Download or read book Adaptive Control for Conventional Modes of Operation of MEMS Gyroscopes written by Sungsu Park and published by . This book was released on 2002 with total page 34 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Adaptive Control Strategies for MEMS Gyroscopes written by Sungsu Park and published by . This book was released on 2000 with total page 382 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Whole Angle MEMS Gyroscopes written by Doruk Senkal and published by John Wiley & Sons. This book was released on 2020-05-11 with total page 176 pages. Available in PDF, EPUB and Kindle. Book excerpt: Presents the mathematical framework, technical language, and control systems know-how needed to design, develop, and instrument micro-scale whole-angle gyroscopes This comprehensive reference covers the technical fundamentals, mathematical framework, and common control strategies for degenerate mode gyroscopes, which are used in high-precision navigation applications. It explores various energy loss mechanisms and the effect of structural imperfections, along with requirements for continuous rate integrating gyroscope operation. It also provides information on the fabrication of MEMS whole-angle gyroscopes and the best methods of sustaining oscillations. Whole-Angle Gyroscopes: Challenges and Opportunities begins with a brief overview of the two main types of Coriolis Vibratory Gyroscopes (CVGs): non-degenerate mode gyroscopes and degenerate mode gyroscopes. It then introduces readers to the Foucault Pendulum analogy and a review of MEMS whole angle mode gyroscope development. Chapters cover: dynamics of whole-angle coriolis vibratory gyroscopes; fabrication of whole-angle coriolis vibratory gyroscopes; energy loss mechanisms of coriolis vibratory gyroscopes; and control strategies for whole-angle coriolis vibratory gyro- scopes. The book finishes with a chapter on conventionally machined micro-machined gyroscopes, followed by one on micro-wineglass gyroscopes. In addition, the book: Lowers barrier to entry for aspiring scientists and engineers by providing a solid understanding of the fundamentals and control strategies of degenerate mode gyroscopes Organizes mode-matched mechanical gyroscopes based on three classifications: wine-glass, ring/disk, and mass spring mechanical elements Includes case studies on conventionally micro-machined and 3-D micro-machined gyroscopes Whole-Angle Gyroscopes is an ideal book for researchers, scientists, engineers, and college/graduate students involved in the technology. It will also be of great benefit to engineers in control systems, MEMS production, electronics, and semi-conductors who work with inertial sensors.
Download or read book Inertial MEMS written by Volker Kempe and published by Cambridge University Press. This book was released on 2011-02-17 with total page 497 pages. Available in PDF, EPUB and Kindle. Book excerpt: A practical and systematic overview of the design, fabrication and test of MEMS-based inertial sensors, this comprehensive and rigorous guide shows you how to analyze and transform application requirements into practical designs, and helps you to avoid potential pitfalls and to cut design time. With this book you'll soon be up to speed on the relevant basics, including MEMS technologies, packaging, kinematics and mechanics, and transducers. You'll also get a thorough evaluation of different approaches and architectures for design and an overview of key aspects of testing and calibration. Unique insights into the practical difficulties of making sensors for real-world applications make this up-to-date description of the state of the art in inertial MEMS an ideal resource for professional engineers in industry as well as students looking for a complete introduction to the area.
Download or read book Advanced Materials and Technologies for Micro Nano Devices Sensors and Actuators written by Evgeni Gusev and published by Springer Science & Business Media. This book was released on 2010-03-15 with total page 310 pages. Available in PDF, EPUB and Kindle. Book excerpt: A NATO Advanced Research Workshop (ARW) entitled “Advanced Materials and Technologies for Micro/Nano Devices, Sensors and Actuators” was held in St. Petersburg, Russia, from June 29 to July 2, 2009. The main goal of the Workshop was to examine (at a fundamental level) the very complex scientific issues that pertain to the use of micro- and nano-electromechanical systems (MEMS and NEMS), devices and technologies in next generation commercial and defen- related applications. Micro- and nano-electromechanical systems represent rather broad and diverse technological areas, such as optical systems (micromirrors, waveguides, optical sensors, integrated subsystems), life sciences and lab equipment (micropumps, membranes, lab-on-chip, membranes, microfluidics), sensors (bio-sensors, chemical sensors, gas-phase sensors, sensors integrated with electronics) and RF applications for signal transmission (variable capacitors, tunable filters and antennas, switches, resonators). From a scientific viewpoint, this is a very multi-disciplinary field, including micro- and nano-mechanics (such as stresses in structural materials), electronic effects (e. g. charge transfer), general electrostatics, materials science, surface chemistry, interface science, (nano)tribology, and optics. It is obvious that in order to overcome the problems surrounding next-generation MEMS/NEMS devices and applications it is necessary to tackle them from different angles: theoreticians need to speak with mechanical engineers, and device engineers and modelers to listen to surface physicists. It was therefore one of the main objectives of the workshop to bring together a multidisciplinary team of distinguished researchers.
Download or read book Adaptive sliding mode control of a Mems vibratory gyroscope written by Juntao Fei and published by . This book was released on 2008 with total page 125 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Micromanipulation written by Nicola Pio Belfiore and published by MDPI. This book was released on 2019-01-10 with total page 201 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is a printed edition of the Special Issue "Micromanipulation" that was published in Actuators
Download or read book Adaptive Control for MEMS Gyroscopes written by Sungsu Park and published by . This book was released on 2002 with total page 32 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Journal of Micro nanolithography MEMS and MOEMS written by and published by . This book was released on 2008 with total page 688 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book IEEE ASME International Conference on Advanced Intelligent Mechatronics Proceedings written by and published by . This book was released on 2005 with total page 862 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Adaptive Control System for a Vibrational MEMS Gyroscope with Time varying Rotation Rates written by Lili Dong and published by . This book was released on 2005 with total page 236 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Digital Implementation of Adaptive Control Algorithms for MEMS Gyroscopes written by Sungsu Park and published by . This book was released on 2002 with total page 35 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Adaptive Sliding Mode Control with Application to a MEMS Vibratory Gyroscope written by Juntao Fei and published by . This book was released on 2007 with total page 168 pages. Available in PDF, EPUB and Kindle. Book excerpt: "Gyroscopes are commonly used sensors for measuring angular velocity in many areas of applications such as navigation, homing, and control stabilization. Vibratory gyroscopes are the devices that transfer energy from one axis to the other through Coriolis forces. Fabrication imperfections result in some cross stiffness and cross damping effects that may hinder the measurement of angular velocity of MEMS gyroscope. Other noise sources such as thermal, mechanical noise also affect the performance. The angular velocity measurement and minimization of the cross coupling between two axes are challenging problems in the control of vibrating gyroscopes. This dissertation develops adaptive sliding mode control strategies for a MEMS z-axis gyroscope. The proposed adaptive sliding mode controllers for MEMS z-axis gyroscope make real-time estimates of the angular velocity as well as all unknown gyroscope parameters including coupling stiffness and damping parameters. Therefore, fabrication imperfection and time varying noise and disturbance can be compensated for. These estimates are updated using the tracking error between the reference model trajectory and mass' real trajectory. The reference model trajectory is designed to satisfy the persistence of excitation condition to enable parameter estimates to converge to their true values. The indirect adaptive sliding mode controller and direct adaptive sliding mode controller with proportional and integral sliding surface are proposed for MEMS gyroscope. In the presence of unmeasured velocity states, an adaptive sliding mode controller with a sliding mode observer that can reconstruct the unmeasured states is developed to estimate the angular velocity and the linear damping and stiffness coefficients of the gyroscope in real time despite parameter variations and external disturbance. Moreover, the adaptive sliding mode control for two axes angular sensor is extended to triaxial angular sensor and a novel concept for an adaptively controlled triaxial angular velocity sensor device that is able to detect rotation in the three orthogonal axes, using a single vibrating mass is proposed. The numerical simulations of MEMS gyroscope show the effectiveness of all the proposed adaptive sliding mode control schemes. It is shown that the proposed adaptive sliding mode control schemes offer several advantages such as consistent estimates of gyroscope parameters including angular velocity and large robustness to parameter variations and disturbance."--Abstract.
Download or read book Proceedings written by and published by . This book was released on 2004 with total page 740 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Control and Self Calibration of Microscale Rate Integrating Gyroscopes MRIGs written by Fu Zhang and published by . This book was released on 2015 with total page 114 pages. Available in PDF, EPUB and Kindle. Book excerpt: This dissertation investigates the design of control algorithms and calibration methods for Microscale Rate Integrating Gyroscopes (MRIGs). As its name implies, a MRIG operates in rate integrating mode and can directly measure the rotation angle of the base where it is mounted. However, the MRIG mechanical system does not spontaneously operate in a rate integrating mode, but requires an active controller. Such a controller enables the MRIG to oscillate in a specific pattern that is related to the input rotation angle in a measurable way. Conventional micro-machined gyroscopes (i.e. MEMS gyroscopes) operate in rate mode (as apposed to rate integrating mode). That is, the gyroscope directly measures the rotation rate of the base. The measured rotation rate is then numerically integrated over time to obtain the input rotation angle. The main drawback of this measuring mechanism is that, by integrating, the rate measurement error will propagate over time, causing the angle measurement to drift from the real input angle. MRIG, by its operating principle, can directly measure the input rotation angle; hence it suffers from no such error propagation. A well-known control scheme for rate integrating gyroscopes was proposed by Lynch in 1995 [51]. This control scheme has demonstrated its efficacy on precisely fabricated rate integrating gyroscopes such as Hemispherical Resonance Gyroscopes (HRGs). However, for MRIGs fabricated by micro-fabrication technology, fabrication imperfections significantly degrade the gyro performance. In addition, the Lynch-proposed-scheme is essentially nonlinear. As a consequence, the controller performance is hard to predict and analyze prior to real tests. In this dissertation, a novel demodulation method is developed to transform the original nonlinear control problem into a linear time invariant controller design problem. This technique is based on the averaging method proposed by Lynch [50] but enables the use of well studied linear system theory for MRIG controller design and analysis. The resulting controller design for MRIGs is much more tractable and the performance is rather predictable. This fundamental improvement also opens up new opportunities for implementing and analyzing control systems based on linear control theory. Two schemes are proposed in this dissertation to compensate for the parameter mismatches caused by fabrication imperfections. The first one is based on electrostatic spring softening and tuning. The basic operation principle is first introduced. Then a full derivation of this method on a real MRIG configuration is conducted. Experimental results confirm that this compensation scheme can significantly attenuate the parameter mismatch. The other compensation scheme considered in this dissertation is an adaptive compensation scheme consisting of three feedforward controllers. Each of them runs on top of the corresponding feedback control loop and estimates and compensates parameter mismatches in real time. We also present a stability and convergence analysis that shows such adaptive controllers converge to the correct values and perfectly cancel the parameter mismatch. A simulation study performed on a MRIG model also confirms the efficacy of the compensation scheme. Then a self-calibration process is proposed to automatically calibrate the gyroscope. This self-calibration method requires no human involvement or auxiliary device, hence enables the gyroscope to calibrate itself whenever necessary, even in use.
Download or read book Dissertation Abstracts International written by and published by . This book was released on 2007 with total page 1044 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Adaptive Force Balancing Control of MEMS Gyroscope System with Magnitude Constraints written by Hameed Abdul Mohammed and published by . This book was released on 2003 with total page 140 pages. Available in PDF, EPUB and Kindle. Book excerpt: "This thesis work presents a suite of adaptive force-balancing control schemes with magnitude constraints on the input for a MEMS (Microelectromechanical systems) z-axis gyroscope."--Abstract, p. iii.
