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Book An Investigation of Electrical and Optical Properties of Sputtered Amorphous Silicon Nitride and Germanium Thin Films

Download or read book An Investigation of Electrical and Optical Properties of Sputtered Amorphous Silicon Nitride and Germanium Thin Films written by Rajendra S. Khandelwal and published by . This book was released on 1987 with total page 246 pages. Available in PDF, EPUB and Kindle. Book excerpt: Low temperature preparation of thin amorphous Silicon Nitride and Germanium Films by direct RF sputter deposition was investigated. Influence of various sputtering parameters on film properties was studied. Infrared transmission spectrophotometry was used to evaluate optical properties of the films whereas electrical characteristics of the films were determined from current-voltage measurements of MIS structures. For Silicon Nitride films it was observed that the stoichiometry, as indicated by the IR transmission, dielectric constant and current density versus square root of electric field measurements, was a strong function of the sputtering gas composition and particularly the Ar/N ratio in the sputtering gas. It was established from the current-voltage relationship that the dominant conduction mechanism in these films is of PooleFrenkel type. The current-voltage characteristics of the MIS devices were observed to be independent of the electrode material, device area and the film thickness. It is concluded that the insulating films thus deposited were comparable to those deposited using any other deposition method and is anticipated that due to the low deposition temperatures, sputtering may emerge as a highly potential process for optoelectronic device passivation.

Book An Investigation of Electrical and Optical Properties of Reactively Sputtered Silicon Nitride and Amorphous Hydrogenated Silicon Thin Films

Download or read book An Investigation of Electrical and Optical Properties of Reactively Sputtered Silicon Nitride and Amorphous Hydrogenated Silicon Thin Films written by Tae Hoon Kim and published by . This book was released on 1988 with total page 168 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Properties of Sputtered A Ge and A Ge H Thin Films

Download or read book Properties of Sputtered A Ge and A Ge H Thin Films written by Hanjin Cho and published by . This book was released on 1987 with total page 126 pages. Available in PDF, EPUB and Kindle. Book excerpt: The effect of the amorphous and glassy structure of amorphous germanium films on their electrical characteristics was investigated experimentally. The films were deposited onto silicon substrates using a modified MRC 8800 triode sputtering system. The Poole-Frenkel and Schottky mechanisms are discussed in detail and the shortcomings of the accepted picture of the former in amorphous materials are dealt with. It was concluded on the basis available evidence that the current flow in amorphous germanium favors the Poole-Frenkel mechanism at high fields. Amorphous hydrogenated germanium films which were deposited by bias sputtering were characterized by measuring the infrared absorption. The films have absorption peaks, as expected, at 1950 cḿ1 and at 570 cḿ1 due to GeH2 bonding and at 1880 cḿ1 due to GeH2 bonding. A method was described for determining the optical constants of a thin film deposited on a nonabsorbing window using a single set of transmittances over an absorption band. The method depends on the fact that the phase shift of the transmitted radiation can be determined from the transmittance by a Kramers-Kronig transform. The transmittance data of a-Ge:H and sputtered silicon nitride films were used to calculate their optical constants by this method. In a-Ge:H films, the value of the calculated refractive index in the k=0 region was not reasonable. However, for Si3N4 films, the calculated absorption coefficient was consistent with the experimental results.

Book Masters Theses in the Pure and Applied Sciences

Download or read book Masters Theses in the Pure and Applied Sciences written by Wade H. Shafer and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 411 pages. Available in PDF, EPUB and Kindle. Book excerpt: Masters Theses in the Pure and Applied Sciences was first conceived, published, and disseminated by the Center for Information and Numerical Data Analysis and Synthesis (CINDAS) * at Purdue University in 1 957, starting its coverage of theses with the academic year 1955. Beginning with Volume 13, the printing and dissemination phases of the activity were transferred to University Microfilms/Xerox of Ann Arbor, Michigan, with the thought that such an arrangement would be more beneficial to the academic and general scientific and technical community. After five years of this joint undertaking we had concluded that it was in the interest of all con cerned if the printing and distribution of the volumes were handled by an interna tional publishing house to assure improved service and broader dissemination. Hence, starting with Volume 18, Masters Theses in the Pure and Applied Sciences has been disseminated on a worldwide basis by Plenum Publishing Cor poration of New York, and in the same year the coverage was broadened to include Canadian universities. All back issues can also be ordered from Plenum. We have reported in Volume 32 (thesis year 1987) a total of 12,483 theses titles from 22 Canadian and 176 United States universities. We are sure that this broader base for these titles reported will greatly enhance the value of this important annual reference work. While Volume 32 reports theses submitted in 1987, on occasion, certain univer sities do report theses submitted in previous years but not reported at the time.

Book An Investigation of Electrical and Physical Properties of Reactively  Diode Sputtered Silicon Nitride Thin Films

Download or read book An Investigation of Electrical and Physical Properties of Reactively Diode Sputtered Silicon Nitride Thin Films written by Divyang Manharlal Shah and published by . This book was released on 1988 with total page 160 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Scientific and Technical Aerospace Reports

Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1995 with total page 464 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Solar Energy Update

Download or read book Solar Energy Update written by and published by . This book was released on 1984 with total page 884 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Metals Abstracts

Download or read book Metals Abstracts written by and published by . This book was released on 1984 with total page 1040 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Energy Research Abstracts

Download or read book Energy Research Abstracts written by and published by . This book was released on 1988 with total page 752 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Physics Briefs

Download or read book Physics Briefs written by and published by . This book was released on 1992 with total page 1358 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book A Fundamental Study of the Electrical and Optical Properties of Thin film  R f  sputter deposited  Cu doped ZnTe

Download or read book A Fundamental Study of the Electrical and Optical Properties of Thin film R f sputter deposited Cu doped ZnTe written by Timothy Arthur Gessert and published by . This book was released on 1996 with total page 324 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Thin Films on Silicon

Download or read book Thin Films on Silicon written by Vijay Narayanan and published by . This book was released on 2016 with total page 550 pages. Available in PDF, EPUB and Kindle. Book excerpt: "This volume provides a broad overview of the fundamental materials science of thin films that use silicon as an active substrate or passive template, with an emphasis on opportunities and challenges for practical applications in electronics and photonics. It covers three materials classes on silicon: Semiconductors such as undoped and doped Si and SiGe, SiC, GaN, and III-V arsenides and phosphides; dielectrics including silicon nitride and high-k, low-k, and electro-optically active oxides; and metals, in particular silicide alloys. The impact of film growth and integration on physical, electrical, and optical properties, and ultimately device performance, is highlighted."--Publisher's website.

Book Metals Abstracts Index

Download or read book Metals Abstracts Index written by and published by . This book was released on 1996 with total page 1622 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book British Technology Index

Download or read book British Technology Index written by and published by . This book was released on 1979 with total page 988 pages. Available in PDF, EPUB and Kindle. Book excerpt: