Download or read book Growth and Characterization of Nanocrystalline Diamond Films for Microelectronics and Microelectromechanical Systems written by Sathyaharish Jeedigunta and published by . This book was released on 2008 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: ABSTRACT: Diamond is widely known for its extraordinary properties, such as high thermal conductivity, energy bandgap and high material hardness and durability making it a very attractive material for microelectronic and mechanical applications. Synthetic diamonds produced by chemical vapor deposition (CVD) methods retain most of the properties of natural diamond. Within this class of material, nanocrystalline diamond (NCD) is being developed for microelectronic and microelectromechanical systems (MEMS) applications. During this research, intrinsic and doped NCD films were grown by the microwave plasma enhanced chemical vapor deposition (MPECVD) method using CH4/Ar/H2 gas mixture and CH4/Ar/N2 gas chemistries respectively. The first part of research focused on the growth and characterization of NCD films while the second part on the application of NCD as a structural material in MEMS device fabrication.

Download or read book Materials Characterization Techniques written by Sam Zhang and published by CRC Press. This book was released on 2008-12-22 with total page 344 pages. Available in PDF, EPUB and Kindle. Book excerpt: Experts must be able to analyze and distinguish all materials, or combinations of materials, in use today-whether they be metals, ceramics, polymers, semiconductors, or composites. To understand a material's structure, how that structure determines its properties, and how that material will subsequently work in technological applications, researche

Download or read book Growth and Characterization of Nitrogen Doped Nanocrystalline Diamond Films written by and published by . This book was released on 2006 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Synthesis and Characterization of Nanocrystalline Diamond Films written by Nicolas Wöhrl and published by . This book was released on 2010 with total page 175 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Ultrananocrystalline Diamond written by Olga A. Shenderova and published by William Andrew. This book was released on 2012-12-31 with total page 581 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ultrananocrystalline Diamond: Synthesis, Properties, and Applications is a unique practical reference handbook. Written by the leading experts worldwide it introduces the science of UNCD for both the R&D community and applications developers using UNCD in a diverse range of applications from macro to nanodevices, such as energy-saving ultra-low friction and wear coatings for mechanical pump seals and tools, high-performance MEMS/NEMS-based systems (e.g. in telecommunications), the next generation of high-definition flat panel displays, in-vivo biomedical implants, and biosensors. This work brings together the basic science of nanoscale diamond structures, with detailed information on ultra-nanodiamond synthesis, properties, and applications. The book offers discussion on UNCD in its two forms, as a powder and as a chemical vapor deposited film. Also discussed are the superior mechanical, tribological, transport, electrochemical, and electron emission properties of UNCD for a wide range of applications including MEMS/ NEMS, surface acoustic wave (SAW) devices, electrochemical sensors, coatings for field emission arrays, photonic and RF switching, biosensors, and neural prostheses, etc. Ultrananocrystalline Diamond summarises the most recent developments in the nanodiamond field, and presents them in a way that will be useful to the R&D community in both academic and corporate sectors Coverage of both nanodiamond particles and films make this a valuable resource for both the nanotechnology community and the field of thin films / vacuum deposition Written by the world’s leading experts in nanodiamond, this second edition builds on its predecessor’s reputation as the most up-to-date resource in the field

Download or read book Handbook of Thin Films Five Volume Set written by Hari Singh Nalwa and published by Elsevier. This book was released on 2001-11-17 with total page 3451 pages. Available in PDF, EPUB and Kindle. Book excerpt: This five-volume handbook focuses on processing techniques, characterization methods, and physical properties of thin films (thin layers of insulating, conducting, or semiconductor material). The editor has composed five separate, thematic volumes on thin films of metals, semimetals, glasses, ceramics, alloys, organics, diamonds, graphites, porous materials, noncrystalline solids, supramolecules, polymers, copolymers, biopolymers, composites, blends, activated carbons, intermetallics, chalcogenides, dyes, pigments, nanostructured materials, biomaterials, inorganic/polymer composites, organoceramics, metallocenes, disordered systems, liquid crystals, quasicrystals, and layered structures. Thin films is a field of the utmost importance in today's materials science, electrical engineering and applied solid state physics; with both research and industrial applications in microelectronics, computer manufacturing, and physical devices. Advanced, high-performance computers, high-definition TV, digital camcorders, sensitive broadband imaging systems, flat-panel displays, robotic systems, and medical electronics and diagnostics are but a few examples of miniaturized device technologies that depend the utilization of thin film materials. The Handbook of Thin Films Materials is a comprehensive reference focusing on processing techniques, characterization methods, and physical properties of these thin film materials.

Download or read book Microstructural Mechanical and Antibacterial Characterization of Nanocrystalline Diamond Thin Films written by and published by . This book was released on 2004 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Nanocrystalline diamond thin films exhibit unusual hardness, wear resistance, and corrosion resistance properties, and are currently being considered for use in orthopaedic, ophthalmic, and other medical implants. The purpose of this study was to evaluate the hardness, Young's modulus, microscratch adhesion, and antimicrobial properties of nanocrystalline diamond thin films. Microwave plasma enhanced chemical vapor deposition (MPCVD) was used to deposit nanocrystalline diamond thin films on p-type silicon wafers. Raman spectroscopy, scanning electron microscopy (SEM), and high resolution transmission electron microscopy (HRTEM) were used to determine quality and phase purity of the nanocrystalline diamond thin films. The thin films consisted of diamond nodules that varied in morphology (size=60-600 nm). HRTEM showed that the films contained rectangular crystallites with dimensions between 2 -- 4 nm. Raman spectroscopy confirmed that the thin film sample contained both tetrahedrally-bonded and amorphous carbon phases. The hardness and Young's modulus values for the nanocrystalline diamond thin films were 29.4 " 11.9 GPa to 72.0 " 10.7 GPa and 346.4 " 98 GPa to 551.8 " 71.5 GPa, respectively. Microscratch adhesion testing was performed on the nanocrystalline diamond films to examine the functional adhesion strength between the diamond films and the silicon substrates. The nanocrystalline diamond/silicon wafer systems demonstrated very good film adhesion (LCN H"3.1 -- 3.4 N). A CDC biofilm reactor was utilized to incubate and grow Pseudomonas fluorescens on the surfaces of the nanocrystalline diamond thin films and stainless steel coupons. Quantitative data showed that bacterial attachment on the nanocrystalline diamond thin films was quite significant and comparable to that on stainless steel surfaces. This work suggests that nanocrystalline diamond thin films are good candidate materials for biomedical implants but are susceptible.

Download or read book Growth and Characterization of Diamond Thin Films written by Sattar Mirzakuchaki and published by . This book was released on 1996 with total page 272 pages. Available in PDF, EPUB and Kindle. Book excerpt: Chemical vapor deposited (CVD) diamond thin films grown homoepitaxially as well as on non-diamond substrates have been the subject of intense investigation since the beginning of the last decade. Diamond's remarkable properties such as physical hardness, chemical inertness, high thermal conductivity, high breakdown voltage, and high carrier mobility are the main factors for the attention it has received from many researchers around the world. Although these properties are somewhat degraded in polycrystalline diamond films, they are still superior to many other materials. One of the most potentially useful applications of diamond thin films is in the semiconductor industry. Although a few prototype devices such as field effect transistors and Schottky diodes have been fabricated on diamond, some major obstacles remain to be overcome before full scale commercial applications of diamond as a semiconductor is possible. The high cost of large area monocrystalline diamond substrates has forced researchers to look for alternative substrates for the heteroepitaxial growth of diamond. So far only marginal results have been reported on the growth of highly oriented diamond films and on the heteroepitaxial growth involving substrates that are as costly as diamond. Silicon, as the dominant material in semiconductor industry, has been the subject of much research as a substrate for the growth of polycrystalline diamond. Another problem in development of diamond as a semiconductor is the effective doping of diamond, particularly for n-type conductivity. Although many researchers have studied boron-doped (p-type) diamond thin films in the past several years, there have been few reports on the effects of doping diamond films with phosphorous (n-type). Once these two issues have been solved, other fabrication steps such as oxidation, etching, masking, etc. may be attempted. The present work is a study directed toward solving some of these problems by looking at in-situ doping of n-type hot filament CVD (HFCVD) grown diamond films on silicon substrates. The study includes electrical characterization, stable metallic contacts, effect of silicon substrate surface pretreatment, and selective area deposition. A number of different techniques for inducing diamond nucleation on Si substrates are studied and the resulting diamond films characterized by common techniques such as Raman spectroscopy, X-ray diffraction, optical and scanning electron microscopy, and profilometery. The effect of doping the diamond films with different concentrations of phosphorous as well as calculation of the activation energy by temperature measurement was also carried out in this work. A new technique is presented for the selective deposition of diamond films onto silicon substrates.

Download or read book Microstructural Mechanical and Antibacterial Characterization of Nanocrystalline Diamond Thin Films written by Jamal Sana Lewis and published by . This book was released on 2007 with total page 69 pages. Available in PDF, EPUB and Kindle. Book excerpt: Keywords: biomedical coatings, antibacterial, nanocrystalline diamond, mechanical properties.

Download or read book Deposition and Characterization of Nanocrystalline Diamond SiC diamond Beta SiC Composite Film System written by Venkata Satya Siva Srikanth Vadali and published by . This book was released on 2008 with total page 157 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Synthesis of Thin and Thick Ultra nanocrystalline Diamond Films by Microwave Plasma CVD Systems written by Dzung Tri Tran and published by . This book was released on 2005 with total page 314 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Diamond Based Materials written by Qiang Hu and published by . This book was released on 2011 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: The studies covered in this dissertation concentrate on the various forms of diamond films synthesized by chemical vapor deposition (CVD) method, including microwave CVD and hot filament CVD. According to crystallinity and grain size, a variety of diamond forms primarily including microcrystalline (most commonly referred to as polycrystalline) and nanocrystalline diamond films, diamond-like carbon (DLC) films were successfully synthesized. The as-grown diamond films were optimized by changing deposition pressure, volume of reactant gas hydrogen (H2) and carrier gas argon (Ar) in order to get high-quality diamond films with a smooth surface, low roughness, preferred growth orientation and high sp3 bond contents, etc. The characterization of diamond films was carried out by metrological and analytical techniques such as scanning electron microscopy (SEM), X-ray diffraction (XRD), atomic force microscopy (AFM) and Raman spectroscopy. The results of characterization served as feedback to optimize experimental parameters, so as to improve the quality of diamond films. A good understanding of the diamond film properties such as mechanical, electrical, optical and biological properties, which are determined by the qualities of diamond films, is necessary for the selection of diamond films for different applications. The nanocrystalline diamond nanowires grown by a combination of vapor-liquid-solid (VLS) method and CVD method in two stages, and the graphene grown on silicon substrate with nickel catalytic thin film by single CVD method were also investigated in a touch-on level.

Download or read book Growth and Characterization of Thin Film Nanocrystalline Silicon Materials and Solar Cells written by Solomon Nwabueze Agbo and published by . This book was released on 2012 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Handbook of Thin Film Materials Characterization and spectroscopy of thin films written by Hari Singh Nalwa and published by . This book was released on 2002 with total page 816 pages. Available in PDF, EPUB and Kindle. Book excerpt: Vol.1: Deposition and processing of thin films; Vol.2: Characterization and spectroscopy of thin films; Vol.3: Ferroelectric and dielectric thin films; Vol.4: Semiconductor and superconductor thin films; Vol.5: Nanomaterials and magnetic thin flims

Download or read book Growth and Characterization of Diamond Thin Films Deposited on Silicon Substrates written by Po-Jen Cheng and published by . This book was released on 1993 with total page 188 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Advances in Grinding and Abrasive Processes written by Xi Peng Xu and published by Trans Tech Publications Ltd. This book was released on 2004-03-15 with total page 910 pages. Available in PDF, EPUB and Kindle. Book excerpt: The present volume contains selected papers from the 12th Grinding and Machining Conference, held in China (GMC 2003). Volume is indexed by Thomson Reuters CPCI-S (WoS). This collection presents a selection of over 250 papers, submitted to the conference by many universities and industrial concerns. All of the papers were subjected to peer-review by at least two expert referees. Moreover, fifteen papers on high-speed machining were specially selected by Dr. Ning He, a full professor at Nanjing University of Aeronautics and Astronautics (NUAA), from papers submitted to the International Conference on High Speed Machining, which is organized by the NUAA and will be held in Nanjing from March 31st to April 2nd, 2004. These papers have been selected for the present volume because of their quality and the fact that they cover the main topics of the conference.

Download or read book Fabrication and Characterization of Nano crystalline Diamond Films written by and published by . This book was released on 1993 with total page 18 pages. Available in PDF, EPUB and Kindle. Book excerpt: Highly uniform, smooth nano-crystalline diamond films have been fabricated with a magneto-active microwave CVD system. Top and bottom magnet currents were 145A and 60A, while microwave power and substrate temperature were controlled at 1500W and 850°C during deposition. Total processing pressure was regulated at 40 Pa (300 mTorr), with gas flow rates of 30 sccm of hydrogen, 2.4 sccm of methane and 1 sccm of oxygen. Diamond films obtained under the above conditions have grain sizes between 0.1--0.3 [mu]m, a growth rate of 0.1[mu]m/hr and a mean roughness of 14.95 nm. Characterization techniques have involved XRD, Raman spectroscopy, SEM, AFM and TEM. Both X-ray and electron diffraction patterns show no evidence of non-diamond phases. Although a high density of twins and stacking faults were revealed by HREM, compact diamond grains and clean intergranular boundaries (no graphitic or amorphous phases) were observed.