Download or read book Tunable Absolute Capacitive MEMS Pressure Sensor on a Pure Play Commercial Process written by Charles Allan and published by . This book was released on 2016 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt: "A new method for manufacturing absolute MEMS (microelectromechanical systems) capacitive pressure sensors was developed using MIDISTM, a commercially available Pure Play process offered by Teledyne DALSA. The method takes advantage of the clean vacuum and low leak rate of 45 molecules/s (7.5E−13 atm∙cc/s) [2, 3] as a highly stable reference. The method allows absolute capacitive pressure sensors to be manufactured alongside 3-axis accelerometers and 3-axis gyroscopes opening the possibility of 10-axis IMUs on a single dye [4]. A method for characterizing the mechanical properties of the sensing membrane using FT-MTA02 Micromechanical Testing and Assembly Station by FemtoTools showed an accurate correlation of membrane deflection constant with simulated results. Finally, a testing set up was designed and built to measure the electrical performance of the pressure sensors under the biomedical, environmental and energy extraction applications. This pressure testing set up will be used to compare sensor data from sensors with diameters ranging from 210-360um with membrane thicknesses of 3 and 5um. The data will be valuable in showcasing the range and versatility of this method for manufacturing absolute pressure sensors. From the simulations we expect our sensors to have a resolution of 0.01kPa with an accuracy of +/-0.7% in the smallest package (2mmx2mmx0.8mm) while consuming only 24uA in high resolution and 3.3uA in low resolution. A high performance, low power, customizable pressure sensor that can be fabricated alongside accelerometers, gyroscopes allowing for 10-axis IMUs on a single dye." --
Download or read book MEMS Materials and Processes Handbook written by Reza Ghodssi and published by Springer Science & Business Media. This book was released on 2011-03-18 with total page 1211 pages. Available in PDF, EPUB and Kindle. Book excerpt: MEMs Materials and Processes Handbook" is a comprehensive reference for researchers searching for new materials, properties of known materials, or specific processes available for MEMS fabrication. The content is separated into distinct sections on "Materials" and "Processes". The extensive Material Selection Guide" and a "Material Database" guides the reader through the selection of appropriate materials for the required task at hand. The "Processes" section of the book is organized as a catalog of various microfabrication processes, each with a brief introduction to the technology, as well as examples of common uses in MEMs.
Download or read book Handbook of Modern Sensors written by Jacob Fraden and published by Springer Science & Business Media. This book was released on 2006-04-29 with total page 596 pages. Available in PDF, EPUB and Kindle. Book excerpt: Seven years have passed since the publication of the previous edition of this book. During that time, sensor technologies have made a remarkable leap forward. The sensitivity of the sensors became higher, the dimensions became smaller, the sel- tivity became better, and the prices became lower. What have not changed are the fundamental principles of the sensor design. They are still governed by the laws of Nature. Arguably one of the greatest geniuses who ever lived, Leonardo Da Vinci, had his own peculiar way of praying. He was saying, “Oh Lord, thanks for Thou do not violate your own laws. ” It is comforting indeed that the laws of Nature do not change as time goes by; it is just our appreciation of them that is being re?ned. Thus, this new edition examines the same good old laws of Nature that are employed in the designs of various sensors. This has not changed much since the previous edition. Yet, the sections that describe the practical designs are revised substantially. Recent ideas and developments have been added, and less important and nonessential designs were dropped. Probably the most dramatic recent progress in the sensor technologies relates to wide use of MEMS and MEOMS (micro-electro-mechanical systems and micro-electro-opto-mechanical systems). These are examined in this new edition with greater detail. This book is about devices commonly called sensors. The invention of a - croprocessor has brought highly sophisticated instruments into our everyday lives.
Download or read book Smart Sensors and MEMS written by S Nihtianov and published by Woodhead Publishing. This book was released on 2018-02-27 with total page 606 pages. Available in PDF, EPUB and Kindle. Book excerpt: Smart Sensors and MEMS: Intelligent Devices and Microsystems for Industrial Applications, Second Edition highlights new, important developments in the field, including the latest on magnetic sensors, temperature sensors and microreaction chambers. The book outlines the industrial applications for smart sensors, covering direct interface circuits for sensors, capacitive sensors for displacement measurement in the sub-nanometer range, integrated inductive displacement sensors for harsh industrial environments, advanced silicon radiation detectors in the vacuum ultraviolet (VUV) and extreme ultraviolet (EUV) spectral range, among other topics. New sections include discussions on magnetic and temperature sensors and the industrial applications of smart micro-electro-mechanical systems (MEMS). The book is an invaluable reference for academics, materials scientists and electrical engineers working in the microelectronics, sensors and micromechanics industry. In addition, engineers looking for industrial sensing, monitoring and automation solutions will find this a comprehensive source of information. - Contains new chapters that address key applications, such as magnetic sensors, microreaction chambers and temperature sensors - Provides an in-depth information on a wide array of industrial applications for smart sensors and smart MEMS - Presents the only book to discuss both smart sensors and MEMS for industrial applications
Download or read book Nyquist AD Converters Sensor Interfaces and Robustness written by Arthur H.M. van Roermund and published by Springer Science & Business Media. This book was released on 2012-11-26 with total page 291 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is based on the 18 presentations during the 21st workshop on Advances in Analog Circuit Design. Expert designers provide readers with information about a variety of topics at the frontier of analog circuit design, including Nyquist analog-to-digital converters, capacitive sensor interfaces, reliability, variability, and connectivity. This book serves as a valuable reference to the state-of-the-art, for anyone involved in analog circuit research and development.
Download or read book 2D Monoelemental Materials Xenes and Related Technologies written by Zongyu Huang and published by CRC Press. This book was released on 2022-04-19 with total page 166 pages. Available in PDF, EPUB and Kindle. Book excerpt: Monoelemental 2D materials called Xenes have a graphene-like structure, intra-layer covalent bond, and weak van der Waals forces between layers. Materials composed of different groups of elements have different structures and rich properties, making Xenes materials a potential candidate for the next generation of 2D materials. 2D Monoelemental Materials (Xenes) and Related Technologies: Beyond Graphene describes the structure, properties, and applications of Xenes by classification and section. The first section covers the structure and classification of single-element 2D materials, according to the different main groups of monoelemental materials of different components and includes the properties and applications with detailed description. The second section discusses the structure, properties, and applications of advanced 2D Xenes materials, which are composed of heterogeneous structures, produced by defects, and regulated by the field. Features include: Systematically detailed single element materials according to the main groups of the constituent elements Classification of the most effective and widely studied 2D Xenes materials Expounding upon changes in properties and improvements in applications by different regulation mechanisms Discussion of the significance of 2D single-element materials where structural characteristics are closely combined with different preparation methods and the relevant theoretical properties complement each other with practical applications Aimed at researchers and advanced students in materials science and engineering, this book offers a broad view of current knowledge in the emerging and promising field of 2D monoelemental materials.
Download or read book Triboelectric Nanogenerators written by Zhong Lin Wang and published by Springer. This book was released on 2016-08-17 with total page 537 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book introduces an innovative and high-efficiency technology for mechanical energy harvesting. The book covers the history and development of triboelectric nanogenerators, basic structures, working principles, performance characterization, and potential applications. It is divided into three parts: Part A illustrates the fundamental working modes of triboelectric nanogenerators with their prototype structures and theoretical analysis; Part B and Part C introduce two categories of applications, namely self-powered systems and self-powered active sensors. The book will be an ideal guide to scientists and engineers beginning to study triboelectric nanogenerators or wishing to deepen their knowledge of the field. Readers will be able to place the technical details about this technology in context, and acquire the necessary skills to reproduce the experimental setups for fabrication and measurement.
Download or read book Reliability of MEMS written by Osamu Tabata and published by John Wiley & Sons. This book was released on 2008-02-04 with total page 328 pages. Available in PDF, EPUB and Kindle. Book excerpt: This first book to cover exclusively and in detail the principles, tools and methods for determining the reliability of microelectromechanical materials, components and devices covers both component materials as well as entire MEMS devices. Divided into two major parts, following a general introductory chapter to reliability issues, the first part looks at the mechanical properties of the materials used in MEMS, explaining in detail the necessary measuring technologies -- nanoindenters, bulge methods, bending tests, tensile tests, and others. Part Two treats the actual devices, organized by important device categories such as pressure sensors, inertial sensors, RF MEMS, and optical MEMS.
Download or read book MEMS Mechanical Sensors written by Stephen Beeby and published by Artech House. This book was released on 2004 with total page 282 pages. Available in PDF, EPUB and Kindle. Book excerpt: Here's the book to keep handy when you have to overcome obstacles in design, simulation, fabrication and application of MEMS sensors. This practical guide to design tools and packaging helps you create the sensors you need for the full range of mechanical microsensor applications. Critical physical sensing techniques covered include piezoresistive, piezoelectric, capacative, optical, resonant, actuation, thermal, and magnetic, as well as smart sensing.
Download or read book Principles of Chemical Sensors written by Jiri Janata and published by Springer Science & Business Media. This book was released on 2010-03-14 with total page 382 pages. Available in PDF, EPUB and Kindle. Book excerpt: Do not learn the tricks of the trade, learn the trade I started teachinggraduate coursesin chemical sensors in early 1980s, ?rst as a o- quarter (30 h) class then as a semester course and also as several intensive, 4–5-day courses. Later I organized my lecture notes into the ?rst edition of this book, which was published by Plenum in 1989 under the title Principles of Chemical Sensors. I started working on the second edition in 2006. The new edition of Principles of Chemical Sensors is a teaching book, not a textbook. Let me explain the difference. Textbooks usually cover some more or less narrow subject in maximum depth. Such an approach is not possible here. The subject of chemical sensors is much too broad, spanning many aspects of physical and analytical chemistry, biochemistry, materials science, solid-state physics, optics, device fabrication, electrical engine- ing, statistical analysis, and so on. The challengefor me has been to present uniform logical coverage of such a large area. In spite of its relatively shallow depth, it is intended as a graduate course. At its present state the amount of material is more thancan be coveredin a one-semestercourse (45h). Two one-quartercourseswould be more appropriate. Because of the breadth of the material, the sensor course has a somewhat unexpected but, it is hoped, bene?cial effect.
Download or read book Nanotechnology Enabled Sensors written by Kourosh Kalantar-zadeh and published by Springer Science & Business Media. This book was released on 2007-09-19 with total page 502 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nanotechnology provides tools for creating functional materials, devices, and systems by controlling materials at the atomic and molecular scales and making use of novel properties and phenomena. Nanotechnology-enabled sensors find applications in several fields such as health and safety, medicine, process control and diagnostics. This book provides the reader with information on how nanotechnology enabled sensors are currently being used and how they will be used in the future in such diverse fields as communications, building and facilities, medicine, safety, and security, including both homeland defense and military operations.
Download or read book Technology for the United States Navy and Marine Corps 2000 2035 written by and published by National Academies. This book was released on 1997 with total page 356 pages. Available in PDF, EPUB and Kindle. Book excerpt: The future national security environment will present the naval forces with operational challenges that can best be met through the development of military capabilities that effectively leverage rapidly advancing technologies in many areas. The panel envisions a world where the naval forces will perform missions in the future similar to those they have historically undertaken. These missions will continue to include sea control, deterrence, power projection, sea lift, and so on. The missions will be accomplished through the use of platforms (ships, submarines, aircraft, and spacecraft), weapons (guns, missiles, bombs, torpedoes, and information), manpower, materiel, tactics, and processes (acquisition, logistics, and so on.). Accordingly, the Panel on Technology attempted to identify those technologies that will be of greatest importance to the future operations of the naval forces and to project trends in their development out to the year 2035. The primary objective of the panel was to determine which are the most critical technologies for the Department of the Navy to pursue to ensure U.S. dominance in future naval operations and to determine the future trends in these technologies and their impact on Navy and Marine Corps superiority. A vision of future naval operations ensued from this effort. These technologies form the base from which products, platforms, weapons, and capabilities are built. By combining multiple technologies with their future attributes, new systems and subsystems can be envisioned. Technology for the United States Navy and Marine Corps, 2000-2035 Becoming a 21st-Century Force: Volume 2: Technology indentifies those technologies that are unique to the naval forces and whose development the Department of the Navy clearly must fund, as well as commercially dominated technologies that the panel believes the Navy and Marine Corps must learn to adapt as quickly as possible to naval applications. Since the development of many of the critical technologies is becoming global in nature, some consideration is given to foreign capabilities and trends as a way to assess potential adversaries' capabilities. Finally, the panel assessed the current state of the science and technology (S&T) establishment and processes within the Department of the Navy and makes recommendations that would improve the efficiency and effectiveness of this vital area. The panel's findings and recommendations are presented in this report.
Download or read book MEMS and Microsystems written by Tai-Ran Hsu and published by McGraw-Hill Science, Engineering & Mathematics. This book was released on 2002 with total page 456 pages. Available in PDF, EPUB and Kindle. Book excerpt: Microsystems and MEMS technology is one of the biggest breakthroughs in the area of mechanical and electronic technology in recent years. This is the technology of extremely small and powerful devices, and systems built around them, which have mechanical and electrical components. MEMS technology is expanding rapidly, with major application areas being telecommunications, biomedical technology, manufacturing and robotic systems, transportation and aerospace. Academics are desperate for texts to familiarise future engineers with this broad-ranging technology. This text provides an engineering design approach to MEMS and microsystems which is appropriate for professionals and senior level students. This design approach is conveyed through good examples, cases and applied problems. The book is appropriate for mechanical and aerospace engineers, since it carefully explains the electrical/electronic aspects of the subject. Electrical engineering students will be given strong coverage of the mechanical side of MEMS, something they may not receive elsewhere.
Download or read book Piezotronics and Piezo Phototronics written by Zhong Lin Wang and published by Springer Science & Business Media. This book was released on 2013-01-11 with total page 254 pages. Available in PDF, EPUB and Kindle. Book excerpt: The fundamental principle of piezotronics and piezo-phototronics were introduced by Wang in 2007 and 2010, respectively. Due to the polarization of ions in a crystal that has non-central symmetry in materials, such as the wurtzite structured ZnO, GaN and InN, a piezoelectric potential (piezopotential) is created in the crystal by applying a stress. Owing to the simultaneous possession of piezoelectricity and semiconductor properties, the piezopotential created in the crystal has a strong effect on the carrier transport at the interface/junction. Piezotronics is for devices fabricated using the piezopotential as a “gate” voltage to control charge carrier transport at a contact or junction. The piezo-phototronic effect uses the piezopotential to control the carrier generation, transport, separation and/or recombination for improving the performance of optoelectronic devices, such as photon detector, solar cell and LED. The functionality offered by piezotroics and piezo-phototronics are complimentary to CMOS technology. There is an effective integration of piezotronic and piezo-phototronic devices with silicon based CMOS technology. Unique applications can be found in areas such as human-computer interfacing, sensing and actuating in nanorobotics, smart and personalized electronic signatures, smart MEMS/NEMS, nanorobotics and energy sciences. This book introduces the fundamentals of piezotronics and piezo-phototronics and advanced applications. It gives guidance to researchers, engineers and graduate students.
Download or read book Tuneable Film Bulk Acoustic Wave Resonators written by Spartak Gevorgian and published by Springer Science & Business Media. This book was released on 2013-02-01 with total page 264 pages. Available in PDF, EPUB and Kindle. Book excerpt: To handle many standards and ever increasing bandwidth requirements, large number of filters and switches are used in transceivers of modern wireless communications systems. It makes the cost, performance, form factor, and power consumption of these systems, including cellular phones, critical issues. At present, the fixed frequency filter banks based on Film Bulk Acoustic Resonators (FBAR) are regarded as one of the most promising technologies to address performance -form factor-cost issues. Even though the FBARs improve the overall performances the complexity of these systems remains high.a Attempts are being made to exclude some of the filters by bringing the digital signal processing (including channel selection) as close to the antennas as possible. However handling the increased interference levels is unrealistic for low-cost battery operated radios. Replacing fixed frequency filter banks by one tuneable filter is the most desired and widely considered scenario. As an example, development of the software based cognitive radios is largely hindered by the lack of adequate agile components, first of all tuneable filters. In this sense the electrically switchable and tuneable FBARs are the most promising components to address the complex cost-performance issues in agile microwave transceivers, smart wireless sensor networks etc.Tuneable Film Bulk Acoustic Wave Resonators discusses FBAR need, physics, designs, modelling, fabrication and applications. Tuning of the resonant frequency of the FBARs is considered. Switchable and tuneable FBARs based on electric field induced piezoelectric effect in paraelectric phase ferroelectrics are covered. The resonance of these resonators may be electrically switched on and off and tuned without hysteresis.The book is aimed at microwave and sensor specialists in the industry and graduate students. Readers will learn about principles of operation and possibilities of the switchable and tuneable FBARs, and will be given general guidelines for designing, fabrication and applications of these devices."
Download or read book Advanced Piezoelectric Materials written by Kenji Uchino and published by . This book was released on 2010 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Robotic Tactile Sensing written by Ravinder S. Dahiya and published by Springer Science & Business Media. This book was released on 2012-07-29 with total page 258 pages. Available in PDF, EPUB and Kindle. Book excerpt: Future robots are expected to work closely and interact safely with real-world objects and humans alike. Sense of touch is important in this context, as it helps estimate properties such as shape, texture, hardness, material type and many more; provides action related information, such as slip detection; and helps carrying out actions such as rolling an object between fingers without dropping it. This book presents an in-depth description of the solutions available for gathering tactile data, obtaining aforementioned tactile information from the data and effectively using the same in various robotic tasks. The efforts during last four decades or so have yielded a wide spectrum of tactile sensing technologies and engineered solutions for both intrinsic and extrinsic touch sensors. Nowadays, new materials and structures are being explored for obtaining robotic skin with physical features like bendable, conformable, and stretchable. Such features are important for covering various body parts of robots or 3D surfaces. Nonetheless, there exist many more hardware, software and application related issues that must be considered to make tactile sensing an effective component of future robotic platforms. This book presents an in-depth analysis of various system related issues and presents the trade-offs one may face while developing an effective tactile sensing system. For this purpose, human touch sensing has also been explored. The design hints coming out of the investigations into human sense of touch can be useful in improving the effectiveness of tactile sensory modality in robotics and other machines. Better integration of tactile sensors on a robot’s body is prerequisite for the effective utilization of tactile data. The concept of semiconductor devices based sensors is an interesting one, as it allows compact and fast tactile sensing systems with capabilities such as human-like spatio-temporal resolution. This book presents a comprehensive description of semiconductor devices based tactile sensing. In particular, novel Piezo Oxide Semiconductor Field Effect Transistor (POSFET) based approach for high resolution tactile sensing has been discussed in detail. Finally, the extension of semiconductors devices based sensors concept to large and flexile areas has been discussed for obtaining robotic or electronic skin. With its multidisciplinary scope, this book is suitable for graduate students and researchers coming from diverse areas such robotics (bio-robots, humanoids, rehabilitation etc.), applied materials, humans touch sensing, electronics, microsystems, and instrumentation. To better explain the concepts the text is supported by large number of figures.
