Download or read book Dry Etching Technology for Semiconductors written by Kazuo Nojiri and published by Springer. This book was released on 2014-10-25 with total page 126 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is a must-have reference to dry etching technology for semiconductors, which will enable engineers to develop new etching processes for further miniaturization and integration of semiconductor integrated circuits. The author describes the device manufacturing flow, and explains in which part of the flow dry etching is actually used. The content is designed as a practical guide for engineers working at chip makers, equipment suppliers and materials suppliers, and university students studying plasma, focusing on the topics they need most, such as detailed etching processes for each material (Si, SiO2, Metal etc) used in semiconductor devices, etching equipment used in manufacturing fabs, explanation of why a particular plasma source and gas chemistry are used for the etching of each material, and how to develop etching processes. The latest, key technologies are also described, such as 3D IC Etching, Dual Damascene Etching, Low-k Etching, Hi-k/Metal Gate Etching, FinFET Etching, Double Patterning etc.
Download or read book The Renaissance of Etching written by Catherine Jenkins and published by Metropolitan Museum of Art. This book was released on 2019-10-21 with total page 311 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Renaissance of Etching is a groundbreaking study of the origins of the etched print. Initially used as a method for decorating armor, etching was reimagined as a printmaking technique at the end of the fifteenth century in Germany and spread rapidly across Europe. Unlike engraving and woodcut, which required great skill and years of training, the comparative ease of etching allowed a wide variety of artists to exploit the expanding market for prints. The early pioneers of the medium include some of the greatest artists of the Renaissance, such as Albrecht Dürer, Parmigianino, and Pieter Bruegel the Elder, who paved the way for future printmakers like Rembrandt, Goya, and many others in their wake. Remarkably, contemporary artists still use etching in much the same way as their predecessors did five hundred years ago. Richly illustrated and including a wealth of new information, The Renaissance of Etching explores how artists in Germany, the Netherlands, Italy, and France developed the new medium of etching, and how it became one of the most versatile and enduring forms of printmaking. p.p1 {margin: 0.0px 0.0px 0.0px 0.0px; font: 14.0px Verdana}
Download or read book Plasma Etching written by M. Sugawara and published by OUP Oxford. This book was released on 1998-05-28 with total page 362 pages. Available in PDF, EPUB and Kindle. Book excerpt: The focus of this book is the remarkable advances in understanding of low pressure RF (radio frequency) glow discharges. A basic analytical theory and plasma physics are explained. Plasma diagnostics are also covered before the practicalities of etcher use are explored.
Download or read book CRC Handbook of Metal Etchants written by Perrin Walker and published by CRC Press. This book was released on 1990-12-11 with total page 1434 pages. Available in PDF, EPUB and Kindle. Book excerpt: This publication presents cleaning and etching solutions, their applications, and results on inorganic materials. It is a comprehensive collection of etching and cleaning solutions in a single source. Chemical formulas are presented in one of three standard formats - general, electrolytic or ionized gas formats - to insure inclusion of all necessary operational data as shown in references that accompany each numbered formula. The book describes other applications of specific solutions, including their use on other metals or metallic compounds. Physical properties, association of natural and man-made minerals, and materials are shown in relationship to crystal structure, special processing techniques and solid state devices and assemblies fabricated. This publication also presents a number of organic materials which are widely used in handling and general processing...waxes, plastics, and lacquers for example. It is useful to individuals involved in study, development, and processing of metals and metallic compounds. It is invaluable for readers from the college level to industrial R & D and full-scale device fabrication, testing and sales. Scientific disciplines, work areas and individuals with great interest include: chemistry, physics, metallurgy, geology, solid state, ceramic and glass, research libraries, individuals dealing with chemical processing of inorganic materials, societies and schools.
Download or read book The Art and Practice of Etching written by Henry Thomas Alken and published by . This book was released on 1849 with total page 92 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Printmaking written by Bill Fick and published by Laurence King Publishing. This book was released on 2015-08-25 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Printmaking is a practical and comprehensive guide to printmaking techniques with clear step–by–step illustrations. This fully updated second edition contains new images throughout, including improved process shots and examples of the latest work from contemporary printmakers. There are expanded chapters on digital and mixed media processes, as well as a brand new 'Print & Make' chapter, which explores the opportunities for creative expression within the many processes available to print makers. For example, this edition includes a new, detailed section on Japanese moku hanga woodblock printing while the more traditional techniques of relief, intaglio, collograph, lithography, screen printing and monoprint have also been refreshed. The addition of new images showing a broader range of subject matter, include more contemporary prints and international artists. Each technique is explored from the development of the printing or digital matrix, through the different stages of creation to image output. Guidance on how to set up a print studio, sections on troubleshooting techniques and the inclusion of up–to–date lists of suppliers, workshops and galleries make this an essential volume for beginner and experienced printmakers alike. Special attention is given to safe practices, addressing the important concern for health and safety. Step–by–step illustrations provide an enhanced visual reference – either photographic or diagrams for clarity – and the authors have supplied more information on safer and more sustainable practices. Since nontoxic alternatives are a rapidly growing and ever–evolving landscape, Printmaking 2nd Edition presents products and practices that are accessible worldwide. Praise for Printmaking 2nd Edition 'A lavishly illustrated large–format volume that constitutes a veritable printmaker's bible.' – The West Australia News
Download or read book Plasma Etching Processes for Sub quarter Micron Devices written by G. S. Mathad and published by The Electrochemical Society. This book was released on 2000 with total page 396 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Techniques for Ruling and Etching Precise Scales in Glass and Their Reproduction by Photoetching with a New Light sensitive Resist written by Raymond Davis and published by . This book was released on 1955 with total page 44 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Studies of Ice Etching written by Daisuke Kuroiwa and published by . This book was released on 1965 with total page 56 pages. Available in PDF, EPUB and Kindle. Book excerpt: Thermal etching of ice and its application to the investigation of surface abrasion in ice crystals is explained. Investigations of surface abrasion in ice crystals provide fundamental information in the study of snow and ice friction. The technique of producing evaporation etch pits by the application of Formvar film to the ice crystal surface is described, and the development of microcrystals by recrystallization is compared with the surrounding mother crystals. Experimental data are presented and discussed with emphasis on the development of thermal etch pits, scratches on different crystal faces, damage to the prismatic face, thermal etch channels on the basal plane, predominant orientation of etch channels on the basal plane, and etch-pit-free zones and stress concentrations around solid inclusions. (Author).
Download or read book Etching of Crystals written by K. Sangwal and published by Elsevier. This book was released on 2012-12-02 with total page 518 pages. Available in PDF, EPUB and Kindle. Book excerpt: Defects in Solids, Volume 15: Etching of Crystals: Theory, Experiment, and Application focuses on the processes, reactions, and methodologies involved in the etching of crystals, including thermodynamics and diffusion. The publication first underscores the defects in crystals, detection of defects, and growth and dissolution of crystals. Discussions focus on thermodynamic theories, nature of pit sites, surface roughening during diffusion-controlled dissolution, growth controlled by simultaneous mass transfer and surface reactions, and chemical and thermal etching. The text then examines the theories of dissolution and etch-pit formation and the chemical aspects of the dissolution process, including catalytic reactions, dissolution of semiconductors, topochemical adsorption theories, and diffusion theories. The book tackles the solubility of crystals and complexes in solution and the kinetics and mechanism of dissolution. Topics include metallic crystals, semiconductors, stability of complexes, relationship between solubility, surface energy, and hardness of crystals, and solvents for crystals and estimation of crystal solubility in solvents other than water. The publication is a dependable source of data for readers interested in the etching of crystals.
Download or read book Proceedings of the Symposium on Highly Selective Dry Etching and Damage Control written by G. S. Mathad and published by The Electrochemical Society. This book was released on 1993 with total page 452 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book The Art of Etching written by Ernest S. Lumsden and published by . This book was released on 1926 with total page 384 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Micro and Nano Fabrication by Metal Assisted Chemical Etching written by Lucia Romano and published by MDPI. This book was released on 2021-01-13 with total page 106 pages. Available in PDF, EPUB and Kindle. Book excerpt: Metal-assisted chemical etching (MacEtch) has recently emerged as a new etching technique capable of fabricating high aspect ratio nano- and microstructures in a few semiconductors substrates—Si, Ge, poly-Si, GaAs, and SiC—and using different catalysts—Ag, Au, Pt, Pd, Cu, Ni, and Rh. Several shapes have been demonstrated with a high anisotropy and feature size in the nanoscale—nanoporous films, nanowires, 3D objects, and trenches, which are useful components of photonic devices, microfluidic devices, bio-medical devices, batteries, Vias, MEMS, X-ray optics, etc. With no limitations of large-areas and low-cost processing, MacEtch can open up new opportunities for several applications where high precision nano- and microfabrication is required. This can make semiconductor manufacturing more accessible to researchers in various fields, and accelerate innovation in electronics, bio-medical engineering, energy, and photonics. Accordingly, this Special Issue seeks to showcase research papers, short communications, and review articles that focus on novel methodological developments in MacEtch, and its use for various applications.
Download or read book Plasma Etching Processes for Interconnect Realization in VLSI written by Nicolas Posseme and published by Elsevier. This book was released on 2015-04-14 with total page 123 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is the first of two books presenting the challenges and future prospects of plasma etching processes for microelectronics, reviewing the past, present and future issues of etching processes in order to improve the understanding of these issues through innovative solutions.This book focuses on back end of line (BEOL) for high performance device realization and presents an overview of all etch challenges for interconnect realization as well as the current etch solutions proposed in the semiconductor industry. The choice of copper/low-k interconnect architecture is one of the keys for integrated circuit performance, process manufacturability and scalability. Today, implementation of porous low-k material is mandatory in order to minimize signal propagation delay in interconnections. In this context, the traditional plasma process issues (plasma-induced damage, dimension and profile control, selectivity) and new emerging challenges (residue formation, dielectric wiggling) are critical points of research in order to control the reliability and reduce defects in interconnects. These issues and potential solutions are illustrated by the authors through different process architectures available in the semiconductor industry (metallic or organic hard mask strategies). Presents the difficulties encountered for interconnect realization in very large-scale integrated (VLSI) circuits Focused on plasma-dielectric surface interaction Helps you further reduce the dielectric constant for the future technological nodes
Download or read book Metallographic Etching written by G. Petzow and published by . This book was released on 1978 with total page 152 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Glass Etching written by Norman Dobbins and published by Cke Publications. This book was released on 1988 with total page 116 pages. Available in PDF, EPUB and Kindle. Book excerpt: Instructions and patterns for glass etching using a sandblaster.
Download or read book Etching written by Alan Smith and published by The Crowood Press. This book was released on 2020-09-21 with total page 426 pages. Available in PDF, EPUB and Kindle. Book excerpt: This practical new paperback edition explains the full process of etching, covering traditional techniques in depth and introducing modern ideas when they add to mark-making capabilities. Illustrated with lavishly finished examples and clear step-by-step sequences, this beautiful book covers the basics of etching - the materials required, how to prepare a plate, and ways of making marks using hard ground, soft ground and aquatint. Other etching techniques are covered including spit-bite and sugar lift, and how to transfer images onto the plate using photo etching. Engraving techniques are shown with various ways of making the plate without acid: drypoint, line engraving, stipple engraving and mezzotint. Advice on printing is given including papers and inks, the printing process and more advanced techniques such as colour printing and editioning.
