Download or read book Advances in Chemical Mechanical Polishing Volume 816 written by Materials Research Society. Meeting and published by . This book was released on 2004-09 with total page 318 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. This book, first published in 2004, presents advances in fundamental understanding, development, and applications of chemical-mechanical polishing (CMP).

Download or read book Advances in Chemical Mechanical Polishing written by Duane S. Boning and published by Cambridge University Press. This book was released on 2014-06-05 with total page 310 pages. Available in PDF, EPUB and Kindle. Book excerpt: While now in widespread use in integrated circuit fabrication, chemical-mechanical polishing (CMP) is also starting to appear in a surprisingly wide range of applications, with a growing variety of processes and technologies. This book, first published in 2004, presents advances in fundamental understanding, development, and applications of CMP. CMP of both conventional and nonconventional materials are discussed. Conventional materials polished using CMP include silicon, oxides and nitrides, polysilicon, and other insulating films, as well as copper, tungsten, barrier films, and other metal films. Nonconventional materials include those of increasing importance in advanced semiconductor, MEMS, and nanotechnologies, such as low-k dielectrics and polymer, nickel, and ruthenium films. CMP in IC fabrication continues to pose substantial problems - for virgin silicon wafer preparation, shallow-trench isolation (STI) structures, and poly or other deep-trench structure formation, as well as copper and low-k metal interconnect. New developments in CMP pads and slurries are presented. Novel polishing methods and are described. Advances in CMP process understanding and modeling are also highlighted.

Download or read book Chemical Mechanical Planarization Volume 867 written by A. Kumar and published by . This book was released on 2005-07-19 with total page 330 pages. Available in PDF, EPUB and Kindle. Book excerpt: Technology requirements associated with the progressive scaling of devices for future technology nodes, coupled with the aggressive introduction of new materials, places tremendous demands on chemical-mechanical polishing. The goal of this 2005 book, which is part of a popular series from MRS, is to bring together experts from a broad spectrum of research and technology groups currently working on CMP, to review advances made, and to offer a comprehensive discussion of future challenges that must be overcome. The book shows trends in the development of consumables, process modules, tool designs, process integration, modeling, defect characterization, and metrology. Topics include: planarization processes and applications; consumables -CMP pads and slurries; CMP equipment and metrology; and CMP modeling and simulation.

Download or read book Electron Microscopy of Molecular and Atom Scale Mechanical Behavior Chemistry and Structure Volume 839 written by Materials Research Society. Meeting and published by . This book was released on 2005-06-15 with total page 232 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. This book, first published in 2005, showcases how electron microscopy is applied to materials problems and to encourage ideas from both the solid-state and biological communities.

Download or read book Solid State Chemistry of Inorganic Materials V Volume 848 written by Materials Research Society. Meeting and published by . This book was released on 2005-07-18 with total page 568 pages. Available in PDF, EPUB and Kindle. Book excerpt: Solid-state chemistry continues to span and to spawn multiple materials research areas, attracting investigators from chemistry, condensed-matter physics, materials science and engineering, ceramics, chemical engineering, and mineralogy/geology, to name a few. The common challenge is to understand and to predict structures and properties of new materials. As with earlier volumes in this series from the Materials Research Society, the presentations here represent interdisciplinary research from around the world and explore not only recent advances in the solid-state chemistry of inorganic materials, but also their impact on commercial applications. The book covers a broad range of topics, including synthesis and characterization of novel functional materials; design and fabrication of nanostructures and nanomaterials; crystal and structural chemistry; catalysis; gas separation and storage; and magnetic and optical applications. Both theoretical and computational studies of solid-state inorganic materials are featured. Joint presentations with solid-state ionics are also particularly fruitful.

Download or read book Progress in Compound Semiconductor Materials IV Electronic and Optoelectronic Applications Volume 829 written by Materials Research Society. Meeting and published by . This book was released on 2005-04-13 with total page 568 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Download or read book Materials Technology and Reliability for Advanced Interconnects and Low k Dielectrics written by and published by . This book was released on 2004 with total page 440 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Materials Technology and Reliability for Advanced Interconnects and Low K Dielectrics 2004 written by R. J. Carter and published by . This book was released on 2004-09 with total page 432 pages. Available in PDF, EPUB and Kindle. Book excerpt: The scaling of device dimensions with a simultaneous increase in functional density has imposed tremendous challenges for materials, technology, integration and reliability of interconnects. To meet requirements of the ITRS roadmap, new materials are being introduced at a faster pace in all functions of multilevel interconnects. The issues addressed in this book cannot be dispelled as simply selecting a low-k material and integrating it into a copper damascene process. The intricacies of the back end for sub-100nm technology include novel processing of low-k materials, employing pore-sealing techniques and capping layers, introducing advanced dielectric and diffusion barriers, and developing novel integration schemes. This is in addition to concerns of performance, yield, and reliability appropriate to nanoscaled interconnects. Although many challenges continue to impede progress along the ITRS roadmap, the contributions in this book confront them head-on. It provides a scientific understanding of the issues and stimulate new approaches to advanced multilevel interconnects.

Download or read book Integration of Advanced Micro and Nanoelectronic Devices critical Issues and Solutions written by Materials Research Society. Meeting and published by . This book was released on 2004 with total page 506 pages. Available in PDF, EPUB and Kindle. Book excerpt: "This volume is the joint proceedings of papers presented in Symposium D, 'High-k Insulators and Ferroelectrics for Advanced Microelectronic Devices,' and Symposium E, 'Integration Challenges in Next-Generation Oxide-Based Nanoelectronics,' held April 13-16 at the 2004 MRS Spring Meeting in San Francisco, California."--p. x

Download or read book Solid state Chemistry of Inorganic Materials written by and published by . This book was released on 2005 with total page 638 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Progress in Compound Semiconductor Materials electronic and Optoelectronic Applications written by and published by . This book was released on 2005 with total page 570 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Mechanical Properties of Bioinspired and Biological Materials written by Christopher Viney and published by . This book was released on 2005 with total page 368 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Nanoscale Materials and Modeling relations Among Processing Microstructure and Mechanical Properties written by Materials Research Society. Meeting and published by . This book was released on 2004 with total page 426 pages. Available in PDF, EPUB and Kindle. Book excerpt: The 55 papers in this collection from the April 2004 symposium study processing methods for nanostructured materials, internal stress and the physics of strengthening mechanisms at the nanoscale, and the mechanical properties of nanoscale materials. Each of the six parts presents experimental contributions first, followed by papers describing related modeling and simulation. Topics include the effect of gold films electrodeposited on nickel substrates, microstructural refinement in copper solid solutions by machining, the synthesis of zeolite as ordered multi-crystal arrays, the elevated temperature mechanical properties of devitrified metallic glass, and improved fracture toughness in advanced nanocrystalline ceramic composites. Annotation : 2004 Book News, Inc., Portland, OR (booknews.com).

Download or read book Materials for Photovoltaics Volume 836 written by Materials Research Society. Meeting and published by . This book was released on 2005-09-09 with total page 328 pages. Available in PDF, EPUB and Kindle. Book excerpt: Solar-cell performance is critically dependent on the optical and electrical properties of their constituent materials. In order to obtain significant improvements in performance for future generations of photovoltaic devices, it will be necessary to either improve the properties of existing materials or engineer new materials and device structures. This book focuses on materials issues and advances for photovoltaics. Topics include: dye-sensitized solar cells; nanoparticle/hybrid solar cells; polymer-based devices; small molecule-based devices; III-V semiconductors; II-VI semiconductors and transparent conducting oxides and silicon thin films.

Download or read book Group IV Semiconductor Nanostructures Volume 832 written by Materials Research Society. Meeting and published by . This book was released on 2005-05-24 with total page 440 pages. Available in PDF, EPUB and Kindle. Book excerpt: Broad interest and steady progress in the area of Group-IV (Si:Ge:C) semiconductor nanostructures, including quantum dots, wires and wells, has produced a new class of functional materials and devices with characteristic dimensions less than 50nm. This volume brings together scientists from different disciplines to discuss fabrication and characterization techniques and optical and transport properties, as well as applications of Group-IV semiconductor nanostructures. Fields such as photonic systems, nanocrystal memories, light-emitting and THz devices, nanowire-based interconnections and transistors are addressed. Topics include: nanoscale silicon-based photonic systems; Si/SiGe/SiN heterostructures and devices; Si/SiGe quantum cascade laser for terahertz; three-dimensional Si/SiGe nanostructures; Si nanocrystals and porous Si- light-emitting properties; Si nanocrystals and porous Si - other properties; Group-IV semiconductor nanowires; and rare-earth-doped Group-IV semiconductor nanostructures.

Download or read book Materials for Space Applications Volume 851 written by Materials Research Society. Meeting and published by . This book was released on 2005-05-05 with total page 608 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. This book, first published in 2005, offers a scientific and technical discussion and analysis of modifications induced by extreme conditions of the space environment.

Download or read book Materials for Hydrogen Storage 2004 Volume 837 written by Materials Research Society. Meeting and published by . This book was released on 2005-09-12 with total page 176 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.