Download or read book Silicide Thin Films Volume 402 written by Raymond T. Tung and published by . This book was released on 1996 with total page 680 pages. Available in PDF, EPUB and Kindle. Book excerpt: Tremendous advances have been made in the use of silicides as contacts and interconnects in micro-electronic devices and as active layers in sensors. A flourish of novel fabrication concepts and characterization techniques has led to high-quality silicide devices and a better understanding of the electronic and micrometallurgical properties of their interfaces. However, the shrinking physical dimensions of ULSI devices beyond the deep submicron regime now poses new and serious materials challenges for the development of manufacturable silicide processes. Scientists and engineers from materials science, physics, chemistry, device, processing and other disciplines come together in this book to examine the current issues facing silicide thin-film applications. Topics include: silicide fundamentals - energetics and kinetics; processing of silicide thin films; ULSI issues; CVD silicides; semiconducting silicides; processing of germano-silicide thin films; silicides and analogs for IR detection; interfaces, surfaces and epitaxy; novel structures and techniques and properties of silicide thin films.
Download or read book Epitaxial Oxide Thin Films II Volume 401 written by James S. Speck and published by . This book was released on 1996-03-29 with total page 588 pages. Available in PDF, EPUB and Kindle. Book excerpt: Our understanding and control of epitaxial oxide heterostructures has progressed along multiple frontiers including magnetic, dielectric, ferroelectric, and superconducting oxide materials. This has resulted in both independent rediscovery and the successful borrowing of ideas from ceramic science, solid-state physics, and semiconductor epitaxy. A new field of materials science has emerged which aims at the use of the intrinsic properties of various oxide materials in single-crystal thin-film form. Exploiting the potential of these materials, however, will only be possible if many fundamental and engineering questions can be answered. This book represents continued progress toward fulfilling that promise. Technical information on epitaxial oxide thin films from industry, academia and government laboratories is presented. Topics include: dielectrics; ferroelectrics; optics; superconductors; magnetics; magnetoresistance.
Download or read book Ferroelectric Thin Films written by and published by . This book was released on 1996 with total page 486 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Rare Earth Doped Semiconductors II Volume 422 written by S. Coffa and published by . This book was released on 1996 with total page 392 pages. Available in PDF, EPUB and Kindle. Book excerpt: Rare-earth doped semiconductors hold great potential for a variety of optoelectronic applications, including lasers, LEDs and optical amplifiers. In fact, the field has grown rapidly over the past several years, with a clear switch in direction. The first book by this name was devoted to rare-earth doped II-VI and III-V semiconductors; more than half of the papers in this new volume are devoted to rare-earth doped silicon. This indicates that rare-earth doping of silicon is now seriously considered as a means to achieve silicon-based optoelectronic devices. In addition, new reports on rare-earth doped III-nitrides are also presented. Researchers from 14 countries come together in the volume to discuss current trends, highlight new developments and identify potential electronic and optoelectronic applications. Topics include: incorporation methods and properties; structural, electrical and optical properties; excitation mechanisms and electroluminescence and integration.
Download or read book Epitaxial Oxide Thin Films written by and published by . This book was released on 1995 with total page 594 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Ferroelectric Thin Films V Volume 433 written by Seshu B. Desu and published by . This book was released on 1996-11-08 with total page 480 pages. Available in PDF, EPUB and Kindle. Book excerpt: The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
Download or read book Amorphous Silicon Technology 1996 Volume 420 written by Michael Hack and published by . This book was released on 1996-12-31 with total page 946 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book from the highly successful series on amorphous-silicon science and devices reflects the increasing range of applications for a-Si technology. Advances in solar cells incorporating microcrystalline silicon absorber layers are discussed, and a new manufacturing facility for amorphous-silicon-based tandem solar cells is highlighted. Progress towards realizing both higher resolution and improved visibility in active-matrix liquid crystal displays is featured. And while work on raising the deposition rate for amorphous-silicon transistors is also outlined, it is expected that advances in devices and manufacturing will be accelerated when several fundamental puzzles regarding amorphous silicon's structure and optoelectronic properties are resolved. Topics include: solar cells; thin-film transistors and flat-panel displays; sensors, detectors and novel devices; device physics; deposition technologies; studies of growth processes; hydrogen and structure a-Si:H; defects and equilibration in a-Si:H; fundamental issues in defect processes; transport and recombination processes; thin films for photovoltaic and related device applications.
Download or read book Optoelectronic Materials Volume 417 written by Eric D. Jones and published by . This book was released on 1996-07-02 with total page 450 pages. Available in PDF, EPUB and Kindle. Book excerpt: While the effects of spontaneous ordering or composition modulation on the properties of semiconductors and optoelectronic devices have been studied with great interest over the past several years, an understanding of the physics and chemistry of these two related phenomena is still in its infancy. This book brings together researchers from around the world to address issues concerning the physics, chemistry and growth parameters for spontaneous ordering and composition modulation. Developments in the use of artificial patterning to obtain new structured materials on a microscopic scale are featured. Advances in characterization techniques are also presented. Topics include: spontaneous ordering; self-assembled structures and quantum dots; self-organized epitaxial structures; composition modulation studies and optoelectronic materials.
Download or read book Thin Films and Surfaces for Bioactivity and Biomedical Applications written by Catherine M. Cotell and published by . This book was released on 1996 with total page 232 pages. Available in PDF, EPUB and Kindle. Book excerpt:
Download or read book Thin Films for Photovoltaic and Related Device Applications Volume 426 written by David Ginley and published by . This book was released on 1996-11-18 with total page 632 pages. Available in PDF, EPUB and Kindle. Book excerpt: There has been considerable progress in the development of thin-film photovoltaic devices with new efficiency records and enhanced durability. These achievements are the result of significant advances in the fundamental understanding of the materials, interfaces and devices. With 18 countries represented, this truly international volume brings together engineers and researchers from academic, industrial and national laboratories worldwide to review different materials systems and address common issues and problems. A wide variety of topics related to the development of thin-film photovoltaic and related devices, including thick-film transistors and materials for flat-panel displays, are addressed. Areas of emphasis include materials synthesis, device fabrication and characterization, and modelling. Topics include: thin-film amorphous silicon devices; thin-film silicon devices; thin-film devices based on copper-indium diselenide; cadmium-telluride devices; transparent conductive oxides and related materials for thin-film devices; and novel concepts for thin-film photovoltaics.
Download or read book Advanced Laser Processing of Materials Volume 397 written by Rajiv K. Singh and published by . This book was released on 1996-09-09 with total page 704 pages. Available in PDF, EPUB and Kindle. Book excerpt: Laser processing has been used in a wide variety of applications and materials such as semiconductors, superconductors, ceramics, polymers and metals. Lasers provide a controlled source of atomic and electronic excitations involving nonequilibrium phenomena that lend themselves to processing of novel materials and structures. The range of laser-solid interactions involving electronic excitation, melting and evaporation result in the formation of novel phases, selective gas excitations, surface modification and low-temperature thin-film deposition. This book from MRS focuses on the use of lasers in both the fundamental understanding and applied aspects of laser-solid and laser-gas interactions relevant to materials processing. Applications featured include thin-film transistors formed by laser-induced crystallization of amorphous silicon, diamond coatings and micromachining. Topics include: fundamentals of laser-solid interactions; fundamentals of pulsed laser ablation; pulsed laser deposition; novel applications of laser processing; laser-driven formation of nanocrystals; laser annealing; surface modification and etching; and laser-assisted chemical vapor deposition.
Download or read book Disordered Materials and Interfaces Volume 407 written by Herman Z. Cummins and published by . This book was released on 1996-03-26 with total page 450 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book focuses on the fractal aspects of materials and disordered systems. Disorder plays a critical role in many naturally occurring and manufactured materials, both at the microscopic level (e.g., glasses) and the macroscopic level (e.g., foams, dendritic alloys, porous rock). The book addresses the dynamical processes involved in the formation and characterization of a wide range of disordered materials. Topics include: porous media; colloids; chemical reactions; dynamical aspects of the liquid-glass transition; disordered materials and surfaces and scaling and nanostructures.
Download or read book Materials Reliability in Microelectronics VI Volume 428 written by William F. Filter and published by . This book was released on 1996-11-18 with total page 616 pages. Available in PDF, EPUB and Kindle. Book excerpt: MRS books on materials reliability in microelectronics have become the snapshot of progress in this field. Reduced feature size, increased speed, and larger area are all factors contributing to the continual performance and functionality improvements in integrated circuit technology. These same factors place demands on the reliability of the individual components that make up the IC. Achieving increased reliability requires an improved understanding of both thin-film and patterned-feature materials properties and their degradation mechanisms, how materials and processes used to fabricate ICs interact, and how they may be tailored to enable reliability improvements. This book focuses on the physics and materials science of microelectronics reliability problems rather than the traditional statistical, accelerated electrical testing aspects. Studies are grouped into three large sections covering electromigration, gate oxide reliability and mechanical stress behavior. Topics include: historical summary; reliability issues for Cu metallization; characterization of electromigration phenomena; modelling; microstructural evolution and influences; oxide and device reliability; thin oxynitride dielectrics; noncontact diagnostics; stress effects in thin films and interconnects and microbeam X-ray techniques for stress measurements.
Download or read book Rapid Thermal and Integrated Processing V Volume 429 written by J. C. Gelpey and published by . This book was released on 1996-10-14 with total page 416 pages. Available in PDF, EPUB and Kindle. Book excerpt: This book is the latest in a continuing series on rapid thermal processing and related topics. It embraces a diversity of research, development and manufacturing activities that require rapid thermal and integrated processing techniques which are recognized by their acronyms, such as rapid thermal annealing (RTA), rapid thermal processing (RTP), rapid thermal chemical vapor deposition (RTCVP), rapid thermal oxidation (RTO), and others. This fifth anniversary volume reports notable advances in the use of rapid thermal techniques in processing science and technology, and for process control in industrial fabrication facilities. It is organized around progress obtained through: evaluation methodology; equipment and process modelling; temperature control; defects and diffusion associated with annealing; metallizations such as silicidation; novel processing of sol-gel and magnetic films; dielectric growth and deposition; and silicon or silicon-germanium film deposition.
Download or read book Thin Films Stresses and Mechanical Properties VI written by William W. Gerberich and published by . This book was released on 1997 with total page 576 pages. Available in PDF, EPUB and Kindle. Book excerpt: Interest in the mechanical properties of thin films remains high throughout the world, as evidenced by the large international contingent represented in this book. With regard to stresses, techniques for sorting out residual stress and strain states are becoming more varied and sophisticated. Discussions include Raman scattering, nonlinear acoustic responses and back-scattered electron imaging microscopies, as well as the more standard wafer-bending and X-ray techniques. Spectroscopy, indenting and the burgeoning field of nanoprobe imaging for the characterization of mechanical properties of thin films are also highlighted. Topics include: mechanical properties of films and multilayers; fracture and adhesion; nanoindentation of films and surfaces; mechanical property methods and modelling; tribological properties of thin films; properties of polymer films; stress effects in thin films and interconnects; epitaxy and strain relief mechanisms, measurements.
Download or read book Thermodynamics and Kinetics of Phase Transformations Volume 398 written by James S. Im and published by . This book was released on 1996-09-10 with total page 714 pages. Available in PDF, EPUB and Kindle. Book excerpt: The emphasis of this book is on the quantitative analysis of transformation kinetics, integrated with thermodynamics. Solidification is a success story for quantitative kinetics analysis. The work reported concentrates on phase selection under extreme processing - large undercooling or ultrarapid quenching - of the liquid. Theoretical treatments are concerned mainly with the analysis of morphological instabilities during directional solidification at more conventional rates. The coverage of particle-beam effects is distinguished by the materials studied: alkali halides, minerals, semiconductors and metals. The thermodynamics of interfaces are a particular focus, especially in connection with the solid-state formation of amorphous phases. A highlight of the book is the coverage of the Johnson-Mehl-Avrami-Kolmogorov analysis of overall transformation kinetics. This venerable treatment is revisited and new insights and limitations are explored. Topics include: transformations in undercooled liquids; directional solidification; particle beam-induced transformations; interfaces - thermodynamics and reactions; amorphous materials - structure and transformations; solid-state transformations and ordering and phase separation.
Download or read book Thin Films Stresses and Mechanical Properties VI written by Shefford P. Baker and published by Materials Research Society. This book was released on 1996-02-11 with total page 576 pages. Available in PDF, EPUB and Kindle. Book excerpt: Interest in the mechanical properties of thin films remains high throughout the world, as evidenced by the large international contingent represented in this book. With regard to stresses, techniques for sorting out residual stress and strain states are becoming more varied and sophisticated. Discussions include Raman scattering, nonlinear acoustic responses and back-scattered electron imaging microscopies, as well as the more standard wafer-bending and X-ray techniques. Spectroscopy, indenting and the burgeoning field of nanoprobe imaging for the characterization of mechanical properties of thin films are also highlighted. Topics include: mechanical properties of films and multilayers; fracture and adhesion; nanoindentation of films and surfaces; mechanical property methods and modelling; tribological properties of thin films; properties of polymer films; stress effects in thin films and interconnects; epitaxy and strain relief mechanisms, measurements.