Download or read book Advanced Interconnects and Contacts Volume 564 written by Daniel C. Edelstein and published by . This book was released on 1999-10-07 with total page 606 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Download or read book Advanced Interconnects for ULSI Technology written by Mikhail Baklanov and published by John Wiley & Sons. This book was released on 2012-02-17 with total page 616 pages. Available in PDF, EPUB and Kindle. Book excerpt: Finding new materials for copper/low-k interconnects is critical to the continuing development of computer chips. While copper/low-k interconnects have served well, allowing for the creation of Ultra Large Scale Integration (ULSI) devices which combine over a billion transistors onto a single chip, the increased resistance and RC-delay at the smaller scale has become a significant factor affecting chip performance. Advanced Interconnects for ULSI Technology is dedicated to the materials and methods which might be suitable replacements. It covers a broad range of topics, from physical principles to design, fabrication, characterization, and application of new materials for nano-interconnects, and discusses: Interconnect functions, characterisations, electrical properties and wiring requirements Low-k materials: fundamentals, advances and mechanical properties Conductive layers and barriers Integration and reliability including mechanical reliability, electromigration and electrical breakdown New approaches including 3D, optical, wireless interchip, and carbon-based interconnects Intended for postgraduate students and researchers, in academia and industry, this book provides a critical overview of the enabling technology at the heart of the future development of computer chips.

Download or read book Advanced Hard and Soft Magnetic Materials Volume 577 written by and published by . This book was released on 1999-11-03 with total page 656 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Download or read book Semiconductor Technology ISTC 2001 written by Ming Yang and published by . This book was released on 2001 with total page 664 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Chemical mechanical Polishing written by and published by . This book was released on 1999 with total page 304 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Morphological Evolution of Electrodeposits and Electrochemical Processing in ULSI Fabrication and Electrodeposition of and on Semiconductors IV written by Kazuo Kondo and published by The Electrochemical Society. This book was released on 2005 with total page 422 pages. Available in PDF, EPUB and Kindle. Book excerpt: Papers in this volume are from the 199th ECS Meeting, held in Washington, DC, Spring 2001. Morphology evolution encompasses electrochemical processing in ULSI fabrication, shape evolution, growth habit, and microstructure of electrodeposits. The most prominent example at present is the electrochemical deposition of copper for ULSI interconnects. Many other electrochemical processes at various stages of emergence and development hold promise for the electronics industry and beyond.

Download or read book Amorphous and Heterogeneous Silicon Thin Films written by Howard M. Branz and published by . This book was released on 1999 with total page 924 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Nucleation and Growth Processes in Materials written by Antonios Gonis and published by . This book was released on 2000 with total page 474 pages. Available in PDF, EPUB and Kindle. Book excerpt: One of the goals of materials science is to design alloys with pre-specified desirable technological properties. To achieve this goal, it is necessary to have a thorough understanding of the fundamental mechanisms underlying materials behavior. In particular, one must understand the effects on alloy properties caused by intentional changes in concentration and how the combinations of temperature, time and uncontrollable foreign impurities affect microstructure. In addition to the equilibrium phase information contained in phase diagrams, nonequilibrium dynamic processes and metastable phases are known to be crucial in determining materials properties. This volume brings together researchers working on various aspects of nonequilibrium processes in materials to discuss current research issues and to provide guidelines for future work. Particular attention was paid to understanding particle nucleation and growth, both experimentally and theoretically, solid-state reactions, nanosystems, liquid-solid transformations, and solidification and amorphization. On the theoretical side, fundamental principles governing nucleation and growth, and related phenomena such as coarsening and Ostwald ripening, are discussed. Progress is also reported on the phase field method and on Monte Carlo simulations.

Download or read book Interfacial Engineering for Optimized Properties II Volume 586 written by C. Barry Carter and published by . This book was released on 2000-10-02 with total page 338 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners. This book, first published in 2000, concentrates on the preparation and processing of interfaces, the relationships between chemistry and structure and the properties and behavior of interfaces, particularly in relation to strength and bonding.

Download or read book CMOS BiCMOS ULSI written by Kiat Seng Yeo and published by Prentice Hall. This book was released on 2002 with total page 634 pages. Available in PDF, EPUB and Kindle. Book excerpt: For upper level and graduate level Electrical and Computer Engineering courses in Integrated Circuit Design as well as professional circuit designers, engineers and researchers working in portable wireless communications hardware. This book presents the fundamentals of Complementary Metal Oxide Semiconductor (CMOS) and Bipolar compatible Complementary Metal Oxide Semiconductor (BiCMOS) technology, as well as the latest technological advances in the field. It discusses the concepts and techniques of new integrated circuit design for building high performance and low power circuits and systems for current and future very-large-scale-integration (VLSI) and giga-scale-integration (GSI) applications. CMOS/BiCMOS ULSI: Low-Voltage Low-Power is an essential resource for every professional moving toward lower voltage, lower power, and higher performance VLSI circuits and subsystems design.

Download or read book Organic Inorganic Hybrid Materials II Volume 576 written by Lisa C. Klein and published by . This book was released on 1999-11-10 with total page 488 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Download or read book Amorphous and Nanostructured Carbon Volume 593 written by J. P. Sullivan and published by . This book was released on 2000-07-05 with total page 600 pages. Available in PDF, EPUB and Kindle. Book excerpt: There has been tremendous development in the science of carbon in past years. First came the development of the chemical vapor deposition of diamond, followed by the discovery of a new class of molecules - the fullerenes. Carbon nanotubes were discovered and techniques were developed to deposit new phases of amorphous carbon containing mainly sp3 bonding. This book brings together scientists and engineers from all areas of carbon research, both sp2 and sp3 bonded, from the fully amorphous to nanostructured carbon, to the highly ordered nanotubes. It covers a range of subjects including the synthesis and properties of nanotubes, as well as diamond-like carbon deposition and properties. Applications range from nanotubes for hydrogen storage, to electrochemical double-layer capacitors (supercapacitors), field emission displays, hard coatings, and carbon coatings for magnetic storage technology. The book deals with the growth, characterization, properties and applications of nanotubes and field emission from all varieties of carbon, amorphous and diamond-like carbon- growth, properties and applications. It also contains papers on diamond, silicon carbide, carbon nitride and beryllium films.

Download or read book Advanced Interconnects and Contact Materials and Processes for Future Integrated Circuits Volume 514 written by S. P. Murarka and published by . This book was released on 1998-11-02 with total page 596 pages. Available in PDF, EPUB and Kindle. Book excerpt: Comprising the proceedings of an MRS symposium held in April of 1998, contributions in this volume are divided into ten sections: interconnection frontiers; aluminum interconnects; cobalt and other silicides; titanium silicide; MOSFET, source, drain, and interconnect engineering; copper interconnects and barriers; a poster session on advanced interconnects and contacts; contacts to compound semiconductor devices; novel interconnect materials and schemes; and diffusion barriers. Annotation copyrighted by Book News, Inc., Portland, OR

Download or read book Multicomponent Oxide Films for Electronics Volume 574 written by Marilyn Hawley and published by . This book was released on 1999-10-06 with total page 408 pages. Available in PDF, EPUB and Kindle. Book excerpt: The exceptional properties of multicomponent oxides, combined with the inability of simpler materials to meet the increasing demands of the electronics industry, have motivated tremendous interest and activity in utilizing multicomponent oxides for electronic applications. For these applications, it is often desirable to integrate complex oxides in thin-film form with other materials. This book focuses on common materials issues involved in the processing and characterization of multicomponent oxides and how these issues relate to device applications. Papers range from theoretical explanations of the magnetic and electronic properties of transition metal oxides, to integration with silicon technology. Noteworthy is the progress being made in the deposition and characterization of these complex materials, as well as their applicability in ferroelectric memories, MOSFETs, optical devices, infrared imaging arrays, etc. Topics include: epitaxial multicomponent oxide film growth; properties, characterization and modeling; properties of multicomponent oxides; and multicomponent oxide devices.

Download or read book Organic Nonlinear Optical Materials and Devices Volume 561 written by B. Kippelen and published by . This book was released on 1999-08-11 with total page 248 pages. Available in PDF, EPUB and Kindle. Book excerpt: The field of organic optical materials is rapidly growing, and advances are being made both in attaining a deeper understanding of device phenomena and in designing improved materials for thin films, fibers and waveguides. This book offers an interdisciplinary discussion of research on electronic and photonic devices made with organic and polymeric materials. The 1999 MRS Spring Meeting was highlighted by several major advances in fields ranging from nonlinear absorbers and electro-optic polymers, to photorefractive polymers, organic transistors and electroluminescent materials and devices for displays. This book highlights developments in materials chemistry and physics relevant to such devices and strikes a balance between basic science and technology. Topics include: nonlinear optical materials; photorefractive polymers; and electronic and light-emitting materials.

Download or read book Advances in Materials Problem Solving with the Electron Microscope Volume 589 written by Jim Bentley and published by . This book was released on 2001 with total page 432 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.

Download or read book Semiconductor Manufacturing Handbook written by Hwaiyu Geng and published by McGraw Hill Professional. This book was released on 2005-05-18 with total page 915 pages. Available in PDF, EPUB and Kindle. Book excerpt: WORLD-CLASS SEMICONDUCTOR MANUFACTURING EXPERTISE AT YOUR FINGERTIPS This is a comprehensive reference to the semiconductor manufacturing process and ancillary facilities -- from raw material preparation to packaging and testing, applying basics to emerging technologies. Readers charged with optimizing the design and performance of manufacturing processes will find all the information necessary to produce the highest quality chips at the lowest price in the shortest time possible. The Semiconductor Manufacturing Handbook provides leading-edge information on semiconductor wafer processes, MEMS, nanotechnology, and FPD, plus the latest manufacturing and automation technologies, including: Yield Management Automated Material Handling System Fab and Cleanroom Design and Operation Gas Abatement and Waste Treatment Management And much more Written by 60 international experts, and peer reviewed by a seasoned advisory board, this handbook covers the fundamentals of relevant technology and its real-life application and operational considerations for planning, implementing, and controlling manufacturing processes. It includes hundreds of detailed illustrations and a list of relevant books, technical papers, and websites for further research. This inclusive, wide-ranging coverage makes the Semiconductor Manufacturing Handbook the most comprehensive single-volume reference ever published in the field. STATE-OF-THE-ART SEMICONDUCTOR TECHNOLOGIES AND MANUFACTURING PROCESSES: SEMICONDUCTOR FUNDAMENTALS How Chips Are Designed and Made * Substrates * Copper and Low-k Dielectrics * Silicide Formation * Plasma * Vacuum * Photomask WAFER PROCESSING TECHNOLOGIES Microlithography * Ion Implantation * Etch * PVD/ALD * CVD * ECD * Epitaxy * CMP * Wet Cleaning FINAL MANUFACTURING Packaging * Grinding, Stress Relief, Dicing * Inspection, Measurement, and Testing NANOTECHNOLOGY, MEMS, AND FPD GAS AND CHEMICALS Specialty Gas System and DCA * Gas Abatement Systems * Chemical and Slurries Delivery System * Ultra Pure Water FAB YIELD, OPERATIONS, AND FACILITIES Yield Management * Automated Materials Handling System * Metrology * Six Sigma * Advanced Process Control * EHS * Fab Design and Construction * Cleanroom * Vibration and Acoustic Control * ESD * Airborne Molecular Control * Particle Monitoring * Wastewater Neutralization Systems