Download or read book Ion Emission and Expansion in Laser produced Tin Plasma written by Russell Allen Burdt and published by . This book was released on 2011 with total page 153 pages. Available in PDF, EPUB and Kindle. Book excerpt: Laser produced Sn plasma, in its role as an efficient extreme ultraviolet (EUV) x-ray source, is being studied extensively in support of next generation manufacturing of integrated circuits by nanolithography. The ability to diagnose and manipulate the properties of ions emitted from the laser produced plasma (LPP) must be achieved in order for the technology to meet stringent performance requirements. Here we study the emission and expansion of ions from Sn LPP, in parameter space relevant to the EUV x-ray source application. Several particle and radiation plasma diagnostics, in addition to analytical and numerical analysis, are all used to elucidate the complex relationships between the target properties, irradiation conditions, and resultant plasma and ion properties. Two specific laser systems of current interest to the application, at wavelengths of 1.064 micrometers and 10.6 micrometers are both utilized, which allows for direct comparisons of the effects of laser wavelength on ion properties. Details of the available experimental apparatus, including the Nd:YAG and CO2 laser systems, are discussed first. Following, the design and realization of a custom charged particle plasma diagnostic, hereafter referred to as the ion probe, is described. The successful development of the ion probe enabled measurements of the energy distribution for each charge state of each ion species in expanding plasma, which is a new diagnostic capability. Measurements of mass ablation from Sn plasma produced by a 1.064 micrometer laser are discussed next, specifically the scaling of mass ablation rate with laser intensity. These measurements are useful in the design of mass-limited targets, and also are used to infer mechanisms of laser energy absorption and heat conduction within the plasma. In addition to the ion probe, an EUV spectrometer and a calibrated EUV calorimeter were both utilized as diagnostics to measure the mass ablation rate by complementary methods. Laser intensity was scanned from 3x1011W/cm2 to 2x1012 W/cm2, encompassing parameter space of the EUV x-ray source application to the low end of parameter space of the laser fusion application. Accordingly, previous theoretical results relevant to the laser fusion application can be applied in the data analysis. Experiments at two different laser wavelengths to extensively study the dynamics of ion expansion into vacuum are discussed next. In one set of experiments, the ion probe was used to measure energy distributions for all charge states of Sn ions at laser intensities of 3x1011W/cm2 to 2x1012, from 1.064 micrometer and 10.6 micrometer lasers, respectively. At the longer laser wavelength, higher charge state ions are observed. At both laser wavelengths, the peak ion energies increase approximately linearly as a function of charge state, and all ion energies greatly exceed the initial thermal electron temperature. In a second set of experiments, the distance from the target surface over which the charge state distribution evolves in vacuum is investigated. A Faraday cup translated along the path of plasma expansion is utilized in these measurements. It was found that at the longer laser wavelength, the charge state distribution is decaying to lower charge states over distances up to hundreds of millimeters from the target surface, whereas at the shorter laser wavelength the charge state distribution reaches a frozen-in state within a few tens of millimeters from the target surface. These experimental results are used to infer mechanisms of ion acceleration and recombination in the expanding plasma. In the last section, analytical models of ion expansion into vacuum relevant to the experimental results are first discussed. More detailed analyses are then carried out through numerical simulations. First, a zero-dimensional code following the time evolution of plasma temperature and the population of each ion species is discussed and used to verify some qualitative features observed in the experiments. A more complex one-dimensional Lagrangian hydrodynamics code utilizing the zero-dimensional code as one step in its algorithm is then used to simulate ion properties throughout the spatial expansion into vacuum. Due to the significant number of assumptions made in both codes, only qualitative features of the experiments are reproduced.
Download or read book Extreme ultraviolet Radiation Transport in Small Scale Length Laser produced Tin Plasmas written by Kevin Lamar Williams Sequoia and published by . This book was released on 2009 with total page 179 pages. Available in PDF, EPUB and Kindle. Book excerpt: The majority of the studies on laser-produced plasmas as an efficient extreme ultraviolet (EUV) light source have focused on relatively large plasmas produced at large laser facilities. However, to develop a commercially viable light source for EUV lithography, much smaller lasers and hence much smaller plasmas must be employed. Smaller plasmas behave quite differently than large plasmas in that the temperature and density are less uniform, and lateral expansion is more important. These differences affect the energy transport and, in particular, the radiation transport. This work studies the EUV radiation transport in small scale length tin plasmas, focusing on the effects of target geometry and laser pulse duration. Both planar and spherical tin targets were irradiated with an Nd:YAG laser operating at 1.064 [Mu]m. Conversion efficiency of laser light to 13.5 nm radiation (in-band), EUV emission spectrum, two-dimensional in-band emission profile, and the plasma electron density were measured experimentally. These measurements provide insight into where the laser is absorbed, where the in-band emission is produced, and how the radiation is transmitted. The plasma evolution in these experiments were simulated with a two-dimensional radiation hydrodynamic code, while the radiation transport and atomic kinetics where modeled with a collisional radiative code. Additional experiments were conducted using planar targets where the pulse duration was varied from 0.5 ns to 16 ns to understand the effects of laser pulse duration. It was found that the optimum plasma temperature for efficient generation and transmission of in-band emission is 20 eV. This is lower than the previously reported optimum temperature of 30 eV. The use of a 1.064 [Mu]m heating laser results in overheating of the plasma in a region that is much too dense to transmit the in-band emission. This overheating is necessary for the plasma to reach the optimum temperature in the region where the density is low enough to transmit the in-band emission.
Download or read book EUV Sources for Lithography written by Vivek Bakshi and published by SPIE Press. This book was released on 2006 with total page 1104 pages. Available in PDF, EPUB and Kindle. Book excerpt: This comprehensive volume, edited by a senior technical staff member at SEMATECH, is the authoritative reference book on EUV source technology. The volume contains 38 chapters contributed by leading researchers and suppliers in the EUV source field. Topics range from a state-of-the-art overview and in-depth explanation of EUV source requirements, to fundamental atomic data and theoretical models of EUV sources based on discharge-produced plasmas (DPP) and laser-produced plasmas, to a description of prominent DPP and LPP designs and other technologies for producing EUV radiation. Additional topics include EUV source metrology and components (collectors, electrodes), debris mitigation, and mechanisms of component erosion in EUV sources. The volume is intended to meet the needs of both practitioners of the technology and readers seeking an introduction to the subject.
Download or read book Modern Methods in Collisional Radiative Modeling of Plasmas written by Yuri Ralchenko and published by Springer. This book was released on 2016-02-25 with total page 220 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides a compact yet comprehensive overview of recent developments in collisional-radiative (CR) modeling of laboratory and astrophysical plasmas. It describes advances across the entire field, from basic considerations of model completeness to validation and verification of CR models to calculation of plasma kinetic characteristics and spectra in diverse plasmas. Various approaches to CR modeling are presented, together with numerous examples of applications. A number of important topics, such as atomic models for CR modeling, atomic data and its availability and quality, radiation transport, non-Maxwellian effects on plasma emission, ionization potential lowering, and verification and validation of CR models, are thoroughly addressed. Strong emphasis is placed on the most recent developments in the field, such as XFEL spectroscopy. Written by leading international research scientists from a number of key laboratories, the book offers a timely summary of the most recent progress in this area. It will be a useful and practical guide for students and experienced researchers working in plasma spectroscopy, spectra simulations, and related fields.
Download or read book Single fluid Radiation hydrodynamic Modeling of Laser driven EUV emitting Plasmas written by and published by . This book was released on 2023 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: State-of-the-art nanolithography machines employ extreme ultraviolet (EUV) light to pattern nanometer-scale features on silicon wafers for the production of integrated circuits. This radiation is generated in a laser-produced plasma formed on tin microdroplet targets. This thesis presents work on radiation-hydrodynamic simulations of tin droplet-based laser-produced plasmas, including plasma characterization, plasma expansion, and subsequent early-time droplet dynamics. The work is closely connected to experimental measurements, be it to successfully validate the simulation results on plasma expansion and droplet dynamics, or to guide future experiments towards optimal EUV emission conditions. It is shown that, after validation, the simulations can provide additional insight into (i) non-trivial plasma dynamics leading to the measured ion kinetic energy distributions and (ii) the plasma impulse shaping the early-time droplet dynamics that ultimately determines the late-time droplet morphology. Moreover, the simulations can successfully explore a broad range of laser wavelengths and intensities. Finally, these investigations aim to complement efforts to increase the performance of the EUV source system: the conversion efficiency of laser pulses to in-band EUV radiation as well as the lifetime of the collector mirror, which may be affected by ionic or liquid debris.
Download or read book The Physics of Inertial Fusion written by Stefano Atzeni and published by OUP Oxford. This book was released on 2004-06-03 with total page 488 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is on inertial confinement fusion, an alternative way to produce electrical power from hydrogen fuel by using powerful lasers or particle beams. It involves the compression of tiny amounts (micrograms) of fuel to thousand times solid density and pressures otherwise existing only in the centre of stars. Thanks to advances in laser technology, it is now possible to produce such extreme states of matter in the laboratory. Recent developments have boosted laser intensities again with new possibilities for laser particle accelerators, laser nuclear physics, and fast ignition of fusion targets. This is a reference book for those working on beam plasma physics, be it in the context of fundamental research or applications to fusion energy or novel ultra-bright laser sources. The book combines quite different areas of physics: beam target interaction, dense plasmas, hydrodynamic implosion and instabilities, radiative energy transfer as well as fusion reactions. Particular attention is given to simple and useful modelling, including dimensional analysis and similarity solutions. Both authors have worked in this field for more than 20 years. They want to address in particular those teaching this topic to students and all those interested in understanding the technical basis.
Download or read book The Theory of Atomic Structure and Spectra written by Robert D. Cowan and published by Univ of California Press. This book was released on 2023-11-15 with total page 752 pages. Available in PDF, EPUB and Kindle. Book excerpt: Both the interpretation of atomic spectra and the application of atomic spectroscopy to current problems in astrophysics, laser physics, and thermonuclear plasmas require a thorough knowledge of the Slater-Condon theory of atomic structure and spectra. This book gathers together aspects of the theory that are widely scattered in the literature and augments them to produce a coherent set of closed-form equations suitable both for computer calculations on cases of arbitrary complexity and for hand calculations for very simple cases.
Download or read book Laser induced Breakdown Spectroscopy LIBS written by Andrzej W. Miziolek and published by . This book was released on 2014-05-14 with total page 640 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is the first comprehensive reference explaining the fundamentals of the LIBS phenomenon, its history and its fascinating applications across eighteen chapters written by recognized leaders in the field. This book will be of significant interest to researchers in chemical and materials analysis within academia and industry.
Download or read book The Dynamics of a Laser Produced Heavy Ion Plasma written by Lawrence Martin Schadegg and published by . This book was released on 1970 with total page 58 pages. Available in PDF, EPUB and Kindle. Book excerpt: To investigate the front of a laser produced plasma that is expanding in a homogeneous magnetic field a reliable method of positioning the target, monitoring the laser, and observing the properties of the expanding plasma had to be developed. Photodiodes and supporting circuitry were constructed to observe the laser interaction with the plasma, plasma expansion velocity, and total light emitted from the plasma. A heavy material, copper, was chosen to slow down the processes occurring in the expanding plasma front. The predictions of a computer program of the mathematical analogue to the experiment give expansion velocities of approximately 10 to the 6th power cm/sec and indicate a bouncing of the plasma front off the magnetic field. (Author).
Download or read book Atomic Properties in Hot Plasmas written by Jacques Bauche and published by Springer. This book was released on 2015-08-03 with total page 386 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is devoted to the calculation of hot-plasma properties which generally requires a huge number of atomic data. It is the first book that combines information on the details of the basic atomic physics and its application to atomic spectroscopy with the use of the relevant statistical approaches. Information like energy levels, radiative rates, collisional and radiative cross-sections, etc., must be included in equilibrium or non-equilibrium models in order to describe both the atomic-population kinetics and the radiative properties. From the very large number of levels and transitions involved in complex ions, some statistical (global) properties emerge. The book presents a coherent set of concepts and compact formulas suitable for tractable and accurate calculations. The topics addressed are: radiative emission and absorption, and a dozen of other collisional and radiative processes; transition arrays between level ensembles (configurations, superconfigurations); effective temperatures of configurations, superconfigurations, and ions; charge-state distributions; radiative power losses and opacity. There are many numerical examples and comparisons with experiment presented throughout the book. The plasma properties described in this book are especially relevant to large nuclear fusion facilities such as the NIF (California) and the ITER (France), and to astrophysics. Methods relevant to the central-field configurational model are described in detail in the appendices: tensor-operator techniques, second-quantization formalism, statistical distribution moments, and the algebra of partition functions. Some extra tools are propensity laws, correlations, and fractals. These methods are applied to the analytical derivation of many properties, specially the global ones, through which the complexity is much reduced. The book is intended for graduate-level students, and for physicists working in the field.
Download or read book Laser Plasmas and Nuclear Energy written by Heinrich Hora and published by . This book was released on 1975 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Atoms Solids and Plasmas in Super Intense Laser Fields written by Dimitri Batani and published by Springer Science & Business Media. This book was released on 2001-09-30 with total page 434 pages. Available in PDF, EPUB and Kindle. Book excerpt: Proceedings of the 30th Course of the International School of Quantum Electronics on Atoms, Solids and Plasmas in Super-Intense Laser Fields, held 8-14 July, in Erice, Sicily
Download or read book Plasma Spectroscopy written by Takashi Fujimoto and published by Clarendon Press. This book was released on 2004-06-17 with total page 300 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book focuses on the characteristics of optical radiation, or a spectrum, emitted by various plasmas. In plasma, the same atomic species can produce quite different spectra, or colours, depending on the nature of the plasma. This book gives a theoretical framework by which a particular spectrum can be interpreted correctly and coherently. The uniqueness of the book lies in its comprehensive treatment of the intensity distribution of spectral lines and the population density distribution among the atomic levels in plasmas. It is intended to provide beginners with a good perspective of the field, laying out the physics in an extremely clear manner and starting from an elementary level. A useful feature of the book is the asterisked sections and chapters which can be skipped by readers who only wish to gain a quick and basic introduction to plasma spectroscopy. It will also be useful to researchers working actively in the field, acting as a guide for carrying out experiments and interpreting experimental observations.
Download or read book The Plasma Universe written by Curt Suplee and published by Cambridge University Press. This book was released on 2009-09-10 with total page 88 pages. Available in PDF, EPUB and Kindle. Book excerpt: Plasma physics is the fascinating science behind lightning bolts, fluorescent lights, solar flares, ultra-bright TV screens, fusion reactors, cosmic jets and black hole radiation, to name but a few examples. Yet plasmas obey their own, often very surprising, rules, and repeatedly defy our best efforts to anticipate and control them. This richly illustrated book reveals for the first time the exciting world of plasma physics to a non-technical audience. It describes the phenomena, and follows the worldwide research effort to comprehend them, taking the reader on a journey from neighborhood neon lights to the remotest galaxies and beyond. The lively text is interspersed with fascinating photographs and explanatory diagrams, giving the readers a deeper understanding of the world around them.
Download or read book Resonance Enhancement in Laser Produced Plasmas written by Rashid A. Ganeev and published by John Wiley & Sons. This book was released on 2018-07-24 with total page 410 pages. Available in PDF, EPUB and Kindle. Book excerpt: A comprehensive guide to a new technology for enabling high-performance spectroscopy and laser sources Resonance Enhancement in Laser-Produced Plasmas offers a guide to the most recent findings in the newly emerged field of resonance-enhanced high-order harmonic generation using the laser pulses propagating through the narrow and extended laser-produced plasma plumes. The author—a noted expert in the field—presents an introduction and the theory that underpin the roles of resonances in harmonic generation. The book also contains a review of the most advanced methods of plasma harmonics generation at the conditions of coincidence of some harmonics, autoionizing states, and some ionic transitions possessing strong oscillator strengths. Comprehensive in scope, this text clearly demonstrates the importance of resonance-enhanced nonlinear optical effects leading to formation of efficient sources of coherent extreme ultraviolet radiation that can be practically applied. This important resource: Puts the focuses on novel applications of laser-plasma physics, such as the development of ultrashort-wavelength coherent light sources Details both the theoretical and experimental aspects of higher-order harmonic generation in laser-produced plasmas Contains information on early studies of resonance enhancement of harmonics in metal-ablated plasmas Analyzes the drawbacks of different theories of resonant high order harmonic generation Includes a discussion of the quasi-phase-matching and properties of semiconductor plasmas Written for researchers and students in the fields of physics, materials science, and electrical engineering who are interested in laser physics and optics, Resonance Enhancement in Laser-Produced Plasmas offers an introduction to the topic and covers recent experimental studies of various resonance processes in plasmas leading to enhancement of single harmonic.
Download or read book Laser Processing and Chemistry written by Dieter Bäuerle and published by Springer Science & Business Media. This book was released on 2011-09-02 with total page 846 pages. Available in PDF, EPUB and Kindle. Book excerpt: Laser Processing and Chemistry gives an overview of the fundamentals and applications of laser-matter interactions, in particular with regard to laser material processing. Special attention is given to laser-induced physical and chemical processes at gas-solid, liquid-solid, and solid-solid interfaces. Starting with the background physics, the book proceeds to examine applications of laser techniques in micro-machining, and the patterning, coating, and modification of material surfaces. This fourth edition has been revised and enlarged to cover new topics such as 3D microfabrication, advances in nanotechnology, ultrafast laser technology and laser chemical processing (LCP). Graduate students, physicists, chemists, engineers, and manufacturers alike will find this book an invaluable reference work on laser processing.
Download or read book High Energy and Short Pulse Lasers written by Richard Viskup and published by BoD – Books on Demand. This book was released on 2016-09-07 with total page 426 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book gives the readers an introduction to experimental and theoretical knowledge acquired by large-scale laser laboratories that are dealing with extra-high peak power and ultrashort laser pulses for research of terawatt (TW), petawatt (PW), or near-future exawatt (EW) laser interactions, for soft X-ray sources, for acceleration of particles, or for generation of hot dense thermal plasma for the laser fusion. The other part of this book is dealing with the small-scale laser laboratories that are using for its research on commercial sources of laser radiation, nanosecond (ns), picosecond (ps), or femtosecond (fs) laser pulses, either for basic research or for more advanced applications. This book is divided into six main sections dealing with short and ultrashort laser pulses, laser-produced soft X-ray sources, large-scale high-power laser systems, free-electron lasers, fiber-based sources of short optical pulse, and applications of short pulse lasers. In each chapter readers can find fascinating topics related to the high energy and/or short pulse laser technique. Individual chapters should serve the broad spectrum of readers of different expertise, layman, undergraduate and postgraduate students, scientists, and engineers, who may in this book find easily explained fundamentals as well as advanced principles of particular subjects related to these phenomena.
