Download or read book GaAs based Integrated Microsensors written by Jun Rim Choi and published by . This book was released on 1991 with total page 266 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Integrated Chemical Microsensor Systems in CMOS Technology written by Andreas Hierlemann and published by Springer Science & Business Media. This book was released on 2005-08-29 with total page 236 pages. Available in PDF, EPUB and Kindle. Book excerpt: Beginning with a comprehensive survey of existing semiconductor-based chemical microsensors and microsystems, this book proceeds to describe in detail CMOS technology-based chemical microsensor systems. The benefits of using CMOS technology for developing chemical microsensor systems and, in particular, monolithically integrated sensor systems comprising transducers and associated circuitry are laid out. Several successful realizations of such microsensor systems are presented. First, the fundamentals of the chemical sensing process itself will be elucidated, followed by a short description of microfabrication techniques and the CMOS substrate. Thereafter, a comprehensive overview of semiconductor-based and CMOS-based transducer structures and their applications is given. It is shown that CMOS-technology can be successfully used as platform technology to integrate microtransducers with the necessary driving and signal conditioning circuitry, and, in a next step, to develop monolithic multisensor arrays and fully developed microsystems with on-chip sensor control and standard interfaces. The book concludes with a brief outlook to future developments, such as interfacing cells with CMOS microelectronics.
Download or read book Materials Process Integration for MEMS written by Francis E. H. Tay and published by Springer Science & Business Media. This book was released on 2013-06-29 with total page 302 pages. Available in PDF, EPUB and Kindle. Book excerpt: The field of materials and process integration for MEMS research has an extensive past as well as a long and promising future. Researchers, academicians and engineers from around the world are increasingly devoting their efforts on the materials and process integration issues and opportunities in MEMS devices. These efforts are crucial to sustain the long-term growth of the MEMS field. The commercial MEMS community is heavily driven by the push for profitable and sustainable products. In the course of establishing high volume and low-cost production processes, the critical importance of materials properties, behaviors, reliability, reproducibility, and predictability, as well as process integration of compatible materials systems become apparent. Although standard IC fabrication steps, particularly lithographic techniques, are leveraged heavily in the creation of MEMS devices, additional customized and novel micromachining techniques are needed to develop sophisticated MEMS structures. One of the most common techniques is bulk micromachining, by which micromechanical structures are created by etching into the bulk of the substrates with either anisotropic etching with strong alk:ali solution or deep reactive-ion etching (DRIB). The second common technique is surface micromachining, by which planar microstructures are created by sequential deposition and etching of thin films on the surface of the substrate, followed by a fmal removal of sacrificial layers to release suspended structures. Other techniques include deep lithography and plating to create metal structures with high aspect ratios (LIGA), micro electrodischarge machining (J.
Download or read book Uncooled Infrared Imaging Arrays and Systems written by and published by Academic Press. This book was released on 1997-11-24 with total page 364 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is the first book to describe an emerging but already growing technology of thermal imaging based on uncooled infrared imaging arrays and systems, which are the most exciting new developments in infrared technology today. This technology is of great importance to developers and users of thermal images for military and commercial applications. The chapters, prepared by world leaders in the technology, describe not only the mainstream efforts, but also exciting new approaches and fundamental limits applicable to all. - Unified approach to technology development based on fundamental limits - Individual chapters written by world leaders in each technology - Novel potential approaches, allowing for the reduction of costs, described in detail - Descriptive and analytical - Provides details of the mainstream approaches--resistive bolometric, pyroelectric/field enhanced pyroelectric, thermoelectric - Provides insight into a unified approach to development of all types of thermal imaging arrays Features state-of-the-art and selected new developments
Download or read book Chemical Sensors Proceedings of the Symposium written by and published by . This book was released on 1999 with total page 478 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Micronic Integrated Sensors written by J.L. Robert and published by Elsevier. This book was released on 1992-10-09 with total page 209 pages. Available in PDF, EPUB and Kindle. Book excerpt: Progress in material research, recent developments in growth techniques, as well as in processing technology and modelling, have had a great impact on sensors. The contributions in this volume will be of interest to all those who wish to keep abreast of recent developments in the interdisciplinary field of sensor research.
Download or read book Chemical Sensors Four written by Michael Alan Butler and published by The Electrochemical Society. This book was released on 1999 with total page 478 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Annual Report written by United States. Department of Energy. Chemical & Biological Nonproliferation Program and published by . This book was released on 1999 with total page 210 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Integrated Optics and Microstructures written by and published by . This book was released on 1994 with total page 396 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Mems Nems written by Cornelius T. Leondes and published by Springer Science & Business Media. This book was released on 2007-10-08 with total page 2142 pages. Available in PDF, EPUB and Kindle. Book excerpt: This significant and uniquely comprehensive five-volume reference is a valuable source for research workers, practitioners, computer scientists, students, and technologists. It covers all of the major topics within the subject and offers a comprehensive treatment of MEMS design, fabrication techniques, and manufacturing methods. It also includes current medical applications of MEMS technology and provides applications of MEMS to opto-electronic devices. It is clearly written, self-contained, and accessible, with helpful standard features including an introduction, summary, extensive figures and design examples with comprehensive reference lists.
Download or read book Monolithic Smart Sensor Systems Based on Lead zirconate titanate Thin Films written by Peter Joseph Schiller and published by . This book was released on 1997 with total page 288 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Proceedings of the Workshop on Microtechnologies and Applications to Space Systems written by and published by . This book was released on 1993 with total page 382 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Transducers 01 Eurosensors XV written by Ernst Obermeier and published by Springer. This book was released on 2016-05-12 with total page 1763 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Conference is the premier international meeting for the presentation of original work addressing all aspects of the theory, design, fabrication, assembly, packaging, testing and application of solid-state sensors, actuators, MEMS, and microsystems.
Download or read book MEMS A Practical Guide of Design Analysis and Applications written by Jan Korvink and published by Springer Science & Business Media. This book was released on 2010-05-28 with total page 981 pages. Available in PDF, EPUB and Kindle. Book excerpt: A new generation of MEMS books has emerged with this cohesive guide on the design and analysis of micro-electro-mechanical systems (MEMS). Leading experts contribute to its eighteen chapters that encompass a wide range of innovative and varied applications. This publication goes beyond fabrication techniques covered by earlier books and fills a void created by a lack of industry standards. Subjects such as transducer operations and free-space microsystems are contained in its chapters. Satisfying a demand for literature on analysis and design of microsystems the book deals with a broad array of industrial applications. This will interest engineering and research scientists in industry and academia.
Download or read book The Mechatronics Handbook 2 Volume Set written by Robert H. Bishop and published by CRC Press. This book was released on 2018-10-08 with total page 1392 pages. Available in PDF, EPUB and Kindle. Book excerpt: The first comprehensive reference on mechatronics, The Mechatronics Handbook was quickly embraced as the gold standard in the field. From washing machines, to coffeemakers, to cell phones, to the ubiquitous PC in almost every household, what, these days, doesn’t take advantage of mechatronics in its design and function? In the scant five years since the initial publication of the handbook, the latest generation of smart products has made this even more obvious. Too much material to cover in a single volume Originally a single-volume reference, the handbook has grown along with the field. The need for easy access to new material on rapid changes in technology, especially in computers and software, has made the single volume format unwieldy. The second edition is offered as two easily digestible books, making the material not only more accessible, but also more focused. Completely revised and updated, Robert Bishop’s seminal work is still the most exhaustive, state-of-the-art treatment of the field available.
Download or read book BioMEMS and Bionanotechnology written by Ronald P. Manginell and published by . This book was released on 2002 with total page 268 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microelectromechanical systems (MEMS) can be a critical link between the macroworld and the realm of nanobiotechnology. Top-down MEMS methods and devices will likely serve as an important handle for interfacing with the bottom-up techniques and structures that typify nanobiotechnology. This volume focuses on recent advances in the fields of MEMS and BioMEMS, including microfluidics, bioanalysis, packaging, materials and fabrication methods. It is clear from these presentations that top-down semiconductor-based processing remains vital. Indeed, frontiers are expanding within this realm, with new research on materials like poly-SiGe. However, new materials, particularly polymers, and bottom-up methods such as soft lithography and chemical synthesis, are continually gaining in utility and importance. It is also apparent from this volume that microanalytical techniques continue to be advanced, including new ways of separating samples by optical, adhesion-based and dielectrophoretic methods. And sensors, always of interest, are demonstrated here by research into sensors for environmental and material analysis. Capacitance-based sensors for DNA analysis, and magnetic sensors for position sensing, are also highlighted. Finally, systems for direct interfacing with biological systems are addressed, with presentations on neural recording methods, retinal implants, and tissue engineering.
Download or read book Handbook of Integrated Circuit Industry written by Yangyuan Wang and published by Springer Nature. This book was released on 2023-12-29 with total page 2006 pages. Available in PDF, EPUB and Kindle. Book excerpt: Written by hundreds experts who have made contributions to both enterprise and academics research, these excellent reference books provide all necessary knowledge of the whole industrial chain of integrated circuits, and cover topics related to the technology evolution trends, fabrication, applications, new materials, equipment, economy, investment, and industrial developments of integrated circuits. Especially, the coverage is broad in scope and deep enough for all kind of readers being interested in integrated circuit industry. Remarkable data collection, update marketing evaluation, enough working knowledge of integrated circuit fabrication, clear and accessible category of integrated circuit products, and good equipment insight explanation, etc. can make general readers build up a clear overview about the whole integrated circuit industry. This encyclopedia is designed as a reference book for scientists and engineers actively involved in integrated circuit research and development field. In addition, this book provides enough guide lines and knowledges to benefit enterprisers being interested in integrated circuit industry.
