Download or read book Characterization of Plasma enhanced Chemical vapor deposited Diamond like Carbon Films written by G. Sreenivas and published by . This book was released on 1992 with total page 216 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Plasma Enhanced Chemical Vapor Deposition of Diamondlike Carbon Films Using Acetylene written by Sriram Vishwanathan and published by . This book was released on 1998 with total page 114 pages. Available in PDF, EPUB and Kindle. Book excerpt: This study is focussed on the synthesis and characterization of diamondlike carbon (DLQ films deposited on silicon wafers and glass by plasma enhanced chemical vapor deposition (PECVD), using acetylene (C2H4) as a precursor. The process parameters, such as temperature, pressure, power and reactant gas flow rate have been systematically varied and their effects on the film growth rate and properties were investigated. The optimized deposition condition appeared to be at 150°C, 200mTorr, 200 Watts and flow rate = 25 sccm. For these conditions, the films were hard and found to have good adhesion to the substrate, and resistant to BF etching (49% BY diluted to 10% with distilled water). It was found that the adhesion of the DLC film to the substrate is good if the substrate is first etched with oxygen and CF4 prior to the deposition.

Download or read book Synthesis and Characterization of Diamond like Carbon Coatings Deposited by Plasma Source Ion Implantation and Conventional Ion Beam Assisted Deposition Processes written by Brian M. Stout and published by . This book was released on 1999 with total page 114 pages. Available in PDF, EPUB and Kindle. Book excerpt: Diamond-like carbon coatings produced by Plasma Source Ion Implantation (PSII) and beamline Ion Beam Assisted Deposition (IBAD) were synthesized and studied. Gas pressure and electrical current were used as variables to design four independent PSII test sets. Beamline IBAD samples were produced with a pre-optimized set of parameters. Profilometry measurements showed the films to have thicknesses between 1.44 +/- 09 and 1.64 +/- 04 microns and to possess very low roughness averages, ranging from 14 +/- 3 to 28 +/- 3 nm, which correlate with substrate surface roughness. Atomic Force Microscopy revealed that diamond-like carbon crystal sizes varied significantly with chamber pressure. Crystals were generally spherical in shape suggesting that films were highly amorphous. Microhardness and nanohardness test results showed the hardest films to be greater than 3 times the hardness of untreated steel. The elastic modulus of the films, measured during the nanohardness test, was directly related to film hardness. Fretting wear and Pin-on-Disk tests were performed to quantitatively assess the ability of films to resist wear. Fretting wear tests showed a dramatic decrease in friction for diamond-like carbon films with friction levels ranging from 10% to 30% of that of untreated steel. Pin-on-Disk tests revealed a significant improvement in wear resistance prior to stylus penetration into the substrate.

Download or read book The Characterization of Thin Carbon Films Created Via Radio Frequency Plasma enhanced Chemical Vapor Deposition written by George Tecos and published by . This book was released on 2011 with total page 112 pages. Available in PDF, EPUB and Kindle. Book excerpt: Various deposition parameters have been adopted to deposit carbon-based thin films on silicon subtrates via Plasma-Enhanced Chemical Vapor Detection (PECVD) with a Radio-Frequency Plasma. We seek a recipe and formulation for carbon film deposition by varying the ratios of input gases and subtrate temperature, with the goal of observing these effects on the deposited carbon film. Characterization of the samples was carried out through various procedures, including the Ion Beam Analysis (IBA) techniques: Rutherford/Non-Rutherford Backscattering Spectrometry (RBS/NRBS), Elastic Recoil Detection Analysis (ERDA), and Raman Spectroscopy. This data was analyzed to determine the purity, quality, elemental compensation, and interface integrity of each respective sample. We conclude that the films deposited on Si subtrates are polymer-like carbon films with 30-35 at% C and 65-70 at% H. The interface between the film and subtrate was found to be abrupt. The effect of subtrate temperature on the microstructure of the deposited films was found to be inconclusive. This study will lay the basis for future explorations into Western Michigan University produced CVD carbon-based films, and investigate the properties of these unique and profitable materials.

Download or read book Synthesis and Characterization of Diamond Thin Films by Microwave Plasma enhanced Chemical Vapor Deposition MPECVD written by Shih-Feng Chou and published by . This book was released on 2005 with total page 174 pages. Available in PDF, EPUB and Kindle. Book excerpt: Diamond thin films are deposited on silicon wafers by MPECVD process with the presence of methane, argon, and hydrogen gases. The reaction chamber is designed with an internal microwave reaction cavity and a high-pressure pocket for improving deposition conditions. Scanning electron microscopy reveals tetrahedral and cauliflower-shaped crystals for polycrystalline diamond and nanocrystalline diamond films, respectively. Spectroscopy ellipsometer studies indicate that diamond-like carbon (DLC) films are deposited with a thickness of 700 nm. Fourier transform infrared spectroscopy shows C-H stretching in the range from 2800 cm -1 to 3000 cm -1 . Nanoindentation is performed on DLC films with an average hardness of 10.98 GPa and an average elastic modulus of 90.32 GPa. The effects of chamber pressure, microwave forward power, and gas mixture on the plasma chemistry are discussed. Substrate temperature has a significant influence on film growth rate, and substrate pretreatment can enhance the quality of diamond films.

Download or read book Synthetic Diamond written by Karl E. Spear and published by John Wiley & Sons. This book was released on 1994-04-04 with total page 690 pages. Available in PDF, EPUB and Kindle. Book excerpt: A riveting look at the science, technology and people involved in overcoming early impracticalities of the fledgling chemical vapor deposition (CVD) synthesis method and its development in today's state of commercial readiness. Provides insights into numerous vapor phase techniques. Surveys the synthesis, structure, properties and applications of diamondlike carbon. Details current and rapidly emerging applications, manufacturing and markets.

Download or read book Atmospheric Plasma Deposition of Diamond like Carbon Coatings written by and published by . This book was released on 2008 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: There is great demand for thin functional coatings in the semiconductor, optics, electronics, medical, automotive and aerospace industries [1-13]. As fabricated components become smaller and more complex, the properties of the materials' surface take on greater importance. Thin coatings play a key role in tailoring surfaces to give them the desired hardness, wear resistance, chemical inertness, and electrical characteristics. Diamond-like carbon (DLC) coatings possess an array of desirable properties, including outstanding abrasion and wear resistance, chemical inertness, hardness, a low coefficient of friction and exceptionally high dielectric strength [14-22]. Diamond-like carbon is considered to be an amorphous material, containing a mixture of sp2 and sp3 bonded carbon. Based on the percentage of sp3 carbon and the hydrogen content, four different types of DLC coatings have been identified: tetrahedral carbon (ta-C), hydrogenated amorphous carbon (a-C:H) hard, a-C:H soft, and hydrogenated tetrahedral carbon (ta-C:H) [20,24,25]. Possessing the highest hardness of 80 GPa, ta-C possesses an sp3 carbon content of 80 to 88u%, and no appreciable hydrogen content whereas a-C:H soft possesses a hardness of less than 10 GPa, contains an sp3 carbon content of 60% and a hydrogen content between 30 to 50%. Methods used to deposit DLC coatings include ion beam deposition, cathodic arc spray, pulsed laser ablation, argon ion sputtering, and plasma-enhanced chemical vapor deposition [73-83]. Researchers contend that several advantages exist when depositing DLC coatings in a low-pressure environment. For example, ion beam processes are widely utilized since the ion bombardment is thought to promote denser sp3-bonded carbon networks. Other processes, such as sputtering, are better suited for coating large parts [29,30,44]. However, the deposition of DLC in a vacuum system has several disadvantages, including high equipment cost and restrictions on the size and shape of material that may be treated. The deposition of DLC at atmospheric pressure has been demonstrated by several researchers. Izake, et al [53] and Novikov and Dymont [54] have demonstrated an electrochemical process that is carried out with organic compounds such as methanol and acetylene dissolved in ammonia. This process requires that the substrates be immersed in the liquid [53-54]. The atmospheric pressure deposition of DLC was also demonstrated by Kulik, et al. utilizing a plasma torch. However, this process requires operating temperatures in excess of 800 oC [55]. In this report, we investigate the deposition of diamond-like carbon films using a low temperature, atmospheric pressure plasma-enhanced chemical vapor deposition (PECVD) process. The films were characterized by solid-state carbon-13 nuclear magnetic resonance (13C NMR) and found to have a ratio of sp2 to sp3 carbon of 43 to 57%. The films were also tested for adhesion, coefficient of friction, and dielectric strength.

Download or read book Diamond like Carbon Films written by Yuto S. Tanaka and published by Nova Biomedical Books. This book was released on 2012-02 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book presents current research from across the globe in the study of diamond-like carbon films. Topics discussed include the peculiarities of ion-beam synthesis of carbon-based phases; electron field emission properties of non-metal and metal doped diamond like carbon; internal stress and its reduction of hydrogenated diamond-like carbon thin films deposited by plasma CVD methods; incorporating crystalline diamond particles in diamond-like carbon films to improve their properties and diamond-like carbon films applied as an alignment layer for LCDs.

Download or read book The Synthesis of Diamond Films and Diamond Like Carbon DLC Films Using a Two Factorial Experimental Design written by Dawn Heather Fant and published by . This book was released on 1995 with total page 138 pages. Available in PDF, EPUB and Kindle. Book excerpt: Focuses on using the first level of a two level factorial design to characterize a radio frequency plasma enhanced chemical vapor deposition system.

Download or read book Microwave Plasma enhanced Chemical Vapor Deposition and Characterization of Diamond and Silicon Nitride Thin Films written by Kevin John Grannen and published by . This book was released on 1994 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Diamond and Diamond Like Film Applications written by Peter Gielisse and published by CRC Press. This book was released on 1998-05-05 with total page 520 pages. Available in PDF, EPUB and Kindle. Book excerpt: This text covers nucleation and growth; modeling and phase equilibria; properties characterisation; diamond-like carbon; and wide bandgap nitrides and carbides of Diamond and Diamond-Film applications as presented as the proceedings of the third international symposium on Diamond Films in St.Petersburg, Russia June 16-19, 1996

Download or read book Microwave Plasma Enhanced Chemical Vapor Deposition and Structural Characterization of Diamond Films written by Wei Zhu and published by . This book was released on 1990 with total page 530 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Tribology of Diamond like Carbon Films written by Christophe Donnet and published by Springer Science & Business Media. This book was released on 2007-12-06 with total page 673 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book highlights some of the most important structural, chemical, mechanical and tribological characteristics of DLC films. It is particularly dedicated to the fundamental tribological issues that impact the performance and durability of these coatings. The book provides reliable and up-to-date information on available industrial DLC coatings and includes clear definitions and descriptions of various DLC films and their properties.

Download or read book Radiation Response and Optical Characterization of Carbon Based Thin films Prepared by Saddle Field Plasma Enhanced Chemical Vapor Deposition written by Sameh Hegazy and published by . This book was released on 2020 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: Carbon based thin-film materials have been attracting a lot of attention in many research fields due to their unique material properties. Detection of ionizing radiation is an important application that carbon and diamond based materials, which offer a promising detection material with low manufacturing cost and a variety of physical characteristics for different detection applications. In the current study, the direct current (DC) saddle field Plasma Enhanced Chemical Vapor Deposition (PECVD) method was used to prepare a set of nano-crystalline diamond samples. The relation between the deposition pressure, the gases mixing ratios and the resultant film characteristics were studied. The optical, microstructure and electronic properties of the prepared samples were studied using Raman spectroscopy, FTIR, UV-Visible spectroscopy and I -V characteristics methods. It was found that, an increase in the hydrogen content in the gas mixture leads to a decrease in the crystallinity of the resultant film. A set of samples were selected with different crystalline content and defect DOS to investigate the impact of these parameters on the material's radiation response. It was determined that, the sample with relatively high degree of crystallinity and with the presence of defects close to the valence show promising responses for radiation detection applications. We attributed this results to the fact that, transport is dominated by electrons and shallow defects near the conduction band act as electron traps. On the other hand, hole-traps near the valence band do not have the same impact on the overall transport properties.

Download or read book Carbon Nanowalls written by Mineo Hiramatsu and published by Springer Science & Business Media. This book was released on 2010-07-23 with total page 168 pages. Available in PDF, EPUB and Kindle. Book excerpt: Representing the first text to cover this exciting new area of research, this book will describe synthesis techniques of CNWs, their characterization and various expected applications using CNWs. Carbon-nanowalls (CNWs) can be described as two-dimensional graphite nanostructures with edges comprised of stacks of plane graphene sheets standing almost vertically on the substrate. These sheets form a wall structure with a high aspect ratio. The thickness of CNWs ranges from a few nm to a few tens of nm. The large surface area and sharp edges of CNWs may prove useful for a number of applications such as electrochemical devices, field electron emitters, storage materials for hydrogen gas, catalyst support. In particular, vertically standing CNWs with a high surface-to-volume ratio, serve as an ideal material for catalyst support for fuel cells and in gas storage materials.

Download or read book Tribology and Characterization of Surface Coatings written by Sarfraj Ahmed and published by John Wiley & Sons. This book was released on 2022-01-07 with total page 300 pages. Available in PDF, EPUB and Kindle. Book excerpt: TRIBOLOGY AND CHARACTERIZATION OF SURFACE COATINGS The book provides updated information on the friction and wear behavior of coatings used in various industrial applications. Surface modification is a cost-effective process of increasing the life of components so that the whole device need not be changed if the surface is worn out. The tribological behavior of biological implants is currently an active topic and a thorough discussion is one of the book’s features. Tribology and Characterization of Surface Coatings explores key issues which are important in the research and development of surface coatings by providing updated information on friction and wear behavior of coatings used in different industrial applications. It covers the various coating deposition techniques, tribological response of nanocomposite coatings, multilayer hardfacing, and wear testing methods for coatings at nanoscale. The use of nanostructures may alter the tribological, characterization, and mechanical properties of the materials. Thermal spraying is the most widely used technique in industry for the deposition of coatings and their tribological properties need to be determined. This book also includes the recent trends in biotribology and the materials used in implants to counter the abrasive wear. Audience The book will serve as a reference to researchers, scientists, academicians, industrial engineers, and students who work in the fields of materials/polymer science and mechanical engineering. Apart from their applications to aerospace and electronics industries, the coatings are also used in the field of biomedical engineering.

Download or read book Diamond and Related Nanostructures written by Mircea Vasile Diudea and published by Springer Science & Business Media. This book was released on 2013-05-28 with total page 395 pages. Available in PDF, EPUB and Kindle. Book excerpt: Over the past twenty years, the field of carbon structures has been invigorated by the discovery of fullerenes and carbon nanotubes. These nano-structured carbons have attracted a tremendous interest in the fundamental properties of discrete carbon molecules, leading to the discovery of novel complex crystalline and quasi-crystalline materials. As a consequence, a variety of applications have been developed, including technical and bio-medical materials and miniaturized tools. Diamond and Related Nanostructures focuses on the advances in the area of diamond-like carbon nanostructures (hyper-structures built from fullerenes and/or carbon nanotube junctions) and other related carbon nanostructures. Each chapter contributes to the topic from different fields, ranging from theory to synthesis and properties investigation of these new materials. This volume brings together the major findings in the field and provides a source of inspiration and understanding to advanced undergraduates, graduates, and researchers in the fields of Physics, Graph Theory, Crystallography, Computational and Synthetic Chemistry.