Download or read book Study of the Mechanisms of Silicide Formation by Isotope Diffusion and Atom Probe Tomography written by Ting Luo and published by . This book was released on 2018 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: With the downscaling of microelectronic devices, NiSi has been widely used in complementary-metal-oxide-semiconductor (CMOS) transistors as contact on source, drain and gate. However, NiSi suffers from degradation upon annealing at high temperatures. Adding alloying elements is an effective method to increase the stability of nickel monosilicide but the formation sequence of Ni silicides is substantially modified. Therefore, the studies of the phase formation sequence and the stability of monosilicide are of great importance.The solid-state reactions between Ni films alloyed with W and/or Pt and Si substrates were studied mainly by in-situ X-ray diffraction (XRD) and atom probe tomography (APT) using combinatorial analysis of co-deposited gradient films. The phase sequence was monitored by in-situ XRD and APT was used to examine the silicides and reveal the redistribution of alloying elements. The content of alloying elements (W and Pt) has a large impact on the phase sequence of Ni silicides and the kinetics of phase formation. The basic agglomeration mechanism of NiSi thin films was studied. A 15nm pure Ni film was deposited on a Si substrate enriched with isotope multilayers. APT analyses were performed on the sample of Ni/Si (isotope) after an annealing at 600°C. By observing the distribution of Si isotopes (30Si, 29Si and 28Si), whether they maintain a multilayer structure or are mixed together, a mechanism of the agglomeration of NiSi was proposed. This was possible because of the unique capability of APT to observe isotopes in 3D at the atomic scale and it allows a better understanding and to control of the agglomeration of poly-crystalline compound thin films.
Download or read book Atom Probe Tomography written by Williams Lefebvre and published by Academic Press. This book was released on 2016-05-30 with total page 418 pages. Available in PDF, EPUB and Kindle. Book excerpt: Atom Probe Tomography is aimed at beginners and researchers interested in expanding their expertise in this area. It provides the theoretical background and practical information necessary to investigate how materials work using atom probe microscopy techniques, and includes detailed explanations of the fundamentals, the instrumentation, contemporary specimen preparation techniques, and experimental details, as well as an overview of the results that can be obtained. The book emphasizes processes for assessing data quality and the proper implementation of advanced data mining algorithms. For those more experienced in the technique, this book will serve as a single comprehensive source of indispensable reference information, tables, and techniques. Both beginner and expert will value the way the book is set out in the context of materials science and engineering. In addition, its references to key research outcomes based upon the training program held at the University of Rouen—one of the leading scientific research centers exploring the various aspects of the instrument—will further enhance understanding and the learning process. - Provides an introduction to the capabilities and limitations of atom probe tomography when analyzing materials - Written for both experienced researchers and new users - Includes exercises, along with corrections, for users to practice the techniques discussed - Contains coverage of more advanced and less widespread techniques, such as correlative APT and STEM microscopy
Download or read book Diffusion in Condensed Matter written by Paul Heitjans and published by Springer Science & Business Media. This book was released on 2006-01-16 with total page 971 pages. Available in PDF, EPUB and Kindle. Book excerpt: This comprehensive, handbook-style survey of diffusion in condensed matter gives detailed insight into diffusion as the process of particle transport due to stochastic movement. It is understood and presented as a phenomenon of crucial relevance for a large variety of processes and materials. In this book, all aspects of the theoretical fundamentals, experimental techniques, highlights of current developments and results for solids, liquids and interfaces are presented.
Download or read book Semiconducting Silicides written by Victor E. Borisenko and published by Springer Science & Business Media. This book was released on 2013-03-07 with total page 362 pages. Available in PDF, EPUB and Kindle. Book excerpt: A comprehensive presentation and analysis of properties and methods of formation of semiconducting silicides. Fundamental electronic, optical and transport properties of the silicides collected from recent publications will help readers choose their application in new generations of solid-state devices. A comprehensive presentation of thermodynamic and kinetic data is given in combination with their technical application, as is information on corresponding thin-film or bulk crystal formation techniques.
Download or read book Scientific and Technical Aerospace Reports written by and published by . This book was released on 1986 with total page 1358 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Diffusion in Materials written by A.L. Laskar and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 684 pages. Available in PDF, EPUB and Kindle. Book excerpt: This volume is the proceedings of the NATO Advanced Study Institute, "Diffusion in Materials", held at "Centre Paul Langevin", Aussois, during March 12-25, 1989. There were 105 participants of whom 24 were lecturers and members of the international advisory committee. In addition to the participants from NATO countries, a small number of participants came from Australia, Hungary, Poland and Tunisia. The principal aim of the organizing committee was to bring together scientists of wide interest and expertise in the field of diffusion and to familiarize the young workers in material science with the wide range of theoretical models and methods and of experimental techniques . The Institute was concerned with the study of diffusion and related phenomena in solids which are at the cutting edge of novel technologies. The discussion of basic theories of defects in solids and their transport, with their applications in the understanding of diffusion processes in "simple solids" was followed by the wide range of current theoretical models and methods, experimental techniques and their potential. The lectures on the diffusion in specific materials included : metals, dilute and concentrated alloys, simple and compound semiconductors, stoichiometric and non-stoichiometric oxides, high-Tc compounds, carbides, nitrides, silicates, conducting polymers and thin films, ionic, superionic, amorphous and irradiated materials.
Download or read book Atom Probe Microscopy written by Baptiste Gault and published by Springer Science & Business Media. This book was released on 2012-08-27 with total page 411 pages. Available in PDF, EPUB and Kindle. Book excerpt: Atom probe microscopy enables the characterization of materials structure and chemistry in three dimensions with near-atomic resolution. This uniquely powerful technique has been subject to major instrumental advances over the last decade with the development of wide-field-of-view detectors and pulsed-laser-assisted evaporation that have significantly enhanced the instrument’s capabilities. The field is flourishing, and atom probe microscopy is being embraced as a mainstream characterization technique. This book covers all facets of atom probe microscopy—including field ion microscopy, field desorption microscopy and a strong emphasis on atom probe tomography. Atom Probe Microscopy is aimed at researchers of all experience levels. It will provide the beginner with the theoretical background and practical information necessary to investigate how materials work using atom probe microscopy techniques. This includes detailed explanations of the fundamentals and the instrumentation, contemporary specimen preparation techniques, experimental details, and an overview of the results that can be obtained. The book emphasizes processes for assessing data quality, and the proper implementation of advanced data mining algorithms. Those more experienced in the technique will benefit from the book as a single comprehensive source of indispensable reference information, tables and techniques. Both beginner and expert will value the way that Atom Probe Microscopy is set out in the context of materials science and engineering, and includes references to key recent research outcomes.
Download or read book INIS Atomindex written by and published by . This book was released on 1983 with total page 888 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Atom Probe Tomography written by Michael K. Miller and published by Springer Science & Business Media. This book was released on 2012-12-06 with total page 247 pages. Available in PDF, EPUB and Kindle. Book excerpt: The microanalytical technique of atom probe tomography (APT) permits the spatial coordinates and elemental identities of the individual atoms within a small volume to be determined with near atomic resolution. Therefore, atom probe tomography provides a technique for acquiring atomic resolution three dimensional images of the solute distribution within the microstructures of materials. This monograph is designed to provide researchers and students the necessary information to plan and experimentally conduct an atom probe tomography experiment. The techniques required to visualize and to analyze the resulting three-dimensional data are also described. The monograph is organized into chapters each covering a specific aspect of the technique. The development of this powerful microanalytical technique from the origins offield ion microscopy in 1951, through the first three-dimensional atom probe prototype built in 1986 to today's commercial state-of-the-art three dimensional atom probe is documented in chapter 1. A general introduction to atom probe tomography is also presented in chapter 1. The various methods to fabricate suitable needle-shaped specimens are presented in chapter 2. The procedure to form field ion images of the needle-shaped specimen is described in chapter 3. In addition, the appearance of microstructural features and the information that may be estimated from field ion microscopy are summarized. A brief account of the theoretical basis for processes of field ionization and field evaporation is also included.
Download or read book The Materials Science of Thin Films written by Milton Ohring and published by Academic Press. This book was released on 1992 with total page 744 pages. Available in PDF, EPUB and Kindle. Book excerpt: Prepared as a textbook complete with problems after each chapter, specifically intended for classroom use in universities.
Download or read book Semiconductor Material and Device Characterization written by Dieter K. Schroder and published by John Wiley & Sons. This book was released on 2015-06-29 with total page 800 pages. Available in PDF, EPUB and Kindle. Book excerpt: This Third Edition updates a landmark text with the latest findings The Third Edition of the internationally lauded Semiconductor Material and Device Characterization brings the text fully up-to-date with the latest developments in the field and includes new pedagogical tools to assist readers. Not only does the Third Edition set forth all the latest measurement techniques, but it also examines new interpretations and new applications of existing techniques. Semiconductor Material and Device Characterization remains the sole text dedicated to characterization techniques for measuring semiconductor materials and devices. Coverage includes the full range of electrical and optical characterization methods, including the more specialized chemical and physical techniques. Readers familiar with the previous two editions will discover a thoroughly revised and updated Third Edition, including: Updated and revised figures and examples reflecting the most current data and information 260 new references offering access to the latest research and discussions in specialized topics New problems and review questions at the end of each chapter to test readers' understanding of the material In addition, readers will find fully updated and revised sections in each chapter. Plus, two new chapters have been added: Charge-Based and Probe Characterization introduces charge-based measurement and Kelvin probes. This chapter also examines probe-based measurements, including scanning capacitance, scanning Kelvin force, scanning spreading resistance, and ballistic electron emission microscopy. Reliability and Failure Analysis examines failure times and distribution functions, and discusses electromigration, hot carriers, gate oxide integrity, negative bias temperature instability, stress-induced leakage current, and electrostatic discharge. Written by an internationally recognized authority in the field, Semiconductor Material and Device Characterization remains essential reading for graduate students as well as for professionals working in the field of semiconductor devices and materials. An Instructor's Manual presenting detailed solutions to all the problems in the book is available from the Wiley editorial department.
Download or read book Springer Handbook of Microscopy written by Peter W. Hawkes and published by Springer Nature. This book was released on 2019-11-02 with total page 1561 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book features reviews by leading experts on the methods and applications of modern forms of microscopy. The recent awards of Nobel Prizes awarded for super-resolution optical microscopy and cryo-electron microscopy have demonstrated the rich scientific opportunities for research in novel microscopies. Earlier Nobel Prizes for electron microscopy (the instrument itself and applications to biology), scanning probe microscopy and holography are a reminder of the central role of microscopy in modern science, from the study of nanostructures in materials science, physics and chemistry to structural biology. Separate chapters are devoted to confocal, fluorescent and related novel optical microscopies, coherent diffractive imaging, scanning probe microscopy, transmission electron microscopy in all its modes from aberration corrected and analytical to in-situ and time-resolved, low energy electron microscopy, photoelectron microscopy, cryo-electron microscopy in biology, and also ion microscopy. In addition to serving as an essential reference for researchers and teachers in the fields such as materials science, condensed matter physics, solid-state chemistry, structural biology and the molecular sciences generally, the Springer Handbook of Microscopy is a unified, coherent and pedagogically attractive text for advanced students who need an authoritative yet accessible guide to the science and practice of microscopy.
Download or read book Extractive Metallurgy of Niobium written by A.K. Suri and published by Routledge. This book was released on 2017-11-13 with total page 272 pages. Available in PDF, EPUB and Kindle. Book excerpt: The growth and development witnessed today in modern science, engineering, and technology owes a heavy debt to the rare, refractory, and reactive metals group, of which niobium is a member. Extractive Metallurgy of Niobium presents a vivid account of the metal through its comprehensive discussions of properties and applications, resources and resource processing, chemical processing and compound preparation, metal extraction, and refining and consolidation. Typical flow sheets adopted in some leading niobium-producing countries for the beneficiation of various niobium sources are presented, and various chemical processes for producing pure forms of niobium intermediates such as chloride, fluoride, and oxide are discussed. The book also explains how to liberate the metal from its intermediates and describes the physico-chemical principles involved. It is an excellent reference for chemical metallurgists, hydrometallurgists, extraction and process metallurgists, and minerals processors. It is also valuable to a wide variety of scientists, engineers, technologists, and students interested in the topic.
Download or read book Atom Probe Tomography written by Michael K. Miller and published by Springer. This book was released on 2014-07-31 with total page 437 pages. Available in PDF, EPUB and Kindle. Book excerpt: Nanocharacterization by Atom Probe Tomography is a practical guide for researchers interested atomic level characterization of materials with atom probe tomography. Readers will find descriptions of the atom probe instrument and atom probe tomography technique, field ionization, field evaporation and field ion microscopy. The fundamental underlying physics principles are examined, in addition to data reconstruction and visualization, statistical data analysis methods and specimen preparation by electropolishing and FIB-based techniques. A full description of the local electrode atom probe – a new state-of-the-art instrument – is also provided, along with detailed descriptions and limitations of laser pulsing as a method to field evaporate atoms. Valuable coverage of the new ionization theory is also included, which underpins the overall technique.
Download or read book Nanocharacterisation written by John Hutchison and published by Royal Society of Chemistry. This book was released on 2007-10-31 with total page 319 pages. Available in PDF, EPUB and Kindle. Book excerpt: Chemical characterisation techniques have been essential tools in underpinning the explosion in nanotechnology in recent years and nanocharacterisation is a rapidly developing field. Contributions in this book from leading teams across the globe provide an overview of the different microscopic techniques now in regular use for the characterisation of nanostructures. Essentially a handbook to all working in the field this indispensable resource provides a survey of microscopy based techniques with experimental procedures and extensive examples of state of the art characterisation methods including: Transmission Electron Microscopy, Electron Tomography, Tunneling Microscopy, Electron Holography, Electron Energy Loss Spectroscopy. This timely publication will appeal to academics, professionals and anyone working fields related to the research and development of nanocharacterisation and nanotechnology.
Download or read book Surface Segregation written by J. du Plessis and published by Trans Tech Publications Ltd. This book was released on 1991-01-01 with total page 132 pages. Available in PDF, EPUB and Kindle. Book excerpt: The book presents the fundamental aspects of surface segregation theory. The material is presented in a self-contained manner and mathematical procedures are worked through in some cases in order to provide the reader with the necessary opportunity to realize the restrictions under which the expressions are valid.
Download or read book Fundamentals of Grain and Interphase Boundary Diffusion written by Inderjeet Kaur and published by Wiley. This book was released on 1995-06-08 with total page 0 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is the first comprehensive treatise of one of the key physical processes occurring in various materials at elevated temperatures. The book provides essential background information for materials scientists, metallurgists, solid state physicists and semiconductor technologists carrying out research or development in this and related areas. The first and second editions of the book were published by the University of Stuttgart in 1988 and 1989. In the present third edition the book has been updated and essentially enlarged to cover all recent developments in the area of grain and interphase boundary diffusion. The reader will find more than 100 new text pages, 60 new figures and 100 new references. This unique book is strongly recommended as a textbook for students as well as a reference book for physicists, chemists, metallurgists and engineers.
