Download or read book Athermal Photonic Effects on Boron Diffusion and Activation in Silicon During Microwave Rapid Thermal Annealing written by C. J. Bonifas and published by . This book was released on 2004 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Boron Activation and Diffusion in Polycrystalline Silicon with Flash assist Rapid Thermal Annealing written by Sidan Jin and published by . This book was released on 2011 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: ABSTRACT: The rigorous scaling in dimensions for future generations of transistor fabrication demands ever steeper requirements for dopant solubility with minimal diffusion. Advanced annealing techniques such as flash-assist rapid thermal processing now allow effective anneal times up to three orders of magnitude less than conventional methods. At the same time, advanced characterization techniques can now provide three-dimensional compositional analysis of materials systems. While there has been extensive research for flash annealing of B doped crystalline Si, the effects on polycrystalline Si have been less studied, but is of equal importance. It continues to be prevalent in device fabrication for current and future technologies. The morphology and evolution of grains in heavily B-doped poly-Si is studied under high temperature millisecond annealing conditions using plan-view transmission electron microscopy. High activation with low thermal budgets has allowed study of a very fine-grained microstructure of highly activated B doped poly-Si. 3D atom probe tomography allowed direct quantitative measurement of the segregation coefficient of B to the grain boundaries, and its diffusion behavior has been accurately modeled. Activation, mobility, and deactivation of B in flash annealed polycrystalline Si was also explored using Hall effect. By combining electrical, compositional and microstructural measurements, a model has been developed to describe the activation, mobility, and diffusion behavior of B in poly-Si films with average hole concentrations greater than 5\U+00d7\1019 cm−3.
Download or read book Physics and modeling of boron diffusion activation and evolution of extended defects and point defects during rapid thermal annealing of ion implanted silicon written by Hiroyuki Kinoshita and published by . This book was released on 1993 with total page 220 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Bibliographie sur l huile de Carthame written by and published by . This book was released on 1955 with total page 15 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Susceptor Assisted Microwave Annealing of Ion Implanted Silicon written by Rajitha Vemuri and published by . This book was released on 2011 with total page 65 pages. Available in PDF, EPUB and Kindle. Book excerpt: This thesis discusses the use of low temperature microwave anneal as an alternative technique to recrystallize materials damaged or amorphized due to implantation techniques. The work focuses on the annealing of high-Z doped Si wafers that are incapable of attaining high temperatures required for recrystallizing the damaged implanted layers by microwave absorption The increasing necessity for quicker and more efficient processing techniques motivates study of the use of a single frequency applicator microwave cavity along with a Fe2O infused SiC-alumina susceptor/applicator as an alternative post implantation process. Arsenic implanted Si samples of different dopant concentrations and implantation energies were studied pre and post microwave annealing. A set of as-implanted Si samples were also used to assess the effect of inactive dopants against presence of electrically active dopants on the recrystallization mechanisms. The extent of damage repair and Si recrystallization of the damage caused by arsenic and Si implantation of Si is determined by cross-section transmission electron microscopy and Raman spectroscopy. Dopant activation is evaluated for the As implanted Si by sheet resistance measurements. For the same, secondary ion mass spectroscopy analysis is used to compare the extent of diffusion that results from such microwave annealing with that experienced when using conventional rapid thermal annealing (RTA). Results show that compared to susceptor assisted microwave annealing, RTA caused undesired dopant diffusion. The SiC-alumina susceptor plays a predominant role in supplying heat to the Si substrate, and acts as an assistor that helps a high-Z dopant like arsenic to absorb the microwave energy using a microwave loss mechanism which is a combination of ionic and dipole losses. Comparisons of annealing of the samples were done with and without the use of the susceptor, and confirm the role played by the susceptor, since the samples donot recrystallize when the surface heating mechanism provided by the susceptor is not incorporated. Variable frequency microwave annealing was also performed over the as-implanted Si samples for durations and temperatures higher than the single frequency microwave anneal, but only partial recrystallization of the damaged layer was achieved.
Download or read book Silicon Photonics II written by David J. Lockwood and published by Springer Science & Business Media. This book was released on 2010-10-13 with total page 264 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is volume II of a series of books on silicon photonics. It gives a fascinating picture of the state-of-the-art in silicon photonics from a component perspective. It presents a perspective on what can be expected in the near future. It is formed from a selected number of reviews authored by world leaders in the field, and is written from both academic and industrial viewpoints. An in-depth discussion of the route towards fully integrated silicon photonics is presented. This book will be useful not only to physicists, chemists, materials scientists, and engineers but also to graduate students who are interested in the fields of micro- and nanophotonics and optoelectronics.
Download or read book Ion Implantation Technology written by Edmund G. Seebauer and published by American Institute of Physics. This book was released on 2008-12-11 with total page 582 pages. Available in PDF, EPUB and Kindle. Book excerpt: The conference is focused on recent advances and emerging technologies in semiconductor processing before, during and after ion implantation. The content encompasses fundamental physical understanding, common and novel applications as well as equipment issues, maintenance and design. The primary audience is process engineers in the microelectronics industry. Additional contributions come from academia and other industry segments (automotive, aerospace, and medical device manufacturing).
Download or read book Properties and Applications of Silicon Carbide written by Rosario Gerhardt and published by BoD – Books on Demand. This book was released on 2011-04-04 with total page 550 pages. Available in PDF, EPUB and Kindle. Book excerpt: In this book, we explore an eclectic mix of articles that highlight some new potential applications of SiC and different ways to achieve specific properties. Some articles describe well-established processing methods, while others highlight phase equilibria or machining methods. A resurgence of interest in the structural arena is evident, while new ways to utilize the interesting electromagnetic properties of SiC continue to increase.
Download or read book Advances in Rapid Thermal and Integrated Processing written by F. Roozeboom and published by Springer Science & Business Media. This book was released on 2013-03-09 with total page 568 pages. Available in PDF, EPUB and Kindle. Book excerpt: Rapid thermal and integrated processing is an emerging single-wafer technology in ULSI semiconductor manufacturing, electrical engineering, applied physics and materials science. Here, the physics and engineering of this technology are discussed at the graduate level. Three interrelated areas are covered. First, the thermophysics of photon-induced annealing of semiconductor and related materials, including fundamental pyrometry and emissivity issues, the modelling of reactor designs and processes, and their relation to temperature uniformity. Second, process integration, treating the advances in basic equipment design, scale-up, integrated cluster-tool equipment, including wafer cleaning and integrated processing. Third, the deposition and processing of thin epitaxial, dielectric and metal films, covering selective deposition and epitaxy, integrated processing of layer stacks, and new areas of potential application, such as the processing of III-V semiconductor structures and thin- film head processing for high-density magnetic data storage.
Download or read book ULSI Science and Technology 1987 written by S. Broydo and published by . This book was released on 1987 with total page 874 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Microwaves in Catalysis written by Satoshi Horikoshi and published by John Wiley & Sons. This book was released on 2015-12-14 with total page 426 pages. Available in PDF, EPUB and Kindle. Book excerpt: A comprehensive overview covering the principles and preparation of catalysts, as well as reactor technology and applications in the field of organic synthesis, energy production, and environmental catalysis. Edited and authored by renowned and experienced scientists, this reference focuses on successful reaction procedures for applications in industry. Topics include catalyst preparation, the treatment of waste water and air, biomass and waste valorisation, hydrogen production, oil refining as well as organic synthesis in the presence of heterogeneous and homogeneous catalysts and continuous-flow reactions. With its practical relevance and successful methodologies, this is a valuable guide for chemists at universities working in the field of catalysis, organic synthesis, pharmaceutical or green chemistry, as well as researchers and engineers in the chemical industry.
Download or read book High Efficiency Silicon Solar Cells written by Martin A. Green and published by Trans Tech Publications Ltd. This book was released on 1987-01-01 with total page 240 pages. Available in PDF, EPUB and Kindle. Book excerpt: The early chapters comprehensively review the optical and transport properties of silicon. Light trapping is described in detail. Limits on the efficiency of silicon cells are discussed as well as material requirements necessary to approach these limits. The status of current approaches to passifying surfaces, contacts and bulk regions is reviewed. The final section of the book describes the most practical approaches to the fabrication of high-efficiency cells capable of meeting the efficiency targets for both concentrated and non-concentrated sunlight, including a discussion of design and processing approaches for non-crystalline silicon.
Download or read book SIMOX written by Maria J. Anc and published by IET. This book was released on 2004-12-03 with total page 164 pages. Available in PDF, EPUB and Kindle. Book excerpt: SIMOX represents the first effort to compile a broad spectrum of knowledge from various groups of researchers and technologists in the world. It provides the reader with a basic understanding of SIMOX technology and in addition gives a good starting point for further investigation and applications.
Download or read book Broadband Dielectric Spectroscopy written by Friedrich Kremer and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 740 pages. Available in PDF, EPUB and Kindle. Book excerpt: Both an introductory course to broadband dielectric spectroscopy and a monograph describing recent dielectric contributions to current topics, this book is the first to cover the topic and has been hotly awaited by the scientific community.
Download or read book Solid State Properties written by Mildred Dresselhaus and published by Springer. This book was released on 2018-01-17 with total page 521 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book fills a gap between many of the basic solid state physics and materials sciencebooks that are currently available. It is written for a mixed audience of electricalengineering and applied physics students who have some knowledge of elementaryundergraduate quantum mechanics and statistical mechanics. This book, based on asuccessful course taught at MIT, is divided pedagogically into three parts: (I) ElectronicStructure, (II) Transport Properties, and (III) Optical Properties. Each topic is explainedin the context of bulk materials and then extended to low-dimensional materials whereapplicable. Problem sets review the content of each chapter to help students to understandthe material described in each of the chapters more deeply and to prepare them to masterthe next chapters.
Download or read book Properties of Crystalline Silicon written by Robert Hull and published by IET. This book was released on 1999 with total page 1054 pages. Available in PDF, EPUB and Kindle. Book excerpt: A unique and well-organized reference, this book provides illuminating data, distinctive insight and expert guidance on silicon properties.
Download or read book Solar Cells and Modules written by Arvind Shah and published by Springer Nature. This book was released on 2020-07-16 with total page 357 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book gives a comprehensive introduction to the field of photovoltaic (PV) solar cells and modules. In thirteen chapters, it addresses a wide range of topics including the spectrum of light received by PV devices, the basic functioning of a solar cell, and the physical factors limiting the efficiency of solar cells. It places particular emphasis on crystalline silicon solar cells and modules, which constitute today more than 90 % of all modules sold worldwide. Describing in great detail both the manufacturing process and resulting module performance, the book also touches on the newest developments in this sector, such as Tunnel Oxide Passivated Contact (TOPCON) and heterojunction modules, while dedicating a major chapter to general questions of module design and fabrication. Overall, it presents the essential theoretical and practical concepts of PV solar cells and modules in an easy-to-understand manner and discusses current challenges facing the global research and development community.
