Download or read book Study on the Polycrystalline Silicon Thin film Transistors with Single Grain Boundary in the Channel for the 3D stacked CMOS Applications written by and published by . This book was released on 2010 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Thin Film Transistors Polycrystalline silicon thin film transistors written by Yue Kuo and published by Kluwer Academic Pub. This book was released on 2004 with total page 505 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is the first reference on amorphous silicon and polycrystalline silicon thin film transistors that gives a systematic global review of all major topics in the field. These volumes include sections on basic materials and substrates properties, fundamental device physics, critical fabrication processes (structures, a-Si: H, dielectric, metallization, catalytic CVD), and existing and new applications. The chapters are written by leading researchers who have extensive experience with reputed track records. Thin Film Transistors provides practical information on preparing individual functional a-Si: H TFTs and poly-Si TFTs as well as large-area TFT arrays. Also covered are basic theories on the a-Si: H TFT operations and unique material characteristics. Readers are also exposed to a wide range of existing and new applications in industries.
Download or read book Poly silicon Thin Film Transistor Technology and Applications in Display and Other Novel Technology Areas written by Apostolos T. Voutsas and published by SPIE-International Society for Optical Engineering. This book was released on 2003 with total page 214 pages. Available in PDF, EPUB and Kindle. Book excerpt: Proceedings of SPIE present the original research papers presented at SPIE conferences and other high-quality conferences in the broad-ranging fields of optics and photonics. These books provide prompt access to the latest innovations in research and technology in their respective fields. Proceedings of SPIE are among the most cited references in patent literature.
Download or read book Study on the Characteristics of Low Temperature Polycrystalline Silicon Thin Film Transistors with the Location Controlled Grain Boundary Via Green Nanoseconds Laser Crystallization written by and published by . This book was released on 2020 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Polycrystalline Semiconductors written by Hans J. Möller and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 399 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book summarizes the most recent aspects of polycrystalline semiconductors as presented at the conference Polycrystalline Semiconductors - Grain Boundaries and Interfaces. It contains 12 review articles on selected topics written by experts in their fields and 41 complementary contributed papers. The structure, chemistry and physics of grain boundaries and other interfaces are experimentally and theoretically studied. Aspects of the technologically important polycrystalline silicon are discussed in detail. Also covered are other polycrystalline semiconductors, germanium and compound semiconductors, that are currently of interest in fundamental research and in the technology of solar cells and thin film devices. Anyone interested in polycrystalline semiconductors will be able to use this comprehensive collection to advantage. It also suggests directions for new research and development.
Download or read book Proceedings of the Symposium on Thin Film Transistor Technologies written by and published by . This book was released on 1992 with total page 336 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Toward Quantum FinFET written by Weihua Han and published by Springer Science & Business Media. This book was released on 2013-11-23 with total page 369 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book reviews a range of quantum phenomena in novel nanoscale transistors called FinFETs, including quantized conductance of 1D transport, single electron effect, tunneling transport, etc. The goal is to create a fundamental bridge between quantum FinFET and nanotechnology to stimulate readers' interest in developing new types of semiconductor technology. Although the rapid development of micro-nano fabrication is driving the MOSFET downscaling trend that is evolving from planar channel to nonplanar FinFET, silicon-based CMOS technology is expected to face fundamental limits in the near future. Therefore, new types of nanoscale devices are being investigated aggressively to take advantage of the quantum effect in carrier transport. The quantum confinement effect of FinFET at room temperatures was reported following the breakthrough to sub-10nm scale technology in silicon nanowires. With chapters written by leading scientists throughout the world, Toward Quantum FinFET provides a comprehensive introduction to the field as well as a platform for knowledge sharing and dissemination of the latest advances. As a roadmap to guide further research in an area of increasing importance for the future development of materials science, nanofabrication technology, and nano-electronic devices, the book can be recommended for Physics, Electrical Engineering, and Materials Science departments, and as a reference on micro-nano electronic science and device design. Offers comprehensive coverage of novel nanoscale transistors with quantum confinement effect Provides the keys to understanding the emerging area of the quantum FinFET Written by leading experts in each research area Describes a key enabling technology for research and development of nanofabrication and nanoelectronic devices
Download or read book Proceedings of the Third Symposium on Thin Film Transistor Technologies written by Yue Kuo and published by The Electrochemical Society. This book was released on 1997 with total page 424 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Polycrystalline Silicon Thin Film Transistors for Active Matrix Guest host Liquid Crystal Displays written by Roberto Enrique Proaño and published by . This book was released on 1990 with total page 760 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Thin film transistors 1 Amorphous silicon thin film transistors written by Yue Kuo and published by Springer Science & Business Media. This book was released on 2004 with total page 538 pages. Available in PDF, EPUB and Kindle. Book excerpt: This is the first reference on amorphous silicon and polycrystalline silicon thin film transistors that gives a systematic global review of all major topics in the field. These volumes include sections on basic materials and substrates properties, fundamental device physics, critical fabrication processes (structures, a-Si: H, dielectric, metallization, catalytic CVD), and existing and new applications. The chapters are written by leading researchers who have extensive experience with reputed track records. Thin Film Transistors provides practical information on preparing individual functional a-Si: H TFTs and poly-Si TFTs as well as large-area TFT arrays. Also covered are basic theories on the a-Si: H TFT operations and unique material characteristics. Readers are also exposed to a wide range of existing and new applications in industries.
Download or read book A Study of Low Temperature Polycrystalline Silicon Thin Film Transistors and MOSFETs Using Advanced Materials written by and published by . This book was released on 2009 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Thin Film Transistor Technologies VI written by Yue Kuo and published by The Electrochemical Society. This book was released on 2003 with total page 324 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Proceedings of the Second Symposium on Thin Film Transistor Technologies written by Yue Kuo and published by The Electrochemical Society. This book was released on 1995 with total page 428 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Thin Film Transistor Technologies written by Yue Kuo and published by The Electrochemical Society. This book was released on 1999 with total page 448 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Morphological and Electrical Variance in Polysilicon Thin Film Transistors Crystallized by Flash Lamp Annealing written by Glenn Packard and published by . This book was released on 2023 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: "This work is a wide-reaching study of the factors that impact the in-situ crystallization of thin films of amorphous silicon into low-temperature polycrystalline silicon (LTPS) by flash lamp annealing (FLA) on glass substrates, which is used to develop thin film transistors (TFTs) with an eye towards display applications. The body of research surrounding FLA LTPS is thus advanced by identifying several challenges towards industrial integration and exploring solutions involving device configuration, novel methods of dopant introduction and activation, and novel TFT material systems. It is unlikely that FLA will ever produce LTPS superior to the laser-annealing techniques currently dominating the market, but its significant improvements in throughput and roll-to-roll compatibility make it an attractive complementary technology. In this work, existing FLA LTPS TFT research is expanded into complementary metal-oxide-semiconductor (CMOS) logic to take advantage of the n- and p- channel compatibility of LTPS over competing amorphous oxide technology. A processing alternative is developed for scaling these devices down to current dimensions of liquid crystal display (LCD) transistor backplanes and then further improved by exploring a silicon ion self-implant to preamorphize the polycrystalline lattice structure, allowing enhanced dopant activation at temperatures compatible with thermally-fragile substrates. This method is also shown to be compatible with a self-aligned device configuration for ease of processing and reduced parasitic capacitance. Additionally, a new strategy for producing bottom-gate LTPS devices (a consistent challenge for laser-annealed LTPS) is presented by incorporating a transparent conductive oxide as a gate structure. The increased thermal mass provided by the bottom gate is harnessed to improve the impact of channel crystallization at lower pulse intensity, producing devices with extremely high channel mobility at low drain voltage. Monolayer Doping (MLD) is demonstrated to be compatible with FLA LTPS, utilizing a simultaneous anneal to both crystallize amorphous silicon and activate selectively self-assembled MLD-adhered dopants. MLD phosphorus n-channel TFTs are presented with activation on par with that of ultra-shallow MLD junctions on bulk silicon. Further, Gallium MLD is demonstrated for the first time, successfully producing p-channel TFTs with FLA. The material system of FLA-crystallized silicon on chromium, already well established in the micrometer-thick film range for PV applications, is given an in-depth investigation in the nanometer thin film range for TFT applications. A unique set of crystallization patterns and texture on the nanometer scale is revealed and characterized to determine the extent, cause, and impact of chromium redistribution in this material, which is also explored as a predictable and edge-directed morphology of FLA LTPS for a wide variety of device configurations. Finally, the individual advancements in this work are explored in many combinations in a wide multi-process study to determine their efficacy as techniques for producing FLA LTPS TFTs. Using this broad information, the field of flash-lamp crystallized TFTs is advanced and several challenges are more specifically identified as a foundation for future research."--Abstract.
Download or read book A Study on Device Characterization of Polycrystalline silicon Thin film Transistors written by 裕幸·池田 and published by . This book was released on 2010 with total page 187 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Study on the N Channel Polycrystalline Silicon Thin Film Transistors with High k HfO2 Gate Dielectrics Via Green Nanosecond Laser Crystallization written by and published by . This book was released on 2019 with total page pages. Available in PDF, EPUB and Kindle. Book excerpt:
