Download or read book Ion assisted Chemical Vapor Deposition of Thin Film Cubic Boron Nitride written by Darren Herman Berns and published by . This book was released on 1998 with total page 173 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Deposition of Cubic Boron Nitride Thin Films by Supersonic D C Plasma enhanced Chemical Vapor Deposition written by Eric Runde and published by . This book was released on 2004 with total page 122 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Cubic Boron Nitride Film Deposition and Process Diagnostics in a Supersonic Plasma Jet Chemical Vapor Deposition System with Substrate Bias written by Jami Lyn McLaren and published by . This book was released on 2006 with total page 354 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Nucleation and Growth of Ion beam deposited Cubic Boron Nitride Thin Films written by Horst Feldermann and published by Cuvillier Verlag. This book was released on 2002 with total page 130 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Low Energy Ion Assisted Film Growth written by A. R. González-Elipe and published by World Scientific Publishing Company. This book was released on 2003-01-01 with total page 283 pages. Available in PDF, EPUB and Kindle. Book excerpt: An introductory manual for Ion Assisted Deposition (IAD) procedures of thin films. Addressed to researchers, post-graduates and even engineers with little or no experience, the book reviews the basic concepts related to the interaction of low energy ion beams with materials.

Download or read book Handbook of Chemical Vapor Deposition written by Hugh O. Pierson and published by William Andrew. This book was released on 2012-12-02 with total page 458 pages. Available in PDF, EPUB and Kindle. Book excerpt: Handbook of Chemical Vapor Deposition: Principles, Technology and Applications provides information pertinent to the fundamental aspects of chemical vapor deposition. This book discusses the applications of chemical vapor deposition, which is a relatively flexible technology that can accommodate many variations. Organized into 12 chapters, this book begins with an overview of the theoretical examination of the chemical vapor deposition process. This text then describes the major chemical reactions and reviews the chemical vapor deposition systems and equipment used in research and production. Other chapters consider the materials deposited by chemical vapor deposition. This book discusses as well the potential applications of chemical vapor deposition in semiconductors and electronics. The final chapter deals with ion implantation as a major process in the fabrication of semiconductors. This book is a valuable resource for scientists, engineers, and students. Production and marketing managers and suppliers of equipment, materials, and services will also find this book useful.

Download or read book Investigation of Reactively Sputtered Boron Carbon Nitride Thin Films written by Vinit O. Todi and published by . This book was released on 2011 with total page 130 pages. Available in PDF, EPUB and Kindle. Book excerpt: Research efforts have been focused in the development of hard and wear resistant coatings over the last few decades. These protective coatings find applications in the industry such as cutting tools, automobile and machine part etc. Various ceramic thin films like TiN, TiAlN, TiC, SiC and diamond-like carbon (DLC) are examples of the films used in above applications. However, increasing technological and industrial demands request thin films with more complicated and advanced properties. For this purpose, B-C-N ternary system which is based on carbon, boron and nitrogen which exhibit exceptional properties and attract much attention from mechanical, optical and electronic perspectives. Also, boron carbonitride (BCN) thin films contains interesting phases such as diamond, cubic BN (c-BN), hexagonal boron nitride (h-BN), B4C, [greek lower case letter beta]-C3N4. Attempts have been made to form a material with semiconducting properties between the semi metallic graphite and the insulating h-BN, or to combine the cubic phases of diamond and c-BN (BC2N heterodiamond) in order to merge the higher hardness of the diamond with the advantages of c-BN, in particular with its better chemical resistance to iron and oxygen at elevated temperatures. New microprocessor CMOS technologies require interlayer dielectric materials with lower dielectric constant than those used in current technologies to meet RC delay goals and to minimize cross-talk. Silicon oxide or fluorinated silicon oxide (SiOF) materials having dielectric constant in the range of 3.6 to 4 have been used for many technology nodes. In order to meet the aggressive RC delay goals, new technologies require dielectric materials with K[less than]3. BCN shows promise as a low dielectric constant material with good mechanical strength suitable to be used in newer CMOS technologies. For optical applications, the deposition of BCN coatings on polymers is a promising method for protecting the polymer surface against wear and scratching. BCN films have high optical transparency and thus can be used as mask substrates for X-ray lithography. Most of the efforts from different researchers were focused to deposit cubic boron nitride and boron carbide films. Several methods of preparing boron carbon nitride films have been reported, such as chemical vapor deposition (CVD), plasma assisted CVD, pulsed laser ablation and ion beam deposition. Very limited studies could be found focusing on the effect of nitrogen incorporation into boron carbide structure by sputtering. In this work, the deposition and characterization of amorphous thin films of boron carbon nitride (BCN) is reported. The BCN thin films were deposited by radio frequency (rf) magnetron sputtering system. The BCN films were deposited by sputtering from a high purity B4C target with the incorporation of nitrogen gas in the sputtering ambient. Films of different compositions were deposited by varying the ratios of argon and nitrogen gas in the sputtering ambient. Investigation of the oxidation kinetics of these materials was performed to study high temperature compatibility of the material. Surface characterization of the deposited films was performed using X-ray photoelectron spectroscopy and optical profilometry. Studies reveal that the chemical state of the films is highly sensitive to nitrogen flow ratios during sputtering. Surface analysis shows that smooth and uniform BCN films can be produced using this technique. Carbon and nitrogen content in the films seem to be sensitive to annealing temperatures. However depth profile studies reveal certain stoichiometric compositions to be stable after high temperature anneal up to 700°C. Electrical and optical characteristics are also investigated with interesting results. The optical band gap of the films ranged from 2.0 eV - 3.1 eV and increased with N2/Ar gas flow ratio except at the highest ratio. The optical band gap showed an increasing trend when annealed at higher temperatures. The effect of deposition temperature on the optical and chemical compositions of the BCN films was also studied. The band gap increased with the deposition temperature and the films deposited at 500°C had the highest band gap. Dielectric constant was calculated from the Capacitance-Voltage curves obtained for the MOS structures with BCN as the insulating material. Aluminum was used as the top electrode and the substrate was p-type Si. Effect of N2/Ar gas flow ratio and annealing on the values of dielectric constant was studied and the dielectric constant of 2.5 was obtained for the annealed BCN films. This by far is the lowest value of dielectric constant reported for BCN film deposited by sputtering. Lastly, the future research work on the BCN films that will be carried out as a part of the dissertation is proposed.

Download or read book Chemical Vapor Deposition Growth and Characterization of Two Dimensional Hexagonal Boron Nitride written by Roland Yingjie Tay and published by Springer. This book was released on 2018-06-20 with total page 122 pages. Available in PDF, EPUB and Kindle. Book excerpt: This thesis focuses on the growth of a new type of two-dimensional (2D) material known as hexagonal boron nitride (h-BN) using chemical vapor deposition (CVD). It also presents several significant breakthroughs in the authors’ understanding of the growth mechanism and development of new growth techniques, which are now well known in the field. Of particular importance is the pioneering work showing experimental proof that 2D crystals of h-BN can indeed be hexagonal in shape. This came as a major surprise to many working in the 2D field, as it had been generally assumed that hexagonal-shaped h-BN was impossible due to energy dynamics. Beyond growth, the thesis also reports on synthesis techniques that are geared toward commercial applications. Large-area aligned growth and up to an eightfold reduction in the cost of h-BN production are demonstrated. At present, all other 2D materials generally use h-BN as their dielectric layer and for encapsulation. As such, this thesis lays the cornerstone for using CVD 2D h-BN for this purpose.

Download or read book Hot Filament Activated Chemical Vapor Deposition of Nitride and Carbide Thin Films written by Sadanand Vinayak Deshpande and published by . This book was released on 1994 with total page 302 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Residual Stresses in Cubic Boron Nitride Thin Films Deposited by Ion assisted Laser Ablation written by Gregory Frank Cardinale and published by . This book was released on 1995 with total page 336 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Growth of Semiconducting Cubic Boron Nitride Thin Films written by Dmitri Litvinov and published by . This book was released on 1999 with total page 220 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Setup of Low Pressure Chemical Vapor Deposition of Boron Nitride Thin Films written by Hsiao C. Liu and published by . This book was released on 1991 with total page 36 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Boron Nitride Nanomaterials written by Ben McLean and published by CRC Press. This book was released on 2022-12-23 with total page 231 pages. Available in PDF, EPUB and Kindle. Book excerpt: Boron nitride was first produced in the 18th century and, by virtue of its extraordinary mechanical strength, has found extensive application in industrial processes since the 1940s. However, the more recent discovery that boron nitride allotropes are as structurally diverse as those of carbon (e.g. fullerenes, graphene, carbon nanotubes) has placed this material, and particularly its low-dimensional allotropes, back at the forefront of modern material science. This book provides a comprehensive history of this rapid rise in the status of boron nitride and boron nitride nanomaterials, spanning the earliest examples of three-dimensional boron nitride allotropes, through to contemporary structures such as monolayer hexagonal boron nitride, boron nitride nanomeshes, boron nitride nanotubes and the incorporation of boron nitride into cutting-edge van der Waals heterostructures. It specifically focuses on the properties, applications and synthesis techniques for each of these allotropes and examines how the evolution in boron nitride production methods is linked to that in our understanding of how low-dimensional nanomaterials self-assemble, or ‘grow’, during synthesis. The book demonstrates the key synergy between growth mechanisms and the development of new, advanced nanostructured materials.

Download or read book Handbook of Physical Vapor Deposition PVD Processing written by D. M. Mattox and published by Cambridge University Press. This book was released on 2014-09-19 with total page 947 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book covers all aspects of physical vapor deposition (PVD) process technology from the characterizing and preparing the substrate material, through deposition processing and film characterization, to post-deposition processing. The emphasis of the book is on the aspects of the process flow that are critical to economical deposition of films that can meet the required performance specifications. The book covers subjects seldom treated in the literature: substrate characterization, adhesion, cleaning and the processing. The book also covers the widely discussed subjects of vacuum technology and the fundamentals of individual deposition processes. However, the author uniquely relates these topics to the practical issues that arise in PVD processing, such as contamination control and film growth effects, which are also rarely discussed in the literature. In bringing these subjects together in one book, the reader can understand the interrelationship between various aspects of the film deposition processing and the resulting film properties. The author draws upon his long experience with developing PVD processes and troubleshooting the processes in the manufacturing environment, to provide useful hints for not only avoiding problems, but also for solving problems when they arise. He uses actual experiences, called ""war stories"", to emphasize certain points. Special formatting of the text allows a reader who is already knowledgeable in the subject to scan through a section and find discussions that are of particular interest. The author has tried to make the subject index as useful as possible so that the reader can rapidly go to sections of particular interest. Extensive references allow the reader to pursue subjects in greater detail if desired. The book is intended to be both an introduction for those who are new to the field and a valuable resource to those already in the field. The discussion of transferring technology between R&D and manufacturing provided in Appendix 1, will be of special interest to the manager or engineer responsible for moving a PVD product and process from R&D into production. Appendix 2 has an extensive listing of periodical publications and professional societies that relate to PVD processing. The extensive Glossary of Terms and Acronyms provided in Appendix 3 will be of particular use to students and to those not fully conversant with the terminology of PVD processing or with the English language.

Download or read book Ion Assisted Sputter Deposition and Structural Characterization of Cubic Boron Nitride written by Shirley L. Matson Kidner and published by . This book was released on 1994 with total page 330 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Metallurgical Coatings and Thin Films 1991 written by G.E. McGuire and published by Elsevier. This book was released on 2012-12-02 with total page 587 pages. Available in PDF, EPUB and Kindle. Book excerpt: The contributions in this two-volume set represent the work of over two hundred international researchers from universities, government laboratories and industry, with diverse backgrounds and interests in a wide range of coatings and thin film processes. The two hundred and six papers attest to the fact that Metallurgical Coatings is a rapidly growing field attracting experts from the large materials, scientific and technical community. The papers will be a useful and dynamic tool for those wishing to increase their knowledge on metallurgical coatings, as well as providing a guide to recent literature in this field.

Download or read book Plasma enhanced Chemical Vapor Deposition of Boron Nitride written by Todd Hideo Yuzuriha and published by . This book was released on 1984 with total page 320 pages. Available in PDF, EPUB and Kindle. Book excerpt: