Download or read book Cleanroom Energy Efficiency written by and published by . This book was released on 2010 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Cleanrooms are among the most energy-intensive types of facilities. This is primarily due to the cleanliness requirements that result in high airflow rates and system static pressures, as well as process requirements that result in high cooling loads. Various studies have shown that there is a wide range of cleanroom energy efficiencies and that facility managers may not be aware of how energy efficient their cleanroom facility can be relative to other cleanroom facilities with the same cleanliness requirements. Metrics and benchmarks are an effective way to compare one facility to another and to track the performance of a given facility over time. This article presents the key metrics and benchmarks that facility managers can use to assess, track, and manage their cleanroom energy efficiency or to set energy efficiency targets for new construction. These include system-level metrics such as air change rates, air handling W/cfm, and filter pressure drops. Operational data are presented from over 20 different cleanrooms that were benchmarked with these metrics and that are part of the cleanroom benchmark dataset maintained by Lawrence Berkeley National Laboratory (LBNL). Overall production efficiency metrics for cleanrooms in 28 semiconductor manufacturing facilities in the United States and recorded in the Fabs21 database are also presented.
Download or read book Cleanroom Energy Code of Practice for Improving Energy Efficiency in Cleanrooms and Clean Air Devices written by British Standards Institute Staff and published by . This book was released on 1913-03-31 with total page 36 pages. Available in PDF, EPUB and Kindle. Book excerpt: Clean rooms, Communicable disease control, Environmental cleanliness, Rooms, Waste handling, Air cleaning equipment, Air treatment devices, Maintenance, Cleaning, Classification systems, Contamination, Qualification approval, Leak tests, Performance testing, Access, Air-distribution systems, Design, Installation, Environment (working), Instructions for use
Download or read book Best Practice for Energy Efficient Cleanrooms written by Tengfang Xu and published by . This book was released on 2005 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Cleanroom air-recirculation systems typically account for a significant portion of the HVAC energy use in cleanrooms. High electric power density is normally required for fans to deliver large volume of airflows that were designed, supplied, recirculated, and exhausted within a given time. With the increasing demand for specific contamination control, it is important to optimize design of clean spaces. Best practice in cleanroom air system design includes right-sizing the systems in cleanrooms and adopting minienvironments. Implementing and integrating minienvironments in cleanrooms can improve contamination control and save significant energy. A minienvironment is a localized environment created by an enclosure to isolate a product or process from the surrounding environment. The advantages in using minienvironments include the following: (1) Minienvironments may create better contamination control and process integration. (2) Minienvironments may maintain better contamination control by better control of pressure difference or through use of unidirectional airflows, e.g., cleanliness-class upgrade required for certain process. (3) Minienvironments may potentially reduce energy costs. The use of fan-filter units (FFU) in minienvironments is common. The energy efficiency of such air-delivery systems can vary significantly because of the difference in energy performance, airflow paths, and operating conditions. Simply adding minienvironments with fan-filter units in an existing cleanroom will increase power density and energy intensity for delivering airflow in the space served, if everything else is unchanged. However, by considering contamination control requirements in the various spaces minienvironments can be integrated with the surrounding cleanroom to optimize the overall electric power demand for the facility and to achieve specific cleanliness in each area. In addition, selecting energy efficient minienvironment systems will further improve the overall energy efficiency of the clean spaces.
Download or read book Considerations for Efficient Airflow Design in Cleanrooms written by and published by . This book was released on 2004 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: A high-performance cleanroom should provide efficient energy performance in addition to effective contamination control. Energy-efficient designs can yield capital and operational cost savings, and can be part of a strategy to improve productivity in the cleanroom industry. Based upon in-situ measurement data from ISO Class 5 clean rooms, this article discusses key factors affecting cleanroom air system performance and benefits of efficient airflow design in clean rooms. Cleanroom HVAC systems used in the semiconductor, pharmaceutical, and healthcare industries are very energy intensive, requiring large volumes of cleaned air to remove or dilute contaminants for satisfactory operations. There is a tendency, however, to design excessive airflow rates into cleanroom HVAC systems, due to factors such as design conservatism, lack of thorough understanding of airflow requirements, concerns about cleanliness reliability, and potential design and operational liabilities. Energy use of cleanroom environmental systems varies with system type and design, cleanroom functions, and the control of critical parameters such as temperature and humidity. In particular, cleanroom cleanliness requirements specified by cleanliness class have an impact on overall energy use. A previous study covering Europe and the US reveals annual cleanroom electricity usage for cooling and fan energy varies significantly depending on cleanliness class, and may account for up to three-quarters of total annual operating costs. A study on a semiconductor cleanroom in Japan found air delivery systems account for more than 30% of total power consumption. It is evident that the main factors dictating cleanroom operation energy include airflow rates and HVAC system efficiency. Improving energy efficiency in clean rooms may potentially contribute to significant savings in the initial costs of the facilities as well as operation and maintenance costs. For example, energy consumption by a typical chip manufacturer can be cut 40% or more, and the associated greenhouse emissions even more. Cleanroom HVAC systems provide huge opportunities for energy savings in the semiconductor industry. In addition to direct cost reductions in cleanroom investment and operation, energy-efficient designs can reduce maintenance costs, increase power reliability, improve time-to-market in cleanroom production, and improve environmental quality. Companies that use energy efficiency to lower costs and increase productivity can gain a competitive advantage and achieve a higher return on investment. In addition, energy-efficient cleanroom systems conserve energy and natural resources, heightening the company's reputation as an environmentally conscious leader in the community and the industry. A significant portion of energy use in cleanroom environmental systems is associated with recirculating air systems. We will review and analyze design factors and operational performance of airflow systems in ISO Class 5 clean rooms. We will also discuss benefits of efficient cleanroom airflow designs in conjunction with effective cleanroom contamination control. We will consider the following common recirculating air system designs: fan-tower (FT) with pressurized-plenum; distributed air handler unit (AHU); and fan-filter unit (FFU).
Download or read book Energy Performance of Cleanroom Environmental Systems written by and published by . This book was released on 2001 with total page 12 pages. Available in PDF, EPUB and Kindle. Book excerpt: By developing metrics for evaluating cleanroom air system performance and overall load intensity, this paper provides energy benchmarking results for thirteen cleanroom environmental system performance, and identifies opportunities for improving cleanroom energy efficiency while maintaining or improving cleanroom contamination control. Comparisons with IEST Recommended Practice are made to examine the performance of cleanroom air systems. These results can serve as a vehicle to identify energy efficient cleanroom design practices and to highlight important issues in cleanroom operation and maintenance. Results from this study confirm that there are opportunities in improving energy efficiency of cleanroom environmental systems while maintaining effective contamination control.
Download or read book Cleanroom Energy Benchmarking Results written by and published by . This book was released on 2001 with total page 12 pages. Available in PDF, EPUB and Kindle. Book excerpt: A utility market transformation project studied energy use and identified energy efficiency opportunities in cleanroom HVAC design and operation for fourteen cleanrooms. This paper presents the results of this work and relevant observations. Cleanroom owners and operators know that cleanrooms are energy intensive but have little information to compare their cleanroom's performance over time, or to others. Direct comparison of energy performance by traditional means, such as watts/ft2, is not a good indicator with the wide range of industrial processes and cleanliness levels occurring in cleanrooms. In this project, metrics allow direct comparison of the efficiency of HVAC systems and components. Energy and flow measurements were taken to determine actual HVAC system energy efficiency. The results confirm a wide variation in operating efficiency and they identify other non-energy operating problems. Improvement opportunities were identified at each of the benchmarked facilities. Analysis of the best performing systems and components is summarized, as are areas for additional investigation.
Download or read book Best Practice for Energy Efficient Cleanrooms written by Tengfang Xu and published by . This book was released on 2005 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: The HVAC systems in cleanrooms may use 50 percent or more of the total cleanroom energy use. Fan energy use accounts for a significant portion (e.g., over 50%) of the HVAC energy use in cleanrooms such as ISO Classes 3, 4, or 5. Three types of air-handling systems for recirculating airflows are commonly used in cleanrooms: (1) fan-tower systems with pressurized plenum, (2) ducted HEPA systems with distributed-fans, and (3) systems with fan-filter units. Because energy efficiency of the recirculation systems could vary significantly from system type to system type, optimizing aerodynamic performance in air recirculation systems appears to be a useful approach to improve energy efficiency in cleanrooms. Providing optimal airflows through careful planning, design and operation, including air change rate, airflow uniformity, and airflow speed, is important for controlling particle contamination in cleanrooms. In practice, the use of fan-filter units (FFUs) in the air-handling system is becoming more and more popular because of this type of system may offer a number of advantages. Often modular and portable than traditional recirculation airflow systems, FFUs are easier to install, and can be easily controlled and monitored to maintain filtration performance. Energy efficiency of air handling systems using fan-filter units can, however, be lower than their counterparts and may vary significantly from system to system because of the difference in energy performance, airflow paths, and the operating conditions of FFUs.
Download or read book An Energy Efficiency Guide for Use in Cleanroom Programming written by and published by . This book was released on 2001 with total page 5 pages. Available in PDF, EPUB and Kindle. Book excerpt: This guide was developed to provide ideas for considering energy efficiency in the early stages of a cleanroom design project. Use of this guide will facilitate selection of design features that will improve energy efficiency in cleanrooms. Cleanroom owners and designers can use the guide to focus on energy intensive items in the design of a cleanroom facility.
Download or read book Best Practicefor Energy Efficient Cleanrooms written by Tengfang Xu and published by . This book was released on 2005 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Cleanroom energy benchmarking data shows that chiller plant designs and operating efficiencies varied significantly from cleanroom to cleanroom. While system optimization is critical to the overall energy efficiency of chiller plants, the operating efficiency of chilled water and condenser pumps, along with chiller efficiency and cooling tower efficiency, is a major factor in the overall system efficiency. The design and operating efficiency of water pumps directly affects energy use for such facilities. Figure 1 shows benchmarked HVAC energy end use in a semiconductor cleanroom facility. In this case, the water pumps collectively accounted for 17% of the total energy use. Figure 2 shows the electric power demand of the components in a chiller plant system. Pumps accounted for 18% of the total power demand for the whole chiller plant. It is important to design, select, operate, and control water-pumping systems to achieve high efficiency and to lower life-cycle costs for cleanrooms and their adjacent spaces.
Download or read book Cleanroom Energy Efficiency Workshop Proceedings written by and published by . This book was released on 1999 with total page 119 pages. Available in PDF, EPUB and Kindle. Book excerpt: On March 15, 1999, Lawrence Berkeley National Laboratory hosted a workshop focused on energy efficiency in Cleanroom facilities. The workshop was held as part of a multiyear effort sponsored by the California Institute for Energy Efficiency, and the California Energy Commission. It is part of a project that concentrates on improving energy efficiency in Laboratory type facilities including cleanrooms. The project targets the broad market of laboratory and cleanroom facilities, and thus cross-cuts many different industries and institutions. This workshop was intended to raise awareness by sharing case study success stories, providing a forum for industry networking on energy issues, contributing LBNL expertise in research to date, determining barriers to implementation and possible solutions, and soliciting input for further research.
Download or read book Efficient Airflow Design for Cleanrooms Improves Business Bottom Lines written by Tengfang Xu and published by . This book was released on 2003 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Based on a review of airflow design factors and in-situ energy measurements in ISO Cleanliness Class-5 cleanrooms, this paper addresses the importance of energy efficiency in airflow design and opportunities of cost savings in cleanroom practices. The paper discusses design factors that can long lastingly affect cleanroom system performance, and demonstrates benefits of energy efficient cleanroom design from viewpoints of environmental control and business operations. The paper suggests that a high performance cleanroom should not only be effective in contamination control, but also be efficient in energy and environmental performance. The paper also suggests that energy efficient design practice stands to bring in immediate capital cost savings and operation cost savings, and should be regarded by management as a strategy to improve business bottom lines.
Download or read book Das Polizeischulwesen written by and published by . This book was released on with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book P VINYL GUAIACOL written by and published by . This book was released on 2001 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Toward Green Systems for Cleanrooms written by and published by . This book was released on 2004 with total page 5 pages. Available in PDF, EPUB and Kindle. Book excerpt: The paper presents results of laboratory-measured performance of fan-filter units (FFUs) used for cleanrooms. A total of twenty FFUs collected from the market were tested, including thirteen 1220 mm x 610 mm (or 4 ft x 2 ft) units and seven 1220 mm x 1220 mm (or 4 ft x 4 ft) units. The paper concludes that there are wide variations in FFUs energy performance, and that there are opportunities in improving energy efficiency and lowering operating costs of FFUs. Furthermore, the paper suggests the benefits of having a uniform method for testing and reporting FFU performance. Such a testing method and recommended practice guideline is under development, with heavy input from FFU suppliers, users, and independent institutions that include Lawrence Berkeley National Laboratory (LBNL), Industrial Technology Research Institute (ITRI), and Institute of Environmental Sciences and Technology (IEST). An integrated approach with the participation from designers, suppliers, users, and utility companies can help to identify energy-efficient FFUs that are required for many cleanroom applications.
Download or read book Energy Management in Cleanrooms written by and published by . This book was released on 2004 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: Lawrence Berkeley Laboratory is working to improve energy efficiency in high-tech facilities, i.e., laboratories, data centers, and clean rooms. With their high ventilation requirements and correspondingly high process loads, 7x24 operation, and importance to the overall economy, these types of facilities offer important (and often under-exploited) potential for energy savings. In California alone, two large electric power plants could be avoided with the widespread adoption of measures to improve energy efficiency in this arena, saving half a billion dollars per year for facility owners. To help identify specific promising opportunities, the California Energy Commission sponsored the development of technology research ''Roadmaps'' for clean rooms and laboratories (in 2002) and data centers (in 2003). These were developed with industry participation and provided dozens of specific recommendations. The balance of this article focuses on the case of clean rooms.
Download or read book Performance Evaluation of Cleanroom Environmental Systems written by and published by . This book was released on 2003 with total page 13 pages. Available in PDF, EPUB and Kindle. Book excerpt: This paper presents in-situ measurement results for energy and environmental performance of thirteen cleanroom systems located in the USA, including key metrics for evaluating cleanroom air system performance and overall electric power intensity. Comparisons with the IEST Recommended Practice (IEST-RP-CC012.1) are made to examine the performance of cleanroom air systems. Based upon the results, the paper discusses likely opportunities for improving cleanroom energy efficiency while maintaining effective contamination control. The paper concludes that there are wide variations in energy performance of cleanroom environmental systems, and that performance benchmarking can serve as a vehicle to identify energy efficient cleanroom design practices and to highlight important issues in cleanroom operation and maintenance.
