Download or read book GaAs based Integrated Microsensors written by Jun Rim Choi and published by . This book was released on 1991 with total page 266 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Integrated Chemical Microsensor Systems in CMOS Technology written by Andreas Hierlemann and published by Springer Science & Business Media. This book was released on 2005-02-21 with total page 248 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book, "Integrated Chemical Microsensor Systems in CMOS Technology", provides a comprehensive treatment of the highly interdisciplinary field of CMOS chemical microsensor systems. It is targeted at students, scientists and engineers who are interested in gaining an introduction to the field of chemical sensing since all the necessary fundamental knowledge is included. However, as it provides detailed information on all important issues related to the realization of chemical microsensors in CMOS technology, it also addresses experts well familiar with the field. After a brief introduction, the fundamentals of chemical sensing are presented. Fabrication and processing steps that are commonly used in the semiconductor industry are then detailed followed by a short description of the microfabrication techniques, and of the CMOS substrate and materials. Thereafter, a comprehensive overview of semiconductor-based and CMOS-based transducer structures for chemical sensors is given. CMOS-technology is then introduced as platform technology, which enables the integration of these microtransducers with the necessary driving and signal conditioning circuitry on the same chip. In a next section, the development of monolithic multisensor arrays and fully developed microsystems with on-chip sensor control and standard interfaces is described. A short section on packaging shows that techniques from the semiconductor industry can be applied to chemical microsensor packaging. The book concludes with a brief outlook on future developments, such as the realization of more complex integrated microsensor systems and methods to interface biological materials, such as cells, with CMOS microelectronics.
Download or read book Materials Process Integration for MEMS written by Francis E. H. Tay and published by Springer Science & Business Media. This book was released on 2013-06-29 with total page 302 pages. Available in PDF, EPUB and Kindle. Book excerpt: The field of materials and process integration for MEMS research has an extensive past as well as a long and promising future. Researchers, academicians and engineers from around the world are increasingly devoting their efforts on the materials and process integration issues and opportunities in MEMS devices. These efforts are crucial to sustain the long-term growth of the MEMS field. The commercial MEMS community is heavily driven by the push for profitable and sustainable products. In the course of establishing high volume and low-cost production processes, the critical importance of materials properties, behaviors, reliability, reproducibility, and predictability, as well as process integration of compatible materials systems become apparent. Although standard IC fabrication steps, particularly lithographic techniques, are leveraged heavily in the creation of MEMS devices, additional customized and novel micromachining techniques are needed to develop sophisticated MEMS structures. One of the most common techniques is bulk micromachining, by which micromechanical structures are created by etching into the bulk of the substrates with either anisotropic etching with strong alk:ali solution or deep reactive-ion etching (DRIB). The second common technique is surface micromachining, by which planar microstructures are created by sequential deposition and etching of thin films on the surface of the substrate, followed by a fmal removal of sacrificial layers to release suspended structures. Other techniques include deep lithography and plating to create metal structures with high aspect ratios (LIGA), micro electrodischarge machining (J.
Download or read book Annual Report written by United States. Department of Energy. Chemical & Biological Nonproliferation Program and published by . This book was released on 1999 with total page 202 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Chemical Sensors Proceedings of the Symposium written by and published by . This book was released on 1999 with total page 478 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Chemical Sensors Four written by Michael Alan Butler and published by The Electrochemical Society. This book was released on 1999 with total page 478 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Mems Nems written by Cornelius T. Leondes and published by Springer Science & Business Media. This book was released on 2007-10-08 with total page 2142 pages. Available in PDF, EPUB and Kindle. Book excerpt: This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It is clearly written, self-contained, and accessible, with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.
Download or read book Uncooled Infrared Imaging Arrays and Systems written by and published by Academic Press. This book was released on 1997-11-24 with total page 341 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is the first book to describe an emerging but already growing technology of thermal imaging based on uncooled infrared imaging arrays and systems, which are the most exciting new developments in infrared technology today. This technology is of great importance to developers and users of thermal images for military and commercial applications. The chapters, prepared by world leaders in the technology, describe not only the mainstream efforts, but also exciting new approaches and fundamental limits applicable to all. Unified approach to technology development based on fundamental limits Individual chapters written by world leaders in each technology Novel potential approaches, allowing for the reduction of costs, described in detail Descriptive and analytical Provides details of the mainstream approaches--resistive bolometric, pyroelectric/field enhanced pyroelectric, thermoelectric Provides insight into a unified approach to development of all types of thermal imaging arrays Features state-of-the-art and selected new developments
Download or read book Proceedings of the Workshop on Microtechnologies and Applications to Space Systems written by and published by . This book was released on 1993 with total page 382 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Mechatronic Systems Sensors and Actuators written by Robert H. Bishop and published by CRC Press. This book was released on 2017-07-28 with total page 774 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book covers the key elements of physical systems modeling, sensors and actuators, signals and systems, computers and logic systems, and software and data acquisition. It describes mathematical models of the mechanical, electrical, and fluid subsystems that comprise many mechatronic systems.
Download or read book Monolithic Smart Sensor Systems Based on Lead zirconate titanate Thin Films written by Peter Joseph Schiller and published by . This book was released on 1997 with total page 288 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Microsensors written by Oleg Minin and published by BoD – Books on Demand. This book was released on 2011-06-09 with total page 310 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is planned to publish with an objective to provide a state-of-art reference book in the area of microsensors for engineers, scientists, applied physicists and post-graduate students. Also the aim of the book is the continuous and timely dissemination of new and innovative research and developments in microsensors. This reference book is a collection of 13 chapters characterized in 4 parts: magnetic sensors, chemical, optical microsensors and applications. This book provides an overview of resonant magnetic field microsensors based on MEMS, optical microsensors, the main design and fabrication problems of miniature sensors of physical, chemical and biochemical microsensors, chemical microsensors with ordered nanostructures, surface-enhanced Raman scattering microsensors based on hybrid nanoparticles, etc. Several interesting applications area are also discusses in the book like MEMS gyroscopes for consumer and industrial applications, microsensors for non invasive imaging in experimental biology, a heat flux microsensor for direct measurements in plasma surface interactions and so on.
Download or read book The Mechatronics Handbook 2 Volume Set written by Robert H. Bishop and published by CRC Press. This book was released on 2018-10-08 with total page 1416 pages. Available in PDF, EPUB and Kindle. Book excerpt: The first comprehensive reference on mechatronics, The Mechatronics Handbook was quickly embraced as the gold standard in the field. From washing machines, to coffeemakers, to cell phones, to the ubiquitous PC in almost every household, what, these days, doesn’t take advantage of mechatronics in its design and function? In the scant five years since the initial publication of the handbook, the latest generation of smart products has made this even more obvious. Too much material to cover in a single volume Originally a single-volume reference, the handbook has grown along with the field. The need for easy access to new material on rapid changes in technology, especially in computers and software, has made the single volume format unwieldy. The second edition is offered as two easily digestible books, making the material not only more accessible, but also more focused. Completely revised and updated, Robert Bishop’s seminal work is still the most exhaustive, state-of-the-art treatment of the field available.
Download or read book Smart Materials Fabrication and Materials for Micro Electro Mechanical Systems Volume 276 written by A. Peter Jardine and published by . This book was released on 1992-10-26 with total page 344 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Download or read book Dissertation Abstracts International written by and published by . This book was released on 2003 with total page 664 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Micronic Integrated Sensors written by J.L. Robert and published by Elsevier. This book was released on 1992-10-09 with total page 209 pages. Available in PDF, EPUB and Kindle. Book excerpt: Progress in material research, recent developments in growth techniques, as well as in processing technology and modelling, have had a great impact on sensors. The contributions in this volume will be of interest to all those who wish to keep abreast of recent developments in the interdisciplinary field of sensor research.
Download or read book Photonic Crystal Light Sources and Microsensors written by Juraj Topolancik and published by . This book was released on 2005 with total page 330 pages. Available in PDF, EPUB and Kindle. Book excerpt:
