Download or read book Dry Etching of Glass written by and published by . This book was released on 1948 with total page 14 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Dry Etching Technology for Semiconductors written by Kazuo Nojiri and published by Springer. This book was released on 2014-10-25 with total page 126 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is a must-have reference to dry etching technology for semiconductors, which will enable engineers to develop new etching processes for further miniaturization and integration of semiconductor integrated circuits. The author describes the device manufacturing flow, and explains in which part of the flow dry etching is actually used. The content is designed as a practical guide for engineers working at chip makers, equipment suppliers and materials suppliers, and university students studying plasma, focusing on the topics they need most, such as detailed etching processes for each material (Si, SiO2, Metal etc) used in semiconductor devices, etching equipment used in manufacturing fabs, explanation of why a particular plasma source and gas chemistry are used for the etching of each material, and how to develop etching processes. The latest, key technologies are also described, such as 3D IC Etching, Dual Damascene Etching, Low-k Etching, Hi-k/Metal Gate Etching, FinFET Etching, Double Patterning etc.
Download or read book Dry Etching of Glass and Its Use to Study Near Surface Mass Transport written by Linlin Wang and published by . This book was released on 2005 with total page 552 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Letter Circular 150 written by National Bureau of Standards and published by . This book was released on 1925 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Glass Etching written by Robert A. Capp and published by Courier Corporation. This book was released on 1984-01-01 with total page 66 pages. Available in PDF, EPUB and Kindle. Book excerpt: Easy-to-use guide with complete instructions for etching on any glass — panes, panels, bottles, stained glass, more — using acid cream and sandblasting techniques. Includes 46 full-size patterns of birds, butterflies, animals, florals, geometrics, and Art-Nouveau-Style abstracts. Instructions. 46 patterns. 27 illustrations.
Download or read book Dry Etching for Microelectronics written by R.A. Powell and published by Elsevier. This book was released on 2012-12-02 with total page 312 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume collects together for the first time a series of in-depth, critical reviews of important topics in dry etching, such as dry processing of III-V compound semiconductors, dry etching of refractory metal silicides and dry etching aluminium and aluminium alloys. This topical format provides the reader with more specialised information and references than found in a general review article. In addition, it presents a broad perspective which would otherwise have to be gained by reading a large number of individual research papers. An additional important and unique feature of this book is the inclusion of an extensive literature review of dry processing, compiled by search of computerized data bases. A subject index allows ready access to the key points raised in each of the chapters.
Download or read book Encyclopedia of Microfluidics and Nanofluidics written by Dongqing Li and published by Springer Science & Business Media. This book was released on 2008-08-06 with total page 2242 pages. Available in PDF, EPUB and Kindle. Book excerpt: Covering all aspects of transport phenomena on the nano- and micro-scale, this encyclopedia features over 750 entries in three alphabetically-arranged volumes including the most up-to-date research, insights, and applied techniques across all areas. Coverage includes electrical double-layers, optofluidics, DNC lab-on-a-chip, nanosensors, and more.
Download or read book Techniques for Ruling and Etching Precise Scales in Glass and Their Reproduction by Photoetching with a New Light sensitive Resist written by Raymond Davis and published by . This book was released on 1955 with total page 44 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Letter Circular 892 written by National Bureau of Standards and published by . This book was released on 1948 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Etching in Microsystem Technology written by Michael Köhler and published by John Wiley & Sons. This book was released on 2008-07-11 with total page 384 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microcomponents and microdevices are increasingly finding application in everyday life. The specific functions of all modern microdevices depend strongly on the selection and combination of the materials used in their construction, i.e., the chemical and physical solid-state properties of these materials, and their treatment. The precise patterning of various materials, which is normally performed by lithographic etching processes, is a prerequisite for the fabrication of microdevices. The microtechnical etching of functional patterns is a multidisciplinary area, the basis for the etching processes coming from chemistry, physics, and engineering. The book is divided into two sections: the wet and dry etching processes are presented in the first, general, section, which provides the scientific fundamentals, while a catalog of etching bath composition, etching instructions, and parameters can be found in the second section. This section will enhance the comprehension of the general section and also give an overview of data that are essential in practice.
Download or read book Introduction to Microfabrication written by Sami Franssila and published by John Wiley & Sons. This book was released on 2010-10-29 with total page 534 pages. Available in PDF, EPUB and Kindle. Book excerpt: This accessible text is now fully revised and updated, providing an overview of fabrication technologies and materials needed to realize modern microdevices. It demonstrates how common microfabrication principles can be applied in different applications, to create devices ranging from nanometer probe tips to meter scale solar cells, and a host of microelectronic, mechanical, optical and fluidic devices in between. Latest developments in wafer engineering, patterning, thin films, surface preparation and bonding are covered. This second edition includes: expanded sections on MEMS and microfluidics related fabrication issues new chapters on polymer and glass microprocessing, as well as serial processing techniques 200 completely new and 200 modified figures more coverage of imprinting techniques, process integration and economics of microfabrication 300 homework exercises including conceptual thinking assignments, order of magnitude estimates, standard calculations, and device design and process analysis problems solutions to homework problems on the complementary website, as well as PDF slides of the figures and tables within the book With clear sections separating basic principles from more advanced material, this is a valuable textbook for senior undergraduate and beginning graduate students wanting to understand the fundamentals of microfabrication. The book also serves as a handy desk reference for practicing electrical engineers, materials scientists, chemists and physicists alike. www.wiley.com/go/Franssila_Micro2e
Download or read book Microstructuring of Glasses written by Dagmar Hülsenberg and published by Springer Science & Business Media. This book was released on 2008-06-24 with total page 339 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is the first book that explains how to structure glass for micro- and nanophotonic applications. It deals with various glass compositions and their properties, and the interactions between glass and the electromagnetic waves used to modify it. The book also explores methods for influencing the geometrical microstructure of glass as well as methods to produce actual microdevices. It also details methods for influencing the geometrical microstructure of glasses.
Download or read book Engraving Glass written by Boyd Graham and published by Courier Corporation. This book was released on 2014-05-05 with total page 132 pages. Available in PDF, EPUB and Kindle. Book excerpt: Step-by-step instructions for diamond burr engraving. Four complete projects plus expert advice on choosing glass, lighting and arranging finished pieces, much more. 117 illustrations. List of Supply Sources.
Download or read book MEMS Materials and Processes Handbook written by Reza Ghodssi and published by Springer Science & Business Media. This book was released on 2011-03-18 with total page 1211 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate materials for the required task at hand. The "Processes" section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.
Download or read book CRC Handbook of Metal Etchants written by Perrin Walker and published by CRC Press. This book was released on 1990-12-11 with total page 1434 pages. Available in PDF, EPUB and Kindle. Book excerpt: This publication presents cleaning and etching solutions, their applications, and results on inorganic materials. It is a comprehensive collection of etching and cleaning solutions in a single source. Chemical formulas are presented in one of three standard formats - general, electrolytic or ionized gas formats - to insure inclusion of all necessary operational data as shown in references that accompany each numbered formula. The book describes other applications of specific solutions, including their use on other metals or metallic compounds. Physical properties, association of natural and man-made minerals, and materials are shown in relationship to crystal structure, special processing techniques and solid state devices and assemblies fabricated. This publication also presents a number of organic materials which are widely used in handling and general processing...waxes, plastics, and lacquers for example. It is useful to individuals involved in study, development, and processing of metals and metallic compounds. It is invaluable for readers from the college level to industrial R & D and full-scale device fabrication, testing and sales. Scientific disciplines, work areas and individuals with great interest include: chemistry, physics, metallurgy, geology, solid state, ceramic and glass, research libraries, individuals dealing with chemical processing of inorganic materials, societies and schools.
Download or read book Diffractive Optics written by Donald C. O'Shea and published by SPIE Press. This book was released on 2004 with total page 266 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides the reader with the broad range of materials that were discussed in a series of short courses presented at Georgia Tech on the design, fabrication, and testing of diffractive optical elements (DOEs). Although there are not long derivations or detailed methods for specific engineering calculations, the reader should be familiar and comfortable with basic computational techniques. This text is not a 'cookbook' for producing DOEs, but it should provide readers with sufficient information to assess whether this technology would benefit their work, and to understand the requirements for using the concepts and techniques presented by the authors.
Download or read book Glassy Materials Based Microdevices written by Giancarlo C. Righini and published by MDPI. This book was released on 2019-02-28 with total page 284 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microtechnology has changed our world since the last century, when silicon microelectronics revolutionized sensor, control and communication areas, with applications extending from domotics to automotive, and from security to biomedicine. The present century, however, is also seeing an accelerating pace of innovation in glassy materials; as an example, glass-ceramics, which successfully combine the properties of an amorphous matrix with those of micro- or nano-crystals, offer a very high flexibility of design to chemists, physicists and engineers, who can conceive and implement advanced microdevices. In a very similar way, the synthesis of glassy polymers in a very wide range of chemical structures offers unprecedented potential of applications. The contemporary availability of microfabrication technologies, such as direct laser writing or 3D printing, which add to the most common processes (deposition, lithography and etching), facilitates the development of novel or advanced microdevices based on glassy materials. Biochemical and biomedical sensors, especially with the lab-on-a-chip target, are one of the most evident proofs of the success of this material platform. Other applications have also emerged in environment, food, and chemical industries. The present Special Issue of Micromachines aims at reviewing the current state-of-the-art and presenting perspectives of further development. Contributions related to the technologies, glassy materials, design and fabrication processes, characterization, and, eventually, applications are welcome.
