Download or read book Dielectric and Piezoelectric Properties of Sol gel Derived Pb Zr Ti O3 Thin Films written by David Vaal Taylor and published by . This book was released on 1999 with total page 148 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Sol Gel Processed Piezoelectric Pb Zr Ti O3 Thin Films written by G. Yi and published by . This book was released on 1989 with total page 24 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Thin Films on Glass written by Hans Bach and published by Springer Science & Business Media. This book was released on 2013-03-09 with total page 445 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book, entitled Thin Films on Glass, is one of a series reporting on research and development activities on products and processes conducted by the Schott Group. The scientifically founded development of new products and technical pro cesses has traditionally been of vital importance to Schott and has always been performed on a scale determined by the prospects for application of our special glasses. Since the reconstruction of the Schott Glaswerke in Mainz, the scale has increased enormously. The range of expert knowledge required could never have been supplied by Schott alone. It is also a tradition in our company to cultivate collaboration with customers, universities, and research institutes. Publications in numerous technical journals, which since 1969 we have edited to a regular schedule as Forschungsberichte - 'research reports' - describe the results of these cooperations. They contain up-to-date infor mation on various topics for the expert but are not suited as survey material for those whose standpoint is more remote. This is the point where we would like to place our series, to stimulate the exchange of thoughts, so that we can consider from different points of view the possibilities offered by those incredibly versatile materials, glass and glass ceramics. We would like to share the knowledge won through our research and development at Schott in cooperation with the users of our materials with scientists and engineers, interested customers and friends, and with the employees of our firm.

Download or read book Handbook of Advanced Dielectric Piezoelectric and Ferroelectric Materials written by Z-G Ye and published by Elsevier. This book was released on 2008-03-20 with total page 1091 pages. Available in PDF, EPUB and Kindle. Book excerpt: This comprehensive book covers recent developments in advanced dielectric, piezoelectric and ferroelectric materials. Dielectric materials such as ceramics are used to manufacture microelectronic devices. Piezoelectric components have been used for many years in radioelectrics, time-keeping and, more recently, in microprocessor-based devices. Ferroelectric materials are widely used in various devices such as piezoelectric/electrostrictive transducers and actuators, pyroelectric infrared detectors, optical integrated circuits, optical data storage and display devices.The book is divided into eight parts under the general headings: High strain high performance piezo- and ferroelectric single crystals; Electric field-induced effects and domain engineering; Morphotropic phase boundary related phenomena; High power piezoelectric and microwave dielectric materials; Nanoscale piezo- and ferroelectrics; Piezo- and ferroelectric films; Novel processing and new materials; Novel properties of ferroelectrics and related materials. Each chapter looks at key recent research on these materials, their properties and potential applications.Advanced dielectric, piezoelectric and ferroelectric materials is an important reference tool for all those working in the area of electrical and electronic materials in general and dielectrics, piezoelectrics and ferroelectrics in particular. - Covers the latest developments in advanced dielectric, piezoelectric and ferroelectric materials - Includes topics such as high strain high performance piezo and ferroelectric single crystals - Discusses novel processing and new materials, and novel properties of ferroelectrics and related materials

Download or read book Advanced Dielectric Piezoelectric and Ferroelectric Thin Films written by Bruce A. Tuttle and published by John Wiley & Sons. This book was released on 2012-04-17 with total page 86 pages. Available in PDF, EPUB and Kindle. Book excerpt: Advances in synthesis and characterization of dielectric, piezoelectric and ferroelectric thin films are included in this volume. Dielectric, piezoelectric and ferroelectric thin films have a tremendous impact on a variety of commercial and military systems including tunable microwave devices, memories, MEMS devices, actuators and sensors. Recent work on piezoelectric characterization, AFE to FE dielectric phase transformation dielectrics, solution and vapor deposited thin films, and materials integration are among the topics included. Novel approaches to nanostructuring, characterization of material properties and physical responses at the nanoscale also is included.

Download or read book Advanced Piezoelectric Materials written by Kenji Uchino and published by Woodhead Publishing. This book was released on 2017-06-20 with total page 850 pages. Available in PDF, EPUB and Kindle. Book excerpt: Advanced Piezoelectric Materials: Science and Technology, Second Edition, provides revised, expanded, and updated content suitable for those researching piezoelectric materials or using them to develop new devices in areas such as microelectronics, optical, sound, structural, and biomedical engineering. Three new chapters cover multilayer technologies with base-metal internal electrodes, templated grain growth preparation techniques for manufacturing piezoelectric single crystals, and piezoelectric MEMS technologies. Chapters from the first edition have been revised in order to provide up-to-date, comprehensive coverage of developments in the field. Part One covers the structure and properties of a range of piezoelectric materials. Part Two details advanced manufacturing processes for particular materials and device types, including three new chapters. Finally, Part Three covers materials development for three key applications of piezoelectric materials. Dr. Kenji Uchino is a pioneer in piezoelectric actuators, Professor of Electrical Engineering at Penn State University, and Director of the International Center for Actuators and Transducers. He has authored 550 papers, 54 books and 26 patents in the ceramic actuator area. - Features an overview of manufacturing methods for a wide range of piezoelectric materials - Provides revised, expanded, and updated coverage compared to the first edition, including three new chapters - Suitable for those researching piezoelectric materials or using them to develop new devices in areas such as microelectronics, optical, sound, structural, and biomedical engineering

Download or read book Sol Gel Derived Ferroelectric Thin Films for Voltage Tunable Applications written by and published by . This book was released on 2007 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Ferroelectric perovskite thin films for voltage tunable applications, namely (Ba, Sr)TiO3 (Barium Strontium Titanate or BST) and (Pb, Sr)TiO3 (Lead Strontium Titanate or PST), are synthesized via the so-called sol-gel route. While BST shows the tendency to severe film cracking, PST can be grown crack free onto platinised Si standard substrates and even directly onto SiO2, SiNx or bare Si. The growth kinetics of PST on platinised SiO2/Si and directly on SiO2/Si are studied in detail using X-ray diffractometry (XRD), scanning electron and atomic force microscopy, SEM and AFM respectively. It is shown that PST begins to crystallise at 500°C on Ti/Pt and 550°C directly on SiO2. After a thermal treatment of 650°C for 15 min both films are fully crystallised with random (100) and (110) orientation and a smooth surface. The dielectric properties, e.g. dielectric constant, loss and tunability, of PST 50/50 are measured using a standard Ti/Pt bottom electrode with Cr/Au top electrodes and a TiW/Cu bottom electrode on which the PST thin film was bonded with TiW/Cu top electrodes. The Cu/PST/Cu system shows an enhanced performance in terms of loss resulting in a larger device quality factor and a figure of merit (FOM) of 18.25 compared to 16.6 for the configuration using a Pt bottom electrode. The maximum tunability is 73% with an applied voltage of 35V and the dielectric constant at zero bias is ~ 420 with a loss

Download or read book Sol gel Processing Microstructural Development and Electrical Properties of Ferroelectric Lead Zirconate titanate Thin Films written by Cheng-Chen Hsueh and published by . This book was released on 1991 with total page 296 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Investigation on the Structural Dielectric and Ferroelectric Properties of Sol Gel Derived Zirconium Zr Substituted Barium Titanate Thin Films written by Anju Dixit and published by . This book was released on 2003 with total page 420 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Progress In Advanced Dielectrics written by Li Jin and published by World Scientific. This book was released on 2020-03-20 with total page 510 pages. Available in PDF, EPUB and Kindle. Book excerpt: Dielectrics is becoming increasingly important due to the rapid developments in electronics, optoelectronics, photonics and nanotechnology. In the past two decades, research on advanced dielectric materials and related applications has undergone an accelerated growth, due in larger part to the discovery of the superior piezoelectric properties in relaxor single crystals, the development of the lead-free piezoelectric/ferroelectric materials and the renaissance of the multiferroics.This book contains 9 feature articles which, together, provide a comprehensive account on the current state of advanced dielectrics and related phenomena. The first two articles present fundamental knowledge related to the characterization of ferroelectric hysteresis, which is the most widely used method to learn the ferroelectricity experimentally. The latest research progress in relaxor ferroelectric is given in the next two articles. The last five articles are dedicated to the multi-functionality of advanced dielectrics, with emphasis on multiferroic magnetoelectric composites, lead-free piezoceramics, pyroelectric/electrocaloric materials, polymer-based dielectrics, and flexible nanodielectrics.

Download or read book Nanostructures in Ferroelectric Films for Energy Applications written by Jun Ouyang and published by Elsevier. This book was released on 2019-07-15 with total page 386 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nanostructures in Ferroelectric Films for Energy Applications: Grains, Domains, Interfaces and the Engineering Methods presents methods of engineering nanostructures in ferroelectric films to improve their performance in energy harvesting and conversion and storage. Ferroelectric films, which have broad applications, including the emerging energy technology, usually consist of nanoscale inhomogeneities. For polycrystalline films, the size and distribution of nano-grains determines the macroscopic properties, especially the field-induced polarization response. For epitaxial films, the energy of internal long-range electric and elastic fields during their growth are minimized by formation of self-assembled nano-domains. This book is an accessible reference for both instructors in academia and R&D professionals. Provides the necessary components for the systematic study of the structure-property relationship in ferroelectric thin film materials using case studies in energy applications Written by leading experts in the research areas of piezoelectrics, electrocalorics, ferroelectric dielectrics (especially in capacitive energy storage), ferroelectric domains, and ferroelectric-Si technology Includes a well balanced mix of theoretical design and simulation, materials processing and integration, and dedicated characterization methods of the involved nanostructures

Download or read book Characterisation of Ferroelectric Bulk Materials and Thin Films written by Markys G. Cain and published by Springer. This book was released on 2014-06-02 with total page 283 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents a comprehensive review of the most important methods used in the characterisation of piezoelectric, ferroelectric and pyroelectric materials. It covers techniques for the analysis of bulk materials and thick and thin film materials and devices. There is a growing demand by industry to adapt and integrate piezoelectric materials into ever smaller devices and structures. Such applications development requires the joint development of reliable, robust, accurate and – most importantly – relevant and applicable measurement and characterisation methods and models. In the past few years there has been a rapid development of new techniques to model and measure the variety of properties that are deemed important for applications development engineers and scientists. The book has been written by the leaders in the field and many chapters represent established measurement best practice, with a strong emphasis on application of the methods via worked examples and detailed experimental procedural descriptions. Each chapter contains numerous diagrams, images, and measurement data, all of which are fully referenced and indexed. The book is intended to occupy space in the research or technical lab, and will be a valuable and practical resource for students, materials scientists, engineers, and lab technicians.

Download or read book Materials Process Integration for MEMS written by Francis E. H. Tay and published by Springer Science & Business Media. This book was released on 2013-06-29 with total page 302 pages. Available in PDF, EPUB and Kindle. Book excerpt: The field of materials and process integration for MEMS research has an extensive past as well as a long and promising future. Researchers, academicians and engineers from around the world are increasingly devoting their efforts on the materials and process integration issues and opportunities in MEMS devices. These efforts are crucial to sustain the long-term growth of the MEMS field. The commercial MEMS community is heavily driven by the push for profitable and sustainable products. In the course of establishing high volume and low-cost production processes, the critical importance of materials properties, behaviors, reliability, reproducibility, and predictability, as well as process integration of compatible materials systems become apparent. Although standard IC fabrication steps, particularly lithographic techniques, are leveraged heavily in the creation of MEMS devices, additional customized and novel micromachining techniques are needed to develop sophisticated MEMS structures. One of the most common techniques is bulk micromachining, by which micromechanical structures are created by etching into the bulk of the substrates with either anisotropic etching with strong alk:ali solution or deep reactive-ion etching (DRIB). The second common technique is surface micromachining, by which planar microstructures are created by sequential deposition and etching of thin films on the surface of the substrate, followed by a fmal removal of sacrificial layers to release suspended structures. Other techniques include deep lithography and plating to create metal structures with high aspect ratios (LIGA), micro electrodischarge machining (J.

Download or read book Piezoelectric MEMS Resonators written by Harmeet Bhugra and published by Springer. This book was released on 2017-01-09 with total page 423 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS. The authors discuss the most exciting developments in the area of materials and devices for the making of piezoelectric MEMS resonators, and offer direct examples of the technical challenges that need to be overcome in order to commercialize these types of devices. Some of the topics covered include: Widely-used piezoelectric materials, as well as materials in which there is emerging interest Principle of operation and design approaches for the making of flexural, contour-mode, thickness-mode, and shear-mode piezoelectric resonators, and examples of practical implementation of these devices Large scale manufacturing approaches, with a focus on the practical aspects associated with testing and qualification Examples of commercialization paths for piezoelectric MEMS resonators in the timing and the filter markets ...and more! The authors present industry and academic perspectives, making this book ideal for engineers, graduate students, and researchers.

Download or read book Synthesis and Characterization of Pb Zr Ti O3 Thin Films for Microelectromechanical Systems written by Kirsten L. Brookshire and published by . This book was released on 2011 with total page 126 pages. Available in PDF, EPUB and Kindle. Book excerpt: Pb(Zr, Ti)O3 (PZT) is a very attractive material for use in piezoelectric-based microelectromechanical systems (MEMS) due to its high piezoelectric coefficients and ability for large displacements with relatively low applied fields (as compared to electrostatic-based MEMS). The piezoelectric effect is strongly anisotropic, thus it is very desirable to control the crystallographic orientation of the active material. This study is designed to understand the effect of crystallographic texture on the long-term stability of piezoelectric-based MEMS devices. Utilizing (100)-oriented solution deposited LaNiO3 (LNO) and PbTiO3 (PT) seed layers, (001) fiber texture of rfmagnetron sputtered PZT films (ex situ annealed) with varying thickness was optimized. X-ray diffraction rocking curve data indicated good out-of-plane alignment, with full-width-at-half-maximum (FWHM) values of 3.8° - 4.5° and 2.5°- 3.1° for PZT on LNO and PT, respectively. This optimization of (001) orientation is paramount to maximizing the piezoelectric response of PZT thin films for MEMS applications, as this promotes the highest piezoelectric response. Dielectric and ferroelectric properties were obtained for films 120-1320 nm thick. Subsequently these films were subjected to lifetime (fatigue) tests similar to what is experienced in piezo- MEMS applications. Fatigue endurance is a critical factor in evaluating long-term device reliability in these devices. A study of fatigue dependence on film thickness, morphology, bottom electrode, and field strength was conducted. Results of these studies show film morphology contributes strongly to film fatigue and film failure prior to reaching 108 fatigue cycles, with increased grain size leading to improved fatigue endurance. Film thickness was also shown to contribute significantly to fatigue, predominantly in PZT on PT films, with films over 1 [micrometer] in thickness showing large fatigue after 108 cycles. Films with bottom LNO electrodes demonstrated improved performance over all thickness ranges studied when compared to PT bottom electrodes, exhibiting minimal fatigue after 108 cycles.

Download or read book Handbook of Silicon Based MEMS Materials and Technologies written by Markku Tilli and published by William Andrew. This book was released on 2015-09-02 with total page 827 pages. Available in PDF, EPUB and Kindle. Book excerpt: The Handbook of Silicon Based MEMS Materials and Technologies, Second Edition, is a comprehensive guide to MEMS materials, technologies, and manufacturing that examines the state-of-the-art with a particular emphasis on silicon as the most important starting material used in MEMS. The book explains the fundamentals, properties (mechanical, electrostatic, optical, etc.), materials selection, preparation, manufacturing, processing, system integration, measurement, and materials characterization techniques, sensors, and multi-scale modeling methods of MEMS structures, silicon crystals, and wafers, also covering micromachining technologies in MEMS and encapsulation of MEMS components. Furthermore, it provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques, shows how to protect devices from the environment, and provides tactics to decrease package size for a dramatic reduction in costs. - Provides vital packaging technologies and process knowledge for silicon direct bonding, anodic bonding, glass frit bonding, and related techniques - Shows how to protect devices from the environment and decrease package size for a dramatic reduction in packaging costs - Discusses properties, preparation, and growth of silicon crystals and wafers - Explains the many properties (mechanical, electrostatic, optical, etc.), manufacturing, processing, measuring (including focused beam techniques), and multiscale modeling methods of MEMS structures - Geared towards practical applications rather than theory

Download or read book Acoustic Wave and Electromechanical Resonators written by Humberto Campanella and published by Artech House. This book was released on 2010 with total page 364 pages. Available in PDF, EPUB and Kindle. Book excerpt: This groundbreaking book provides you with a comprehensive understanding of FBAR (thin-film bulk acoustic wave resonator), MEMS (microelectomechanical system), and NEMS (nanoelectromechanical system) resonators. For the first time anywhere, you find extensive coverage of these devices at both the technology and application levels. This practical reference offers you guidance in design, fabrication, and characterization of FBARs, MEMS and NEBS. It discusses the integration of these devices with standard CMOS (complementary-metal-oxide-semiconductor) technologies, and their application to sensing and RF systems. Moreover, this one-stop resource looks at the main characteristics, differences, and limitations of FBAR, MEMS, and NEMS devices, helping you to choose the right approaches for your projects. Over 280 illustrations and more than 130 equations support key topics throughout the book.