Download or read book Convective Heat Transfer and Flow Stability in Rotating Disk CVD Reactors written by and published by . This book was released on 1998 with total page 8 pages. Available in PDF, EPUB and Kindle. Book excerpt: The flow and heat transfer of NH3 and He have been studied in a rotating disk system with applications to chemical vapor deposition reactors. Influence of the important operating parameters were studied numerically over ranges of the primary dimensionless variables: (1) the spin Reynolds number, Re{sub {omega}}, (2) the disk mixed convection parameter, MCP{sub d}, and (3) a new parameter, the wall mixed convection parameter, MCP{sub w}. Inlet velocities were set to the corresponding infinite rotating disk asymptotic velocity. Results were obtained primarily for NH3. Results show that increasing Re{sub {omega}} from 314.5 to 3,145 increases the uniformity of the rotating disk heat flux and results in thinner thermal boundary layers at the disk surface. At Re{sub {omega}} = 314.5, increasing MCP{sub d} to 15 leads to significant departure from the infinite disk result with nonuniform disk heat fluxes and recirculating flow patterns. At Re{sub {omega}} = 3,145, the results are closer to the infinite disk for MCP{sub d} up to 15. For large values of MCP{sub w}, the flow recirculates and there is significant deviation from the infinite disk result. The influence of MCP{sub w} on flow stability is increased at larger MCP{sub d} and lower Re{sub {omega}}. The results show that because of variable transport properties, the flow of NH3 is less stable than that of He as MCP{sub d} is increased for MCP{sub w} = 0 and Re{sub {omega}} = 314.5.
Download or read book The Influence of Convective Heat Transfer on Flow Stability in Rotating Disk Chemical Vapor Deposition Reactors written by William S. Winters and published by . This book was released on 1997 with total page 46 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book The Influence of Convective Heat Transfer on Flow Stability in Rotating Disk Chemical Vapor Deposition Reactors written by and published by . This book was released on 2001 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Flow and heat transfer of NH[sub 3] and He were studied in a rotating disk system with applications to chemical vapor deposition reactors. Flow field and disk heat flux were obtained over a range of operating conditions. Comparisons of disk convective heat transfer were made to infinite rotating disk results to appraise uniformity of transport to the disk. Important operating variables include disk spin rate, disk and enclosure temperatures, flow rate, composition, pressure, and gas mixture temperature at the reactor inlet. These variables were studied over ranges of the spin Reynolds number, Re[omega]; disk mixed convection parameter, MCP[sub w]; and wall mixed convection parameter, MCP[sub w]. Results obtained for NH[sub 3] show that increasing Re[omega] from 314.5 to 3145 increases the uniformity of rotating disk heat flux and results in thinner thermal boundary layers at the disk surface. At Re[omega]=314.5, increasing MCP[sub d] to 15 leads to significant departure from the infinite disk result with nonuniform disk heat fluxes and recirculating flow patterns; flow becomes increasingly complex at larger values of MCP[sub d]. At Re[omega] of 3145, results are closer to the infinite disk for MCP[sub d] up to 15. For large negative (hot walls) and positive (cold walls) values of MCP[sub w], flow recirculates and there is significant deviation from the infinite disk result; nonuniformities occur at both values of Re[omega]. The influence of MCP[sub w] on flow stability is increased at larger MCP[sub d] and lower Re[omega]. To determine the influence of viscosity and thermal conductivity variation with temperature, calculations were made with He and NH[sub 3]; He transport property variation is low relative to NH[sub 3]. Results show that the flow of NH[sub 3] is less stable than that of He as MCP[sub d] is increased for MCP[sub w]=0 and Re[omega]=314.5. 16 refs., 15 figs., 1 tab.
Download or read book Applied mechanics reviews written by and published by . This book was released on 1948 with total page 400 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book CVD of Nonmetals written by William S. Rees, Jr. and published by John Wiley & Sons. This book was released on 2008-09-26 with total page 441 pages. Available in PDF, EPUB and Kindle. Book excerpt: Written by leading experts in the field, this practical reference handbook offers an up-to-date, critical survey of the chemical vapor deposition (CVD) of nonmetals, a key technology in semiconductor electronics, finishing, and corrosion protection. The basics necessary for any CVD process are discussed in the introduction. In the following chapters, precursor requirements, with an emphasis on materials chemistry, common structures of reactants and substrates, as well as reaction control are discussed for a broad range of compositions including superconducting, conducting, semiconducting, insulating and structural materials. Technological issues, such as reactor geometries and operation parameters, are assessed and the viability of the method, both technically and economically, is compared with other techniques for the preparation of thin films. Relevant materials and technical data are collected in tables throughout. An extensive glossary, list of abbreviations and acronyms, and over 1400 references round off this impressive work. The 'CVD of Nonmetals' offers a stimulating combination of basic concepts and practical applications. Materials scientists, solid-state and organometallic chemists, physicists, engineer, as well as graduate students will find this book of enomous value.
Download or read book Heat Transfer 1990 General papers written by Gad Hetsroni and published by . This book was released on 1990 with total page 648 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1992 with total page 308 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Heat Transfer 1990 written by Gad Hetsroni and published by . This book was released on 1990 with total page 648 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Energy Research Abstracts written by and published by . This book was released on 1990 with total page 946 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Transport Phenomena in Food Processing First International Conference Proceedings written by Selcuk Guceri and published by CRC Press. This book was released on 1992-11-30 with total page 1618 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Journal of Heat Transfer written by and published by . This book was released on 2002 with total page 416 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Flow Structure and Heat Transfer in an Impinging Jet CVD Reactor written by Nasir Memon and published by . This book was released on 2009 with total page 67 pages. Available in PDF, EPUB and Kindle. Book excerpt: A detailed experimental study is undertaken to investigate the flow structure and heat transfer in an impinging jet Chemical Vapor Deposition (CVD) reactor at atmospheric pressure. It is critical to develop models that predict flow patterns in such a reactor to achieve uniform deposition across the substrate. Free convection can negatively affect the gas flow as cold inlet gas impinges on the heated substrate, leading to vortices and disturbances in the normal flow path. This experimental research will be used to understand the buoyancy-induced and momentum-driven flow structure encountered in an impinging jet CVD reactor. Investigations are conducted for various operational parameters such as substrate temperature and inlet velocity. In addition, different reactor geometries with varying inlet length and height between the substrate and inlet are included in the study. Experimental results obtained from the study provide information on the temperature distribution, heat transfer rates, and flow field. Such results validate the operation of the reactor at atmospheric pressure and provide valuable insight into future design of impinging jet CVD reactors.
Download or read book Experimental Study of Flow and Heat Transfer in a Rotating Chemical Vapor Deposition Reactor written by Sun Wong and published by . This book was released on 2015 with total page 54 pages. Available in PDF, EPUB and Kindle. Book excerpt: An experimental model was set up to study the rotating vertical impinging chemical vapor deposition reactor. Deposition occurs only when the system has enough thermal energy. Therefore, understanding the fluid characteristic and heat transfer of the system will provide a good basis to understand the full model. Growth rate and the uniformity of the film are the two most important factors in CVD process and it is depended on the flow and thermal characteristic within the system. Optimizing the operating parameters will result in better growth rate and uniformity. Operating parameters such as inflow velocity, inflow diameter and rotational speed are used to create different design simulations. Fluid velocities and various temperatures are recorded to see the effects of the different operating parameters. Velocities are recorded by using flow meter and hot wire anemometer. Temperatures are recorded by using various thermocouples and infrared thermometer. The result should provide a quantitative basis for the prediction, design and optimization of the system and process for design and fabrication of future CVD reactors. Further assessment of the system results will be discuss in detail such as effects of buoyancy and effects of rotation. The experimental study also coupled with a numerical study for further validation of both model. Comparisons between the two models are also presented.
Download or read book Proceedings of the 2003 ASME Summer Heat Transfer Conference written by and published by . This book was released on 2003 with total page 1010 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Journal de physique written by and published by . This book was released on 2001 with total page 1246 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Extended Abstracts written by Electrochemical Society and published by . This book was released on 1990 with total page 1210 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Thirteenth European Conference on Chemical Vapour Deposition written by Dimitris Davazoglou and published by . This book was released on 2001 with total page 1240 pages. Available in PDF, EPUB and Kindle. Book excerpt:
