Download or read book Electron Cyclotron Resonance Ion Sources and ECR Plasmas written by R Geller and published by Routledge. This book was released on 2018-12-13 with total page 456 pages. Available in PDF, EPUB and Kindle. Book excerpt: Acknowledged as the "founding father" of and world renowned expert on electron cyclotron resonance sources Richard Geller has produced a unique book devoted to the physics and technicalities of electron cyclotron resonance sources. Electron Cyclotron Resonance Ion Sources and ECR Plasmas provides a primer on electron cyclotron phenomena in ion sour
Download or read book Electron Cyclotron Resonance Ion Sources and ECR Plasmas written by R Geller and published by CRC Press. This book was released on 1996-01-01 with total page 456 pages. Available in PDF, EPUB and Kindle. Book excerpt: Acknowledged as the "founding father" of and world renowned expert on electron cyclotron resonance sources Richard Geller has produced a unique book devoted to the physics and technicalities of electron cyclotron resonance sources. Electron Cyclotron Resonance Ion Sources and ECR Plasmas provides a primer on electron cyclotron phenomena in ion sources as well as being a reference to the field of ion source developments. Coverage includes elements of plasma physics, specific electron cyclotron resonance physics, and the relevant technology directed at both scientists and engineers.
Download or read book Microwave Discharges written by Carlos M. Ferreira and published by Springer Science & Business Media. This book was released on 2013-11-21 with total page 556 pages. Available in PDF, EPUB and Kindle. Book excerpt: Proceedings of a NATO ARW held in Vimeiro, Portugal, May 11-15, 1992
Download or read book Introduction to the Physics of Gyrotrons written by Gregory S. Nusinovich and published by JHU Press. This book was released on 2020-03-03 with total page 352 pages. Available in PDF, EPUB and Kindle. Book excerpt: As unique sources of coherent high-power, microwave, and millimeter-wave radiation, gyrotrons are an essential part of the hunt for controlled fusion. Presently, gyrotrons are actively used for electron cyclotron resonance plasma heating and current drive in various controlled fusion reactors. These sources have been under development in many countries for more than forty years. In spite of their widespread use, however, there is as yet no single book to introduce non-specialists to this vital field. Now Gregory S. Nusinovich, an early pioneer of the gyrotron and widely regarded today as the world's leading authority on the subject, explains the fundamental physical principles upon which gyrotrons and related devices operate. Nusinovich first sets forth some "rules of thumb" that allow readers to understand gyrotron operation in simple terms. He then explores the fundamentals of the general theory of gyrotrons and offers an overview of the various types of gyro-devices, including gyromonotrons, gyroklystrons, gyro-traveling-wave tubes, and gyrotwystrons. He explains not only the theory, linear and nonlinear, but also the practical challenges that users of such devices face. This book will be of interest to undergraduate and graduate students as well as to those who develop gyrotrons or who use them in various applications. It should also appeal to plasma physicists interested in charged-particle dynamics, as well as to applied physicists needing to know more about micro- and millimeter-wave technologies.
Download or read book Advanced Technologies Based on Wave and Beam Generated Plasmas written by H. Schlüter and published by Springer Science & Business Media. This book was released on 1999-02-28 with total page 592 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book draws together three areas of work on plasma technologies: advanced efforts based on wave generated, high frequency plasmas, plasma assisted ion implantation, and electron beam generated plasma. It lays a foundation for the application of sources in industry and various research areas
Download or read book The Physics and Technology of Ion Sources written by Ian G. Brown and published by John Wiley & Sons. This book was released on 2006-03-06 with total page 396 pages. Available in PDF, EPUB and Kindle. Book excerpt: The first edition of this title has become a well-known reference book on ion sources. The field is evolving constantly and rapidly, calling for a new, up-to-date version of the book. In the second edition of this significant title, editor Ian Brown, himself an authority in the field, compiles yet again articles written by renowned experts covering various aspects of ion source physics and technology. The book contains full chapters on the plasma physics of ion sources, ion beam formation, beam transport, computer modeling, and treats many different specific kinds of ion sources in sufficient detail to serve as a valuable reference text.
Download or read book High Density Plasma Sources written by Oleg A. Popov and published by . This book was released on 1995 with total page 445 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book describes the design, physics, and performance of high density plasma sources which have been extensively explored in low pressure plasma processing, such as plasma etching and planarization, plasma enhanced chemical vapor deposition of thin films, sputtered deposition of metals and dielectrics, epitaxial growth of silicon and GaAs, and many other applications. This is a comprehensive survey and a detailed description of most advanced high density plasma sources used in plasma processing.
Download or read book Handbook of Ion Sources written by Bernhard Wolf and published by CRC Press. This book was released on 1995-08-31 with total page 558 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Handbook of Ion Sources delivers the data needed for daily work with ion sources. It also gives information for the selection of a suitable ion source and ion production method for a specific application. The Handbook concentrates on practical aspects and introduces the principle function of ion sources. The basic plasma parameters are defined and discussed. The working principles of various ion sources are explained, and examples of each type of ion source are presented with their operational data. Tables of ion current for various elements and charge states summarize the performance of different ion sources. The problems related to the production of ions of non-gaseous elements are detailed, and data on useful materials for evaporation and ion source construction are summarized. Additional chapters are dedicated to extraction and beam formation, ion beam diagnosis, ion source electronics, and computer codes for extraction, acceleration, and beam transport. Emittance and brilliance are described and space charge effects and neutralization discussed. Various methods for the measurement of current, profile, emittance, and time structure are presented and compared. Intensity limits for these methods are provided for different ion energies. Typical problems related to the operation of ion source plasmas are discussed and practical examples of circuits are given. The influence of high voltage on ion source electronics and possibilities for circuit protection are covered. The generation of microwaves and various microwave equipment are described and special problems related to microwave operation are summarized. The Handbook of Ion Sources is a valuable reference on the subject, of benefit to practitioners and graduate students interested in accelerators, ion implantation, and ion beam techniques.
Download or read book Modeling and Automation of an Electron Cyclotron Resonance Source Etcher Using a Chlorine argon Plasma written by Courtney Kathleen Hanish and published by . This book was released on 1996 with total page 484 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Properties of Electron Cyclotron Resonance Plasma Sources written by Aseem Kumar Srivastava and published by . This book was released on 1995 with total page 364 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Plasma Sources for Thin Film Deposition and Etching written by Maurice H. Francombe and published by Academic Press. This book was released on 2013-10-22 with total page 343 pages. Available in PDF, EPUB and Kindle. Book excerpt: This latest volume of the well-known Physics of Thin Films Series includes four chapters that discuss high-density plasma sources for materials processing, electron cyclotron resonance and its uses, unbalancedmagnetron sputtering, and particle formation in thin film processing plasma. - Chapter One develops a unified framework from which all "high-efficiency" sources may be viewed and compared; outlines key elements of source design affecting processing results; and highlights areas where additional research and development are needed - Chapter Two reviews and analyzes the main types of electron cyclotron resonance (ECR) plasma sources suitable for ECR PACVD of thin films, mainly ECR sources using magnet coils - Chapter Three examines the benefits and limitations of the new technique, unbalanced magnetron sputtering (UBM), along with the motivation for its development, the basic principles of its operation and commercial applications, and some speculations regarding the future of UBM technology - Chapter Four describes general phenomena observed in connection with particle formation in thin film processing plasmas; discusses particles in PECVD plasmas, sputtering plasmas, and RIE plasmas; presents an overview of the theoretical modeling of various aspects of particles in processing plasmas; examines issues of equipment design affecting particle formation; and concludes with remarks about the implications of this work for the control of process-induced particle contamination
Download or read book Gyrotrons written by Machavaram V. Kartikeyan and published by Springer Science & Business Media. This book was released on 2013-03-14 with total page 234 pages. Available in PDF, EPUB and Kindle. Book excerpt: Drawing on the author's wide experience, this book gives a comprehensive review of the state of the art in gyrotron technology, covering the theory, design and applications. The book includes an extensive references list which provides an excellent guide to the related literature.
Download or read book Principles of Plasma Discharges and Materials Processing written by Michael A. Lieberman and published by John Wiley & Sons. This book was released on 2005-04-08 with total page 795 pages. Available in PDF, EPUB and Kindle. Book excerpt: A Thorough Update of the Industry Classic on Principles of Plasma Processing The first edition of Principles of Plasma Discharges and Materials Processing, published over a decade ago, was lauded for its complete treatment of both basic plasma physics and industrial plasma processing, quickly becoming the primary reference for students and professionals. The Second Edition has been carefully updated and revised to reflect recent developments in the field and to further clarify the presentation of basic principles. Along with in-depth coverage of the fundamentals of plasma physics and chemistry, the authors apply basic theory to plasma discharges, including calculations of plasma parameters and the scaling of plasma parameters with control parameters. New and expanded topics include: * Updated cross sections * Diffusion and diffusion solutions * Generalized Bohm criteria * Expanded treatment of dc sheaths * Langmuir probes in time-varying fields * Electronegative discharges * Pulsed power discharges * Dual frequency discharges * High-density rf sheaths and ion energy distributions * Hysteresis and instabilities * Helicon discharges * Hollow cathode discharges * Ionized physical vapor deposition * Differential substrate charging With new chapters on dusty plasmas and the kinetic theory of discharges, graduate students and researchers in the field of plasma processing should find this new edition more valuable than ever.
Download or read book Compact Plasma and Focused Ion Beams written by Sudeep Bhattacharjee and published by Taylor & Francis. This book was released on 2013-12-12 with total page 390 pages. Available in PDF, EPUB and Kindle. Book excerpt: Recent research has brought the application of microwaves from the classical fields of heating, communication, and generation of plasma discharges into the generation of compact plasmas that can be used for applications such as FIB and small plasma thrusters. However, these new applications bring with them a new set of challenges. With coverage ran
Download or read book Physics of Collisional Plasmas written by Michel Moisan and published by Springer Science & Business Media. This book was released on 2012-06-20 with total page 488 pages. Available in PDF, EPUB and Kindle. Book excerpt: This text is an introduction to the physics of collisional plasmas, as opposed to plasmas in space. It is intended for graduate students in physics and engineering . The first chapter introduces with progressively increasing detail, the fundamental concepts of plasma physic. The motion of individual charged particles in various configurations of electric and magnetic fields is detailed in the second chapter while the third chapter considers the collective motion of the plasma particles described according to a hydrodynamic model. The fourth chapter is most original in that it introduces a general approach to energy balance, valid for all types of discharges comprising direct current(DC) and high frequency (HF) discharges, including an applied static magnetic field. The basic concepts required in this fourth chapter have been progressively introduced in the previous chapters. The text is enriched with approx. 100 figures, and alphabetical index and 45 fully resolved problems. Mathematical and physical appendices provide complementary information or allow to go deeper in a given subject.
Download or read book Electron Cyclotron Resonance Ion Sources written by Matthaeus Leitner and published by American Institute of Physics. This book was released on 2005-03-23 with total page 288 pages. Available in PDF, EPUB and Kindle. Book excerpt: Berkeley, California, 26-30 September 2004
Download or read book Background Processes in the Electrostatic Spectrometers of the KATRIN Experiment written by Susanne Mertens and published by Springer Science & Business Media. This book was released on 2013-11-05 with total page 203 pages. Available in PDF, EPUB and Kindle. Book excerpt: Neutrinos continue to be the most mysterious and, arguably, the most fascinating particles of the Standard Model as their intrinsic properties such as absolute mass scale and CP properties are unknown. The open question of the absolute neutrino mass scale will be addressed with unprecedented accuracy by the Karlsruhe Tritium Neutrino (KATRIN) experiment, currently under construction. This thesis focusses on the spectrometer part of KATRIN and background processes therein. Various background sources such as small Penning traps, as well as nuclear decays from single radon atoms are fully characterized here for the first time. Most importantly, however, it was possible to reduce the background in the spectrometer by more than five orders of magnitude by eliminating Penning traps and by developing a completely new background reduction method by stochastically heating trapped electrons using electron cyclotron resonance (ECR). The work beautifully demonstrates that the obstacles and challenges in measuring the absolute mass scale of neutrinos can be met successfully if novel experimental tools (ECR) and novel computing methods (KASSIOPEIA) are combined to allow almost background-free tritium ß-spectroscopy.
