS devices. Utilizing (100)-oriented solution deposited LaNiO3 (LNO) and PbTiO3 (PT) seed layers, (001) fiber texture of rfmagnetron sputtered PZT films (ex situ annealed) with varying thickness was optimized. X-ray diffraction rocking curve data indicated good out-of-plane alignment, with full-width-at-half-maximum (FWHM) values of 3.8° - 4.5° and 2.5°- 3.1° for PZT on LNO and PT, respectively. This optimization of (001) orientation is paramount to maximizing the piezoelectric response of PZT thin films for MEMS applications, as this promotes the highest piezoelectric response. Dielectric and ferroelectric properties were obtained for films 120-1320 nm thick. Subsequently these films were subjected to lifetime (fatigue) tests similar to what is experienced in piezo- MEMS applications. Fatigue endurance is a critical factor in evaluating long-term device reliability in these devices. A study of fatigue dependence on film thickness, morphology, bottom electrode, and field strength was conducted. Results of these studies show film morphology contributes strongly to film fatigue and film failure prior to reaching 108 fatigue cycles, with increased grain size leading to improved fatigue endurance. Film thickness was also shown to contribute significantly to fatigue, predominantly in PZT on PT films, with films over 1 [micrometer] in thickness showing large fatigue after 108 cycles. Films with bottom LNO electrodes demonstrated improved performance over all thickness ranges studied when compared to PT bottom electrodes, exhibiting minimal fatigue after 108 cycles.

Download or read book Piezoelectric Energy Harvesting written by Alper Erturk and published by John Wiley & Sons. This book was released on 2011-04-04 with total page 377 pages. Available in PDF, EPUB and Kindle. Book excerpt: The transformation of vibrations into electric energy through the use of piezoelectric devices is an exciting and rapidly developing area of research with a widening range of applications constantly materialising. With Piezoelectric Energy Harvesting, world-leading researchers provide a timely and comprehensive coverage of the electromechanical modelling and applications of piezoelectric energy harvesters. They present principal modelling approaches, synthesizing fundamental material related to mechanical, aerospace, civil, electrical and materials engineering disciplines for vibration-based energy harvesting using piezoelectric transduction. Piezoelectric Energy Harvesting provides the first comprehensive treatment of distributed-parameter electromechanical modelling for piezoelectric energy harvesting with extensive case studies including experimental validations, and is the first book to address modelling of various forms of excitation in piezoelectric energy harvesting, ranging from airflow excitation to moving loads, thus ensuring its relevance to engineers in fields as disparate as aerospace engineering and civil engineering. Coverage includes: Analytical and approximate analytical distributed-parameter electromechanical models with illustrative theoretical case studies as well as extensive experimental validations Several problems of piezoelectric energy harvesting ranging from simple harmonic excitation to random vibrations Details of introducing and modelling piezoelectric coupling for various problems Modelling and exploiting nonlinear dynamics for performance enhancement, supported with experimental verifications Applications ranging from moving load excitation of slender bridges to airflow excitation of aeroelastic sections A review of standard nonlinear energy harvesting circuits with modelling aspects.

Download or read book Microelectromechanical Systems written by Committee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems and published by National Academies Press. This book was released on 1997-12-15 with total page 76 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microelectromenchanical systems (MEMS) is a revolutionary field that adapts for new uses a technology already optimized to accomplish a specific set of objectives. The silicon-based integrated circuits process is so highly refined it can produce millions of electrical elements on a single chip and define their critical dimensions to tolerances of 100-billionths of a meter. The MEMS revolution harnesses the integrated circuitry know-how to build working microsystems from micromechanical and microelectronic elements. MEMS is a multidisciplinary field involving challenges and opportunites for electrical, mechanical, chemical, and biomedical engineering as well as physics, biology, and chemistry. As MEMS begin to permeate more and more industrial procedures, society as a whole will be strongly affected because MEMS provide a new design technology that could rival--perhaps surpass--the societal impact of integrated circuits.

Download or read book Integration of Epitaxial Piezoelectric Thin Films on Silicon written by Shi Yin and published by . This book was released on 2013 with total page 194 pages. Available in PDF, EPUB and Kindle. Book excerpt: Recently, piezoelectric materials, like lead titanate zirconate Pb(ZrxTi1-x)O3 (PZT), zinc oxide ZnO, and the solid solution Pb(Mg1/3Nb2/3)O3-PbTiO3 (PMN-PT), increasingly receive intensive studies because of their innovative applications in the microelectromechanical systems (MEMS). In order to integrate them on silicon substrate, several preliminaries must be taken into considerations, e.g. buffer layer, bottom electrode. In this thesis, piezoelectric films (PZT and PMN-PT) have been successfully epitaxially grown on silicon and SOI (silicon-on-insulator) in the form of single crystal by sol-gel process. In fact, recent studies show that single crystalline films seem to possess the superior properties than that of polycrystalline films, leading to an increase of the performance of MEMS devices. The first objective of this thesis was to realize the epitaxial growth of single crystalline film of piezoelectric materials on silicon. The use of a buffer layer of gadolinium oxide(Gd2O3) or strontium titanate (SrTiO3 or STO) deposited by molecular beam epitaxy (MBE) has been studied in detail to integrate epitaxial PZT and PMN-PT films on silicon. For Gd2O3/Si(111) system, the study of X-ray diffraction (XRD) on the growth of PZT film shows that the film is polycrystalline with coexistence of the nonferroelectric parasite phase, i.e. pyrochlore phase. On the other hand, the PZT film deposited on STO/Si(001) substrate is successfully epitaxially grown in the form of single crystalline film. In order to measure the electrical properties, a layer of strontium ruthenate (SrRuO3 or SRO) deposited by pulsed laser deposition (PLD) has been employed for bottom electrode due to its excellent conductivity and perovskite crystalline structure similar to that of PZT. The electrical characterization on Ru/PZT/SRO capacitors demonstrates good ferroelectric properties with the presence of hysteresis loop. Besides, the relaxor ferroelectric PMN-PT has been also epitaxially grown on STO/Si and confirmed by XRD and transmission electrical microscopy (TEM). This single crystalline film has the perovskite phase without the appearance of pyrochlore. Moreover, the study of infrared transmission using synchrotron radiation has proven a diffused phase transition over a large range of temperature, indicating a typical relaxor ferroelectric material. The other interesting in the single crystalline PZT films deposited on silicon and SOI is to employ them in the application of MEMS devices, where the standard silicon techniques are used. The microfabrication process performed in the cleanroom has permitted to realize cantilevers and membranes in order to mechanically characterize the piezoelectric layers. Mechanical deflection under the application of an electric voltage could be detected by interferometry. Eventually, this characterization by interferometry has been studied using the modeling based on finite element method and analytic method. In the future, it will be necessary to optimize the microfabrication process of MEMS devices based on single crystalline piezoelectric films in order to ameliorate the electromechanical performance. Finally, the characterizations at MEMS device level must be developed for their utilization in the future applications.

Download or read book Microfabricated Systems and MEMS VII written by and published by The Electrochemical Society. This book was released on 2004 with total page 352 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Piezoelectric Technology written by Swetapadma Praharaj and published by CRC Press. This book was released on 2023-12-01 with total page 211 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book explains the state-of-the-art green piezoelectric energy harvesting (PEH) technology. It highlights different aspects of PEH, starting right from the materials, their synthesis, and characterization techniques to applications. Various types of materials, including ceramics, polymers, composites, and bio-inspired compounds in nano, micro, and meso scale and their recent advancements are captured in detail with special focus on lead-free systems. Different challenges and issues faced while designing a PEH are also included. Features: Guides on how to harvest piezoelectric energy in a sustainable manner Describes related figures of merit for piezoelectric energy harvesting Covers synthesis of piezoelectric materials in the form of bulk, single crystal, nano, and thin/thick film Includes pertinent advanced characterization techniques Reviews piezo-energy harvesting devices and structures This book is aimed at researchers, professionals, and graduate students in electrical engineering, materials, and energy.

Download or read book Pzt Thin Films for Piezoelectric Mems Mechanical Energy Harvesting written by Charles Yeager and published by . This book was released on 2015 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: This thesis describes the optimization of piezoelectric Pb(ZrxTi1-x)O3 (PZT) thin films for energy generation by mechanical energy harvesting, and self-powered micro-electro-mechanical systems (MEMS). For this purpose, optimization of the material was studied, as was the incorporation of piezoelectric films into low frequency mechanical harvesters. A systematic analysis of the energy harvesting figure of merit was made. As a figure of merit (e31,f)2/[epsilon]r (transverse piezoelectric coefficient squared over relative permittivity) was utilized. PZT films of several tetragonal compositions were grown on CaF2, MgO, SrTiO3, and Si substrates, thereby separating the dependence of composition on domain orientation. To minimize artifacts associated with composition gradients, and to extend the temperature growth window, PZT films were grown by metal organic chemical vapor deposition (MOCVD). Using this method, epitaxial {001} films achieved c-domain textures above 90% on single crystal MgO and CaF2 substrates. This could be tailored via the thermal stresses established by the differences in thermal expansion coefficients of the film and the substrate. The 001 single-domain e31,f for PZT thin films was determined to exceed -12 C/m2 in the tetragonal phase field for x >= 0.19, nearly twice the phenomenologically modeled value. The utilization of c-domain PZT films is motivated by a figure of merit above 0.8 C2/m4 for (001) PZT thin films. Increases to the FoM via doping and hot poling were also quantified; a 1% Mn doping reduced [epsilon]r by 20% without decreasing the piezoelectric coefficient. Hot poling a device for one hour above 120 °C also resulted in a 20% reduction in [epsilon]r; furthermore, 1% Mn doping reduced [epsilon]r by another 12% upon hot poling. Two methods for fabricating thin film mechanical energy harvesting devices were investigated. It was found that phosphoric acid solutions could be used to pattern MgO crystals, but this was typically accompanied by damage to the PZT film. An energy harvester was fabricated by etching the MgO substrate down to 10-20 [mu]m under a circular diaphragm device; this structure had a natural frequency of 2.7 kHz and was estimated to provide a maximum RMS power of 8.8 [mu]W/cm2g2. Due to the lack of selectivity in the patterning, MgO was not as versatile as silicon substrates, which can be etched rapidly by wet and dry methods.To successfully release a PZT film onto a polymer passive elastic layer, dry (gas) etch methods were preferable. This protected the interfacial bonding between PZT films and Parylene. A 2 cm2 thin film membrane (15 [mu]m Parylene/ 3 [mu]m Cyclotene 4022/ 0.1 [mu]m Pt-Ti/ 1.4 [mu]m PZT (52/48)/ 0.14 [mu]m Pt-Ti/ 1 [mu]m SiO2) was released from a silicon substrate and operated with a 5 Hz natural frequency, the lowest reported for a thin film energy harvester operating in resonant excitation. Though problems existed with buckling of the beam due to tension in the Cyclotene 4022 (a benzocyclobutene, BCB, resin) from curing on a silicon substrate, the cantilevered device was calculated to output up to RMS 0.53 [mu]W/cm2 when swept through an arc >30°. Silicon substrates facilitated scaling in size and quantity of devices compared to MgO substrates, which motivated an investigation into the reduction of 90° domain walls for thin films released from substrate clamping conditions. Circular test structures were designed to produce systematic changes in the clamping condition of {001} PZT thin films. The stiffness of the substrate interface was modified either by using a PZT buffer layer on the substrate or by removing the substrate completely. Films allowed to stress relax upon release, via curling, had reduced domain wall restoring force compared to fully clamped structures, leading to a 72% increase in irreversible domain wall contributions for free-standing 300 [mu]m features. The irreversible dielectric Raleigh coefficient, [alpha], for a 1.64 [mu]m {001} PZT film measured at 20 Hz increased from 40 cm/kV to 71 cm/kV in this way. Griggio et al., Phys. Rev. Let. 108, no. 15 (2012) 157604 reported [alpha] of 148 cm/kV at 100 Hz for broken sections of 70 [mu]m diaphragms. To understand the relationship between [alpha] reported in those experiments and the results of this thesis, the size dependence of [alpha] was investigated by partitioning 300 [mu]m diaphragms into wedges. Both [alpha] and the frequency dispersion of [alpha] increased as the membrane was sectioned. This was attributed to a decrease in the elastic restoring force for domain walls. Interface (local) stresses were found to have a smaller impact on domain wall mobility, even after the domain structure was annealed above the Curie temperature post release.

Download or read book Materials Science of Microelectromechanical Systems MEMS Devices written by and published by . This book was released on 2000 with total page 378 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Development of Lead free Piezoelectric Thin Films by Pulsed Laser Deposition written by Maryam Abazari Torghabeh and published by . This book was released on 2010 with total page 193 pages. Available in PDF, EPUB and Kindle. Book excerpt: As a high performance piezoelectric material widely used in sensors, actuators and other electronic devices, lead zirconate titanate (PZT) ceramics have been the center of attention for many years. However, the toxicity of these materials and their exposure to the environment during processing steps, such as calcination, sintering, machining as well as problems in recycling and disposal have been major concerns regarding their usage all around the globe for the past couple of decades. Consequently, utilizing lead-based materials for many commercial applications have been recently restricted in Europe and Asia and measures are being taken in United States as well. Therefore, there is an urgent need for lead-free piezoelectrics whose properties are comparable to those of well-known PZT materials. Recently, the discovery of ultra-high piezoelectric activity in the ternary lead-free KNaNbO3-LiTaO3-LiSbO3 (KNN-LT-LS) and (Bi, Na)TiO3-(Bi, K)TiO3-BaTiO3 (BNT-BKT-BT) systems have given hope for alternatives to PZT. Furthermore, the demand for new generation of environment-friendly functional devices, utilizing piezoelectric materials, inspired a new surge in lead-free piezoelectric thin film research. In this study, an attempt has been made to explore the development of lead-free piezoelectric thin films by Pulsed Laser Deposition (PLD) on SrTiO3 substrate. While the growth and development process of KNN-LT-LS thin films was the primary goal of this thesis, a preliminary effort was also made to fabricate and characterize BNT-BKT-BT thin films. In a comprehensive and systematic process optimization study in conjunction with X-ray diffractometry, the phase evolution, stoichiometry, and growth orientation of the films are monitored as a function of deposition conditions including temperature and ambient oxygen partial pressure. Processing parameters such as substrate temperature and pressure are shown to be highly dominant in determining the phase and composition of the films. Oxygen partial pressure has shown to control the chemical composition of the films through solid-gaseous phase equilibrium and substrate temperature has mostly influenced the growth mode and microstructure. Findings of this study has shown that 300-500 nm single-phase epitaxial KNN-LT-LS and BNT-BKT-BT thin films could indeed be obtained at a temperature of 700-750 oC and 300-400 mTorr of oxygen partial pressure. Following a series of studies on effect of doping, it was revealed that addition of 1 mol% Mn to KNN-LT-LS composition resulted in a significant suppression of leakage current and enhancement of polarization saturation. A remanent polarization of 16 æC/cm2 and coercive field of 20 kV/cm were measured for such thin film, which are comparable to those of hard PZT counterparts. Also, a high remanent polarization and coercive field of 30 æC/cm2 and 95 kV/cm were achieved in 350 nm BNT-BKT-BT thin films. Longitudinal (d33) and transverse (e31, f) piezoelectric coefficients of KNN-LT-LS thin films were found to be 55 pm/V and -4.5 C/m2 respectively, prepared at the optimized conditions, whereas 350 nm BNT-BKT-BT thin films exhibited an e31, f of -2.25 C/m2. The results of this study present the great potential of KNN-LT-LS and BNT-BKT-BT thin films for piezoelectric MEMS devices and provide a baseline for future investigations on lead-free piezoelectric thin films.

Download or read book Development of Thin film Based Microdevices and Process Enhancement for Making the Same written by Qing Guo and published by . This book was released on 2012 with total page 132 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microdevices driven by Lead Zirconate Titanate (PbZrxTi1-xO3 or PZT) have received wide attention recently, because they could potentially outperform other MEMS devices in terms of bandwidth, energy density, and actuation strength. PZT integrated microdevice is undoubtedly promising, but its development and fabrication still remains challenging. To cope with such challenges and develop a well functional microdevice with adoption of thin-film PZT in sub-millimeter range requires thorough understand on its properties and fundamental behaviors both in theoretical and practical way. First of all, I developed and improved the microfabrication procedure of PZT thin film microsensor and microactuator. Such procedure includes modified sol-gel preparation, stable fabrication of bottom electrode with proper micro surface texture, microdevice wire bonding and packaging. Meanwhile, during the study I characterized the patterns of thin-film PZT defects. Through parametric study, the degree of bottom electrode porosity is revealed to be the most critical parameter surpassing others strongly affects the deposited thin-film PZT quality. A second parametric study is simultaneously carried out to ensure the fabrication repeatability of low porous bottom electrode. These contributions not only greatly improve the yield of thereafter lab-fabricated thin-film PZT but also provide an effective way for quick prediction of ongoing PZT fabrication yield based on the judgment of one parameter. Fabrication of satisfied thin-film PZT could be difficult, however, measuring material piezoelectric properties of just-prepared PZT could be even challenging. Although there are many currently available solutions, they are either complicated or expensive. Most important, they are not applicable for thin-film PZT application. I developed an easy, low cost, but effective method to deal with the thin film piezoelectric coefficient d33 through a mini impact hammer approach. Such method is proved to be suitable for both bulk and thin-film PZT. More practically, it can be adopted as a fast way for lab-prepared PZT quality evaluation. PZT deposition requires a Pt/Ti bi-layer bottom electrode to be annealed retaining condensed structure. The heat treatment will inevitably pull electrode to be porous. It is well known that electrode with pores can greatly affect thin-film PZT material properties. For such reason, I designed and fabricated a special nonporous bottom electrode which inherits the porous electrode surface micro texture but with pores sealed. Although due to the limited experimental results no strong evidence shows new electrode surpasses traditional one in all ways, it contains large effective electrode area by covering the pores earns it better chance to outperform porous electrode.

Download or read book Advances in Ferroelectrics written by Aimé Peláiz-Barranco and published by BoD – Books on Demand. This book was released on 2012-11-19 with total page 546 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ferroelectricity is one of the most studied phenomena in the scientific community due the importance of ferroelectric materials in a wide range of applications including high dielectric constant capacitors, pyroelectric devices, transducers for medical diagnostic, piezoelectric sonars, electrooptic light valves, electromechanical transducers and ferroelectric random access memories. Actually the ferroelectricity at nanoscale receives a great attention to the development of new technologies. The demand for ferroelectric systems with specific applications enforced the in-depth research in addition to the improvement of processing and characterization techniques. This book contains twenty two chapters and offers an up-to-date view of recent research into ferroelectricity. The chapters cover various formulations, their forms (bulk, thin films, ferroelectric liquid crystals), fabrication, properties, theoretical topics and ferroelectricity at nanoscale.

Download or read book Pulsed Laser Crystallization of Ferroelectric Piezoelectric Oxide Thin Films written by Adarsh Rajashekhar and published by . This book was released on 2017 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Integration of ferroelectric/piezoelectric thin films, such as those of lead zirconate titanate (PZT), with temperature sensitive substrates (complementary metal oxide semiconductors (CMOS), or polymers) would benefit from growth at substrate temperatures below 400C. However, high temperatures are usually required for obtaining good quality PZT films via conventional routes like rapid thermal processing (>550C). Those conditions are not compatible either with polymer substrates or completed CMOS circuits and dictate exploration of alternative methods to realize integration with such substrates.In part of this work, factors influencing KrF excimer laser induced crystallization of amorphous sputtered Pb(Zr0.30Ti0.70)O3 thin films at substrate temperatures

Download or read book Piezotronics and Piezo Phototronics written by Zhong Lin Wang and published by Springer Science & Business Media. This book was released on 2013-01-11 with total page 254 pages. Available in PDF, EPUB and Kindle. Book excerpt: The fundamental principle of piezotronics and piezo-phototronics were introduced by Wang in 2007 and 2010, respectively. Due to the polarization of ions in a crystal that has non-central symmetry in materials, such as the wurtzite structured ZnO, GaN and InN, a piezoelectric potential (piezopotential) is created in the crystal by applying a stress. Owing to the simultaneous possession of piezoelectricity and semiconductor properties, the piezopotential created in the crystal has a strong effect on the carrier transport at the interface/junction. Piezotronics is for devices fabricated using the piezopotential as a “gate” voltage to control charge carrier transport at a contact or junction. The piezo-phototronic effect uses the piezopotential to control the carrier generation, transport, separation and/or recombination for improving the performance of optoelectronic devices, such as photon detector, solar cell and LED. The functionality offered by piezotroics and piezo-phototronics are complimentary to CMOS technology. There is an effective integration of piezotronic and piezo-phototronic devices with silicon based CMOS technology. Unique applications can be found in areas such as human-computer interfacing, sensing and actuating in nanorobotics, smart and personalized electronic signatures, smart MEMS/NEMS, nanorobotics and energy sciences. This book introduces the fundamentals of piezotronics and piezo-phototronics and advanced applications. It gives guidance to researchers, engineers and graduate students.

Download or read book Chemical Solution Deposition of Functional Oxide Thin Films written by Theodor Schneller and published by Springer Science & Business Media. This book was released on 2014-01-24 with total page 801 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is the first text to cover all aspects of solution processed functional oxide thin-films. Chemical Solution Deposition (CSD) comprises all solution based thin- film deposition techniques, which involve chemical reactions of precursors during the formation of the oxide films, i. e. sol-gel type routes, metallo-organic decomposition routes, hybrid routes, etc. While the development of sol-gel type processes for optical coatings on glass by silicon dioxide and titanium dioxide dates from the mid-20th century, the first CSD derived electronic oxide thin films, such as lead zirconate titanate, were prepared in the 1980’s. Since then CSD has emerged as a highly flexible and cost-effective technique for the fabrication of a very wide variety of functional oxide thin films. Application areas include, for example, integrated dielectric capacitors, ferroelectric random access memories, pyroelectric infrared detectors, piezoelectric micro-electromechanical systems, antireflective coatings, optical filters, conducting-, transparent conducting-, and superconducting layers, luminescent coatings, gas sensors, thin film solid-oxide fuel cells, and photoelectrocatalytic solar cells. In the appendix detailed “cooking recipes” for selected material systems are offered.

Download or read book 2018 IEEE ISAF FMA AMF AMEC PFM Joint Conference IFAAP written by IEEE Staff and published by . This book was released on 2018-05-27 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: This international conference aims to bring together leaders from academia, national laboratories and industrial research and development sectors, to discuss the most recent advancements in the science and technology of ferroelectric and dielectric materials, spanning a broad range of topics from the theory and modeling of the materials, to processing and characterization thereof, as well as development of new applications and devices

Download or read book Piezoelectric MEMS Resonators written by Harmeet Bhugra and published by Springer. This book was released on 2017-01-09 with total page 423 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include: Widely-used piezoelectric materials, as well as materials in which there is emerging interest Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets ...and more! The authors present industry and academic perspectives, making this book ideal for engineers, graduate students, and researchers.