Download or read book Wavefront Metrology for High Resolution Optical Systems written by Ryan Miyakawa and published by . This book was released on 2011 with total page 252 pages. Available in PDF, EPUB and Kindle. Book excerpt: Next generation extreme ultraviolet (EUV) optical systems are moving to higher resolution optics to accommodate smaller length scales targeted by the semiconductor industry. As the numerical apertures (NA) of the optics become larger, it becomes increasingly difficult to characterize aberrations due to experimental challenges associated with high-resolution spatial filters and geometrical effects caused by large incident angles of the test wavefront. This dissertation focuses on two methods of wavefront metrology for high resolution optical systems. The first method, lateral shearing interferometry (LSI), is a self-referencing interferometry where the test wavefront is incident on a low spatial frequency grating, and the resulting interference between the diffracted orders is used to reconstruct the wavefront aberrations. LSI has many advantages over other interferometric tests such as phase-shifting point diffraction interferometry (PS/PDI) due to its experimental simplicity, stability, relaxed coherence requirements, and its ability to scale to high numerical apertures. While LSI has historically been a qualitative test, this dissertation presents a novel quantitative investigation of the LSI interferogram. The analysis reveals the existence of systematic aberrations due to the nonlinear angular response from the diffraction grating that compromises the accuracy of LSI at medium to high NAs. In the medium NA regime (0.15

Download or read book Fringe 2009 written by Wolfgang Osten and published by Springer Science & Business Media. This book was released on 2010-04-28 with total page 808 pages. Available in PDF, EPUB and Kindle. Book excerpt: 21 years ago it was a joint idea with Hans Rottenkolber to organize a workshop dedicated to the discussion of the latest results in the automatic processing of fringe patterns. This idea was promoted by the insight that automatic and high precision phase measurement techniques will play a key role in all future industrial and scientific applications of optical metrology. A couple of months later more than 50 specialists from East and West met in East Berlin, the capital of the former GDR, to spend 3 days with the discussion of new principles of fringe processing. In the stimulating atmoshere the idea was born to repeat the workshop and to organize the meeting in an olympic schedule. And thus meanwhile 20 years have been passed and we have today Fringe number six. However, such a workshop takes place in a dynamic environment. Therefore the main topics of the previous events were always adapted to the most interesting subjects of the new period. In 1993 the workshop took place in Bremen and was dedicated to new principles of optical shape measurement, setup calibration, phase unwrapping and nondestructive testing, while in 1997 new approaches in multi-sensor metrology, active measurement strategies and hybrid processing technologies played a central role. 2001, the first meeting in the 21st century, was focused to optical methods for micromeasurements, hybrid measurement technologies and new sensor solutions for industrial inspection.

Download or read book Fringe 2013 written by Wolfgang Osten and published by Springer Science & Business Media. This book was released on 2013-08-15 with total page 975 pages. Available in PDF, EPUB and Kindle. Book excerpt: In continuation of the FRINGE Workshop Series this Proceeding contains all contributions presented at the 7. International Workshop on Advanced Optical Imaging and Metrology. The FRINGE Workshop Series is dedicated to the presentation, discussion and dissemination of recent results in Optical Imaging and Metrology. Topics of particular interest for the 7. Workshop are: - New methods and tools for the generation, acquisition, processing, and evaluation of data in Optical Imaging and Metrology (digital wavefront engineering, computational imaging, model-based reconstruction, compressed sensing, inverse problems solution) - Application-driven technologies in Optical Imaging and Metrology (high-resolution, adaptive, active, robust, reliable, flexible, in-line, real-time) - High-dynamic range solutions in Optical Imaging and Metrology (from macro to nano) - Hybrid technologies in Optical Imaging and Metrology (hybrid optics, sensor and data fusion, model-based solutions, multimodality) - New optical sensors, imaging and measurement systems (integrated, miniaturized, in-line, real-time, traceable, remote) Special emphasis is put on new strategies, taking into account the active combination of physical modeling, computer aided simulation and experimental data acquisition. In particular attention is directed towards new approaches for the extension of existing resolution limits that open the gates to wide-scale metrology, ranging from macro to nano, by considering dynamic changes and using advanced optical imaging and sensor systems.

Download or read book In situ Testing of High Resolution Optical Systems Via Localized Wavefront Curvature Sensing written by and published by . This book was released on 2012 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Download or read book Optical Metrology written by Kjell J. Gåsvik and published by John Wiley & Sons. This book was released on 2003-04-11 with total page 372 pages. Available in PDF, EPUB and Kindle. Book excerpt: New material on computerized optical processes, computerized ray tracing, and the fast Fourier transform, Bibre-Bragg sensors, and temporal phase unwrapping. * New introductory sections to all chapters. * Detailed discussion on lasers and laser principles, including an introduction to radiometry and photometry. * Thorough coverage of the CCD camera.

Download or read book High Resolution Optical Surface Metrology with the Slope Measuring Portable Optical Test System written by Alejandro V. Maldonado and published by . This book was released on 2014 with total page 165 pages. Available in PDF, EPUB and Kindle. Book excerpt: New optical designs strive to achieve extreme performance, and continually increase the complexity of prescribed optical shapes, which often require wide dynamic range and high resolution. SCOTS, or the Software Configurable Optical Test System, can measure a wide range of optical surfaces with high sensitivity using surface slope. This dissertation introduces a high resolution version of SCOTS called SPOTS, or the Slope measuring Portable Optical Test System. SPOTS improves the metrology of surface features on the order of sub-millimeter to decimeter spatial scales and nanometer to micrometer level height scales. Currently there is no optical surface metrology instrument with the same utility. SCOTS uses a computer controlled display (such as an LCD monitor) and camera to measure surface slopes over the entire surface of a mirror. SPOTS differs in that an additional lens is placed near the surface under test. A small prototype system is discussed in general, providing the support for the design of future SPOTS devices. Then the SCOTS instrument transfer function is addressed, which defines the way the system filters surface heights. Lastly, the calibration and performance of larger SPOTS device is analyzed with example measurements of the 8.4-m diameter aspheric Large Synoptic Survey Telescope's (LSST) primary mirror. In general optical systems have a transfer function, which filters data. In the case of optical imaging systems the instrument transfer function (ITF) follows the modulation transfer function (MTF), which causes a reduction of contrast as a function of increasing spatial frequency due to diffraction. In SCOTS, ITF is shown to decrease the measured height of surface features as their spatial frequency increases, and thus the SCOTS and SPOTS ITF is proportional to their camera system's MTF. Theory and simulations are supported by a SCOTS measurement of a test piece with a set of lithographically written sinusoidal surface topographies. In addition, an example of a simple inverse filtering technique is provided. The success of a small SPOTS proof of concept instrument paved the way for a new larger prototype system, which is intended to measure subaperture regions on large optical mirrors. On large optics, the prototype SPOTS is light weight and it rests on the surface being tested. One advantage of this SPOTS is stability over time in maintaining its calibration. Thus the optician can simply place SPOTS on the mirror, perform a simple alignment, collect measurement data, then pick the system up and repeat at a new location. The entire process takes approximately 5 to 10 minutes, of which 3 minutes is spent collecting data. SPOTS' simplicity of design, light weight, robustness, wide dynamic range, and high sensitivity make it a useful tool for optical shop use during the fabrication and testing process of large and small optics.

Download or read book Metrics for High quality Specular Surfaces written by Lionel R. Baker and published by SPIE Press. This book was released on 2004 with total page 170 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book supplies the optical component and systems designer, and quality assurance engineers and managers with the definitions, measurement principles, and standard metrics used to characterize high-quality specular surfaces. The author covers both the traditional visual methods as well as newer (but not necessarily better) computer-aided techniques and describes the metrics adopted by the new ISO standards, including the setting of form and finish tolerances. Key issues of industry are raised, to help stimulate research and development of new methods and standards that blend the best of the old and new approaches to surface assessment.

Download or read book Optical Metrology written by Olivério D.D. Soares and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 794 pages. Available in PDF, EPUB and Kindle. Book excerpt: Optical Metrology is a rapidly expanding field i'n both its scientific foundations and technological developments, being of major concern to measurements, quality control, non-destructive tes ting and in fundamental research. In order to define the state-of-the-art, and to evaluate pre sent accomplishments, whilst giving an appraisal of how each of the particular topics will evolve the Optical Metrology-anAdvancedStudy Institute was organized with a concourse of the world's acknowledged experts. Thus, the Institute provided a forum for tutorial reviews blended with topics of current research in the form of a progressive and comprehensive presentation of recent promising developments, lea ding techniques and instrumentation in incoherent and coherent optics for Metrology, Sensing and Control in Science, Industry and Biomedici ne. Optical Metrology is a very broad field which is highly inter disciplinary in its applications, and in its scientific and technolo gical background. It is related to such diverse disciplines as physi cal and chemical sciences, engineering, electronics, computer scien ces, biological sciences and theoretical sciences, such as statistics. Although there was an emphasis on photomechanics and industri al applications, a marked diversity was reflected in the different background and interests of the participants. The vitality and viabi lity of the discipline was enhanced not only by the encouraging number of young scientists and industrialists participating and authoring, but also by the remarkably promising prospects found in x the practical applications supported by advanced electronic hybridi zation.

Download or read book Optical Metrology for Precision Engineering written by Wei Gao and published by Walter de Gruyter GmbH & Co KG. This book was released on 2021-11-22 with total page 655 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book provides readers the fundamentals of optical metrology for precision engineering. The next-generation measurement technologies based on ultrashort pulse laser and optical frequency comb are also presented, making it an essential reference book for various engineering fields. • Introduces fundamental theories and techniques • Combines theories with practical applications • Presents technologies in an easy-to-understand way

Download or read book Handbook of Optical Dimensional Metrology written by Kevin Harding and published by CRC Press. This book was released on 2013-02-26 with total page 509 pages. Available in PDF, EPUB and Kindle. Book excerpt: Due to their speed, data density, and versatility, optical metrology tools play important roles in today’s high-speed industrial manufacturing applications. Handbook of Optical Dimensional Metrology provides useful background information and practical examples to help readers understand and effectively use state-of-the-art optical metrology methods. The book first builds a foundation for evaluating optical measurement methods. It explores the many terms of optical metrology and compares it to other forms of metrology, such as mechanical gaging, highlighting the limitations and errors associated with each mode of measurement at a general level. This comparison is particularly helpful to current industry users who operate the most widely applied mechanical tools. The book then focuses on each application area of measurement, working down from large area to medium-sized to submicron measurements. It describes the measurement of large objects on the scale of buildings, the measurement of durable manufactured goods such as aircraft engines and appliances, and the measurement of fine features on the micron and nanometer scales. In each area, the book covers fast, coarse measures as well as the finest measurements possible. Best practices and practical examples for each technology aid readers in effectively using the methods. Requiring no prior expertise in optical dimensional metrology, this handbook helps engineers and quality specialists understand the capabilities and limitations of optical metrology methods. It also shows them how to successfully apply optical metrology to a vast array of current engineering and scientific problems.

Download or read book Handbook of Optical Systems Volume 2 written by Herbert Gross and published by Wiley-VCH. This book was released on 2005-09-12 with total page 728 pages. Available in PDF, EPUB and Kindle. Book excerpt: The state-of-the-art full-colored handbook gives a comprehensive introduction to the principles and the practice of calculation, layout, and understanding of optical systems and lens design. Written by reputed industrial experts in the field, this text introduces the user to the basic properties of optical systems, aberration theory, classification and characterization of systems, advanced simulation models, measuring of system quality and manufacturing issues. In this Volume Volume 2 continues the introduction given in volume 1 with the more advanced texts about the foundations of image formation. Emphasis is placed on an intuitive while theoretically exact presentation. More than 400 color graphs and selected references on the end of each chapter support this undertaking. From the contents: 17 Wave equation 18 Diffraction 19 Interference and coherence 20 Imaging 21 Imaging with partial coherence 22 Three dimensional imaging 23 Polarization 24 Polarization and optical imaging A1 Mathematical appendix Other Volumes Volume 1: Fundamentals of Technical Optics Volume 3: Aberration Theory and Correction of Optical Systems Volume 4: Survey of Optical Instruments Volume 5: Advanced Physical Optics

Download or read book Optical Imaging and Metrology written by Wolfgang Osten and published by John Wiley & Sons. This book was released on 2012-09-10 with total page 471 pages. Available in PDF, EPUB and Kindle. Book excerpt: A comprehensive review of the state of the art and advances in the field, while also outlining the future potential and development trends of optical imaging and optical metrology, an area of fast growth with numerous applications in nanotechnology and nanophysics. Written by the world's leading experts in the field, it fills the gap in the current literature by bridging the fields of optical imaging and metrology, and is the only up-to-date resource in terms of fundamental knowledge, basic concepts, methodologies, applications, and development trends.

Download or read book Advanced Optics Using Aspherical Elements written by Bernhard Braunecker and published by SPIE Press. This book was released on 2008 with total page 435 pages. Available in PDF, EPUB and Kindle. Book excerpt: Modern optical systems rely on leading-edge production technologies, especially when using aspherical optical elements. Due to the inherent complexity of aspheres, all efforts to push the technological limits are risky. Thus, to minimize risk, clear decisions based on a good understanding of technology are indispensable. This compendium is written as an optical technology reference book for development and production engineers. With contributions from worldwide experts, this book aids in mitigating the risk in adopting new asphere production technologies.

Download or read book Optical Metrology and Optoacoustics in Nondestructive Evaluation of Materials written by Zinoviy Nazarchuk and published by Springer Nature. This book was released on 2023-05-23 with total page 415 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book includes the description, modeling and realization of new optical metrology techniques for technical diagnostics of materials. Special attention is paid to multi-step phase shifting interferometry with arbitrary phase shifts between interferograms, phase shifting and correlation digital speckle pattern interferometry, optical-digital speckle correlation, and digital image correlation, as well as dynamic speckle patterns analysis. Optoacoustic techniques can be treated as a separate branch of optical metrology and can solve many problems of technical diagnostics, including detection and localization of subsurface defects in laminated composite materials. The utility of such techniques can be increased by illumination of the object via acoustic waves at certain frequencies. Hence, an effective theoretical approach to the modeling of an elastic wave field interaction with an interphase defect, and to defect visualization using dynamic speckle patterns, is also included in this book. The experimental proof of the proposed approaches was achieved using a specially created hybrid optical-digital system for detection of different subsurface defects. This book is intended for engineers, researchers and students engaged in the field of nondestructive evaluation of materials and technical diagnostics of structural elements, hybrid optical systems, speckle metrology and optoacoustic imaging techniques.

Download or read book Optical Metrology with Interferometry written by Dahi Ghareab Abdelsalam Ibrahim and published by Cambridge Scholars Publishing. This book was released on 2019-07-31 with total page 312 pages. Available in PDF, EPUB and Kindle. Book excerpt: The accurate measurements of surface topography are becoming important to many applications in both engineering and science. Optical interferometry is considered a preferable technique for featuring accurate 3D surface profiling since it is non-contacting, non-destructive and highly accurate. In combination with computers and other electronic devices, optical interferometry has become faster, more reliable, more convenient and more robust. There is now a wealth of new optical interferometry techniques on the market, or being developed in academia, that can measure surface topography with high precision. Each method has both its strong points and its limitations. This book explains in detail the basics of optical interferometry, their common language, generic features and limitations, and their simulation and uncertainties. Moreover, it provides an introduction to new frontiers in optical interferometry, including terahertz technology and optical frequency combs.

Download or read book Optical Metrology for Fluids Combustion and Solids written by Carolyn Mercer and published by Springer Science & Business Media. This book was released on 2013-04-17 with total page 468 pages. Available in PDF, EPUB and Kindle. Book excerpt: Optical Metrology for Fluids, Combustion and Solids is the first practical handbook that presents the assemblage of the techniques necessary to provide a basic understanding of optical measurement for fluids, combustion, and solids. The use of light as a measurement tool has grown over the past twenty years from a narrowly specialized activity to a mainstay of modern research today. Until recently, the knowledge that could be extracted from the light interaction of light with physical objects was limited to specialized activities. The invention of the laser, the computer and microelectronics has enabled a measurement revolution such that virtually every parameter of engineering interest can be measured using the minimally intrusive properties of light. The authors of this book's chapters are leaders in this revolution. They work on the front lines of research in government, industry, and universities, inventing yet more ways to harness the power of light for the generation of knowledge.

Download or read book Optical Metrology written by Kjell J. G?svik and published by . This book was released on 1987-05-06 with total page 254 pages. Available in PDF, EPUB and Kindle. Book excerpt: Covers the four optical metrology techniques of holographic interferometry, moire techniques, speckle methods and photoelasticity in a single volume.