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Book Ion Implantation Techniques

    Book Details:
  • Author : H. Ryssel
  • Publisher : Springer Science & Business Media
  • Release : 2012-12-06
  • ISBN : 3642687792
  • Pages : 377 pages

Download or read book Ion Implantation Techniques written by H. Ryssel and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 377 pages. Available in PDF, EPUB and Kindle. Book excerpt: In recent years, ion implantation has developed into the major doping technique for integrated circuits. Several series of conferences have dealt with the application of ion implantation to semiconductors and other materials (Thousand Oaks 1970, Garmisch-Partenkirchen 1971, Osaka 1974, Warwick 1975, Boulder 1976, Budapest 1978, and Albany 1980). Another series of conferences was devoted more to implantation equipment and tech niques (Salford 1977, Trento 1978, and Kingston 1980). In connection with the Third International Conference on Ion Implantation: Equipment and Tech niques, held at Queen's University, ' Kingston, Ontario, Canada, July 8-11, 1980, a two-day instructional program was organized parallel to an implan tation conference for the first time. This implantation school concentra ted on aspects of implantation-equipment design. This book contains all lectures presented at the International Ion Implantation School organized in connection with the Fourth International Conference on Ion Implantation: Equipment and Techniques, held at the Convention Center, Berchtesgaden, Germany, September 13-17, 1982. In con trast to the first .school, the main emphasis in thiS school was placed on practical aspects of implanter operation and application. In three chap ters, various machine aspects of ion implantation (general concepts, ion sources, safety, calibration, dOSimetry), range distributions (stopping power, range profiles), and measuring techniques (electrical and nonelec tri ca 1 measu ri ng techni ques, annea 1 i ng) are di scussed. In the appendi x, a review of the state of the art in modern implantation equipment is given.

Book The Stopping and Range of Ions in Solids

Download or read book The Stopping and Range of Ions in Solids written by James F. Ziegler and published by . This book was released on 1985 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book SRIM  the Stopping and Range of Ions in Matter

Download or read book SRIM the Stopping and Range of Ions in Matter written by James F. Ziegler and published by Lulu.com. This book was released on 2008 with total page 683 pages. Available in PDF, EPUB and Kindle. Book excerpt: "This is a textbook the gives the background of the stopping and range of ions in matter (www.SRIM.org). It is written to be the prime resource for those who use SRIM in scientific work."--Lulu.com.

Book The stopping and range of ions in solids

Download or read book The stopping and range of ions in solids written by James F. Ziegler and published by . This book was released on 1985 with total page 321 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book The Stopping and Range of Ions in Solids

Download or read book The Stopping and Range of Ions in Solids written by J. F. Ziegler and published by . This book was released on 1982 with total page 43 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Ion Solid Interactions

    Book Details:
  • Author : Michael Nastasi
  • Publisher : Cambridge University Press
  • Release : 1996-03-29
  • ISBN : 052137376X
  • Pages : 572 pages

Download or read book Ion Solid Interactions written by Michael Nastasi and published by Cambridge University Press. This book was released on 1996-03-29 with total page 572 pages. Available in PDF, EPUB and Kindle. Book excerpt: Comprehensive guide to an important materials science technique for students and researchers.

Book The Stopping and Ranges of Ions in Matter

Download or read book The Stopping and Ranges of Ions in Matter written by and published by . This book was released on 1977 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book The Stopping and Ranges of Ions in Matter

Download or read book The Stopping and Ranges of Ions in Matter written by J. F. Ziegler and published by . This book was released on 1977 with total page 367 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Stopping   Range of Ions in Solids

Download or read book Stopping Range of Ions in Solids written by jf; biersack ziegler (jp et al) and published by . This book was released on 1985 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book The Stopping and Ranges of Ions in Matter

Download or read book The Stopping and Ranges of Ions in Matter written by J. F. Ziegler and published by . This book was released on 1977 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Ion Implantation Science and Technology

Download or read book Ion Implantation Science and Technology written by J.F. Ziegler and published by Elsevier. This book was released on 2012-12-02 with total page 649 pages. Available in PDF, EPUB and Kindle. Book excerpt: Ion Implantation: Science and Technology serves as both an introduction to and tutorial on the science, techniques, and machines involved in ion implantation. The book is divided into two parts. Part 1 discusses topics such as the history of the ion implantation; the different types and purposes of ion implanters; the penetration of energetic ions into solids; damage annealing in silicon; and ion implantation metallurgy. Part 2 covers areas such as ion implementation system concepts; ion sources; underlying principles related to ion optics; and safety and radiation considerations in ion implantation. The text is recommended for engineers who would like to be acquainted with the principles and processes behind ion implantation or make studies on the field.

Book Energy Loss and Ion Ranges in Solids

Download or read book Energy Loss and Ion Ranges in Solids written by Muradin Abubekirovich Kumakhov and published by CRC Press. This book was released on 1981 with total page 310 pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Structure Property Relationships in Surface Modified Ceramics

Download or read book Structure Property Relationships in Surface Modified Ceramics written by C.J. McHargue and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 517 pages. Available in PDF, EPUB and Kindle. Book excerpt: The use of ion beams for the modification of the structure and properties of the near-surface region of ceramics began in earnest in the early 19805. Since the mechanical properties of such materials are dominated by surface flaws and the surface stress state, the use of surface modification tech niques would appear to be an obvious application. As is often the case in research and development, most of the initial studies can be characterized as cataloging the response of various ceramic materials to a range of ion beam treatments. The systematic study of material and ion beam parameters is well underway and we are now designing experiments to provide specific information about the processing parameter - structure-property rela tionships. This NATO-Advanced Study Institute was convened in order to assess our current state of knowledge in this field, to identify opportunities and needs for further research, and to identify the potential of such processes for technological application. It became apparent that this class of inorganic compounds, loosely termed ceramics, presents many challenges to the understanding of ion-solid inter actions, the relationships among ion-beam parameters, materials parameters, and the resulting structures, as well as relationships between structure and properties. In many instances, this understanding will represent a major extension of that learned from the study of metals and semiconductors.

Book The Stopping and Ranges of Ions in Matter  Bibliography and index of experimental range and stopping power data

Download or read book The Stopping and Ranges of Ions in Matter Bibliography and index of experimental range and stopping power data written by James F. Ziegler and published by . This book was released on 1977 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book The Stopping and Ranges of Ions in Matter  Handbook of range distributions for energetic ions in all elements

Download or read book The Stopping and Ranges of Ions in Matter Handbook of range distributions for energetic ions in all elements written by James F. Ziegler and published by . This book was released on 1977 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:

Book Principles of Radiation Interaction in Matter and Detection

Download or read book Principles of Radiation Interaction in Matter and Detection written by Claude Leroy and published by World Scientific. This book was released on 2009 with total page 951 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book, like its first edition, addresses the fundamental principles of interaction between radiation and matter and the principle of particle detectors in a wide scope of fields, from low to high energy, including space physics and the medical environment. It provides abundant information about the processes of electromagnetic and hadronic energy deposition in matter, detecting systems, and performance and optimization of detectors. In this second edition, new sections dedicated to the following topics are included: space and high-energy physics radiation environment, non-ionizing energy loss (NIEL), displacement damage in silicon devices and detectors, single event effects, detection of slow and fast neutrons with silicon detectors, solar cells, pixel detectors, and additional material for dark matter detectors. This book will benefit graduate students and final-year undergraduates as a reference and supplement for courses in particle, astroparticle, and space physics and instrumentation. A part of it is directed toward courses in medical physics. The book can also be used by researchers in experimental particle physics at low, medium, and high energy who are dealing with instrumentation.